JP3082671B2 - Transistor element and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transistor device and a method of manufacturing the same, and more particularly to a SOI (Silicon).
On Insulator) High integration formed on a substrate,
Low power LSI (Large Scale Inte
The present invention relates to a transistor element used for a graded circuit and a method for manufacturing the same.

[0002]

2. Description of the Related Art A partially depleted SOIMO having a general structure
S (Metal Oxide Semiconductor)
or) FET (Field Effect Trans)
The cross section of the istor is shown in FIG. As shown in the figure, an SOI layer 103 is provided on a silicon substrate 101 via a buried oxide film 102, and an SOI layer 10
3, a gate oxide film 104 and a gate electrode 106 are formed.
A drain region 105 is formed. The SOI layer 103 below the gate electrode 106 has a thickness of 1017 [cm ⁻³ ] to 1018.
[Cm ^-3] about without a second conductivity type body region 108 in which impurities are introduced, a voltage is applied to the gate electrode, a depletion region 109 body region 108 depleted and neutral region 107 which is not depleted Divided into two areas. Further, the channel is formed in a region on the gate oxide film 104 side in the body region 108.

In the drawing, CCG is the capacitance between the gate and the channel, and CCB is the capacitance between the channel and the substrate.

By the way, as shown in FIG.
An example in which an input signal is applied to an SOI layer for the purpose of high-speed operation of a SOI MOSFET under a low voltage has been reported. This is based on I.E.D.M Technical Digest (F. Assade)
raghi, IEDM94, Tech. Dig. p. 8
09). This SOIMOSFE
At T, as shown in the figure, an input signal is applied to both the gate electrode and the inside of the SOI layer by connecting the SOI layer and the gate electrode with a wiring H.

[0005]

The first problem is that the SOI
This is a short channel effect in the MOSFET.

First, the problem relating to the relationship between the short channel effect and the gate oxide film thickness will be described.

When the field effect transistor (FET) is miniaturized and the channel length is shortened, the characteristics are deteriorated due to the short channel effect. This is because the threshold voltage is lowered or the steepness of the subthreshold current is lost due to the effect of the two-dimensional electric field from the source / drain regions.

As one of the methods for solving this, there is a method of reducing the thickness of the gate oxide film. That is, when the gate oxide film is thinned and the value of the capacitance CCG between the gate and the channel is increased, the electrostatic capacitive coupling between the gate electrode and the channel is increased. As a result, the controllability of the channel region by the gate electrode is enhanced, so that the short channel effect is improved. However, when the thickness of the gate oxide film is reduced, the method of forming the gate oxide film becomes difficult, and it is also difficult to ensure the quality such as the insulating property and the reliability with time.

Therefore, in order to miniaturize a transistor, means for increasing the value of the gate-channel capacitance CCG is required without using a thin gate oxide film whose formation method and quality are difficult to secure.

Next, problems relating to the impurity concentration dependence of the short channel effect will be described.

As a method of suppressing the short channel effect, there is a method of increasing the impurity concentration of the substrate.
This is based on the following principle. That is, when the impurity concentration increases, as shown in FIG.
9 becomes narrower, and the neutral region 107 and the source / drain region 105 approach each other. Therefore, of the electric field from the source / drain region 105, the component terminated at the neutral region 107 increases, and the characteristic deterioration due to the two-dimensional electric field from the source / drain region 105 is suppressed.

However, on the other hand, the substrate impurity concentration is also used for adjusting the threshold value. Therefore, as shown in FIG. 41, the threshold value fluctuates when the substrate impurity concentration is increased. That is, the setting of the threshold value (arrow YS) and the suppression of the short channel effect (arrow YT) depend on each other,
Not compatible. Therefore, it is difficult to independently control the impurity concentration of the substrate and the threshold value with the conventional field-effect transistor. The arrow YC in the figure indicates the control of the channel.

In general, the controllability of a channel is controlled by a gate.
This is favorable when the value of the capacitance CCG between the channels is large and the value of the capacitance CCB between the channel and the substrate is small. This will be described with reference to FIG. 39 again. The channel potential is determined by potential division by two capacitors connected in series, a gate-channel capacitance CCG and a channel-substrate capacitance CCB. Here, when the ratio of the value of the capacitance CCG to the value of the capacitance CCB increases, the difference between the channel potential and the gate electrode potential decreases. As a result, the followability of the channel potential to the gate potential is improved, and the controllability of the channel by the gate electrode is improved.

In a normal field-effect transistor,
When the substrate impurity concentration is increased to suppress the short channel effect, the value of the gate-channel capacitance CCG does not change, but the value of the channel-substrate capacitance CCB increases. For this reason, the controllability of the gate to the channel is degraded, and the S factor (the change in the gate voltage required to change the subthreshold current by one digit) is degraded. Therefore, for miniaturization of a transistor, a method of increasing the impurity concentration without affecting the threshold value or the capacitance between the channel and the substrate is required.

These problems also apply to the conventional transistor element shown in FIG.

The second problem is the substrate floating effect in the SOIMOSFET. This is the first conductivity type SOIMO
In the SFET, a buried oxide film 102 is formed under the SOI layer.
This is an abnormal operation that occurs because the second conductivity type carrier cannot flow into or from the substrate side due to the presence of. Partially depleted SOIMO operating under low voltage
In the SFET, particularly when the bias condition changes, the width of the neutral region changes, and the extraordinary or deficient holes are not discharged to the substrate side or are not supplied from the substrate side. In addition, an abnormal operation which occurs because the carrier of the second conductivity type caused by the ionization of the atoms constituting the semiconductor due to the α-rays incident in the channel width direction is not discharged becomes a problem.

Therefore, a stable operation of the SOI transistor requires a structure capable of promptly supplying and discharging holes.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks of the prior art, and has as its object to reduce the parasitic capacitance, the substrate bias effect, etc.
A transistor element which has the advantages of an OSFET and can suppress a substrate floating effect which is a drawback of this element and a short channel effect which becomes a problem when the element is miniaturized, and which can operate at a low power supply voltage, and a method of manufacturing the same. To provide.

[0019]

According to the present invention, there is provided a transistor element comprising an insulator layer and an impurity having a predetermined impurity concentration.
Provided to reach the low-concentration area and the lower interface of the layer
And the impurity concentration is higher than the impurity low concentration region
And a first and second first conductivity type impurity high concentration layers.
A semiconductor layer provided on the insulator layer, and a lower portion of the insulator layer
A lower gate electrode provided on said low-impurity-concentration region
And a second conductivity type impurity is introduced at a predetermined concentration.
And an upper gate electrode .

According to the method of manufacturing a transistor element of the present invention, an insulator layer and a low impurity concentration having a predetermined impurity concentration are provided.
Is provided so as to reach the lower boundary of the
First and second regions having a higher impurity concentration than the low impurity concentration region.
And a second high concentration impurity layer of the first conductivity type.
A semiconductor layer provided on the layer, and a semiconductor layer provided below the insulator layer.
Lower gate electrode and the upper portion of the low impurity concentration region
Upper portion provided with a second conductivity type impurity at a predetermined concentration.
Production method der transistor element comprising a gate electrode, a
A mask pattern on the semiconductor layer on the insulator layer.
Providing a mask and using the provided pattern as a mask.
Etching the semiconductor layer to make it thinner;
The second conductivity type impurity is introduced into this thinned region.
Providing the upper gate electrode by
The first and second first conductors are applied to the area masked by the
Providing a high-concentration impurity-doped layer;
Electrodes and the first and second conductivity type impurity high concentration layers.
Connecting the wiring terminals .

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The operation of the present invention is as follows.

On the insulator layer (reference numeral 2 in FIG. 1 described later)
Is provided with a semiconductor active layer (reference numeral 3 in FIG. 1 described later). This semiconductor active layer includes a first conductivity type impurity high concentration diffusion layer (reference numeral 5 in FIG. 1 described later), a low impurity concentration region (reference number 4 in FIG. 1 described later), and a first conductivity type impurity high concentration diffusion layer. (Reference numeral 5 in FIG. 1 described later) are connected in this order in the horizontal direction. Then, an upper gate electrode (reference numeral 6 in FIG. 1 described later) made of a semiconductor layer, which is a second-conductivity-type high-impurity-concentration region, is formed vertically above the low-impurity-concentration region. Below the insulator layer, a lower gate electrode (reference numeral 1 in FIG. 1 described later) made of a conductor such as a metal, metal silicide, or a semiconductor is formed.

When the first conductivity type is n-type, a positive potential is applied to the lower electrode, and when the first conductivity type is p-type, a negative potential is applied to the lower electrode. An input signal is applied to the upper gate electrode, and an output signal is obtained from one of the first-conductivity-type impurity high-concentration diffusion layers or an element connected thereto.

Further, at least a part of the upper gate electrode is formed of a material (reference numeral 10 in FIG. 5 to be described later) such as a metal and a metal silicide, which is different from the second conductivity type impurity high concentration semiconductor.

Further, when the first conductivity type is n-type, a positive charge (“+” in FIG. 6 described later) is introduced into the insulator layer below the semiconductor layer, and Conductivity type is p
If it is a type, a negative charge is introduced. Alternatively, a ferroelectric material (ferroelectric material 11 in FIG. 7 described later) is buried in an insulator below the semiconductor layer, and polarization charges are generated at the interface to introduce the charges into the lower part of the semiconductor layer. ("+" And "-" in FIG. 7). Thereby, the lower gate electrode can be omitted.

On the other hand, a part of the low impurity concentration region located below (the intrinsic region 8 in FIG. 11 described later) has a narrower band gap than other regions in the low impurity concentration region. It is formed of a material.

The low impurity concentration region extends outside the end of the element region, and a region having a higher impurity concentration of the second conductivity type than the low impurity concentration region is further provided outside the low impurity concentration region (semiconductor in FIG. 29 described later). Layer extension 50).

Further, a pattern of a material serving as a mask for etching is formed on the semiconductor layer on the insulator (an oxide film 36 in FIG. 18 and the like to be described later), and the semiconductor layer is thinned by etching using this pattern as a mask. Become By diffusing or ion-implanting the first conductivity type impurity at a high concentration in this thinned region, a first conductivity type impurity high concentration diffusion layer is provided. A second conductivity type impurity high concentration diffusion layer is provided in a region that has not been etched by the mask effect of the pattern, and wiring is connected to the first and second conductivity type impurity high concentration diffusion layers to form a second conductivity type impurity high concentration diffusion layer. A wiring connected to the concentration diffusion layer is an input terminal.

Hereinafter, the operation principle of the present transistor will be described by taking an n-channel transistor as an example. In the case of a p-channel transistor, the case where all the following polarities are reversed applies.

When a positive voltage is applied to the lower gate, an inversion layer serving as a channel through which electrons flow is formed below the p-type region. Here, when the voltage of the signal input to the upper gate electrode is at a certain voltage level (threshold voltage Vth), the voltage applied to the lower gate 1 is changed so that transition between formation and disappearance of the inversion layer occurs. Set. The threshold voltage Vth takes a value between the high voltage level VH and the low voltage level VL of the input signal, or a value lower than the low voltage level VL.

Thus, when a voltage higher than the threshold voltage is applied to the upper gate electrode, the transistor is turned on because an inversion layer is formed below the p-type region.
When a voltage lower than the threshold voltage is applied to the upper gate electrode, the inversion layer disappears, so that the transistor does not conduct. Therefore, switching or amplifying operation can be performed by changing the input signal of the upper gate electrode between the high voltage level VH and the low voltage level VL.

Here, the operation for the first problem will be described.

In the transistor element of the present invention, unlike an ordinary field effect transistor (MOSFET), the upper gate electrode is brought into direct contact with the second conductivity type region without interposing a gate oxide film. In a MOSFET, since a gate oxide film is interposed between a gate electrode and a channel, the gate oxide film needs to be thin in order to improve the controllability of the channel potential by the gate electrode. In contrast, in this structure, the upper gate electrode is adjacent to the channel via the depletion layer,
There is no oxide film having a low dielectric constant and a small capacitance between the gate and the channel. In this element, a normal MOS
The capacitance between the neutral region and the channel corresponds to the gate-channel capacitance of the FET (the capacitance CCG in FIG. 2 described later). Here, since there is a semiconductor layer having a high dielectric constant between the gate electrode and the channel, the value of the gate-channel capacitance increases, and the controllability of the channel by the gate increases. Further, in order to set a larger value of the gate-channel capacitance, the impurity concentration of the second conductivity type region is increased or a low concentration region below the second conductivity type region (an intrinsic region in FIG. 8) only needs to be reduced, and there is no need to form a thin gate oxide film.

Further, in the transistor element of the present invention, when the impurity concentration of the second conductivity type region adjacent to the upper gate electrode is increased to suppress the short channel effect, the gap between the neutral region and the channel inside the region is increased. Capacity value increases.

Next, the operation relating to the second problem will be described.
In the transistor element of the present invention, the neutral region (p-type region 4
Formed at the top of the second conductive type impurity
Diffusion layer (p + Region (upper gate electrode)
Or the second conductivity type impurity high concentration diffusion layer itself is SO
It has a role as a neutral region in the I layer. Therefore, the second
Second conductive type carrier through conductive type impurity high concentration diffusion layer
Inflow and discharge of the substrate are performed promptly, so that the substrate floating effect
Does not occur.

Further, by contacting a metal or a metal silicide with low resistance to the upper portion or the side surface of the upper gate electrode, the resistance of the upper gate electrode in the channel width direction can be reduced. By contacting the metal layer not only on the upper surface of the upper gate but also on the side surface thereof, the contact resistance between the semiconductor constituting the upper gate and the metal layer can be reduced.

Further, by forming at least a part of the upper gate electrode which is in contact with the low concentration impurity region with a metal, a Schottky contact can be obtained between the upper gate electrode and the semiconductor layer. Leakage current flowing into the semiconductor layer can be reduced.

On the other hand, when electric charges are introduced into the insulating layer below the semiconductor (see FIG. 6 to be described later), the electric field generated by these electric charges plays the same role as the electric field generated by the lower gate, so that the voltage applied to the lower gate is reduced. can do. Alternatively, the lower gate can be omitted.

Further, by providing a layer made of a ferroelectric substance in the insulating layer below the semiconductor (see FIG. 7 to be described later), when a polarization charge is generated at the interface of the ferroelectric substance, the electric field from the polarization charge lowers the electric field from the polarization charge. It can have the same role as the electric field by the gate.

Further, by providing a material having a narrow band gap below the low concentration region (reference numeral 14 in FIG. 9 described later) (reference numeral 13 in FIG. 9 described later), the carrier concentration in the channel can be increased. . Germanium, which is a narrow bandgap material, has a high hole mobility. Therefore, using the structure of FIG. 1 for an n-channel transistor and the structure of FIG.
Replacing the MOSFET in the OS circuit enables high-speed circuit operation.

Here, a part of the lower gate is used as a floating gate, separated from the lower gate, and charges are injected / discharged from the lower gate through the oxide film from the lower gate. Injecting positive charges into the floating gate has the same effect as applying positive charges to the lower gate in the structure of FIG. When the positive charge of the floating gate is discharged or the negative charge is injected into the floating gate, the threshold value of the transistor increases. If the threshold value of a circuit block that does not need to be operated in the LSI at each time is increased by this method, the leakage current flowing through the transistor in the off state can be reduced, so that power consumption can be reduced.

Further, similarly, by controlling the voltage of the lower gate in the structure of FIG. 1 and the polarization charge in FIG. 7, the threshold value of the transistor is changed, and the leakage current flowing through the transistor in the off state is similarly reduced. Power consumption can be reduced.

Then, the portion where the channel of the first conductivity type is formed is changed to the second conductivity type impurity concentration or the impurity concentration in the vicinity thereof is changed to the second region of the second conductivity type or the second gate forming the upper gate electrode. If the impurity concentration is lower than that of the high-concentration impurity diffusion layer of the conductivity type, or if this portion is formed of an intrinsic region (see FIGS. 4 and 11 described later), impurity scattering in the channel region is reduced, so that the current value is increased and the second conductive region is increased. The parasitic capacitance between the mold region and the source / drain region can be reduced.

In the present invention, the second conductivity type high concentration impurity diffusion layer and the first conductivity type high concentration impurity diffusion layer are separated in the horizontal direction (for example, FIG. 1) or the vertical direction (for example, FIG. 5). It is possible to prevent a leak current from being generated due to band-to-band tunneling due to contact between them. Since the upper gate electrode and the source / drain region are separated in the horizontal direction (for example, FIG. 1) or the vertical direction (for example, FIG. 5), the capacitance between the upper gate electrode and the source / drain region (parasitic capacitance and Fringe capacity) can be reduced. When such parasitic capacitance is reduced, the element can be operated at high speed.

Since the transistor of the present invention can be applied to a silicon material, it can be manufactured by using a conventional silicon LSI manufacturing apparatus and manufacturing process.

The upper gate electrode is made of a normal MOSFE.
MOSFE in the circuit assuming the gate electrode at T
By replacing T with the transistor of the present invention,
Normal circuit constituted by MOSFET, for example, C
A MOS circuit can be constituted by the transistor of the present invention.

Further, the low impurity concentration region is extended outward from the end of the element region, and a region having a higher impurity concentration of the second conductivity type than the low impurity concentration region is provided outside the low impurity concentration region (extending portion 50 in FIG. 29). ). Thereby, in the off state, the end of the element region (the end of the channel in the channel width direction) is inverted by the lower gate, and leakage current can be prevented from flowing. Since an inversion layer is difficult to be formed in a region where the impurity concentration of the second conductivity type is high, by providing this region at the end of the element region, inversion or weak inversion is likely to occur at the end of the element region where inversion or weak inversion easily occurs even in the OFF state. Leakage current can be suppressed.

By providing a region having a high impurity concentration of the second conductivity type outside the source / drain region, it is possible to suppress an increase in capacitance between the second conductivity type layer and the source / drain region, It is possible to suppress the flow of a leak current due to an interband tunnel between the second conductivity type layer having the impurity concentration and the source / drain region.

Further, a pattern of a material serving as a mask for etching is formed on the semiconductor layer on the insulator, and the semiconductor layer is thinned by etching using the pattern as a mask.
The first conductive type impurity is diffused or ion-implanted at a high concentration in the thinned region to provide a first conductive type impurity high concentration diffusion layer, and the second conductive type impurity is not etched by the mask effect of the pattern. A high-concentration impurity diffusion layer, a wiring connected to the first and second conductivity-type impurity high-concentration diffusion layers, and a wiring connected to the second conductivity-type impurity high-concentration diffusion layer serving as an input terminal. A transistor having the structure described above and having the above operation can be manufactured.

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing the structure of a first embodiment of the transistor element according to the present invention. In the figure, in the transistor element according to the first embodiment of the present invention, a semiconductor active layer 3 made of a semiconductor is formed on a buried oxide film 2 which is an insulator layer. The semiconductor active layer 3 includes a p-type region 4 which is a low impurity concentration region and a source / drain region 5 which is provided on both sides of the p-type region 4 and is a first conductivity type impurity high concentration diffusion layer made of a semiconductor. It is comprised including.

Further, above the p-type region 4 which is a low impurity concentration region, an upper gate electrode 6 formed of a semiconductor layer which is a second conductivity type high impurity concentration region is formed. Below the buried oxide film 2 as an insulator layer, a lower gate electrode 1 made of a conductor such as metal, metal silicide, or a semiconductor is formed.

Here, when the first conductivity type is n-type, a positive potential is applied to the lower electrode. When the first conductivity type is p-type, a negative potential is applied to the lower electrode. An input signal is applied to the upper gate electrode, and an output signal is obtained from one of the first-conductivity-type impurity high-concentration diffusion layers or an element connected thereto.

This transistor element can be formed by the following procedure. First, phosphorus (P) is 1 × 1
SOI layer 3 made of single-crystal silicon having a thickness of 10 [nm] via a buried oxide film 2 having a thickness of 100 [nm] on lower gate 1 made of an n-type silicon substrate into which 0 ¹⁸ [cm ^-3 ] has been introduced. Is provided. In the center of the SOI layer 3, a p-type region 4 into which boron is introduced at 1 × 10 ¹⁸ [cm ⁻³ ] has a width of 1 × 10 ¹⁸ [cm ⁻³ ].
Provided over 00 [nm]. On both sides of the p-type region 4,
A source / drain region 5 composed of an n ⁺ region into which phosphorus is introduced at 1 × 10 ²⁰ [cm ⁻³ ] is provided. An upper gate electrode 6 made of ap ⁺ region having a height of 200 [nm] is provided at the center of the p-type region 4 so as to be in contact with the upper part of the p-type region 4 over 80 [nm].

By applying a positive voltage to the lower gate 1, an inversion layer 7 is formed below the p-type region 4. Here, when the voltage of the signal input to the upper gate electrode 6 is a certain voltage between the high voltage level (VH) and the low voltage level (VL), that is, the threshold voltage (Vth),
The voltage applied to the lower gate 1 is set so that the formation / disappearance of the inversion layer is performed. Thereby, the upper gate electrode 6
When a voltage higher than the threshold voltage is applied to
Since the inversion layer is formed below the mold region 4, the transistor is turned on. When a voltage lower than the threshold voltage is applied to the upper gate electrode 6, the inversion layer disappears.
No current flows through the transistor. Therefore, switching or amplifying operation can be performed by changing the input signal of the upper gate electrode between the high voltage level (VH) and the low voltage level (VL). High voltage level VH
, The low voltage level VL and the applied voltage of the lower gate are, for example, 0.8 [V], 0.0 [V], 15 [V], respectively.
[V].

That is, in this embodiment, unlike an ordinary field-effect transistor (MOSFET), the upper gate electrode is brought into direct contact with the second conductivity type region without passing through the gate oxide film. This increases the gate-to-channel capacitance CCG without forming a thin gate oxide film, thereby increasing the controllability of the channel by the gate.

In this embodiment, when the impurity concentration of the second conductivity type region adjacent to the upper gate electrode is increased to suppress the short channel effect, the capacitance between the neutral region and the channel inside the region increases. I do. For this reason, when the substrate impurity concentration is increased to suppress the short channel effect, the value of the gate-channel capacitance CCG increases, contrary to a normal field effect transistor, and the controllability of the channel region by the gate electrode is increased. Is improved.

Furthermore, in this embodiment, since the threshold voltage is controlled by the lower gate electrode, the increase in the concentration of the substrate impurity for suppressing the short channel effect and the setting of the threshold value are independent. You can do it. Therefore, in a normal field-effect transistor, the problem that the setting of the threshold voltage and the suppression of the short-channel effect adversely affect each other, for example, if the substrate impurity concentration is increased to suppress the short-channel effect, The problem that the voltage becomes too high is solved.

Then, a neutral region (a region above the p-type region 4)
Formed from above the second conductive type impurity high concentration diffusion layer
(P The upper gate electrode 6) composed of the + region is connected.
Or, the second conductivity type impurity high concentration diffusion layer itself is in the SOI layer.
Since it has a role as a neutral region, the second conductivity type impurity is high.
Inflow and outflow of the second conductivity type carrier through the concentration diffusion layer
Since it is performed promptly, the substrate floating effect does not occur.

Here, the capacitance between the channel and the lower gate does not depend on the impurity concentration. As shown in FIG.
The capacitance between the neutral region 107 and the channel corresponds to the gate-channel capacitance CCG of a normal field effect transistor, and the capacitance between the channel and lower gate corresponds to the channel-substrate CCB capacitance of a normal transistor. I do. Therefore, in the present transistor element, when the substrate impurity concentration is increased in order to suppress the short channel effect, the gate-to-channel capacitance CCG becomes opposite to that of the ordinary field effect transistor.
Is increased, and the controllability of the channel region by the gate electrode is improved.

In the present transistor element, the threshold voltage is controlled by the lower gate electrode. Therefore, it is possible to independently increase the concentration of the substrate impurity for the purpose of suppressing the short channel effect and set the threshold value. . That is, the substrate impurity concentration is first set to a concentration sufficient to suppress the short channel effect,
Next, the potential of the lower gate electrode may be set so that a necessary threshold voltage is obtained. Taking an n-channel transistor as an example, the potential of the lower gate may be lowered to raise the threshold, and the potential of the lower gate may be raised to lower the threshold. Therefore, the problem that the setting of the threshold voltage and the suppression of the short channel effect adversely affect each other, for example, the problem that the threshold voltage becomes too high when the substrate impurity concentration is increased to suppress the short channel effect, Is resolved.

This situation is shown in FIG. As shown in the figure, the setting of the threshold value (arrow YS) and the suppression of the short channel effect (arrow YT) do not depend on each other, and can be controlled independently. The arrow Y in FIG.
C indicates control of the channel.

Here, FIG. 4 shows an example in which the p-type region 4 in FIG. 1 is replaced by an intrinsic region 8 into which no impurity is introduced. The p-type region 4 has a low concentration, for example, 1 ×
It may be replaced with an n ^- type region into which 10 ¹⁷ [cm ⁻³ ] phosphorus is introduced. Further, the lower gate may be formed of metal or metal silicide.

In FIGS. 1 and 4, the lower gate may be formed of an n-type silicon substrate into which boron (B) is introduced.

FIG. 5 shows a transformer according to a second embodiment of the present invention.
FIG. 3 is a cross-sectional view illustrating a configuration of a transistor element. This structure is shown in FIG.
Structure, the p-type region 4 is replaced with the source / drain region 5
Extends 40 nm above and a p-type region above
4 having the same width as 4 and a height of 100 [nm] + Area
An upper gate electrode 6 is provided. Source / drain area
An oxide film 9 having a thickness of 50 [nm] is provided on the
Tungsten (W) to surround the upper gate electrode 6
A metal layer 10 having a thickness of 100 [nm] is provided.

That is, at least a portion of the upper gate electrode 6 is formed of a material different from the high-concentration second conductivity type semiconductor, such as metal or metal silicide.

Here, the material of the metal layer is tungsten (W).
Not limited to other metals, for example, molybdenum (Mo), copper (Cu), tantalum (Ta), aluminum (Al),
Titanium (Ti) or the like may be used. Further, an alloy or a metal silicide may be used.

That is, in this embodiment, a metal or a metal silicide having a low resistance is brought into contact with the upper portion or the side surface of the upper gate electrode. Thereby, the resistance of the upper gate electrode in the channel width direction can be reduced. Further, by bringing the metal layer 10 into contact with not only the upper surface of the upper gate electrode but also the side surfaces thereof, the contact resistance between the semiconductor constituting the upper gate electrode and the metal layer can be reduced.

FIG. 6 is a sectional view showing the structure of a transistor element according to the third embodiment of the present invention. This is to introduce a positive charge “+” into a region below the p-type region 4 in the buried oxide film 2 in the structure of FIG. The positive charge is formed, for example, by ion-implanting silicon into a buried oxide film and introducing a defect called an E ′ center into the oxide film. Alternatively, a buried oxide film is formed by a CVD method or the like, and is formed by introducing a similar defect. The E ′ center is a defect of the oxide film caused by excessive introduction of Si into SiO ₂ . S
Because there is an extra bond that cannot bind to oxygen in i,
It has a positive charge.

Since an inversion layer is formed below p-type region 4 by the electric field from the positive charge, the positive charge has the same effect as applying a positive voltage to the lower gate. FIG.
In the embodiment, a positive voltage may or may not be applied to the lower gate. Also, the lower gate need not be present.

When the transistor is a p-channel transistor, a negative charge is introduced. This is formed, for example, by ion-implanting aluminum (Al) into the oxide film.

That is, in this embodiment, a positive charge is applied to the insulator layer below the semiconductor layer when the first conductivity type is n-type, and a negative charge is applied to the insulator layer below the semiconductor layer when the first conductivity type is p-type. Introduce.

When electric charges are introduced into the insulating layer below the semiconductor, the electric field generated by these electric charges plays the same role as the electric field generated by the lower gate, so that the voltage applied to the lower gate can be reduced. Alternatively, the lower gate can be omitted.

FIG. 7 is a sectional view showing the structure of a transistor element according to a fourth embodiment of the present invention. In this structure, a part of the buried oxide film is replaced with a ferroelectric material 11 in order to introduce a positive charge in the oxide film in the structure of FIG. Here, the thickness of the ferroelectric material 11 is, for example, 300
[Nm], an oxide film having a thickness of 50 [nm] is formed on the upper and lower sides thereof. Once a positive voltage is applied to the lower gate, a positive polarization charge is formed at the upper interface of the ferroelectric material, and a negative polarization charge is formed at the lower interface. After that, when the potential of the lower gate is returned to 0 [V], polarization occurs. The charge remains intact and the positive polarization charge at the upper interface acts the same as the positive charge in the structure of FIG.

The ferroelectric materials include BaTiO ₃ , SrT
iO ₃ , PbTiO ₃ , or another ferroelectric is used.

That is, in this embodiment, the ferroelectric material is buried in the insulator below the semiconductor layer, and polarization charges are generated at the interface, whereby the charges are introduced into the lower part of the semiconductor layer. Thereby, the lower gate electrode can be omitted.

By providing a ferroelectric layer in the insulating layer below the semiconductor, a polarization charge is generated at the interface of the ferroelectric, and the electric field from the polarization charge plays the same role as the electric field by the lower gate. You can have.

FIG. 8 shows a transformer according to a fifth embodiment of the present invention.
FIG. 3 is a cross-sectional view illustrating a configuration of a transistor element. In the structure of FIG.
The upper gate electrode 6 to be + Tongue instead of silicon
Formed by gusten (W), Schottky upper gate
The electrode 12 is used.

Since a high resistance Schottky contact is made between Schottky upper gate electrode 12 and the p-type region, a leak current between the upper gate electrode and the source / drain region is reduced.

That is, in the present embodiment, at least a part of the upper gate electrode which is in contact with the low concentration impurity region is made of metal. As a result, a Schottky contact is obtained between the upper gate electrode and the semiconductor layer,
It is possible to reduce the leak current flowing into the semiconductor layer from the upper gate electrode.

FIG. 9 shows a transformer according to a sixth embodiment of the present invention.
FIG. 3 is a cross-sectional view illustrating a configuration of a transistor element. The structure of FIG.
Replaced with p-type region 4 to apply to channel transistor
In addition, an n-type region 14 is provided.
Narrow band formed by narrow band gap material
A gap region 13 is provided. In this case, the lower gate 1,
The upper gate electrode 6 and the source / drain region 5 are n + Type
The narrow band gap region 13 is made of n-type silicon and gel.
A mixed crystal with manium.

Since the carrier concentration is high in the narrow band gap region, the inversion layer can be easily formed, so that the voltage between the lower gate and the source electrode required for forming the inversion layer can be reduced.

That is, in this embodiment, of the low impurity concentration region, a part of the lower region is formed of a material having a narrower band gap than other regions of the low impurity concentration region.

By providing a material having a narrow band gap below the low-concentration region, the carrier concentration in the channel can be increased. Further, germanium, which is a narrow band gap material, has a high hole mobility. Therefore, when the structure of FIG. 1 is used for the n-channel transistor and the structure of FIG. Circuit operation becomes possible.

FIG. 10 is a sectional view showing the structure of a transistor element according to the seventh embodiment of the present invention. In the structure of the first embodiment (FIG. 1), the lower gate is
And a floating gate 15 surrounded by a buried oxide film is provided between the lower gate and the p-type region 4. The oxide film thickness on the upper and lower portions of the floating gate is, for example, 30 [nm].
And

Electric charges are injected / discharged from the lower gate through the oxide film to the floating gate. Injecting positive charges into the floating gate has the same effect as applying positive charges to the lower gate in the structure of FIG. When the positive charge of the floating gate is discharged or the negative charge is injected into the floating gate, the threshold value of the transistor increases. If the threshold value of a circuit block that does not need to be operated in the LSI at each time is increased by this method, the leakage current flowing through the transistor in the off state can be reduced.
Power consumption can be reduced.

Further, a part of the lower gate is used as a floating gate, separated from the lower gate, and charges are injected / discharged from the lower gate through the oxide film from the lower gate. Injecting positive charges into the floating gate has the same effect as applying positive charges to the lower gate in the structure of FIG. When the positive charge of the floating gate is discharged or the negative charge is injected into the floating gate, the threshold value of the transistor increases. When the threshold value of a circuit block that does not need to be operated in the LSI at each time is increased by this method,
Since leakage current flowing to the transistor in an off state can be reduced, power consumption can be reduced.

FIG. 11 is a sectional view showing the structure of a transistor element according to the eighth embodiment of the present invention. In the structure of FIG. 5, a lower region of 10 [nm] in the p-type region 4 is defined as an intrinsic region. Only by forming the intrinsic region 8 thinly, the value of the gate-channel capacitance can be increased and the controllability of the channel by the gate can be increased without forming a thin gate oxide film.

FIG. 12 shows the transistor element of FIG.
And n is located above the intrinsic region 8. A transformer provided with a mold region 14;
FIG. 3 is a cross-sectional view illustrating a configuration of a transistor element. The transition of FIG.
In the star device, the vertical electric field in the inversion layer 7 is p-type.
When the density of the region is low or this is composed of the intrinsic region
If lower. In addition, this p-type region is formed by conducting the reverse of the p-type.
The vertical electric field can be further reduced by replacing the
It becomes.

In the transistor element of FIG.
Is n Providing the mold region 14 above the channel region 7;
The vertical electric field in the channel region 7 is reduced. H
When the vertical electric field in the channel region 7 is reduced, the channel
And the current value increases. And
Both are marked on the lower gate 1 to set the threshold voltage.
The voltage to be applied can be suppressed low.

FIG. 13 shows the transistor element of FIG. 1 in which the upper gate electrode 6 is replaced by a wide-gap upper gate electrode 16 formed of a material having a wider band gap than the source / drain region 5 and the p-type region 4. FIG. 3 is a cross-sectional view illustrating a configuration of a transistor element.

In the transistor element of FIG. 1, the leakage current between the gate and the source (leakage current) depends on the band gap of the upper gate electrode 6. The leakage current decreases as the band gap increases. In the transistor element shown in FIG. 13, the leak current between the gate and the source is reduced based on this principle.

Here, the wide gap upper gate electrode 1
The material constituting 6 may be any material that satisfies the above relationship with respect to the source / drain region 5 and the p-type region 4.
When the source / drain region 5 and the p-type region 4 are formed of silicon, the wide gap upper gate electrode 1 is formed.
6 may be made of SiC, GaAs, AlGaAs or the like.

FIG. 14 is a diagram showing an example of use of the transistor element of the present invention. FIG. 1 shows a normal CMOS (Complementary) composed of MOSFETs.
MOS) Inverter n-channel MOSFET
1 and the p-channel MOSFET are replaced by an n-channel transistor element of FIG. 1 and a p-channel transistor element having the conductivity type of the element of FIG. 1 reversed, respectively.

In FIG. 14, an input signal Vin is input to the upper gate electrode 6 of the n-channel transistor 23 and the upper electrode 6 of the p-channel transistor 24. N-channel transistor 23 and p-channel transistor 2
4 are connected to each other, and the output signal Vout is obtained therefrom. p-channel transistor 2
4 is connected to the power supply, and the source region 21 of the n-channel transistor 23 is grounded.

In this inverter, in an ordinary CMOS circuit, the upper gate electrode 6 of the transistor element of FIG. 1 is connected to a contact point where the gate electrodes of MOSFETs are connected, and one of the source / drain regions 5 is connected to the source. The region 21 and the other are used as a drain region 22. This inverter performs an operation of inverting an input signal, similarly to a normal CMOS inverter.

Here, the power supply voltage VDD is, for example, 0.5
[V], the voltage VBG1 applied to the lower gate 1 of the n-channel transistor 23 is +10 [V], and the voltage VBG2 applied to the lower gate 1 of the p-channel transistor 24 is -10 [V].

In the above description, the case where the MOSFET is replaced with the transistor element of the present invention in the CMOS inverter has been described.
C other than inverter, such as OR gate and flip-flop
Obviously, a MOS logic gate or the like may be replaced by the transistor element of the present invention.

In a logic gate having a configuration other than the CMOS configuration using a MOSFET, the MOSFET may be replaced with the transistor element of the present invention. Further, the transistor element of the present invention can be used for circuits other than the logic circuit. For example, in the case of a resistive load, the power supply voltage VDD may be connected to the source region 21, the input voltage Vg may be connected to the upper gate electrode 6, and the resistive load R1 may be connected to the drain region 22, as shown in FIG. On the other hand, in the case of a capacitive load, the power supply voltage VDD is applied to the source region 21 and the input voltage V
g, a capacitive load C1 may be connected to the drain region 22.

As described above, in the present transistor element, the threshold voltage of the transistor is changed by controlling the voltage of the lower gate in the structure of FIG. 1 and the polarization charge in FIG. Thus, leakage current flowing through the transistor can be reduced, and power consumption can be reduced.

Further, the portion where the channel of the first conductivity type is formed is changed to the impurity concentration of the second conductivity type or the impurity concentration in the vicinity thereof is changed to the second region of another region of the second conductivity type or the second gate forming the upper gate electrode. By making the impurity concentration lower than that of the high-concentration impurity diffusion layer of the conductivity type or forming this part by an intrinsic region (see FIG. 4 or FIG. 11), the impurity value of the channel region is reduced, so that the current value is increased and the second conductive layer is formed. The parasitic capacitance between the mold region and the source / drain region can be reduced.

Further, the second conductive type high-concentration impurity diffusion layer and the first conductive type high-concentration impurity diffusion layer are separated in a horizontal direction (for example, see FIG. 1) or a vertical direction (for example, see FIG. 5). The contact between them prevents the occurrence of a leak current due to the band-to-band tunnel.

Next, a method for manufacturing the present transistor element will be described. 17 to 28 are schematic sectional views or top views showing one embodiment of the method for manufacturing a transistor element according to the present invention. In these figures, equivalent parts are indicated by the same reference numerals.

First, as shown in FIG. 17, a buried oxide film 32 having a thickness of 80 [nm] is formed on a silicon substrate 31.
And a SOI layer 33 having a thickness of 200 [nm] in the SOI layer 33, boron is implanted at 1 × 10 ¹⁸ [cm ⁻³ ] at 180 [keV] through the SOI layer 33, and 10 × at 800 ° C. Perform a partial heat treatment. Thus, a lower p-type region 35 is formed in a portion of the silicon substrate 31 near the buried oxide film.

Next, boron is applied at 10 [keV] to 1 × 10
¹⁹ [cm ⁻³ ] oblique injection. As a result, p ⁺ -type regions 34 are provided on the top and side surfaces of the SOI layer 33. Also,
5 × 10 ¹⁷ [cm ⁻³ ] ions are implanted with boron at 80 [keV], so that the inside of the SOI layer 33 is a p-type region 40 with a low impurity concentration.

Referring to FIG. 18, the first oxide film 36 is
D (Chemical Vapor Deposition)
n) is deposited by a method of 100 nm, and photolithography and reactive ion etching (Reactive Ion Etch) are performed so as to cross the central portion of the SOI layer 34.
(hereinafter referred to as RIE). 2A is a plan view, and FIG. 2B is a sectional view taken along line AA ′ of FIG.

Next, as shown in FIG.
SOI layer 33 by RIE using oxide film 36 of
Is etched at 190 [nm]. Note that, in the figure, (a) is a plan view, and (b) is a cross-sectional view taken along line AA ′ of (a).

Next, the second oxide film 37 is formed by the CVD method.
20 nm is deposited, perpendicular to the first oxide film 36, and
P remaining in the peripheral portion of the SOI layer 33 Do not cover the + type region 34
Put a pattern using photolithography and RIE
To synchronize.

First, a state in which the photoresist 44 is provided is shown in FIG. 21A is a sectional view of FIG. 21A, and FIG. 21B is a sectional view of BB ′.

After the etching, the oxide film 37 is left around the oxide film 36 and at the step portion as shown in FIG. FIG. 2 is a sectional view taken along the line AA ′ of FIG.
FIG. 23B is a cross-sectional view of FIG.

Next, the SOI layer 33 is etched by 20 [nm] by RIE using the first oxide film 37 as a mask. The state of this etching is shown in FIG. 25A is a cross-sectional view of FIG. 25A, and FIG. 25B is a cross-sectional view of BB ′ in FIG.

In FIG. 25A, an oxide film 37 is formed by RI
FIG. 26 is a cross-sectional view taken along the line AA ′ in a state after being etched by E.

FIG. 27 is a sectional view taken along the line AA 'of FIG.
Contains phosphorus or arsenic on the SOI layer 33
N + Silicon 42 epitaxial growth of 50 [nm]
Then, phosphorus or arsenic is diffused into the SOI layer 33 from this.
You. Thereby, source / drain regions 43 are formed.
You. Next, an oxide film having a thickness of 150 [nm] is formed by a CVD method.
A further interlayer insulating film 38 is deposited.

Finally, contact is made with this interlayer insulating film 38.
Open holes, source / drain regions, p + Type region 3
4. The wiring 39 is connected to the lower p-type region 41. Was
However, the part connecting the wiring of the lower p-type region 35 has
The lower p A + type region 41 is provided. In addition, this
FIG. 28 is a top view in the state of FIG.

In short, in the present manufacturing method, a pattern 36 of a material serving as a mask for etching is formed on a semiconductor layer on an insulator, and the semiconductor layer is thinned by etching using this pattern as a mask. Then, a first conductivity type impurity is diffused or ion-implanted at a high concentration in the thinned region to provide a first conductivity type impurity high concentration diffusion layer, and a region which is not etched by a mask effect by the pattern is provided. The second conductive type impurity high concentration diffusion layer is provided. Finally, wiring is connected to the first and second conductivity type high-concentration impurity diffusion layers, and the wiring connected to the second conductivity-type high impurity concentration diffusion layer is used as an input terminal.

FIG. 29 shows a semiconductor and buried oxide.
FIG. 2 is a perspective view illustrating a portion formed by a film.
You. In the section taken along the line BB ′ in the drawing, S
OI layer 33 and p provided thereon + Type region 34
An extension 50 of the semiconductor layer protruding beyond the channel width WCH is provided.
The channel as shown in FIG.
The end leakage current IL can be prevented.

Here, the channel end shown in FIG.
Leakage current IL is due to the electric field E from the lower gate
The threshold voltage at this point
This is what happens. In contrast,
29, the end of the extension 50 of the semiconductor layer
To p When the + type region 34 is provided, p Impurity in + type region 34
The threshold voltage increases due to the high concentration of the substance. This
As a result, the lowering of the threshold voltage described above is suppressed,
The occurrence of the flow IL can be prevented.

In short, the low-impurity-concentration region extends outside the end of the element region, and a region having a higher impurity concentration of the second conductivity type than the low-impurity-concentration region is provided outside the low-impurity-concentration region.

FIGS. 31 to 38 are schematic sectional views showing another method of manufacturing the present transistor element.

On the silicon substrate 31, a thickness of 100 [nm]
Buried oxide film 32 and SOI layer 33 having a thickness of 10 [nm]
In one SOI substrate, phosphorus is passed through the SOI layer 33 from above 1 × 10 ¹⁸ [cm] at 200 [Kev].
^-3 ] implantation and heat treatment at 800 degrees for 10 minutes. Thus, a lower n-type region 51 is formed in a portion of the silicon substrate 31 near the buried oxide film. Next, a first CVD oxide film 52 is deposited to a thickness of 150 [nm] by a CVD method, and is patterned to a width of 200 [nm] by a normal photolithography step and an etching step by selective RIE. Thereby, the shape shown in FIG. 31 is obtained. The CVD oxide film 52 becomes a dummy pattern for forming a slit described later.

Next, S is formed by selective epitaxial growth.
N containing phosphorus or arsenic on the OI layer 33 + Silicon 42
Is epitaxially grown by 50 [nm]. Next, 80
Heat treatment at 0 degrees for 10 minutes, n + Silicon 42
Or arsenic is diffused into the SOI layer 33, and the source
Formation region 43 is formed. Next, a thickness of 20
0 [nm] Si_ThreeN_FourA film 53 is deposited for 200 [nm]
After that, a photoresist 38 is applied and a first CVD oxidation is performed.
An opening having a width of 300 [nm] is formed above the film 52.
Is performed as described above. As a result, as shown in FIG.
The obtained shape is obtained.

Next, using the photoresist 38 as a mask,
The Si ₃ N ₄ film 53 in the opening is removed by RIE. Then, the photoresist 38 is removed, and the first CVD oxide film 52 is removed by wet etching with hydrofluoric acid. Then, through the state shown in FIG.
A slit 54 is formed at the position where the CVD oxide film 52 was placed.
Is formed. This state is shown in FIG.

Next, the oxide film is formed to a thickness of 100 [n] by the CVD method.
m] is deposited, and then the oxide film is formed by RIE to 100 [n].
m] By etching back, the side of the slit 54
Next, a side wall of the second CVD oxide film 55 is formed. Continued
Selectively on the SOI layer 33 in the slit 54.
Boron-containing p by axial growth + Silicon 56
Is epitaxially grown to 100 [nm], and this is
A gate electrode. Furthermore, AlN is deposited in a 200 [nm]
And etch it back by RIE.
Then, an AlN layer 57 is embedded in the upper part of the slit 54. this
As a result, the shape shown in FIG. 35 is obtained.

Instead of AlN, tungsten (W), tan
Metal such as tall (Ta), molybdenum (Mo), or
Using metal-semiconductor compounds such as tungsten silicide
May be. n + Polysilicon, p + Polysilicon embedded
It's fine. In order to embed these materials, CVD
Method, sputtering method, evaporation method, etc. are used.

The source / drain region of the SOI layer 33 is
In regions other than the region 43, phosphorus,
Introduces donor-type or acceptor-type impurities such as boron and boron.
You may enter. In the manufacturing method shown here,
p + If the growth of silicon 56 is omitted, AlN layer 57
The shape used as the upper gate electrode, that is, as shown in FIG.
Shape is obtained.

By the way, the ion implantation of phosphorus (arrow Y) for forming the lower n-type region 51 is performed after the first CVD oxide film 52 is patterned, with higher energy (for example, 250 [Kev] to 1 [Kev]). [MeV]). In this case, as shown in FIG. 37, the shape of the first CVD oxide film 52 is reflected, and the lower n-type region 51 is shallow below the first CVD oxide film 52 and deeper in other regions. It is formed. As a result, when the element structure is completed, the n-type region 51 is farther away from the source / drain region 43 under the source / drain region 43 as shown in FIG. In other words, the lower n-type region 51 provided in the lower electrode has a first conductivity type impurity in a region other than the distance from the first conductivity type impurity layer in a region facing the region where the insulator layer contacts the gate electrode. The shape is such that the distance from the layer is greater.

Thus, the capacitance (parasitic capacitance) between source / drain region 43 and n-type region 51 is reduced.
When the parasitic capacitance is reduced in this manner, an effect that the operation speed of the element is improved can be obtained. Although the structure in which the lower n-type region 51 is in contact with the buried oxide film 32 below the upper gate electrode made of p + silicon 56 is shown here, this may be separated from the buried oxide film 32.

As described above, in this embodiment, the dummy pattern 52 is formed on the semiconductor layer on the insulator (SOI layer 33 in FIG. 32), and ion implantation and diffusion are performed using the dummy pattern 52 as a mask. Alternatively, a semiconductor layer doped with impurities is grown.

Then, the first area is placed in the area where there is no dummy pattern.
A conductive impurity high concentration diffusion layer is provided (n + Silicon 42,
Source / drain region 43), followed by the dummy pattern
Insulating film (Si) so as to cover the_ThreeN_FourDeposit film 53)
Then, an opening is provided in the insulating film above the dummy pattern 52,
The dummy pattern 52 is formed by etching from this opening.
Is eliminated. Further, the dummy pattern 52
In the slit 54 formed by removing
In addition, a semiconductor (p + Silicon 56)
Epitaxial growth, or use metal or metal
Buried reside and polysilicon by CVD and sputtering
(AlN 57).

[0130] This makes it necessary for each of the above embodiments.
It is possible to manufacture a transistor having a convex shape
it can. In particular, in this method, a high density
Semiconductor containing impurities (p + Silicon 56) epitaxy
Epitaxial growth, and use this as the upper gate electrode.
Control the doping amount of impurities during the axial growth.
Controls the vertical impurity distribution of the upper gate electrode
You can do it. Also, gold in the slit 54
Metal, metal silicide, polysilicon by CVD, sputtering
Source / drain regions by embedding with
Materials other than semiconductors used for the upper gate electrode
You can.

In this embodiment, the semiconductor substrate 31 (FIG.
7), a dummy pattern 52 having a certain width is formed on a semiconductor layer (SOI layer 33) existing through an insulator (oxide film 32) to provide a convex portion, or a lower portion of the convex portion is formed. Is performed so that the impurity ions reach the semiconductor substrate 31 under the insulator (oxide film 32). Thus, in the semiconductor substrate 31 below the insulator layer (the oxide film 32 in FIG. 38) reflecting the convex shape, the position where the high-concentration impurities are shallower under the upper gate electrode than in other regions. Will be introduced. Therefore, a high-concentration impurity region (lower n-type region 51) is formed below the source / drain region 43 so as to be recessed from the source / drain region. Therefore, the capacitance (parasitic capacitance) between the source / drain region and the high-concentration impurity region is reduced. Then, when the parasitic capacitance is reduced, the transistor element can be operated at higher speed.

Further, in a normal field-effect transistor element, after the formation of the gate electrode, the same ion implantation is performed by utilizing the convex shape of the gate electrode.
Because ion implantation is performed through a thin gate oxide,
The thin gate oxide film is damaged at the time of ion implantation, resulting in deterioration of characteristics. On the other hand, according to the present manufacturing method, since the gate oxide film is not formed at the time of ion implantation to the semiconductor substrate, the thin gate oxide film is damaged. No deterioration of characteristics due to In this manufacturing method, the same ion implantation may be performed after forming a convex shape made of a semiconductor (FIGS. 19B and 26).

As described above, since the transistor element of the present invention can be applied to a silicon material, the conventional silicon LS
It can be manufactured using the manufacturing apparatus and manufacturing process of I.

The upper gate electrode is made of a normal MOSFE.
MOSFE in the circuit assuming the gate electrode at T
By replacing T with the transistor of the present invention, a normal circuit constituted by a MOSFET, for example, a CMOS circuit can be constituted by the transistor of the present invention.

Furthermore, by extending the low impurity concentration region outside the end of the element region and further providing a region having a higher impurity concentration of the second conductivity type than the low impurity concentration region outside the element region, the lower portion in the off state is provided. The end of the element region is inverted by the gate, and leakage current can be prevented from flowing.

Then, a pattern of a material serving as a mask for etching is formed on the semiconductor layer on the insulator, the semiconductor layer is thinned by etching using this pattern as a mask, and the first conductive type impurity is doped in the thinned region. A first conductivity type impurity high concentration diffusion layer is provided by high concentration diffusion or ion implantation, and a second conductivity type impurity high concentration diffusion layer is provided in a region which is not etched by a mask effect by this pattern. By connecting a wiring to the two-conductivity-type high-concentration impurity high-concentration diffusion layer and using a wiring connected to the second-conductivity-type high-concentration impurity high-concentration diffusion layer as an input terminal, the semiconductor device has a structure made of a convex semiconductor. It is possible to manufacture a transistor element having the same.

[0137]

As described above, the present invention provides a conventional M
Unlike the OSFET, by contacting the upper gate electrode directly to the second conductivity type region without the intermediary of the gate oxide film, the gate-to-channel capacitance increases without forming a thin gate oxide film, and the This has the effect of increasing controllability. In addition, by increasing the substrate impurity concentration, the effect of increasing the gate-channel capacitance value and improving the controllability of the channel region by the gate electrode, contrary to a normal field-effect transistor, is obtained. Furthermore, since the threshold voltage is controlled by the lower gate electrode, there is an effect that the concentration of the substrate impurity for the purpose of suppressing the short channel effect can be increased and the threshold can be set independently.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a transistor device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a gate-channel capacitance and a channel-substrate CCB capacitance in FIG. 1;

FIG. 3 is a sectional view showing an operation of the transistor element of FIG.

FIG. 4 is a diagram illustrating a configuration in which a p-type region of the transistor element in FIG. 1 is replaced with an intrinsic region.

FIG. 5 is a sectional view showing a configuration of a transistor element according to a second embodiment of the present invention.

FIG. 6 is a sectional view showing a configuration of a transistor element according to a third embodiment of the present invention.

FIG. 7 is a sectional view showing a configuration of a transistor element according to a fourth embodiment of the present invention.

FIG. 8 is a sectional view showing a configuration of a transistor element according to a fifth embodiment of the present invention.

FIG. 9 is a sectional view showing a configuration of a transistor element according to a sixth embodiment of the present invention.

FIG. 10 is a sectional view showing a configuration of a transistor element according to a seventh embodiment of the present invention.

FIG. 11 is a sectional view showing a configuration of a transistor element according to an eighth embodiment of the present invention.

FIG. 12 shows an intrinsic region in the transistor element of FIG.
N at the top of It is sectional drawing which shows the structure which provided the-type | mold area | region.

13 is a cross-sectional view showing a configuration of the transistor element of FIG. 1 in which an upper gate electrode is replaced by a wide-gap upper gate formed of a material having a wider band gap than a source / drain region and a p-type region. is there.

FIG. 14 is a diagram showing a usage example of the transistor element of the present invention.

FIG. 15 is a diagram showing a use example of the transistor element of the present invention in the case of a resistance load.

FIG. 16 is a diagram showing a usage example of the transistor element of the present invention in the case of a capacitive load.

FIG. 17 is a cross-sectional view showing a part of the manufacturing process in the transistor element manufacturing method according to the embodiment of the present invention.

FIG. 18A is a top view illustrating a part of a manufacturing process in a transistor element manufacturing method according to an embodiment of the present invention;
FIG. 2B is a cross-sectional view thereof.

FIG. 19A is a top view showing a part of a manufacturing process in a transistor element manufacturing method according to an embodiment of the present invention;
FIG. 2B is a cross-sectional view taken along line BB ′.

FIG. 20 is a top view showing a part of the manufacturing process in the transistor element manufacturing method according to the embodiment of the present invention.

21A is a sectional view taken along line AA ′ of FIG. 20, and FIG. 21B is a sectional view taken along line BB ′ of FIG.

FIG. 22 is a top view showing a part of the manufacturing process in the transistor element manufacturing method according to the embodiment of the present invention.

23A is a sectional view taken along line AA ′ of FIG. 22, and FIG. 23B is a sectional view taken along line BB ′ of FIG.

FIG. 24 is a top view showing a part of the manufacturing process in the transistor element manufacturing method according to the embodiment of the present invention.

25A is a sectional view taken along the line AA ′ of FIG. 24, and FIG. 25B is a sectional view taken along the line BB ′ of FIG.

FIG. 26 is a cross-sectional view showing a part of the manufacturing process in the transistor element manufacturing method according to the embodiment of the present invention.

FIG. 27 is a cross-sectional view showing a part of the manufacturing process in the transistor element manufacturing method according to the embodiment of the present invention.

FIG. 28 is a top view of the state shown in FIG. 27;

FIG. 29 is a diagram for explaining the effect of preventing leakage current.

FIG. 30 is a diagram for explaining the principle of generation of leak current.

FIG. 31 is a cross-sectional view showing a part of the manufacturing process in the transistor manufacturing method according to another embodiment of the present invention;

FIG. 32 is a cross-sectional view showing a part of the manufacturing process in the transistor manufacturing method according to another embodiment of the present invention;

FIG. 33 is a cross-sectional view showing a part of the manufacturing process in the transistor manufacturing method according to another embodiment of the present invention;

FIG. 34 is a cross-sectional view showing a part of the manufacturing process in the transistor manufacturing method according to another embodiment of the present invention.

FIG. 35 is a cross-sectional view showing a part of the manufacturing process in the transistor manufacturing method according to another embodiment of the present invention;

FIG. 36 is a cross-sectional view showing a part of the manufacturing process in the transistor manufacturing method according to another embodiment of the present invention;

FIG. 37 is a cross-sectional view showing a part of the manufacturing process when ion implantation is performed with higher energy.

FIG. 38 is a cross-sectional view showing a part of the manufacturing process when ion implantation is performed with higher energy.

FIG. 39 is a cross-sectional view showing a structure of a conventional partially depleted SOIMOSFET.

FIG. 40 is a cross-sectional view showing the structure of another conventional SOI MOSFET.

FIG. 41 is a cross-sectional view showing the operation of the SOIMOSFET of FIG. 39.

[Explanation of symbols]

 Reference Signs List 1 lower gate 2 buried oxide film 3 SOI layer 4 p-type region 5 source / drain region 6 upper gate electrode 7 inversion layer 8 intrinsic region 9 oxide film 10 metal layer 11 ferroelectric material 12 Schottky upper gate electrode 13 narrow band gap Region 14 n-type region 15 floating gate 31 silicon substrate 33 SOI layer 34 p + Type region 35 lower p-type region 36, 37 oxide film 38 interlayer insulating film 39 wiring 41 lower p + Type region 42 n + Type silicon 43 source / drain region 44 photoresist

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification code FI H01L 29/80 C

Claims (17)

(57) [Claims] An insulator layer, a low impurity concentration region having a predetermined impurity concentration,
Provided so as to reach the lower interface and having a low impurity concentration.
And second first conductive layers having an impurity concentration higher than that of the first region.
Provided on the insulator layer, including a high-concentration type impurity layer.
A semiconductor layer, a lower gate electrode provided below the insulator layer, and a second conductivity type impurity provided above the low impurity concentration region.
And an upper gate electrode into which a substance is introduced at a predetermined concentration . 2. The method according to claim 1, wherein at least a part of said upper gate electrode is
2. The transistor element according to claim 1, wherein the transistor element is made of a metal . 3. The semiconductor device according to claim 1, wherein said upper gate electrode includes said impurity.
At least a portion that contacts the low concentration area is
Transistor device according to claim 1, characterized in that it is configured. 4. A method according to claim 1 , further comprising:
The transistor element according to claim 2, wherein the low impurity concentration region is in Schottky contact . 5. The method according to claim 1, wherein said first conductivity type is n-type.
A positive potential is applied to the lower electrode, and the first conductivity type is p-type.
In some cases, a negative potential is applied to the lower electrode,
An input signal is applied to the upper gate electrode, and the first and second
Output from at least one of the first conductive type impurity high concentration layers of
5. A signal according to claim 1, wherein the signal is derived.
Transistor element of crab described. 6. An insulating layer under the semiconductor layer is a semiconductor layer.
6. The transistor element according to claim 5 , wherein the transistor element is thicker than the layer . 7. A ferroelectric material region is provided in said insulator layer.
And a polarization charge is generated at the interface.
The transistor element according to claim 1 . 8. The semiconductor device according to claim 1 , wherein said insulating layer has a low impurity concentration.
The region in contact with the body layer is more bumpy than other regions of the semiconductor layer.
Characterized by being formed of a narrow material-gap
The transistor element according to claim 1 . 9. The semiconductor device according to claim 1, wherein said upper gate electrode has a low impurity concentration.
Constructed of a material with a wider band gap than that of the region
The transistor element according to any one of claims 1 to 8, wherein the transistor element is formed. 10. An intrinsic region in place of the low impurity concentration region.
The transistor element according to any one of claims 1 to 9, further comprising a region layer . 11. The upper gate of the intrinsic region layer
The region in contact with the electrode is formed by the first conductivity type impurity low concentration layer.
The transistor element according to claim 10 , wherein the transistor element is formed by: 12. The width of the low impurity concentration region is set to a channel.
Larger than the width, and at both ends of the low-concentration impurity region.
A second conductive layer having a higher impurity concentration than the low impurity concentration region;
12. A type impurity region is provided.
The transistor element according to any one of the above. 13. A semiconductor contacting the upper gate electrode.
The low impurity concentration region at a position facing the layer region
The first conductivity type impurity in a region other than the above distance
The semiconductor layer whose distance from the layer is larger is placed in the lower electrode.
The transistor element according to any one of claims 1 to 12, wherein the transistor element includes: 14. An insulator layer, a low-impurity-concentration region having a predetermined impurity concentration, and first and second impurity-concentration regions provided so as to reach a lower interface of the self-layer and having an impurity concentration higher than the impurity-low-concentration region. a semiconductor layer provided on the first conductivity type high impurity concentration layer and a said insulating layer of said the lower gate electrode provided on the lower insulating layer, Re et al provided in an upper portion of the low-impurity-concentration region A method of manufacturing a transistor element, comprising: providing a mask pattern on the semiconductor layer on the insulator layer; and etching the semiconductor layer using the provided pattern as a mask to form a thin film. And the first and second impurities of the first conductivity type are formed in the thinned region.
Providing a high concentration layer; introducing the second conductivity type impurity into a region masked by the pattern to form
Providing a partial gate electrode; and connecting a wiring terminal to the upper gate electrode and the first and second first- conductivity-type high-concentration impurity layers. 15. An insulator layer, a low impurity concentration region having a predetermined impurity concentration,
Provided so as to reach the lower interface and having a low impurity concentration.
And second first conductive layers having an impurity concentration higher than that of the first region.
Provided on the insulator layer, including a high-concentration type impurity layer.
A semiconductor layer and an upper gate electrode provided above the impurity low concentration region;
A method of manufacturing a transistor device comprising a pole, a, on part of the semiconductor layer on an insulator, forming a dummy pattern, covered the formed dummy pattern on the dummy pattern as a mask Providing a first-conductivity-type high-concentration impurity diffusion layer in a region which is not provided; depositing an insulating film so as to cover the dummy pattern; providing an opening in the insulating film above the dummy pattern; Removing the dummy pattern by etching, and forming an upper gate by providing a semiconductor containing impurities in a slit formed by removing the dummy pattern so as to be in contact with the semiconductor layer.
And a step of manufacturing the transistor element. 16. The method according to claim 1, further comprising a step of providing a metal in the slit so as to be in contact with the semiconductor layer, instead of providing a semiconductor containing the impurity in the slit so as to be in contact with the semiconductor layer. Claim 15
A method for manufacturing the transistor element according to the above. 17. The semiconductor device according to claim 17, wherein the dummy pattern is located below the dummy pattern.
The dummy is placed so that the ions reach the surface of the semiconductor substrate.
Further including the step of implanting ions through the pattern.
17. The transistor according to claim 15, wherein
Device manufacturing method.