JP3007158U - Dryer - Google Patents

Abstract

(57) [Summary] (Modified) [Purpose] In a rotary work dryer, it is necessary to complicate the lid opening / closing mechanism and opening / closing operation to provide a sealing mechanism while reducing the lid opening / closing space. A lid sealing mechanism that eliminates the above is provided. [Construction] A work dryer includes a rotor body 2 which holds a work 3 and rotates inside a dryer main body 1 having a lateral cylindrical shape.
And a lid 6 is attached to the opening 5 provided in the upper portion of the dryer main body 1 along the peripheral wall 1a of the dryer main body 1 so as to be openable and closable in the circumferential direction. The sealing member 12 that seals the periphery of the lid 6 and the opening 5 of the dryer main body 1 is hollow and airtight with a substantially concave cross section, and expands when air is introduced. The sealing member 12 is connected to an air supply / exhaust device that sends / exhausts air to / from the hollow portion.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a dryer used for draining and drying after cleaning a disk-shaped work such as a semiconductor wafer or a magnetic disk substrate. More specifically, it is characterized by a lid sealing mechanism of a dryer body. The present invention relates to a rotary work dryer having a.

[0002]

[Prior art]

 Generally, a rotary work dryer that drains and dries after cleaning a disk-shaped work such as a semiconductor wafer or a magnetic disk substrate is a dryer with a horizontal cylindrical shape. In this system, a rotor that is driven to rotate by a motor is provided, and the rotor holds a required number of workpieces and rotates them at high speed so that water droplets adhering to the workpieces are shaken off by centrifugal force. There is. In this work dryer, an opening for loading and unloading the work is provided in the upper part of the dryer main body, and a lid having an intake port with a filter is openably and closably attached. An exhaust port for discharging the air used for drying together with the water droplets is provided in the lower part or the like.

In the above work dryer, it is necessary to provide a seal mechanism between the periphery of the lid and the periphery of the opening of the dryer main body to prevent gas and liquid from flowing in and out of the periphery of the lid. In this case, if the lid is pivotally attached to one side of the lid so that the lid can be opened and closed, it is easy to install the sealing mechanism, but there is a problem that a very large space is required to open and close the lid. .

In order to reduce the opening / closing space of the lid body, it is effective to open / close the lid body in the circumferential direction along the peripheral wall of the dryer main body. In this case, for example, When the seal mechanism is provided around the lid, it is necessary to prevent the seal mechanism from opening and closing while sliding on the peripheral wall of the dryer body, which makes it difficult to provide the seal mechanism. In order to provide a sealing mechanism and operate it stably, after moving the lid along the peripheral wall of the dryer main body immediately before the opening, the lid is moved through the sealing mechanism. It is necessary to close the lid by pressing against the opening side and to open the lid in the opposite way, but for that purpose, there was a problem that the opening / closing mechanism of the lid becomes very complicated.

[0005]

[Problems to be solved by the device]

 The technical problem of the present invention is that the lid can be opened and closed in the circumferential direction along the peripheral wall of the dryer main body, so that the opening and closing space of the lid can be reduced and the lid can be opened and closed to provide a sealing mechanism. It is to provide a dryer that does not require a complicated mechanism. Another technical problem of the present invention is that it is not necessary to press the lid body against the dryer main body to seal the periphery of the lid body, thereby making it easy and easy to open and close the lid body. To provide.

[0006]

[Means for Solving the Problems]

 In the dryer of the present invention for solving the above-mentioned problems, a rotor that holds and rotates a work is disposed inside a dryer body that is a horizontal cylinder, and the work provided on the top of the dryer body is taken in and out. In a dryer for a work in which a lid is openably and closably attached to an opening for opening the lid, the lid is held openably and closably in a circumferential direction along a peripheral wall of the dryer main body, and the periphery of the lid and the above A sealing member that is attached to one of the openings around the opening of the dryer body and seals between the two is formed of a hollow member that is airtight and has elasticity that expands due to the inflow of air. Then, the seal member is configured by connecting an air supply / exhaust device for feeding / exhausting air to / from the hollow portion inside the seal member.

In the above dryer, it is desirable that the cross-sectional shape of the seal member is substantially concave and the flat portion of the lower surface thereof is attached either around the lid or around the opening of the dryer main body. It is possible to have various cross-sectional shapes that are enormous in feeding air into the hollow portion of the seal member. Also, the lid attached to the top of the dryer main body can be opened and closed in the circumferential direction along the peripheral wall of the dryer main body by attaching it to the tip of the arm that rotates around the center axis of the cylindrical dryer main body. Can be free.

[0008]

[Action]

 When rotating and drying the rotor provided in the drying chamber, the lid is moved to a position that covers the opening along the peripheral wall of the dryer main body, and in that state, the air supply / discharge device to the hollow part of the seal member. When air is pressure-fed by, the sealing member expands to seal between the lid and the dryer main body, and at the same time, the lid is held at that position. When the lid is opened, the sealing member is reduced by removing the air from the sealing member, so that the lid is released from the hold and the lid can be moved along the peripheral wall of the dryer body. become.

As described above, the opening / closing operation of the lid body can be performed only by moving the lid member in the circumferential direction along the outer surface of the peripheral wall of the dryer main body by reducing the size of the sealing member. It can be very small. Further, since the sealing mechanism seals between the lid and the opening of the dryer main body by the bulging of the sealing member as described above, the lid should be pressed against the dryer main body through the seal member. It is not necessary to provide such a mechanism, the opening / closing mechanism of the lid is simplified, and the opening / closing operation of the lid is also simplified and facilitated.

[0010]

【Example】

 1 and 2 show an embodiment of a rotary work dryer to which a lid sealing mechanism of the present invention is applied, in which a horizontal cylindrical dryer main body 1 is horizontally driven by an electric motor (not shown). A rotor 2 that is driven to rotate around an axis is provided. The rotor 2 holds a required number of disk-shaped works 3 and rotates them at a high speed, so that water drops attached to the works 3 can be shaken off and dried by centrifugal force.

An opening 5 for taking in and out the work 3 is provided on the upper part of the dryer main body 1, and a lid 6 having an intake port 7 with a filter 8 is openably and closably attached. The lid body 6 can be opened and closed in the circumferential direction along the outer surface of the peripheral wall 1a of the dryer body 1 by being attached to the tip of an arm 9 which rotates around the central axis of the dryer body 1 having a cylindrical shape. It is the one. For automatically opening and closing the lid body 6, as shown in FIG. 1, a fluid pressure cylinder 10 in which a tip of a piston rod is attached to a part of the lid body 6 can be used as required. Further, an exhaust port 11 for discharging the high-humidity air used for drying together with water is provided in the lower part of the dryer main body 1. A fan for exhaust may be connected to the exhaust port 11 to forcefully exhaust the fan.

Between the periphery of the lid 6 and the periphery of the opening 5 of the dryer body 1, a seal member 12 is attached to the periphery of the lid 6 to seal the two. The seal member 12 is arranged so as to surround the four circumferences of the opening 5, and as shown in FIG. 4, it has a hollow shape with a substantially concave cross section, is airtight, and allows air to enter. It is formed of an elastic member that expands due to, and the flat portion of the lower surface thereof is attached to the lower surface of the lid body 6. Although not shown, the seal member 12 is connected to an air supply / exhaust device for feeding / exhausting air into / from the hollow portion 13 therein.

In the illustrated embodiment, the seal member 12 is attached to the lid body 6 between the periphery of the lid body 6 and the periphery of the opening 5 of the dryer body 1. It can also be attached around the opening 5 of the body 1.

When the work 3 is dried by the dryer having the above structure, as shown in FIG. 3, the work 3 is held by the rotor 2 with the lid 6 open, and then shown in FIG. By closing the lid 6 and rotating the rotor 2 at a high speed, the work 3 is drained and dried.

When the lid 6 is closed as shown in FIG. 1 when performing this rotary drying, the lid 6 is placed in the arm 9 while the lid 6 is reduced by removing air from the seal member 12. It is sufficient to move to the position covering the opening 5 along the peripheral wall of the dryer main body 1 by the rotation of, and in that state, air is fed under pressure to the hollow portion 13 of the seal member 12 by the air supply / discharge device. As a result, the seal member 12 is enlarged, and the space between the lid body 6 supported by the arm 9 and the dryer body 1 is sealed. Further, when the lid 6 is opened to the state as shown in FIG. 3 after the rotary drying, the sealing member 12 is reduced by removing the air in the sealing member 12, so that the sealing member 12 is reduced along the peripheral wall of the dryer main body 1. The lid 6 can be moved without any trouble.

Therefore, the sealing member 12 seals the periphery of the opening 5 by enlarging the tip of the sealing member 12 toward the opposing sealing surface side by the introduction of air by the air supply / exhaust device, and reduces the size by discharging air. However, it is necessary to retract so that it does not come into contact with the opposing sealing surface.

As is apparent from the above description, the opening / closing operation of the lid body 6 is performed only by the circumferential movement along the outer surface of the peripheral wall of the dryer main body 1 due to the reduction of the sealing member 12. Since it is not necessary to press the lid 6 against the opening 5 side in order to stabilize the seal, not only the mechanism for opening and closing the lid 6 is very simple, The opening and closing space may be very small. Further, since the sealing mechanism seals between the lid 6 and the opening 5 of the dryer main body 1 by the bulging of the sealing member 12 as described above, the lid 6 is tightened for sealing. There is no need to perform any operation, and the opening and closing of the lid is extremely easy and easy.

[0018]

[Effect of device]

 As described in detail above, according to the present invention, the lid mechanism can be opened and closed in the circumferential direction along the peripheral wall of the dryer main body, thereby providing a seal mechanism while reducing the opening and closing space of the lid body. Therefore, it is possible to obtain a lid sealing mechanism that does not require the lid opening / closing mechanism to be complicated, and it is not necessary to press the lid on the dryer body side to seal the periphery of the lid. Thus, it is possible to obtain the lid sealing mechanism of the work dryer in which the opening / closing operation of the lid is simple and easy.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a work dryer according to the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is a vertical cross-sectional view showing a state in which a lid is opened.

FIG. 4 is a partially enlarged sectional view showing details of a sealing mechanism.

[Explanation of symbols]

 1 Dryer Main Body 1a Peripheral Wall 2 Rotor 3 Work 5 Opening 6 Lid 9 Arm 12 Sealing Member 13 Hollow Part

Claims (3)

[Scope of utility model registration request] 1. Inside a dryer main body having a sideways cylindrical shape,
In a work dryer in which a rotor that holds and rotates a work is disposed, and a lid is attached to an opening provided in the upper part of the dryer main body for taking in and out the work, the lid is dried. A seal member, which is openably and closably held in the circumferential direction along the peripheral wall of the dryer main body, is attached to one of the periphery of the lid and the periphery of the opening of the dryer main body to seal between the two. , A hollow, airtight, and elastic member that expands when air is fed, and an air supply / discharge device that feeds / discharges air to / from the hollow portion is connected to the sealing member. A dryer characterized by: 2. The dryer according to claim 1, wherein the seal member has a substantially concave cross-sectional shape, and the flat portion of the lower surface thereof is either around the lid or around the opening of the dryer main body. Installed, characterized by a dryer. 3. The dryer according to claim 1 or 2, wherein a lid attached to an upper portion of the dryer main body is attached to a tip of an arm that rotates around a central axis of the cylindrical dryer main body. As a result, the dryer can be opened and closed in the circumferential direction along the peripheral wall of the dryer body.