JP2915402B1 - Centering equipment for piping members - Google Patents

Abstract

A heater is attached to the outer periphery of an outer ring, that is, the outer periphery of a cylindrical portion, and the heater raises the temperature of an inner ring that is in a thermally isolated state by an O-ring made of a rubber elastic body. In addition, the temperature of the inner peripheral surface of the inner ring cannot be efficiently raised, and the adhesion of foreign substances cannot be effectively prevented. SOLUTION: Flange portions 1b, 2 of pipe members 1, 2 are provided.
ring receiving spaces 1c and 2c formed in an annular shape on each of the abutting end surfaces of b, a seal ring 3 partially received and attached to each of the ring receiving spaces 1c and 2c, and an inner space 4a, and an outer peripheral portion. The centering body 4 includes a centering body 4 that supports the outer peripheral surfaces of the flange portions 1b and 2b by cylindrical portions 4b and 4c protruding on both sides, and a heater 5 housed in an internal space 4a of the body 4. Are elastically adhered to the seal rings 13 slightly projecting from the flange portions 1b and 2b, respectively, to maintain airtightness.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centering device for centering a butt end of a pipe member and maintaining airtightness.

[0002]

2. Description of the Related Art As this type of conventional centering device, for example, the one shown in FIGS. 8 and 9 is known. This centering device includes a pair of piping members 10,
11 is an instrument for centering and connecting while maintaining airtightness, as shown in FIG.
And an O-ring 52 interposed between the inner and outer rings 50 and 51. On both sides of the outer peripheral portion of the outer ring 51, a thin cylindrical portion 5 is provided.
1a and 51b are respectively protruded. This inner ring 50
And the width L ₁ of the central axis line direction of the outer ring 51 is set to the same. On the other hand, flange portions 10a and 11a are fixed to ends of the pair of piping members 10 and 11, respectively.

[0003] Between the two flange portions 10a, 11a,
The inner and outer races 50, 51 having the O-ring 52 mounted thereon are sandwiched therebetween, and the flanges 1 on both sides are sandwiched by cylindrical portions 51a, 51b.
The outer peripheral surfaces of Oa and 11a are supported. In this state, the flange portions 10a and 11a of the pair of piping members 10 and 11 are
The O-ring 52 is clamped by the block 60 of the flange clamping device to clamp the O-ring 52, and the O-ring 52 disposed between the inner and outer rings 50, 51 is connected to the pair of flanges 10a, 10a.
1a is elastically and strongly adhered. A plurality of blocks 60 are provided at predetermined intervals in the circumferential direction, and tighten the pair of flange portions 10a, 11a while reducing the diameter. As a result, the butted ends of the pair of piping members 10 and 11 are aligned and connected while maintaining airtightness.

[0004] Pipe heaters 62 and 63 are attached to the outer periphery of the pipe members 10 and 11, and a tape-shaped heater 61 is also attached to the outer periphery of the tubular portions 51a and 51b. The heater 61 has a function of heating the inner and outer rings 50 and 51 and preventing foreign matter from adhering to the inner peripheral surface of the inner ring 50. For example, recently, in a semiconductor manufacturing apparatus, a mixed gas of dichlorosilane and ammonia is flown, and a silicon nitride film (Si ₃ N) is formed on a silicon wafer.
₄ ) to form the joined pipe members 10,
11 or the temperature of the inner surface of the inner ring 50 decreases (less than about 100 ° C)
As a result, ammonium chloride (NH ₄ Cl) adheres, and a gas flowing inside generates flow resistance. For this reason, not only the piping members 10 and 11 are heated by the piping heaters 62 and 63, but also the tubular portions 51a and 51b are heated to 120 to 150 ° C. by the heater 61, so that the inner surface temperature is equal to or higher than a predetermined value. (About 100 ° C. or higher).

[0005] By the way, as described in, for example, Japanese Utility Model Publication No. 7-25508,
The support block, the coupling block, and the coupled block are arranged at predetermined intervals via a link member that is swingably coupled by a pin, and the coupling block located at the end and the coupled block are connected to the coupling block. Each of the blocks 60 which are rotatably supported and fastened and connected by screwing a male screw portion of a male screw member having a knob portion at a base end thereof to a female screw portion of the block to be connected, is arranged in an endless annular shape.
Flanges 10a, 11 butted by the inner side surfaces of
a is clamped.

However, in such a conventional centering device for piping members, a heater 61 is attached to the outer periphery of the outer ring 51, that is, the outer periphery of the cylindrical portions 51a and 51b.
The O-ring 52 made of a rubbery elastic body is
As a result, the temperature of the inner ring 50 in a thermally isolated state is increased, so that the inner peripheral surface of the inner ring 50 is efficiently heated (100
(Approximately ° C.), and there is a technical problem that foreign substances cannot be effectively prevented from adhering, as indicated by reference numeral N in FIG.

The width L ₁ of the inner ring 50 and the outer ring 51 of the centering device in the central axis direction is set to be the same, and both side surfaces of the inner ring 50 and the outer ring 51 are formed by the elastic force of the O-ring 52. , 11 of each flange portion 10a, 1
1a is prevented, and a small gap (about 0.1 mm) is formed.
This is because heat conduction from 0a, 11a to the inner ring 50 is suppressed. That is, the flange portions 10a and 11a are heated by the piping heaters 62 and 63, but the temperature rise of the inner ring 50 and the outer ring 51 is caused by the gap between each flange portion 10a and 11a and both side surfaces of the inner ring 50 and the outer ring 51. Can hardly expect.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of such conventional technical problems, and has the following configuration. According to the first aspect of the present invention, each of the flange portions 1b and 2b of the pair of piping members 1 and 2 is annularly interposed between butted end surfaces of the pair of piping members 1 and 2 and is sealed by a seal ring.
b, 2b, a centering device for pipe members that hermetically seals between the pipe members 1 and 2b.
Ring accommodating spaces 1c and 2c formed in an annular shape on each of the butting end surfaces of the ring accommodating surfaces 2c;
c, each having a seal ring 3 partially received and attached thereto, and an inner space 4a, and cylindrical portions 4b, 4c projecting from both sides of the outer peripheral portion to support the outer peripheral surfaces of both flange portions 1b, 2b. A centering main body 4 and a heater 5 housed in an internal space 4a of the main body 4 are provided. A centering device for a piping member, wherein airtightness is maintained. In the invention according to claim 2, the centering body 4 is U-shaped.
2. The centering device for a piping member according to claim 1, wherein the main body 4 has a tubular section 4b and 4c, respectively. According to the third aspect of the present invention, the flange portions 1b and 2b of the pair of pipe members 1 and 2 are annularly interposed between the butting end surfaces of the pair of piping members 1 and 2, and the seal ring is hermetically sealed between the flange portions 1b and 2b. In the centering device of the piping member to be made,
It has ring receiving spaces 14d, 14e formed independently on both side surfaces in a ring shape, and has both flange portions 1b, 14c formed by cylindrical portions 14b, 14c protruding on both sides of the outer peripheral portion.
A centering main body 14 for supporting the outer peripheral surface of the ring 2b, a seal ring 13 partially received and attached to each of the ring accommodating spaces 14d and 14e, and a cylindrical portion 14b,
A sealing ring 13 slightly protruding from both side surfaces of the centering body 14 is elastically adhered to the end surfaces of the flange portions 1b and 2b to maintain airtightness. A centering device for a piping member. The invention according to claim 4 is annularly interposed between butted end surfaces of the flange portions 1b and 2b of the pair of piping members 1 and 2 provided with the piping heaters 62 and 63,
In a centering device for a piping member that hermetically seals a gap between each flange portion 1b and 2b with a seal ring,
Inner ring 50, and cylindrical portions 51a, 51 protruding on both sides of the outer peripheral portion
b, an outer ring 51 for supporting the outer peripheral surfaces of both flange portions 1b, 2b, and a seal ring 52 interposed between the inner and outer rings 50, 51. The thickness of the inner ring 50 in the central axis direction is A. The thickness of the outer ring 51 in the center axis direction is B, and the thickness of the outer ring 51 in the center axis direction in the free mounting state of the seal ring 52 is C, C>A> B.
A seal ring 52 slightly projecting from both side surfaces of the outer race 51 in a state of being in close contact with the end surfaces of the flanges 1b, 2b.
A centering device for a piping member, wherein the centering device is elastically adhered to an end face of the pipe member 2b and airtightness is maintained.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 show a first embodiment of a pipe member centering device. In the figure, reference numerals 1 and 2 respectively indicate piping members,
The metal flanges 1b and 2b for butting are fixed to the ends of the tubular members 1a and 2a by welding. Ring receiving spaces 1c and 2c are formed in annular shapes at the butted end surfaces of the flange portions 1b and 2b, respectively. The ring accommodating spaces 1c and 2c are annularly opened at the abutting end surfaces of the flange portions 1b and 2b with a width slightly smaller than the diameter of the O-ring 3 serving as a seal ring, and the most part of the rubber-made elastic O-ring 3 is provided. It has the size to accept as closely as possible. Piping heaters 62 and 63 are attached to the outer periphery of the tubular members 1a and 2a, respectively.

On the other hand, the centering device has an inner space 4a having a U-shaped cross section, and has a metal-made centering body 4 having an annular shape as a whole, and cylindrical portions 4b formed on both sides of an outer peripheral portion of the body 4. , 4c. The inner diameter of the main body 4 substantially matches the inner diameters of the cylindrical members 1a, 2a and the flanges 1b, 2b. Internal space 4 of this centering body 4
A string-shaped heater 5 is wound and accommodated in a, and a lead wire of the heater 5 is connected to an appropriate power source (not shown). 4d is a cutout for passing the lead wire of the heater 5.

In such a centering device, the centering body 4 is sandwiched between the flange portions 1b and 2b of the pair of pipe members 1 and 2, and the outer periphery of the flange portions 1b and 2b is received inside the cylindrical portions 4b and 4c. And a pair of piping members 1
Perform the alignment of 2. And, a pair of flange portions 1b,
2b is clamped by the block 60 of the flange clamping device and joined. In this state, each O-ring 3 elastically adheres to both side surfaces of the centering main body 4, and airtightness is maintained. In addition, the lead wire of the heater 5 is drawn out from between the blocks 60 of the flange clamping device that are adjacent in the circumferential direction, and is connected to a power supply (not shown).

By energizing the heater 5,
The inner peripheral portion of the centering body 4 is directly heated from the inside. As a result, the inner peripheral surface of the centering main body 4 is sufficiently heated to a predetermined temperature (100 ° C.) while saving energy, so that foreign substances can be prevented from adhering to the inner peripheral surface of the centering main body 4. In particular, in a semiconductor manufacturing apparatus, a mixed gas of dichlorosilane and ammonia is caused to flow, and a silicon nitride film (Si) is formed on a silicon wafer.
₃ N ₄ ), ammonium chloride (NH ₄ C)
1) is prevented from adhering and causing flow resistance.

FIGS. 4 and 5 show a second embodiment of a piping member centering device. The same reference numerals are given to substantially the same functional portions as those in the first embodiment, and the description thereof will be omitted. In the centering device for a pipe member according to the second embodiment, a centering body 14 made of a solid metal,
Cylindrical portions 14b, 14 formed on both sides of the outer peripheral portion of the main body 14;
c. The main body 14 has an annular shape,
It substantially matches the inner diameters of the tubular members 1a, 2a and the flanges 1b, 2b. However, unlike the first embodiment,
The ring accommodating spaces 1c and 2c are not formed in the flange portions 1b and 2b.

On both side surfaces of the main body 14, annular ring receiving spaces 14d and 14e are formed independently of each other with their positions shifted in the radial direction. Ring accommodation space 14
Each of d and 14e has a ring-like opening having a width slightly smaller than the diameter of the O-ring 13 which is a sealing ring made of a rubbery elastic body on each side surface, and receives most of the O-ring 13 as tightly and individually as possible. Have. A tape-shaped electric heater 15 is wound around the outer peripheral surfaces of the cylindrical portions 14b and 14c of the centering body 14, and the heater 15 is connected to an appropriate power supply (not shown).

In such a centering device, the centering body 14 is sandwiched between the flange portions 1b and 2b of the pair of piping members 1 and 2, and the outer periphery of the flange portions 1b and 2b is received inside the cylindrical portions 14b and 14c. . Then, the pair of flange portions 1b and 2b are pressed by the block 60 of the flange clamping device and joined. In this state, the O-rings 13 slightly projecting from both side surfaces of the centering main body 14 elastically adhere to the end surfaces of the flange portions 1b and 2b, and airtightness is maintained. The lead wire of the heater 15 is drawn out from between the blocks 60 of the flange clamping device that are adjacent in the circumferential direction, and is connected to a power source.

When the heater 15 is energized, the outer peripheral portion of the centering main body 14 is heated, and the ring accommodating spaces 14d and 14e are independently formed to conduct heat through the centering main body 14 having a solid shape. The part is directly heated almost uniformly. As a result, the inner peripheral surface of the centering main body 14 is sufficiently heated to a predetermined temperature (about 100 ° C.) while saving energy, so that it is possible to prevent foreign matter from adhering to the inner peripheral surface of the centering main body 14, The same operation as that of the first embodiment can be obtained.

FIGS. 6 and 7 show a third embodiment of a piping member centering device. The same reference numerals are given to substantially the same functional portions as those in the first embodiment, and their description is omitted. Note that the types of components of the third embodiment are substantially the same as those of the conventional example, and unlike the first embodiment, the ring receiving spaces 1c and 2c are not formed in the flange portions 1b and 2b. In the centering device for a pipe member according to the third embodiment, a metal inner ring 50, a metal outer ring 51, and a rubber elastic seal ring interposed between the inner and outer rings 50, 51 are provided. And an O-ring 52.
Thin cylindrical portions 51a, 51b are provided on both sides of the outer peripheral portion of the outer ring 51.
Is protruding. The inner diameter of the inner ring 50 is the cylindrical member 1a,
2a and the inner diameters of the flange portions 1b and 2b.

As shown in FIG. 7, the thickness of the inner ring 50 in the center axis direction is A, the thickness of the outer ring 51 in the center axis direction is B, and the thickness of the O-ring 52 in the center axis direction when the O-ring 52 is freely mounted. (Diameter) is set as C, and a relationship of C>A> B is set,
The thickness B of the outer ring 51 in the central axis direction is set smaller than the thickness A of the inner ring 50 in the central axis direction. This outer ring 51
A tape-like heater 15 is wound around and attached to the outer peripheral surfaces of the cylindrical portions 51a and 51b, and the heater 15 is connected to an appropriate power supply (not shown).

Such a centering device has an O-ring 5 between flange portions 1b and 2b of a pair of piping members 1 and 2.
2 between the inner and outer rings 50, 51,
a, 51b receive the outer periphery of the flange portions 1b, 2b. Then, the pair of flange portions 1b and 2b are pressed by the block 60 of the flange clamping device and joined. In this state, the O-rings 52 slightly projecting from both side surfaces of the inner and outer races 50, 51 are formed by the respective flange portions 1b, 2b.
Elastically adheres to the end face of the airbag, and airtightness is maintained. Heater 1
The lead wire No. 5 is drawn out from between the blocks 60 of the flange clamping device which are circumferentially adjacent to each other and connected to a power source.

When the centering device is assembled, both sides of the outer ring 51 are prevented from being in close contact with the flanges 1b and 2b of the pipe members 1 and 2 by the elastic force of the O-ring 52. Are formed (about 0.1 mm), but on both sides of the inner ring 50, the thickness A of the inner ring 50 in the central axis direction is set to be larger than the thickness B of the outer ring 51 in the central axis direction. It adheres well to each of the flange portions 1b and 2b. That is, the elastically deformed portion of the O-ring 52 is
1 penetrates into the gaps between both side surfaces of the flange 1 and the flange portions 1b and 2b. Thereby, each of the tubular members 1a, 2a and the flange portions 1b, 2b heated by the pipe heaters 62, 63 are provided.
Heat is promoted from the inner ring 50 to the inner ring 50, and the inner peripheral surface of the inner ring 50 is sufficiently heated to a predetermined temperature (about 100 ° C.) while saving energy. Thus, substantially the same operation as in the first embodiment can be obtained. As described above, since the inner ring 50 is heated by the piping heaters 62 and 63, the heater 15 attached to the tubular portions 51a and 51b can be omitted.

[0021]

As will be understood from the above description,
According to the present invention, the following effects can be obtained. According to the invention according to the first aspect, in the centering device for centering and airtightly maintaining the butted ends of the pair of pipe members, the heater is housed in the inner space of the centering main body. Instead, the inner peripheral surface of the centering body can be directly heated. As a result, it is possible to suppress foreign substances from adhering to the inner peripheral surface of the centering body while saving energy.

According to the third aspect of the present invention, in the same centering device, annular ring receiving spaces are formed independently on both side surfaces of a solid centering main body, and the heater is provided on the outer peripheral surface of the cylindrical portion. , The inner peripheral surface of the centering main body can be heated by conducting heat through the single centering main body without using a seal ring. As a result, it is possible to suppress the attachment of foreign matter to the inner peripheral surface of the centering main body while saving energy, and it is possible to cope only with processing on the centering main body, thereby simplifying the structure.

According to the fourth aspect of the present invention, since the same centering device is formed with the seal ring interposed between the inner and outer rings, the heat transfer from the outer ring side to the inner ring is not good. The inner ring is in close contact with the end surface of each flange portion while the seal ring slightly protruding from both side surfaces of the inner ring is in close contact with the end surface of each flange portion. Can be heated by conducting heat toward it. As a result, it is possible to suppress adhesion of foreign matter to the inner peripheral surface of the inner ring while saving energy.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a half part of a centering device for a pipe member according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a centering device.

FIG. 3 is a sectional view taken along line III-III of FIG. 2;

FIG. 4 is a sectional view showing a half part of a centering device for a piping member according to a second embodiment of the present invention.

FIG. 5 is a sectional view similar to FIG. 3 showing the centering device.

FIG. 6 is a sectional view showing a half part of a centering device for a piping member according to a third embodiment of the present invention.

FIG. 7 is a sectional view showing a half part of the centering device.

FIG. 8 is a sectional view showing a half part of a conventional centering device for piping members.

FIG. 9 is a sectional view showing a half part of the centering device.

[Explanation of symbols]

1, 2: piping member, 1b, 2b: flange portion, 1c, 2
c: ring accommodating space, 3, 13, 52: O-ring (seal ring), 4: centering body, 4a: internal space,
4b, 4c: tubular portion, 5, 15: heater, 14: centering body, 14b, 14c: tubular portion, 14d, 14
e: ring accommodation space, 50: inner ring, 51: outer ring, 51
a, 51b: cylindrical part, 62, 63: piping heater.

Claims (4)

(57) [Claims] 1. A flange ring (1b, 2b) of a pair of piping members (1, 2) is annularly interposed between butting end surfaces of flange portions (1b, 2b), and each flange portion (1b, 2b) is formed by a seal ring.
In a centering device for a pipe member for hermetically sealing the space between the pipe members (1b, 2),
b) ring accommodating spaces (1c, 2c) formed on each of the butted end surfaces, and ring accommodating spaces (1c, 2c).
c, 2c) and a flange (4b, 4c) having an internal space (4a) and a cylindrical portion (4b, 4c) protruding on both sides of the outer peripheral portion. A centering body (4) for supporting an outer peripheral surface of the (1b, 2b); and a heater (5) housed in an internal space (4a) of the body (4).
A centering device for a piping member, characterized in that both side surfaces are elastically closely contacted with seal rings (3) slightly protruding from the flange portions (1b, 2b), thereby maintaining airtightness. 2. The centering body (4) has a U-shaped cross section, and cylindrical portions (4) are formed on both sides of the outer periphery of the body (4).
b, 4c) is formed.
Centering device for piping members. 3. A flange ring (1b, 2b) of a pair of pipe members (1, 2) is annularly interposed between butting end surfaces of flange portions (1b, 2b), and each flange portion (1b, 2b) is formed by a seal ring.
A centering device for a pipe member that hermetically seals the space between the ring member and a ring-shaped receiving space (14d, 14e) which is formed in a solid shape on both sides and is formed independently on both sides, and protrudes on both sides of the outer peripheral portion. Cylindrical portions (14b, 14
c) a centering body (14) for supporting the outer peripheral surfaces of both flange portions (1b, 2b), and a seal ring (13) which is partially received and attached to each of the ring receiving spaces (14d, 14e). And the cylindrical part (14b, 1
4c) a heater (15) provided on the outer peripheral surface;
The centering of a piping member characterized in that each seal ring (13) slightly projecting from both side surfaces of the centering body (14) elastically adheres to the end surface of each flange portion (1b, 2b) to maintain airtightness. apparatus. 4. A pair of piping members (1, 2) provided with piping heaters (62, 63) are annularly interposed between butting end surfaces of flange portions (1b, 2b), and each flange is formed by a seal ring. In a centering device for a pipe member for hermetically sealing the space between the inner ring (5b) and the inner ring (5b),
0) and cylindrical portions (51a, 51) protruding on both sides of the outer peripheral portion.
b) has an outer ring (51) for supporting the outer peripheral surfaces of both flange portions (1b, 2b), and a seal ring (52) interposed between the inner and outer rings (50, 51). 50> A, the thickness of the outer ring (51) in the central axis direction is B, and the thickness of the outer ring (51) in the central axis direction when the seal ring (52) is freely mounted is C, where C> A. > B, the seal ring (52) slightly protruding from both side surfaces of the outer ring (51) with the inner ring (50) in close contact with the end surface of each flange (1b, 2b). 2
b) A centering device for a piping member, wherein the centering device elastically adheres to an end surface of the piping member to maintain airtightness.