JP2912520B2 - Glass substrate storage cassette - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate accommodating method for accommodating glass substrates separately so as not to contact each other.
It relates to a cassette for use .

[0002]

2. Description of the Related Art In handling various glass substrates,
It is necessary to move the substrates into and out of the cassette so as not to contact each other.

[0003] A cassette widely used for this purpose is formed by forming a pair of opposing side surfaces of a box-shaped frame with grooved side plates made of all-resin, and mounting a substrate between corresponding grooves of both side plates. It is designed to be able to enter and exit and accommodate. There are various shapes and designs of the grooved side plates, but each basically has a shape in which a number of rib-shaped shelf pieces protrude in parallel from the back plate of the side plate at a predetermined pitch. . The gap between the adjacent rib-shaped shelf pieces becomes a groove, and the substrate enters and exits there,
Will be accommodated.

[0004] This type is disclosed in Japanese Patent Application Laid-Open Nos. 2-295150 and 3-13 filed by the present applicant.
No. 3,152, JP-A-3-133153, JP-A-3-268343, JP-A-3-268344, JP-A-4-245453, and the like.

Japanese Patent Application Laid-Open No. 62-247328 discloses that a holding container formed of a polyetheretherketone resin is used as a holding container in the production of a glass substrate for a liquid crystal display. -24732
No. 9 discloses that a holding container for holding a thin film semiconductor substrate for driving a surface display body is made of a polyetheretherketone resin.

[0006]

Since the conventional substrate cassette is made of all resin including the grooved side plate, the width of the grooved side plate must be wide (for example, in order to secure the strength to support the weight of the substrate). 100 mm), and the number of sheets per side is also required to be 3-4. As a result, the weight is inevitably increased despite being made of resin.

Since the grooved side plate is made of resin,
The transistor is charged when the substrate is moved in and out or transported, and particularly when the substrate is a glass substrate for a TFT liquid crystal, the transistor may be damaged by static electricity.

Regarding the latter problem of charging, it is conceivable to form the grooved side plate of the cassette using a resin component in which conductive fillers such as metal fibers, metal particles, carbon fibers, and carbon particles are blended. In addition, the grooved side plate obtained by molding with a conductive filler is liable to generate dust such as abrasion powder due to friction with the substrate when the substrate is accommodated. It lacks suitability as a cassette.

It is conceivable that all the grooved side plates of the members constituting the substrate cassette are made of metal, but in this case, the substrate directly contacts the rib-shaped shelf of the grooved side plate made of metal. Therefore, dust such as abrasion powder is generated due to friction with the substrate. In addition, when the grooved side plate is made of metal, current flows at once when it comes into contact with a charged object, and there is a risk of causing a circuit failure such as transistor breakdown.

[0010] The present invention is, in such a background under, moth
Narrowing the width of the grooved side plate for supporting the glass substrate and have the requisite strength even when the minimum necessary the installation number per cassette 1 side, yet with effectively prevent charging during glass substrate handling, even charged without causing circuit failure to be done slowly in a range of moderate attenuation even further provides a hard glass substrate accommodating cassette which produce dust, such as abrasion powder by the friction between the glass substrate The purpose is to do so.

[0011]

SUMMARY OF THE INVENTION The glass substrate housing of the present invention is provided.
The cassette for use is formed in a box shape by a frame (1) and grooved side plates (2), (2), and grooved side plates (2), (2) disposed on a pair of opposing side surfaces of the box shape. in the corresponding cassette so as to accommodate a glass substrate (O) between the grooves of), as the grooved side plate (2), the cassette
When the inner surface side and outer surface side of the
Both sides have a metal body (M) as a skeletal material between them
The chair is arranged to be exposed from the back, and the inside and outside
The resin body (R) on the surface side has a predetermined length in the length direction of the metal body (M).
The narrow width of the structure connected through the through holes provided at intervals
A metal-resin composite plate having a structure in which rib-shaped shelf pieces (22) made of a resin body (R) project parallel to the inside of the cassette at a predetermined pitch from a back portion (21) of a flat plate. The metal-resin composite plate is made of a resin body (R) integrated with the metal body (M) by injection-molding a resin using the metal body (M) as an outsert or insert. It is assumed that.

Hereinafter, the present invention will be described in detail.

The cassette for accommodating a glass substrate according to the present invention is formed in a box shape by a frame (1) and grooved side plates (2), (2), and a grooved side plate (1) is formed on a pair of opposing side surfaces of the box shape. 2) and (2) have a basic configuration.

The frame (1) comprises a bottom frame (11),
Ceiling frame (12), and sheet-likeGlass substrate
(O) Receiving frame as stopper to catch
(13). Replacement for receiving frame (13)
The frame at the innermost part of the cassette or the innermost part of the cassette.
Provide appropriate stopper means on the grooved side plate (2).
Can also be. Even if the material of the frame (1) is resin
It may be metal.

The number of grooved side plates (2), (2) is
A minimum of two per side (ie one side) of the box, usually 3
If the cassette is large, the number may be four or more.

In the present invention, the inner side and the outer side of the cassette are formed of a resin body as the grooved side plate (2).
(R) and between them as a skeletal material
Arranged so that metal body (M) is exposed from the side or back
And the inner and outer resin bodies (R) are metal bodies
(M) through the through holes provided at predetermined intervals in the length direction.
From the back of the narrow flat plate (21)
A metal-resin composite plate having a structure in which rib-shaped shelf pieces (22) made of a resin body (R) project in parallel at a predetermined pitch toward the inside of the cassette is used.

Here, examples of the metal body (M) include stainless steel and aluminum.

Examples of the resin for the resin body (R) include polyetheretherketone, polyetherimide, polyimide, polyamideimide, polyphenylenesulfide,
Polyarylate, polysulfone, polyallylsulfone,
Examples include polyether sulfone, polyphenylene ether sulfone, modified polyphenylene oxide, polyether amide, perfluoroalkoxy-substituted polytetrafluoroethylene, polypropylene, polybutylene terephthalate, polycarbonate, and acrylonitrile-based polymer.

When a high degree of antistatic property is particularly required, it is desirable to use a water-absorbing engineering plastic such as ethylene-vinyl alcohol copolymer or polyamide as the resin body (R). In this case, it is desirable that the water content be increased to, for example, about 0.5 to 20%, particularly about 1 to 10%, by allowing the water to be naturally absorbed or actively brought into contact with the water after molding.

Metal-tree constituting the grooved side plate (2)
The resin composite plate is manufactured by forming a resin body (R) integrated with the metal body (M) by injection molding a resin using the metal body (M) as an outsert or an insert.

The rib-shaped shelf (22) of the grooved side plate (2)
Width is as narrow as possible (for example, 50
is set to mm or less).

The rib-shaped shelf (2)
It is preferable that 2) is inclined such that it becomes higher toward the free end side. The inclination angle is, for example, 2 ° to 30 °.
About ゜, especially about 3 ゜ to 15 ゜. In addition, it is desirable that the shelf surface of the shelf piece (22) is formed in a chevron structure such that the central portion is slightly higher than both end sides thereof. If these measures are taken, the friction when housing the glass substrate (O) is significantly reduced.

In place of the inclined structure or the chevron structure as described above, it is preferable that a convex bulge (h) is formed on the free end side of the rib-shaped shelf piece (22).

It is desirable that the surface of the back wall (21) of the grooved side plate (2) is also slightly inclined. Instead of such an inclination, it is also desirable to design the back portion (21) to have a structure in which the center portion protrudes about 0.5 to 5 mm toward the inside of the cassette from both ends. When these measures are taken, the contact area with the edge of the glass substrate (O) is reduced,
The generation of wear debris is more completely prevented.

The cassette having the above structure includes various glass bases.
A plate (O) is accommodated.

[0026]

In the cassette for accommodating a glass substrate according to the present invention, the grooved side plate (2) serves as the inner surface of the cassette and
The outer surface side is formed of a resin body (R) and between them.
Metal body (M) as skeletal material is exposed from the side or back
And the resin body on the inner side and the outer side
(R) are provided at predetermined intervals in the length direction of the metal body (M).
A rib-shaped shelf (2) made of a resin body (R) starts from the back wall (21) of a narrow flat plate having a structure connected through a certain through hole.
2) uses a metal-resin composite plate having a structure that extends in parallel toward the inside of the cassette at a predetermined pitch.

Therefore, the required strength can be obtained even if the width of the grooved side plate (2) for supporting the substrate is made narrow and the number of sheets installed on one side of the cassette is minimized. The resin body (R) and the metal body (M) do not separate.
No.

Further, by the presence of the metal body (M) and the selection of the resin body (R), the charging during the handling of the glass substrate (O) is effectively prevented, and even if the charging is performed, the decay time is set to 0.1. Since the time is maintained for a predetermined time such as 5 seconds or 1 second, the attenuation is performed slowly within an appropriate range, and there is no possibility of causing a circuit failure. From the exposed part of the metal body (M)
It is easy to take a source. By the way, when the grooved side plate (2) is made of all-metal, a current flows at once when it comes into contact with a charged object.

The inner surface of the cassette is a resin body (R).
The rib-shaped shelf (22) is also made of a resin body (R).
Therefore, dust such as abrasion powder hardly occurs even by friction with the glass substrate (O) .

[0030]

The present invention will be further described with reference to the following examples.

Embodiment 1 FIG. 1 is a partial side view showing an example of a grooved side plate (2) of the present invention, and a part of the side plate is cut out. FIG. 2 shows FIG.
3 is a cross-sectional view of the grooved side plate (2), and FIG. 3 is a front view of the grooved side plate (2) of FIG. 4 is a front view showing an example of the cassette of the present invention, FIG. 5 is a plan view thereof, and FIG. 6 is a side view thereof.

4 to 6, (1) is a frame, which comprises a bottom frame (11), a ceiling frame (12) and a receiving frame (13). The material of the bottom frame (11) and the ceiling frame (12) is the same as that of the resin body (R) described later. The receiving frame (13) is formed by tightly inserting a metal rod made of SUS304 into a polytetrafluoroethylene extruded rod formed in the axial direction.

Reference numeral (2) denotes a grooved side plate, and three screws per side are fixed between the bottom frame (11) and the ceiling frame (12).

(3) is a handle made of SUS304. Indicated by one-dot chain line (O) is a glass substrate. (4)
This is means for preventing the glass substrate (O) from sliding down from the opening of the cassette.

The grooved side plate (2) shown in FIGS. 1 to 3 uses SUS304 as an example of a metal body (M) as an outsert and an ethylene-vinyl alcohol copolymer as an example of a resin body (R). Of a metal-resin composite plate obtained by subjecting the resin body to injection molding, and immersed in water after molding to increase the water content of the resin body (R).

The grooved side plate (2) has a structure in which the inner surface and the outer surface of the cassette are formed of a resin body (R), and a metal body (M) is arranged between them as a frame material. Have. Inner and outer resin bodies (R)
Are connected through through holes provided at predetermined intervals in the length direction of the metal body (M).

The grooved side plate (2) is
It has a structure in which rib-shaped shelf pieces (22) project in parallel from the back part (21) toward the inside of the cassette at a predetermined pitch. The width of the back part (21) is 40 mm, and the shelves (2
The width of 2) is set to 24 mm.

The rib-shaped shelf (22) of the grooved side plate (2)
Is tilted so that its free end is higher than the base end, and the tilt angle is set to 5 °. Shelf pieces (2
The tip of 2) is rounded. The shelf surface of the shelf piece (22) is formed in a chevron structure such that the central portion is higher than both end sides, and the inclination angle of the chevron is set to 5 °.

The back wall (21) of the grooved side plate (2) has an inclined structure as shown in FIG. 1 between the grooves of the adjacent rib-shaped shelf pieces (22), (22). .

[0040] The cassette is on relatively light, when accommodating the T FT LCD glass substrate (O) in the cassette,
Since charge prevention is reliably achieved, transistor breakdown can be reliably prevented. Further, the generation of wear powder due to friction caused by contact with the glass substrate (O) is significantly reduced until almost no generation occurs.

Although the case where an ethylene-vinyl alcohol copolymer is used as the resin body (R) has been described above, the resin body (R) may be made of polyetheretherketone, polyetherimide, polyamide, or acrylonitrile. Various engineering plastics having heat resistance and water absorbency, including polymers, can be used.

Embodiment 2 FIG. 7 is a partial side view showing another example of the grooved side plate (2) of the present invention, a part of which is cut away. FIG. 8 is a cross-sectional view of the grooved side plate (2) of FIG. 7, and FIG. 9 is a front view of the grooved side plate (2) of FIG.

The grooved side plate (2) shown in FIGS. 7 to 9 uses an aluminum alloy as an example of a metal body (M) as an outsert and an ethylene-vinyl alcohol copolymer as an example of a resin body (R). It is made of a metal-resin composite plate obtained by injection-molding the united body, and is immersed in water after molding to increase the water content of the resin body (R).

The other structure is basically the same as that of the first embodiment, except that the width of the back wall (21) of the grooved side plate (2) is 30 mm and the width of the shelf piece (22) is 18 mm. Since each is set and an aluminum alloy is used as the metal body (M), the thickness of the outsert is increased compared to the first embodiment using SUS304.

Third Embodiment FIG. 10 is a partial side view showing still another example of the grooved side plate (2) of the present invention, and a part of the side plate is cut out.

In this embodiment, the grooved side plate (2)
The rib-shaped shelf piece (22) is formed so as to extend substantially in the horizontal direction, and a horizontally long bulge (h) is formed on the free end side of the shelf surface of the shelf piece (22).

[0047]

According to the glass substrate accommodating cassette of the present invention, the grooved side plate (2) for supporting the glass substrate (O) is provided.
The required strength can be obtained even if the width of the groove is narrowed and the number of grooved side plates (2) per side of the cassette is set to a minimum.

Further, the presence of the metal body (M) and the selection of the resin body (R) effectively prevent the charging during the handling of the glass substrate (O) , and even if the charging is performed, the decay time is the required time. Since it is maintained, the attenuation is performed slowly within an appropriate range, and there is no possibility of causing a circuit failure. Further, the inner surface side of the cassette is formed of a resin body (R),
Since the shelf-like shelf piece (22) is also made of the resin body (R),
Dust such as abrasion powder is hardly generated even by friction with the glass substrate (O) .

[Brief description of the drawings]

FIG. 1 is a partial side view showing an example of a grooved side plate (2) of the present invention, with a part thereof being cut away.

FIG. 2 is a cross-sectional view of the grooved side plate (2) of FIG.

FIG. 3 is a front view of the grooved side plate (2) of FIG. 1;

FIG. 4 is a front view showing an example of the cassette of the present invention.

FIG. 5 is a plan view of FIG. 4;

FIG. 6 is a side view of FIG. 4;

FIG. 7 is a partial side view showing another example of the grooved side plate (2) of the present invention, a part of which is cut away.

8 is a cross-sectional view of the grooved side plate (2) of FIG.

FIG. 9 is a front view of the grooved side plate (2) of FIG. 7;

FIG. 10 is a partial side view showing still another example of the grooved side plate (2) of the present invention, a part of which is cut away.

[Explanation of symbols]

(1) ... frame, (11) ... bottom frame, (12) ... ceiling frame, (1
3) ... receiving frame, (2) ... grooved side plate, (21) ... back part, (22) ... rib-shaped shelf piece, (3) ... handle, (4) ... slip-off prevention means, (M) ... Metal body, (R) resin body, (O) glass substrate, (h) bulge

Claims (4)

(57) [Claims] 1. A frame (1) and a grooved side plate (2),
The glass substrate (O) is arranged between the corresponding grooves of the grooved side plates (2), (2) arranged on the pair of opposing side surfaces of the box shape in (2). In the cassette, the inner surface of the cassette is used as the grooved side plate (2).
The side and the outer surface are formed of a resin body (R) and
Metal body (M) as skeletal material between the sides or back
From the inner side and the outer side
The oil bodies (R) are provided at predetermined intervals in the length direction of the metal bodies (M).
A rib-shaped shelf piece (22) made of a resin body (R) is directed toward the inside of the cassette at a predetermined pitch from a back wall portion (21) of a narrow flat plate having a structure connected through a through hole formed in the cassette. The use of a metal-resin composite plate having a structure protruding in parallel, and the metal-resin composite plate is formed with the metal body (M) by injection molding a resin using the metal body (M) as an outsert or an insert. A glass substrate storage cassette comprising an integrated resin body (R). 2. The cassette according to claim 1, wherein the rib-shaped shelf piece (22) is inclined so as to become higher toward the free end side. 3. The cassette according to claim 1, wherein an upwardly convex bulge (h) is formed on the free end side of the rib-shaped shelf piece (22). 4. The cassette according to claim 1, wherein the resin body (R) is a molded article of a water-absorbing resin.