JP2911350B2 - Surface treatment method and surface treatment device used therefor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a surface treatment method and a surface treatment apparatus used for the same.

[0002]

2. Description of the Related Art Plating consists of a pre-treatment stage, a plating stage, and a post-treatment stage of plating.
For example, in the case of copper plating (in this case, only the former stage) and nickel plating (all steps are necessary), for example, organic solvent degreasing-boiling degreasing-water washing-electrolytic degreasing-primary washing-secondary washing-copper strike-copper plating- It requires a number of steps of recovery-primary water washing-secondary water washing-acid neutralization-primary water washing-secondary water washing-nickel plating-recovery-primary water washing-secondary water washing-neutralization-water washing-hot water washing-drying. The greatest reason why such a large number of steps are required is that uniform contact between each processing solution and the object to be plated is not sufficiently performed. Moreover, trichloroethylene, which is a representative of the organic solvent used in the degreasing treatment, is marked as a source of pollution, and there is a strong demand for a method that does not use it. Barrel plating is used for plating small items. This plating method is put into practical use as a method for efficiently plating small items by putting a small object of 1/2 to 1/3 of the volume in a barrel and performing degreasing, water washing, plating, and water washing while rotating the barrel. Have been. However, even though the barrel is rotated, it is difficult for the small items in the barrel to come into contact with the plating solution, etc., evenly, especially for those with blind holes or those with complicated shapes. The tendency is remarkable. As a countermeasure, sufficient stirring of the plating solution is required, but there are also various problems here. As a stirring means, there is a circulation stirring by a pump, which is a preferable means in that the plating solution is not oxidized, but is not practical because of poor stirring efficiency. Aeration is also an effective agitation means, but it oxidizes the plating solution, so there is a problem such as the formation of carbonate in a bluing bath, and the aeration means cannot be incorporated in the plating apparatus.

Accordingly, the present inventor has previously described Japanese Patent Application No. Hei 4-36.
No. 1185 (Japanese Patent Application Laid-Open No. 6-220697) proposes to use vibration stirring in at least one of all of the pretreatment stage, plating stage and post-treatment stage of plating. As a result, the number of steps can be greatly reduced as compared with the conventional plating step, and productivity can be significantly improved.

[0004] However, when small articles are subjected to processing such as degreasing, washing, and plating, a barrel has been conventionally used. However, when a barrel is used, an object to be plated is lifted in the barrel as the barrel rotates. Then, it falls, but as a result, the objects to be plated may be damaged by collision. Also, when small objects are placed in a container such as a basket for degreasing, washing, plating, etc., if many heavy objects are stored in a basket, etc. There is a problem that the treatment liquid cannot sufficiently penetrate into the spot, and as a result, treatments such as degreasing, washing with water and plating are not uniform.

Although trichloroethane is widely used for degreasing before painting, the use of trichloroethane together with freon is being banned. At present, an excellent degreasing agent comparable to these has been found. Therefore, there is an urgent need to provide a method capable of performing efficient and sufficient cleaning without using trichloroethane or freon.

[0006]

An object of the present invention is to simultaneously stir a treatment bath by vibrating the treatment object itself with a vibrating motor through a holder for the treatment object, thereby uniformly irradiating the treatment bath with any part of the treatment object. The point is that the treatment bath can be contacted.

A first aspect of the present invention is that a processing solution is supplied at a frequency of 15 to 60 Hz.
The present invention also relates to a surface treatment method characterized in that the object to be processed itself is subjected to vibration at 15 to 60 Hz by a vibration motor via a holder for the object to be processed at the same time as the object to be processed.

[0008] A second aspect of the present invention is a processing tank, 15 to 60 Hz.
The present invention relates to a surface treatment apparatus comprising: a vibration stirrer driven by a vibration motor that generates vibrations; and a workpiece holder that is vibrated by a vibration motor that generates vibrations of 15 to 60 Hz.

In this apparatus, the vibration motor for driving the vibration stirring means and the vibration motor for vibrating the holder for the object to be processed can be separate vibration motors. Can be achieved, whereby the space can be saved and the cost can be reduced.

The vibration motor has a low frequency, for example, 15 to 60.
Run at Hz. The vibration transmitted to the liquid via the diaphragm has not yet been sufficiently clarified in theory, but if it is related to the natural frequency of the diaphragm, strangely, if the wavelength is changed using an inverter ( 1) A state in which the liquid ripples up and down, (2) A turbulent state in which the liquid flows at a maximum and the liquid moves randomly, and (3) A state in which neither the liquid flow nor the vibration of the diaphragm is observed. It changes as if it were a sine or cosine curve. Therefore,
The device preferably sets the frequency so that the condition (2) appears. It is preferable to set the frequency each time using an inverter as necessary.

In the present invention, it is important not only to agitate the processing liquid by vibrating the vibration plate with a vibration motor, but also to vibrate and agitate the processing liquid by vibrating the object to be processed by the vibration motor. It is.

The transmission of vibration to the workpiece can be achieved by transmitting the vibration from the vibration motor to the workpiece holder. The holder for the object to be processed may be a cage or a porous container for storing a large number of objects to be processed, or may be a hanging tool. INDUSTRIAL APPLICABILITY The present invention is extremely effective particularly in a case where a large number of small articles are stored in a holder for a workpiece such as a basket. The workpiece holder can be directly connected to a vibration frame or the like connected to the vibration motor, but only by placing the workpiece holder on the support pedestal connected to the vibration frame, etc. Vibration of the vibration frame or the like can be transmitted from the support base to the workpiece holder and the workpiece by the weight of the workpiece and the workpiece holder. In addition, this method is advantageous in that the attachment / detachment of the holder for the object to be processed to / from the device is simple, and the operation is advantageous.

When the vibration of the vibration motor is transmitted to the holder for the object to be processed such as a basket or a porous container, the object to be processed in the basket or the porous container vibrates in the same direction as the vibration of the vibrating blade. Instead, it makes a slight, but subtle, rotation in a certain direction. For this reason, the contact points between a large number of objects to be treated in the basket or the porous container change, and the degreasing, rinsing, plating, etc., of the object proceed uniformly and quickly. From this point, the shape of the car or the like may be more preferably round than polygon.

In this case, when the poles of the vibration motor (three-phase alternating current) for vibrating the workpiece holder are switched, the direction of the rotational movement is reversed, so that the above-mentioned effect can be further enhanced. . For example, every minute with a timer,
The poles can be switched at regular intervals, such as every 3 minutes or every 5 minutes. The rotational movement is slow but visible to the naked eye.

A commercially available motor may be used as the vibration motor. For example, KEE-2-2 manufactured by Yaskawa Electric Co., Ltd.
B, KEE-3.5-2B, KEE-6-2B, KEE
-10-2B, KEE-16-2, KEE-23-2 and the like can be used. The output of the vibration motor is determined according to the amount of liquid in the processing bath and the weight of all the objects to be processed in the basket and the porous container. On a normal 100 to 500 liter scale, 0.15 to 0.4
KW's are sufficient, but when one vibration motor is used for both vibration stirring and vibration for the holder for the workpiece,
Needless to say, it is necessary to increase the capacity correspondingly to each, and the one of 0.3 to 2.0 kW is usually used. When a flammable treatment liquid is used, an exposure-proof vibration motor is used, and a heating means such as a steam heating or a Teflon processing heater is selected.

The above-mentioned vibration stirring means may be a means for giving a vibration to the treatment bath in the horizontal direction, or a means for giving a vibration to the treatment bath in the vertical direction. In the present invention, when the transverse vibration stirring means is provided in the processing apparatus as shown in FIGS. 11 and 12, for example, the transverse vibration stirring means is provided below the normal basket 53 as shown in FIGS. In the case where the vertical vibration stirring means is provided, for example, FIG.
In some cases, vertical vibration stirring means as shown in FIGS. 9 to 9 may be provided between the car 53 and the wall of the tank 51, or vertical vibration stirring means as shown in FIG. When the electrode is used as in a treatment tank, for example, a plating tank, the electrode is usually provided along the left and right walls of the tank, and is provided above the horizontal vibration stirring means, In the case of the vibrating means, it may be provided inside the vertical vibration stirring means or may be provided outside.

The vibration stirring means generates vibration at 15 to 60 Hz, preferably 20 to 40 Hz, and transmits vibration from a vibration motor to a vibration plate in the liquid to transmit the vibration to the liquid. This is a newly developed stirring means, the basic concept of which is as disclosed in JP-A-3-275130, and its modified stirring means is disclosed in Japanese Patent Application No. 4-286544 on September 14, 1992. Filed. It is surprising that, when the vibration by the vibrating plate is transmitted to the entire system, the vibrating agitation causes flow agitation to occur in the entire system, and the entire system is promptly homogenized as compared with the agitation by the screw. The phenomenon is the same not only in a liquid system but also in a powder or a granular system, and has been proved by an experiment in which colored sawdust is added to sawdust. The amplitude of the diaphragm is 2 to 30 mm, preferably 10 to 15 mm.

(Regarding Lateral Vibration) First, the lateral vibration stirring means which can be used in the present invention will be described with reference to the drawings. FIG. 1 shows a top view of the vibration stirring means of the present invention, and FIG. 2 shows a sectional view thereof. 1 is a vibration motor or an electromagnetic motor (hereinafter, simply referred to as a vibration motor) that generates vibration in a lateral direction, 2 is a U-shaped vibration transmitter for transmitting the vibration, and is a tank or an arbitrary It is attached to the support directly or via a slide bearing 13 or the like. Reference numeral 3 denotes a support for preventing the vibration generated by the vibration motor 1 from being attenuated. Reference numeral 4 denotes a suspender for suspending the vibrator 5 having the vibrating blades 6 and vibration of the U-shaped vibration transmitter. The vertical vibration transmitter serves to transmit the vibration to the vibrator 5. The vibrating blade 6 has a function of imparting a vibrating agitating action to the liquid or powder in the tank by the vibration of the vibration motor or the electromagnetic motor 1. On both sides of the support 3, elastic bodies 8, such as springs, are provided to prevent the vibration of the U-shaped vibration transmitter 2 from attenuating and to be substantially the same as the weight of the vibration motor 1. Vibration stabilizing means for minimizing the sound generated by the loss of balance in weight can be provided. The vibration stabilizing means can be mounted on the opposite side of the tank 12. Through the U-shaped vibration transmitter, the weight of the vibration motor installed on one side of the tank, the elastic body provided on the opposite side thereof, and the holding mechanism can be substantially balanced. It is preferable that it is adjusted as follows. The vibrator may be in a rod state or a frame. In short, it is sufficient to transmit the lateral vibration transmitted from the transmitter at the bottom of the tank to the vibrating blade.

Any number of vibrating blades may be attached to the vibrator. The vibrating blade is mounted vertically or obliquely on the vibrator (see FIGS. 5A to 5D). The vibrating blade can be attached to the vibrator by welding or can be detached. In particular, it is preferable to employ a method in which the blades are attached to the vibrator in a push-in manner, because the size of the vibrating blades and the number of the vibrating blades can be changed according to the required stirring conditions. Further, it is also possible to change the mounting angle of the blade. The size of the tank is width 8
In the case of 00 mm, length 1000 mm, and depth 1100 mm, for example, a width of 80 mm and a length of 500 at intervals of 50 mm.
By attaching a vibrating blade having a thickness of 0.15 mm and a thickness of 0.15 mm, a sufficient stirring effect can be obtained. Describing the positional relationship between the vibrating blades and the electrodes, the electrodes are usually located on the left and right sides of the tank, and are provided above when viewed from the position of the vibrating blades. Can also.

The presence of the support which receives the two ends of the U-shaped vibration transmitter through the elastic body is to prevent the lateral vibration generated by the vibration motor from being attenuated. It is preferred to have a similarly robust structure. For example, it is possible to use an H-shaped steel material or a reinforcing steel bar, a concrete wall containing a steel frame, or the like, which is formed by laying a foundation on the ground and standing vertically on the foundation. When the vessel wall is sufficiently firm, the vessel wall can be used as a support.

The elastic body serves to receive vibration of the vibration transmitter and repel the vibration from the support. For example, as shown in FIG. 3, a spring 8 having a diameter of 3 to 10 mm made of spring steel around a round bar 7.
Can be used as the elastic body. It is preferable that the elastic body is provided in contrast to the vibration motor side of the support and the opposite side. FIG. 3 shows such a structure, in which the spring is fixed by a stopper plate 9.

(Vertical Vibration) Next, the vertical vibration means used in the present invention will be described in detail with reference to the drawings. First, FIGS. 6 to 9 will be described. The vibration stirrer applies the vibration generated by the vibration motor 26 to the vibration frame 2.
3. The vibration is transmitted to the vibrating blade groups 22, 22,... The vibrating blade group is installed on both sides of the circulation tank 29 as clearly shown in FIGS. The vibration frame 23 is attached to the main body via a spring 24 and a pedestal 25 so that the vibration from the vibration motor 26 does not affect the main body of the circulation tank 29. The vibrating blade may be horizontal, but is preferably mounted with a slight inclination. The degree of the inclination is 0 to 45 °, preferably 10 to 20 ° with respect to the horizontal direction.
It is preferable to mount at an angle. 15 ° in this embodiment
Set with. The width of the vibrating blade is not particularly limited, but is 30 m.
The effect is sufficiently exerted if it is at least about m. Usually 30 ~
It is about 100 mm, preferably about 50 to 80 mm. The distance between the stirring blades is not particularly limited, but is usually 10 to 80.
mm, preferably 30 to 40 mm, and in this example, the interval was 35 mm. The positions of the left and right vibrating blades 22 may be the same height, but may be provided at slightly shifted positions. The top vibrating blade is about 100m from the liquid level
m. If it is provided above this, it slightly varies depending on its amplitude, but it is not preferable because the liquid scatters. The lowest vibrating blade is preferably located at a position about 50 mm above the bottom.

The diaphragm may be vibrated uniformly as described in the above-mentioned publication or the specification. However, one or two portions of the diaphragm may be connected to a vibration axis to vibrate. You can also. In this case, when the liquid tank is rectangular, two vibrating axes may be provided one by one at both ends of one side of the diaphragm, but one vibrating shaft may be provided at the center of the side. Also, one vibration axis may be provided at one corner of the diaphragm. Corners other than the diagonal sides of the side where the vibration axis is attached or corners where the vibration axis is attached are supported by fixed axes. An elastic body on the fixed shaft,
For example, it is preferable to fix the diaphragm via rubber, plastics, a spring, an air spring, or the like, but it is also possible to rely on the elasticity of the diaphragm itself. FIG. 10 shows one specific example. Vibration rods 31 and 32 are provided via vibration transmission rods 35 connected to the vibration motor by any means, and rubber plates 38 and 39 are used for the vibration rods 31 and 32.
6 is fixed, while the fixed rods 33 and 34 are
The supporting rubber pieces 40 and 41 for supporting the vibration of the above are fixed, and the diaphragm 36 is connected to this. The vibrating plate 36 vibrates so as to lift the fan along the vertical axes of the vibration transmitting rods 31 and 32 with the supporting rubber pieces 40 and 41 as fulcrums. Mixing and stirring of the body and the like can be performed.

The material of the vibration stirring means of the present invention is not particularly limited as long as it is not affected by a processing solution such as a degreasing solution, a plating solution, a neutralizing solution or a cleaning solution. For the vibrating blade, a corrosion-resistant metal such as stainless steel or titanium, ceramics, synthetic resin, or the like can be used. There is no particular limitation on the material of the electrode in a plating bath, electrolytic degreasing, etc. In the case of electrolytic degreasing, lead or an alloy thereof is usually used. There is no particular limitation on the material of the tank for storing the processing liquid. For example, stainless steel is used for degreasing, and FRP is used for plating. The surface treatment of the present invention includes (1) degreasing and washing with water for processing machine parts and the like, (2) degreasing and washing before painting, (3) pretreatment of plating, plating, and post-treatment of plating (plating is (Including both electrolytic plating and electroless plating), (4) cleaning of electrical parts such as semiconductors,
Examples thereof include (5) chromate treatment, (6) electrodeposition coating, (7) acid and alkali treatment, (8) chemical reaction on the surface of a solid material, and (9) dishwashing.

The embodiments of the present invention will be listed below. (1) A surface treatment method characterized in that a treatment liquid is vibrated and stirred at 15 to 60 Hz and, at the same time, a treatment object itself is subjected to a vibration of 15 to 60 Hz by a vibration motor via a treatment object holder. (2) The surface treatment method according to the above item 1, wherein the object to be treated is a plurality of articles packed in a basket or a porous container. (3) The surface treatment method according to the above item 1 or 2, wherein the poles of the vibration motor are switched. (4) A processing tank, a vibration stirring means driven by a vibration motor generating 15-60 Hz vibration, and 15-60H
A surface treatment apparatus comprising: a holder for an object to be processed that is vibrated by a vibration motor that generates a vibration of z. (5) The surface treatment apparatus according to (4), further comprising means for switching a pole of the vibration motor. (6) The surface treatment apparatus according to the above (4) or (5), wherein the workpiece holder is mounted on a support base connected to a vibration motor. (7) The surface treatment apparatus according to the above item 4, 5 or 6, wherein the treatment is degreasing. (8) The surface treatment apparatus according to the above item 4, 5 or 6, wherein the treatment is cleaning. (9) The surface treatment apparatus according to the above item 4, 5 or 6, wherein the treatment is plating. (10) The surface treatment apparatus according to the above item 4, 5 or 6, wherein the treatment is electrodeposition.

[0026]

【Example】

Example 1 Workpiece: Iron (SPCC) 22 mm in diameter and 4 in thickness
This is a circular pressed part with a diameter of 8 mm and a hole with a diameter of 8 mm at the center and three holes with a diameter of 2 mm at the periphery. Mode of treatment: degreasing Apparatus used: shown in FIGS. FIG. 11 is a schematic top view, and FIG. 12 is a schematic sectional view. In these figures, the electrodes 27, 27 are also provided so that they can be used for plating or electrolytic degreasing experimentally.
It will be clear that this is not necessary as a degreasing only device. Further, the electrode may be provided outside the vibrating blade as shown in the figure, or may be provided inside. The size of the processing tank is 850 mm in width, 650 mm in length, and 650 mm in depth. Degreasing bath: An ordinary aqueous degreasing bath, an alkaline degreasing bath for iron and stainless steel containing 10% of Technoclean # 2000 [Japan Techno Co., Ltd .; trade name, PH11 containing a surfactant and an alkali component]. Vibrating blade: length 500mm, width 80mm, thickness 0.1
10 pieces of 5mm are fixed on the left and right sides of the tank at an elevation angle of 15 °. Processing temperature: 70 ° C. A stainless steel wire mesh (10 mm
Into a 45cm x 45cm x 50cm basket made in
500 pieces of the above-mentioned plating objects were put, and the vibration frequency was 28.5.
Hz, so that the poles change every 2 minutes,
A degreasing treatment was performed for 5 minutes, and then, water washing was performed for 5 minutes using an apparatus having the same structure. As a result, it is perfect even in a small hole,
It was evenly degreased. On the other hand, for comparison, the same processing as in Example 1 was performed except that the connection rod 28 with the vibration frame was connected and fixed to the degreasing tank to perform degreasing so that the vibration of the vibration motor was not transmitted to the car. went. When the degreasing treatment time was 5 minutes, it was found that the portions considered to be in contact with each other were not degreased. Although the number was very small, in order to eliminate such defective products, a degreasing treatment time of about 15 minutes was required, and about three times as long as that of Example 1 was required.

Example 2 Object to be treated: Stainless steel, tapered cylinder (larger diameter: 15 mm, smaller diameter: 5 mm, length: 5 m)
m) A part in which a mesh like a finger sack is connected to one end of the part. The apparatus used is the same as in Example 1, except that the degreasing bath, the shape of the basket, and the processing temperature are the same as those in Example 1. The frequency is 28.7 Hz, the pole switching time is every 3 minutes, and the degreasing treatment is performed for 10 minutes. Was washed for 5 minutes using the apparatus described in (1). As a result, degreasing of all parts was completely achieved. When a comparative test was performed in the same manner as in Example 1, when the car was not vibrated, the time required to prevent the occurrence of defective products was about 20 minutes, and the time required was about twice that of Example 2. Was.

Example 3 Object to be processed: Stainless steel, 50 m in diameter with small holes
m lead frame disk. Degreasing bath: Solvent-based degreasing bath, Technoclean S700
[Nippon Techno Co., Ltd .; trade name, naphthenic petroleum solvent, fire service class 4 third petroleum, not applicable to poisoning prevention regulations]. The apparatus used is the same as that of Example 1, 500 pieces of the objects to be processed are put in the same cage as in Example 1, the processing temperature is 60 ° C., the frequency is 28.5 Hz, the pole is switched every minute, and after degreasing for 5 minutes,
Hot air drying was performed. All processed materials were completely defatted. On the other hand, when the basket was not vibrated, the degreasing time required 10 minutes.

Example 4 Workpiece: A dish-shaped zinc alloy part having a diameter of 60 mm, a thickness of 2 mm, a hole having a diameter of 20 mm at the center of the dish and two holes of 5 mm in diameter on both sides thereof, and a height of 20 mm. . Degreasing bath: Techno-clean # 2100 with water-based degreasing bath
[Nippon Techno Co., Ltd .; trade name, for light metals, containing a surfactant and an alkali component, PH10] A weak alkaline degreasing bath containing 6%. The apparatus used was the one used in Example 1, and the processing temperature was 50 ° C.
Example 1 was repeated with a frequency of 23.5 Hz, pole switching every 3 minutes, and 500 parts in the car. The purpose of degreasing was completely achieved with a degreasing treatment time of 15 minutes. On the other hand, when the car was not vibrated, it took 30 minutes to obtain the same degree of degreasing effect.

Example 5 Object to be treated: An iron plug center electrode having a diameter of 5 mm and a length of 15 mm, and an iron pole having a diameter of 3 mm and a screw having a blind hole of 12 mm in depth. Except that the frequency was 33.7 Hz and the poles were switched every 2 minutes
A degreasing treatment was performed under the same conditions as in Example 1. It took 10 minutes for complete degreasing to be achieved. This was substantially the same processing time as the degreasing method using the vibration stirring means and the barrel in place of the apparatus of the present invention. However, since the present invention does not impart rotation to the car like a barrel, the parts do not strike each other,
No damage was caused by the barrel treatment.

Example 6 A mechanical part produced by welding two small disks was degreased under the same apparatus and conditions as in Example 1. Next, a 1: 1 mixture of industrial hydrochloric acid and water was used instead of the degreasing solution, and an acid cleaning treatment was performed at 28.5 Hz and 60 ° C. for 2 minutes using the same apparatus. One minute later, the poles were switched. As a result, the welding trace had disappeared. In the case of only vibration stirring, a processing time of 5 minutes was required.

Example 7 A semiconductor chip made of ceramic was washed with ion-exchanged water at 70 ° C. using the apparatus of Example 1, and dirt was removed in 2 minutes. Conventionally, the chips were fixed in a sandwich shape with a wire mesh for cleaning so that the chips do not overlap with each other, but according to the present invention, even if the chips are overlapped, the cleaning effect was not hindered.

Example 8 Using the apparatus of Example 1, 500 copper pillars having a diameter of 5 mm and a length of 15 mm were put in a basket, and were heated at 40 to 50 ° C. in a low-temperature alkaline electroless nickel bath having the following composition. Electroplating was performed. Nickel chloride 23 g / liter Ammonium chloride 40 g / liter Little sodium hypophosphite 12 g / liter sodium citrate 60 g / liter PH 8-9 As a result, an average plating layer of 5 μm was formed in 35 minutes. This is a time reduction of 20 to 30% compared to the case of only stirring. The nickel coating is more uniform than when only vibration stirring is used (the variation in film thickness is 3 to 4 μm when only vibration stirring is used, but the present invention is 1 μm), and has a good gloss. The test results were also good.

Embodiment 9 Using the apparatus of Embodiment 1, a flat cylindrical small iron part 500
The pieces were placed in a basket and subjected to chromate treatment at a temperature of 15 to 21 ° C. and a current density of 90 A / dm ² using a tetrachromate bath having the following composition. Chromic acid 320 g / litre Sulfuric acid 0.64 g / litre Sodium hydroxide 50 g / l As a result, the plating speed is faster, the film thickness is more uniform, the microcracks are further reduced, and the color is lower than in the case of vibration stirring alone. The gloss was also very uniform.

[0035]

【effect】

(1) In addition to the vibration stirring, the object to be processed itself is also subjected to vibration by a vibration motor through the holder for the object to be processed, so that the contact between the processing liquid and the object to be processed is further promoted. In each case, the processing proceeds extremely uniformly on the object to be processed. (2) When processing a large number of small items at once, for example, in the plating process, a barrel was conventionally used, but when the barrel is used, the object to be plated is lifted in the barrel with the rotation of the barrel. Then, as a result, the objects to be plated may be damaged by collision with each other, but according to the present invention, such damage is never caused. (3) Conventionally, when processing small items, a "basket" was used in the past, but since many small items are put in the basket, the small items overlap each other and even when they are vibrated, they come into contact with each other. Although the processing liquid could not sufficiently enter the point and processing unevenness occurred, in the present invention, the "cage" was vibrated by the vibration motor and was slightly and rotationally displaced. As a result, extremely uniform processing could be achieved in a short time.

[Brief description of the drawings]

FIG. 1 is a top view of a basic vibration stirrer for lateral vibration of the present invention.

FIG. 2 is a sectional view of FIG.

FIG. 3 is an enlarged sectional view of a portion A in FIG. 2;

FIG. 4 is a schematic diagram of a vibration transmission mechanism and a vibrator.

FIGS. 5A to 5D show various modes of attaching the vibrating blade to the vibrator. FIGS.

FIG. 6 is a top view for explaining a vibration stirring means for vertical vibration of the present invention.

FIG. 7 is a side view of FIG. 6;

FIG. 8 is a side view as viewed from another side of FIG. 7;

FIG. 9 is a perspective view of the vibration stirring means of FIGS.

FIG. 10 is a perspective view showing another vibration stirring means for giving up-down vibration.

FIG. 11 is a top view showing an example of the processing apparatus of the present invention.

FIG. 12 is a sectional view of FIG. 11;

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 vibration motor 2 U-shaped vibration transmitter 3 support 4 vertical vibration transmitter 5 vibrator 6 vibrating blade 7 round bar 8 spring 9 stop plate 10 heater 11 electrode 12 tank 13 slide bearing 21 vibrating bar 22 vibrating blade 23 vibration Frame 24 Spring 25 Pedestal 26 Vibration motor 27 Electrode 28 Connection rod to vibration frame 29 Tank 31 Vibration rod 32 Vibration rod 33 Fixed rod 34 Fixed rod 35 Vibration transmission rod 36 Vibration plate 37 Tank bottom 38 Rubber piece 39 Support rubber Piece 40 support rubber piece 41 support rubber piece 51 tank 53 basket 54 motor 55 gear 56 support pedestal

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI C25F 7/00 C25F 7/00 JK // C23G 5/00 C23G 5/00

Claims (3)

(57) [Claims] 1. A surface treatment method, wherein a treatment liquid is vibrated and agitated at 15 to 60 Hz and, at the same time, a vibration of 15 to 60 Hz is applied to a treatment object itself by a vibration motor via a treatment object holder. 2. The surface treatment method according to claim 1, wherein the object to be treated is a plurality of articles filled in a basket or a porous container. 3. A processing tank, a vibration stirring means driven by a vibration motor generating vibration of 15 to 60 Hz, and
A surface treatment apparatus comprising: a holder for an object to be processed that is vibrated by a vibration motor that generates vibration at 60 Hz.