JP3514698B2 - Chemical polishing of metal articles - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a chemical polishing method for metal articles.

[0002]

2. Description of the Related Art Methods for chemically polishing a metal surface include (a) chemical polishing and (b) electrolytic polishing. Chemical polishing is performed with the aid of an oxidizer present in a polishing liquid. On the other hand, electropolishing is performed with the help of electric energy. Therefore, the chemical polishing is a method of chemically dissolving and smoothing a metal surface, and the smoothing is performed by forming a diffusion film of an oxide or a metal salt on the metal surface thin on the convex portion and thick on the concave portion, It is performed by preferentially melting the convex portion.

Electrolytic polishing generally has a better polishing effect than chemical polishing, but requires electrolytic operation using the object to be treated as an anode (anode), and involves immersion operation in a simple chemical agent (polishing bath). The work is more complicated and the mass productivity is lower than that of chemical polishing. Particularly, in the chemical polishing method of aluminum, the processing temperature is as high as 100 to 120 ° C., and the negative side due to this high temperature is as follows. (A) The processing environment (mainly phosphoric acid, nitric acid, etc.) is generated significantly, so that the working environment is extremely poor. (B) The life of the treatment liquid is short and the running cost is high. (C) The required thermal energy is very large. (D) A metal-treated product is taken out of the treatment liquid, and a defective product is likely to be produced due to excessive reaction due to the treatment liquid attached to the metal even during a short time (several seconds) to the next step.

Various patent applications have been filed for such a chemical polishing method, most of which are related to the chemical polishing liquid, but JP-A-6-88255 discloses a chemical polishing liquid and a metal article. There has been proposed a technique of rocking a treatment tank containing and. However, there is no doubt that rocking the entire processing tank filled with the chemical polishing solution is a large-scaled one in terms of equipment and energy. Judging from the fact that even if the swing condition is adopted is not described, it is considered that the idea is still in the realm and has not been put into practical use. Since the phosphoric acid solution, which is the main component of the conventional aluminum polishing solution used for chemical polishing, has a high concentration of 75 to 85%, the viscosity of the solution becomes high, and the polishing cannot be advanced by merely shaking.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a chemical polishing method that exhibits a high glossiness at a lower concentration of agent, a lower processing temperature and a shorter time than the conventional chemical polishing methods.

[0006]

The first aspect of the present invention is to generate a desired vibration in the vibrating motor between 10 and 150 Hz by means of an inverter, and to vibrate this vibration through a vibration stress dispersion means. Vibration blades with a single stage or multiple stages fixed have an amplitude of 0.1 to 10.0 mm and a frequency of 200 to 80
The chemical polishing liquid in the stirring tank is oscillated at 0 times / minute for 60 to 8
The present invention relates to a chemical polishing method for a metal article, which is characterized by vibrating and stirring at 0 ° C.

In a second aspect of the present invention, a suspending tool for suspending the metal article in a tank is caused by an inverter to generate a desired vibration at a vibration motor of 5 to 60 Hz, preferably 10 to 60 Hz. Amplitude 0.1 to metal articles
3.0 mm, preferably 0.1 to 1.0 mm, frequency 1
The vibration is applied at a frequency of 0 to 300 times / minute.
The present invention relates to a chemical polishing method for a metal article as described.

A third aspect of the present invention is to chemically hang the hanging device at a swinging width of 10 to 100 mm and a swinging speed of 10 to 30 times / minute. Concerning the law.

A fourth aspect of the present invention is to treat a stirring tank containing a pretreatment liquid, which is provided in the preceding stage of the stirring tank containing the chemical polishing liquid, under the stirring conditions according to any one of claims 1 to 3. A chemical polishing method for a metal article according to claim 1.

A fifth aspect of the present invention is to treat a stirring tank containing a post-treatment liquid, which is provided at a subsequent stage of the stirring tank containing the chemical polishing liquid, under the stirring conditions according to any one of claims 1 to 3. A chemical polishing method for a metal article according to claim 1.

The material of the metal article to which the present invention is applied includes aluminum or its alloy, magnesium or its alloy, titanium or its alloy, iron or its alloy,
Examples thereof include copper and its alloys, zinc and its alloys, and there is no particular limitation. Specific examples of aluminum include industrial pure aluminum (99.0 to 99.
9%) AA-1000 series, eg 1100, 1
090, 1080, 1070 and the like,
As an aluminum-magnesium alloy, 500
5, 5050, 5052, 5083, 5405, etc., as aluminum-copper alloys 2011, 2017,
For example, aluminum-manganese system such as 2024 is 3
003, 3004, etc. can be mentioned. The present invention can also be used for chemical polishing of magnetic disks. In this case, for example, an aluminum alloy substrate is machined, pretreated, NiP underlayer plated, etc., and then subjected to the chemical polishing of the present invention, followed by magnetic plating, protective film formation,
A magnetic disk is obtained through the steps of lubrication and finishing.

The composition of the chemical polishing liquid used in the present invention is sufficient only with the basic composition, and it is extremely uniform without the addition of the surfactant which has been conventionally added for accelerating the treatment or homogenizing the treatment. A product with high gloss can be obtained. The main composition of the chemical polishing liquid is usually phosphoric acid-nitric acid type, and some of them are fluorine type. The typical chemical polishing liquid and its processing conditions are shown below.

[0013]

[Table 1] In the present invention, although it changes somewhat depending on the composition of the bath, a preferable chemical polishing can be usually achieved at a bath temperature of 60 to 80 ° C.

An example of the vibrating fluid agitation device for the bath is shown in the figure, but the vibrating fluid agitation device itself is not limited to this example, and the invention of the present inventor is disclosed in JP-A-6-2206.
No. 97 (Patent No. 2707530), JP-A-6-304.
461, JP-A-6-312124 (Patent No. 2762).
388), JP-A-6-330395, JP-A-8-1.
No. 73785 (Patent No. 2852878), JP-A-9-
No. 40482 (Japanese Patent No. 2911393), Japanese Patent Laid-Open No. Hei 10
It is possible to use the vibrating fluidized stirrer described in JP-A-43569 and JP-B-6-71544 (Patent No. 1941498).

The vibration stress dispersing means in the vibrating fluidized agitator is disclosed in Japanese Patent Application Laid-Open No. 8-17378, particularly FIGS.
As described in detail in the above description, for example, a rubber ring provided around the vibrating rods above and below the base at the connecting portion between the vibration generator and the vibrating rod. In the case where the rubber ring is not used, there is a problem that vibration stress concentrates in the vicinity of the joint between the vibration transmitting member and the vibration rod, and the vibration rod is easily broken. , Can be completely eliminated.

The vibrating vane plate may preferably be made of thin metal, elastic synthetic resin, rubber or the like, but the thickness of the vibrating vane plate is fluttered at least at the tip of the vane plate due to vertical vibration of the vibration motor. The thickness may be such that it exhibits a (wave-like state), which allows the system to be subjected to flow in addition to vibration. Titanium, aluminum, copper, steel, stainless steel and alloys thereof can be used as the material of the metallic vibrating vane. Also,
These metals can be used after being passivated if necessary. As synthetic resin, polycarbonate, vinyl chloride resin, polypropylene,
Epoxy resin can be used. The thickness is not particularly limited in order to transfer vibration energy to enhance the effect of vibration, but generally it is preferably 0.2 to 2 mm in the case of metal and 0.5 to 10 mm in the case of plastic. If it becomes too thick, the effect of vibrating fluid agitation decreases.

When an elastic synthetic resin, rubber or the like is used as the material of the vibrating blade plate, the thickness is not particularly limited, but generally 1 to 5 mm is preferable, but in the case of metal such as stainless steel, 0.2 to 1 mm, for example. It is preferably 0.5 mm. The amplitude of the diaphragm is 0.2 to 10.
It is 0 mm, preferably 0.5 to 3.0 mm.

The vibrating blade portion can be attached to the vibrating shaft in one or more stages. A plurality of vibrating blades can be used depending on the depth of the processing liquid. When increasing the number of stages of the multi-stage, if the load of the vibration motor is increased, the vibration width may decrease and the vibration motor may generate heat.

The vibrating blades may be mounted at right angles to the vibrating rod, but when the right angle direction of the vibrating rod is 0 °, it is 5 to 30 ° in the (+) or (-) direction, preferably. It is preferable to mount with a tilt of 10 to 20 °. Further, the vibrating blade fixing member and the vibrating blade may be integrally inclined and / or bent when viewed from the side surface of the vibrating shaft. Even if it is bent, it is 5
It is preferable to have an inclination of 30 degrees, especially 10 to 20 degrees.

The vibrating blade can be formed by sandwiching the vibrating blade from both upper and lower sides by a vibrating blade fixing member and fixing it to the vibrating rod. Specifically, the vibrating blade can be fixed by screwing the vibrating rod in advance and tightening it with screws, but the vibrating blade 4 is restrained by using a vibrating blade fixing member so as to be sandwiched from above and below. It is preferable that the vibrating blade 4 is fixed by fastening the vibrating blade fixing member with a screw.

When the vibrating blade portion is inclined and / or bent, the lower one of the many vibrating blade portions is used.
It is also possible that two of them have a downward slope and / or a curved line, and the other two have an upward slope and / or a curved line. By doing so, it is possible to sufficiently stir the bottom portion of the processing tank and prevent accumulation in the lower portion.

When it is not desired to stir only the bottom of the processing tank, it can be dealt with by removing the downwardly curved vibrating blade. For example, it is convenient when unnecessary components such as a precipitate are accumulated in the lower portion and taken out from the lower portion without being diffused. Further, in order to prevent the generated gas from being released quickly, all the vibrating vanes can be made to have a downward angle or a curved shape.

As shown in the figure, the vibrating fluidized stirrer may be provided only at one end of the treatment tank, but by providing it at both ends of the treatment tank, the inside of the vessel can be uniformly fluidized and agitated corresponding to a large tank. Further, all of the above-described vibrating and agitating devices are of the type in which the vibrating blades are vibrated up and down, but as shown in Japanese Patent Application Laid-Open No. 6-304461 filed by the present applicant, the vibrating direction There is also a method in which the horizontal direction is set and the vibrating blade is attached to the bottom of the processing tank. In this case, in order to balance the weight on the left side and the weight on the right side with respect to the vibration motor installed on the left side of the processing tank, it is preferable to provide a balancer on the right side with a weight balanced with the weight on the left side. Further, when the vibrating fluidized stirrer is installed close to one side of the processing tank, the length of the vibrating blade is long in the wide direction of the bath and short in the narrow direction of the bath to adjust the strength of the flow. be able to.

The vibrating rod can be used by directly connecting it to a vibrating motor, but it is disclosed in Japanese Patent Laid-Open No. 6-
As described in JP-A-304461 and JP-A-6-330395, it is possible to adopt a form in which the vibration of the vibration motor is transmitted to the vibrating rod through the vibrating frame.

Further, it is preferable to interpose a fluorine-containing polymer film between the vibrating blade and the vibrating blade fixing member because the rate of breakage of the vibrating blade during long-term use is significantly reduced. Fluorine-based polymers include polytetrafluoroethylene (PTFF), tetrafluoroethylene / hexafluoropropylene copolymer (FEP), tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), polychlorotrifluoroethylene (PFE).
CTFE), polyvinylidene fluoride (PVDF), polyvinyl fluoride, ethylene / tetrafluoroethylene copolymer (ETFE), ethylene / chlorotrifluoroethylene copolymer, propylene / tetrafluoroethylene copolymer, etc. However, fluorine rubber is particularly preferable.

Various pretreatment steps can be provided before the chemical polishing treatment of the present invention. For example, a pretreatment process such as degreasing-water washing-alkali treatment-water washing-acid activation-water washing can be provided.

Further, after the chemical polishing treatment of the present invention,
Various post-treatment steps can be provided. For example, a post-treatment process such as water washing-neutralization-water washing-drying can be provided.

According to the present invention, a chemical polishing liquid of 200 mm is used.
/ Sec or more, preferably 250 mm / sec or more. In addition, this flow velocity is a three-dimensional electromagnetic velocity meter (trade name ACM300A manufactured by Alec Electronics Co., Ltd.)
It was measured using.

The electric discharge machining waste liquid and the passivation waste liquid include nitric acid and metal components to be processed of several hundred ppm.
Although it is an aqueous solution containing about 10 ppm or more below, according to the research of the present inventor, such a trace amount metal-containing waste liquid causes various problems in wastewater treatment, and this waste liquid is used as a chemical polishing liquid in the present invention. It was found that when recycled, the metal contained in these trace amounts is not clear, but rather works positively and can be reused as a raw material for the chemical polishing liquid. For example, a chemical discharge liquid H ₃ PO ₄ 85v / v% HNO ₃ 5v / v% CH ₃ COOH 5v having the following composition is used by using a liquid containing nitric acid 17wt% Fe 200ppm Ni 50ppm Cr 15ppm as an ordinary electric discharge machining waste liquid. It was possible to achieve a sufficiently satisfactory chemical polishing by applying the present invention by making / v%.

[0030]

The present invention will be described below with reference to examples.
The present invention is not limited thereby. In the examples of the present invention, the oscillating flow stirrer was driven, but in all of the comparative examples, the oscillating flow stirrer was not driven.

Example 1 and Comparative Example 1 (1) FIGS. 1 to 3 show a vibrating fluidized stirrer and a metal treatment tank used in each example of the present invention. 1 is a sectional view of an apparatus used in Example 1 of the present invention, FIG. 2 is a sectional view of another side surface of FIG. 1, and FIG. 3 is a top view. In the figure, 1 is a vibration motor for a vibration stirrer, 2 is a spring, 3 is a vibrating rod, 4 is a vibrating blade, 5 is a processing tank, and 6 is a vibration stress dispersion means. (2) Composition of chemical polishing liquid [(A) is a conventional type formulation, (B) is a formulation that can be used in the present invention] (A) Phosphoric acid (SG 1.697) 85% by weight Nitrate (SG1.42) 13% by weight Copper nitrate 0.5% by weight Pure water residue (B) Phosphoric acid (SG1.697) 75% by weight Nitric acid (SG.1. 42) 10% by weight Copper nitrate 0.5% by weight Pure water Residue The chemical polishing liquid of (A) or (B) above
It is poured into a treatment tank of 00 × 450 × 500 mmH to a depth of 400 mm. (3) Chemical polishing treatment temperature 110
℃ or 70 ℃

(4) Chemical polishing process: As shown in the table below.

[Table 2] ○ indicates driving a vibrating fluid agitator

(5) Test plate (a) Pure aluminum plate (purity 99.8%), size 10
0 × 100 × 3 mm (b) Aluminum alloy plate: AA / 5357, size 10
0 × 100 × 3 mm (6) Vibratory fluidized stirrer and treatment tank As the fluidized fluidized stirrer, a product name Super Vibration α-3 type stirrer manufactured by Nippon Techno Co., Ltd. was used. As shown in FIGS. 1-2, this is one in which five vibrating blades (made of SUS304) are attached between two vibrating rods (made of SUS304).
The upper four vibrating blades are attached 15 ° upward from the horizontal direction, and the lowermost vibrating blades are attached 15 ° downward from the horizontal direction, and the dimensions of the vibrating vanes and the treatment tank are as shown in FIG. The vibration motor used was a 200V × 250W (3 phase) product manufactured by Murakami Seiki Co., Ltd., which is handled by Yasukawa Shoji. (7) Attached device: Liquid level gauge Heating device Exhaust hood

(8) Pretreatment step (no vibration stirring) Degreasing: Alkaline water-based degreasing agent, Nippon Techno Co., Ltd. trade name: Technoclean # 2100 (including sodium carbonate main component surfactant) 10% by weight % Solution for 3 minutes at 50 ° C. Washing with water: normal temperature for 1 minute Alkaline treatment: NaOH 5 wt% in water for 1.5 minutes water washing: normal temperature for 1 minute Pickling: H ₂ SO ₄ 5 wt% Washing with an aqueous solution (50 ° C.) for 1 minute: Washing at room temperature for 1 minute (9) Chemical polishing Example 1: 40 Hz, vibration width 0.3 mm, frequency 500
Vibratory stirring was performed once. Comparative Example 1: Conventional type without vibration stirrer

Tables 3 and 4 below show the results of measuring the reflectance and appearance of the test plate in order to see the result of the quality of polishing. Reflectance measurement method Mirror surface glossiness measurement method (JIS Z 8741 Method 3
Specular gloss) Suga Tester digital variable angle gloss meter UGV-SD type used

The test results of the above-mentioned (a) pure aluminum plate are as follows.

[Table 3] (Note) The reflectance is an average value of three test plates.

The test results of the above-mentioned (b) aluminum alloy plate are as follows.

[Table 4] (Note) The reflectance is an average value of three test plates.

When the treatment temperature is 110 ° C., a reaction gas is generated due to the high temperature and the polishing surface may be deteriorated. Further, the life of the chemical polishing liquid is shortened, and a metal which can be polished by one chemical polishing liquid is used. The number of boards is also reduced. In the case of Comparative Example 1,
From the above data, a treatment temperature of at least 110 ° C. is required, but in Example 1, extremely excellent results of 90% reflectance were obtained even after chemical polishing at 70 ° C. Indicates that 70 ° C. of Example 1 is superior in all respects to the chemical polishing of Comparative Example 1 at 110 ° C.

The chemical polishing liquid of Example 1 was measured with a three-dimensional electromagnetic flow meter ACM300-A, which is a small electromagnetic velocity meter for a laboratory manufactured by Alec Electronics Co., Ltd., and the result was 300 mm /
The flow of seconds was occurring.

From the above results, it was found that Comparative Example 1 had no practical use unless an effective amount of a surfactant was used as an additive in the chemical polishing liquid. However, the use of an effective amount of surfactants makes disposal of chemical polishing liquors very difficult.

Example 2, Comparative Example 2-1 and Comparative Example 2-2 Industrial Pure Aluminum JIS AA-1080 Mitsubishi Aluminum # 5257 Small Cylindrical Al Extruded and Molded
Container (thickness 0.8 mm) about 30 mmφ x 25 mm H 2
As a test body, 0 pieces were placed in a compressor type barrel [Kondo acid resistant tank Co., Ltd.], and this was subjected to chemical polishing treatment in the following steps, and a comparative test between the conventional method and the method of the present invention was performed. Degreasing-water washing-caustic etching-water washing-acid activity-water washing-chemical polishing (70 ° C) -water washing-acid activity-water washing-anodizing (1
0 minutes) -Washing-Sealing treatment (20 minutes) -Drying (5 minutes)

The composition of each treatment bath is as follows. Degreasing: Technoclean # 2100 (including sodium carbonate main component surfactant) 10% by weight, temperature 50 ° C Water washing: Distilled water (normal temperature) Caustic etching: 1% by weight NaOH aqueous solution, 50 ° C Acid activity: 5% by weight H ₂ SO ₄ aqueous solution, room temperature chemical polishing liquid: H ₃ PO ₄ 85 v / v%, HNO ₃ 5 v /
v%, CH ₃ COOH 5 v / v% composition, liquid temperature is 70 ° C. Sealing treatment: hot water 100 ° C. hot air drying: 80 ° C.

In Example 2, the vibration stirring of the present invention was carried out in each of the steps of degreasing and washing with water. The vibration stirrer and the volume of the treatment bath used were all the same as in Example 1. Comparative Example 2-
In No. 1, vibration agitation was not performed only in the chemical polishing tank, and other processes were performed in the same manner as in Example 2. In Comparative Example 2-2, vibration stirring was not performed in all steps. The processing time of each step is 1 minute. The results are shown in Table 5. The flow velocity of the vibrating and stirring treatment bath is about 300 m.
It was m / sec.

[0044]

[Table 5]

Even if electrolytic polishing is carried out instead of chemical polishing of Example 2, the external appearance of Example 2 is excellent, and the time required for polishing is about 1/2 in Example 2. Results were obtained.

Example 3 and Comparative Example 3 A test plate having the same size as in Example 1 was chemically polished from an austenitic stainless steel plate. The test tank is the same as in Example 2. The volume of the treatment bath and the vibration stirrer were the same as those in Example 1.
Is the same as Comparative Example 3 is a case where the vibrating flow stirring means of Example 3 is not operated.

The steps, processing time, and bath composition are as follows.

[Table 6]

[0048]   Degreasing bath: Technoclean # 3000 10% (strong alkaline water-based degreasing agent, main component)           (Including NaOH and surfactant)   Chemical polishing liquid: 100 ml of condensed phosphoric acid (SG 1.9 to 2.0)               Sulfuric acid (SG 1.8) 10 ml

Comparing Example 3 with Comparative Example 3, the gloss of Example 3 is superior to that of Comparative Example 3,
Also, the amount of gas generated during the chemical polishing treatment was small, and the chemical polishing liquid could be used for a much longer time.

Example 4 and Comparative Example 4 A large number of small cap-shaped containers [diameter 2] prepared by processing a material made of a glittering extensible material Al-Mg-based metal (AA-5252).
5 mm, height 30 mm, wall thickness 0.3 mm] was attached to a suitable jig described in "Plating Technology Handbook", pages 632 to 640, published by Nikkan Kogyo Shimbun, Ltd. on July 25, 1946, for example. Chemical polishing was performed using the apparatus of No. 1 according to the procedure of Table 7 below. As Comparative Example 4, Table 7 shows the conventional method in which the vibration stirring was not performed and the results thereof. In Comparative Example 4, the oscillatory fluidized stirrer was not used, but in Example 4, the oscillatory fluidized stirrer was used at the “o” portion. In addition, the processing tank used SUS-314.

[0051]

[Table 7]

Example 5 A surface of a flat aluminum disk made of an aluminum alloy (a disk having a diameter of 90 mm and a thickness of 3 mm) was subjected to zinc substitution treatment, and a nonmagnetic nickel phosphorus alloy underlayer was electroless plated to 10 μm. To the thickness of. Using the chemical polishing liquid of the following composition H ₃ PO ₄ 85v / v% HNO ₃ 5v / v% CH ₃ COOH 5v / v% and the apparatus of Example 1, 40Hz, vibration width 0.3mm, frequency 500 times Vibrating / min.
Chemical polishing is performed at 60 ° C. for 1 minute to obtain a substrate. as a result,
A highly smooth surface having an average surface roughness of 0.01 μm was obtained. Further, a 10 μm thick cobalt alloy magnetic film was provided as a recording medium layer on this layer, and a 10 μm protective layer was further formed thereon to obtain a magnetic disk.

Example 6 The apparatus of Example 1 was provided with a suspending tool vibrating means and a suspending tool swinging means (see FIGS. 4 to 6). (B) Vibration stirring means Vibration motor 45Hz with inverter, vibration width 1.5
mm, used at a vibration frequency of 300 times / minute. (B) Vibrating means for suspending equipment 50W Vibration motor 10 is controlled by an inverter to 25 Hz, used with a vibration width of 0.3 mm and a vibration frequency of 150 times / min. (C) Swinging means for hanging device Swinging width of about 50 mm by swinging motor 11 and number of swings 15
Used at times / minute. (D) Test plate suspending tool The one shown in FIG. 7 was used. (E) Test plate: pure aluminum plate (Al 100P, JISH400, Si + Fe: 1.
0% or less, Cu: 0.05 to 0.20%, Mn: 0.0
5% or less, Zn: 0.10% or less, Al: 99.00%
Above), width 200mm, length 150mm, wall thickness 1.5m
m, 9 holes having a diameter of 3 mm are provided in the entire plate in a uniformly distributed form. (F) Chemical polishing liquid HNO ₃ 5 v / v% H ₃ PO ₄ 85 v / v% CH ₃ COOH 5 v / v% 70 ° C., 1 minute

Example 6-3 is the same as (3) of (a) to (c) above.
Performed using all one means. Example 6-2 is
It carried out using two means of (a) and (b), and Example 6-1 was carried out using only the means of (a). The results are evaluated as follows.

[0055]

[Table 8]

[0056]

EFFECTS OF THE INVENTION (1) According to the present invention, the treatment temperature in chemical polishing can be lowered by 20 to 40% as compared with the conventional method, and a low-concentration chemical polishing liquid which was impossible by the conventional method can be obtained. Polishing is possible even when used, and the surface condition of the treated product is inferior to that of the conventional electrolytic polishing, but according to the present invention, the brightness is higher than the surface gloss of the product by electrolytic polishing. According to the invention of claim 1,
The invention of claim 2 is more excellent than the invention of claim 2 in the invention of claim 3 in terms of the uniformity of gloss and the uniformity of the treated surface in the holes. Especially for metal articles, the average pore size is 50m.
It is effective when it has deep small holes of m or less and a depth of 20 mm or more. (2) In the conventional chemical polishing, the temperature of the chemical polishing liquid is inevitably high. However, the higher the liquid temperature is, the more gases such as nitric oxide and hydrogen gas are generated, which deteriorates the working environment and the surrounding environment. Since the present invention can be carried out at a temperature 20 to 40% lower than that of the conventional method, it is an environment-friendly invention. (3) Since the conventional method has a high processing temperature as described above,
The evaporation rate of the chemical polishing liquid is high, and the adjustment of the liquid composition and the replenishment of the liquid amount require a great deal of work. However, according to the present invention, these burdens are greatly reduced and the life of the chemical polishing liquid is shortened by the conventional method. More than doubled. (4) In the conventional method, a defective product may be generated due to the gas bit due to high temperature, but in the present invention, there is no fear of that. (5) The thermal energy cost is significantly lower than that of the conventional method.

[Brief description of drawings]

FIG. 1 is a side sectional view of an apparatus used in Example 1.

FIG. 2 is a cross-sectional view of another side surface of the device used in Example 1.

3 is a top view of the device used in Example 1. FIG.

FIG. 4 is a side sectional view of an apparatus used in Example 5.

FIG. 5 is a cross-sectional view of another side surface of the device used in Example 5.

FIG. 6 is a top view of an apparatus used in Example 5.

FIG. 7 is a schematic view of a suspending tool used in Example 5.

[Explanation of symbols]

1 vibration motor 2 spring 3 vibrating rod 4 vibrating blades 5 treatment tanks 6 Vibration stress dispersion means 10 Suspension tool vibration motor 11 Hanging tool swing motor 31 Support Rod 32 hanging arms 33 test plate 34 Locking line

Claims (8)

(57) [Claims] 1. A vibration motor is driven by an inverter.
A desired vibration of up to 150 Hz is generated, and this vibration is generated by vibrating blades in which the vibrating rods in the stirring tank are fixed in one stage or in multiple stages via the vibration stress dispersion means to have an amplitude of 0.1 to 10.0 m.
A chemical polishing method for a metal article, which comprises vibrating at a vibration frequency of 200 to 800 times / min, and vibrating and stirring the chemical polishing liquid in a stirring tank at 60 to 80 ° C. 2. A suspension motor for suspending the metal article in a tank is controlled by an inverter to drive a vibration motor by 5 to 60.
The chemical polishing method for a metal article according to claim 1, wherein a desired vibration between Hz is generated to give the metal article a vibration having an amplitude of 0.1 to 3.0 mm and a frequency of 100 to 300 times / min. . 3. The swinging width of the hanging tool is 10 to 100 m.
The method for chemically polishing a metal article according to claim 1 or 2, wherein the method is performed by rocking at m and a rocking rate of 10 to 30 times / minute. 4. A stirring tank containing a pretreatment liquid, which is provided in the preceding stage of the stirring tank containing the chemical polishing liquid, is treated under the stirring conditions according to any one of claims 1 to 3. A method for chemically polishing a metal article according to any one of claims. 5. A stirring tank containing a post-treatment liquid, which is provided after the stirring tank containing the chemical polishing liquid, is treated under the stirring conditions according to any one of claims 1 to 3. A method for chemically polishing a metal article according to any one of claims. 6. An electro-discharge machining waste liquid and / or a passivation waste liquid is used as a raw material for the chemical polishing liquid.
5. The chemical polishing method for a metal article according to any one of 5 above. 7. A chemical polishing of the metal article of claim 1-6, wherein any velocity in the flow of the processing liquid that occurs is 200 mm / sec or more by the stirring. Wherein said metal article has an average pore diameter of less than 50mm, chemical polishing method according to claim 1-7 metal article according to any one of those which have a depth more than 20mm deep pores of pore.