JP2895568B2 - Electric circuit members - Google Patents

Electric circuit members

Info

Publication number
JP2895568B2
JP2895568B2 JP2121494A JP12149490A JP2895568B2 JP 2895568 B2 JP2895568 B2 JP 2895568B2 JP 2121494 A JP2121494 A JP 2121494A JP 12149490 A JP12149490 A JP 12149490A JP 2895568 B2 JP2895568 B2 JP 2895568B2
Authority
JP
Japan
Prior art keywords
electric circuit
conductive
connection
adhesive layer
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2121494A
Other languages
Japanese (ja)
Other versions
JPH0419970A (en
Inventor
徹夫 吉沢
進 角倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2121494A priority Critical patent/JP2895568B2/en
Priority to US07/810,444 priority patent/US5174766A/en
Publication of JPH0419970A publication Critical patent/JPH0419970A/en
Application granted granted Critical
Publication of JP2895568B2 publication Critical patent/JP2895568B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/811Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector the bump connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/81101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector the bump connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a bump connector, e.g. provided in an insulating plate member

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は電気回路部材に関し、特に電気回路部品が電
気的接続部材を介して基体に接続されてなる電気回路部
材に関する。
Description: TECHNICAL FIELD The present invention relates to an electric circuit member, and more particularly to an electric circuit member in which electric circuit components are connected to a base via an electric connection member.

[背景の技術] 従来は框体、回路基板等の基体と電気回路部品との接
続はコネクター方法、圧着端子方法、はんだ付け方法、
ワイヤボンディング方法、TAB(テイプ オウトメイテ
エド ボンディング:Tape Automated Bonding)方法、C
CB(コントロールド コラァプスド ボンディング:Con
trolled collapsed Bonding)方法、異方性導電膜を用
いる方法等が公知である。ところが、これらの方法にお
いては、隣接する接続部同士が接触しないようにする為
の最小ピッチが比較的大きい為、接続部同士のピッチに
小さいものが要求される場合には対応できないという問
題があった。更に、このような方法では配線が長くなる
為に抵抗値の増大、浮遊容量の増大を招くために電気的
特性上問題があった。特に高周波電気回路では顕著であ
った。
[Background Art] Conventionally, connection between a base such as a frame body and a circuit board and an electric circuit component is performed by a connector method, a crimp terminal method, a soldering method,
Wire bonding method, TAB (Tape Automated Bonding) method, C
CB (Controlled collapsed bonding: Con
Methods such as a controlled collapsed bonding method and a method using an anisotropic conductive film are known. However, these methods have a problem that the minimum pitch for preventing adjacent connecting portions from contacting each other is relatively large, so that it is impossible to cope with a case where a small pitch between connecting portions is required. Was. Further, such a method has a problem in terms of electrical characteristics because the length of the wiring is increased and the resistance value is increased, and the stray capacitance is increased. This was particularly noticeable in high-frequency electric circuits.

このような問題点を解決すべく、絶縁保持体中に複数
の導電部材を相互に絶縁して保持させた構成をなす電気
的接続部材、又は絶縁保持体の内部及び/又は保持体面
上で配線されており、接続導電部材の両端が前記保持体
の両面に保持体の面と同一もしくは突出して露出してい
る構成をなす電気的接続部材を用いて電気回路部品同士
を電気的に接続する方法が提案されている(特開昭63−
222437号公報、特開昭63−224235号公報等)。
In order to solve such a problem, an electric connection member having a configuration in which a plurality of conductive members are mutually insulated and held in an insulating holder, or wiring is provided inside the insulating holder and / or on the surface of the holder. A method of electrically connecting electric circuit components to each other using an electric connection member having a configuration in which both ends of a connecting conductive member are exposed on both surfaces of the holding member so as to be the same as or protrude from the surface of the holding member. (Japanese Patent Laid-Open No. 63-63)
222437, JP-A-63-224235, etc.).

第3図(a),(b)は、このような1つの電気的接
続部材を用いた電気回路部品間の電気的接続を示す模式
図であり、図中1は電気的接続部材、2,3は接続すべき
電気回路部品を示す。電気的接続部材1は、金属又は合
金からなる複数の棒状の導電部材4を、各々の導電部材
4同士を電気的に絶縁して、電気的絶縁材料からなる薄
板上の保持体5中に保持した構成をなし、導電部材4の
両端を各々バンプ8及び9として電気回路部品2及び3
側に突出してある(第3図(a)参照)。
FIGS. 3 (a) and 3 (b) are schematic diagrams showing electrical connections between electrical circuit components using such one electrical connection member, where 1 is an electrical connection member, Reference numeral 3 denotes an electric circuit component to be connected. The electrical connection member 1 holds a plurality of rod-shaped conductive members 4 made of a metal or an alloy in a holding body 5 on a thin plate made of an electrically insulating material by electrically insulating the conductive members 4 from each other. The electrical circuit components 2 and 3 are formed by setting both ends of the conductive member 4 as bumps 8 and 9, respectively.
Side (see FIG. 3 (a)).

そして、一方の電気回路部品2の接続部6と導電部材
4のバンプ8とを、また、他方の電気回路部品3の接続
部7と導電部材4のバンプ9とを各々例えば熱圧着、超
音波加熱法等によって金属化および/又は合金化する事
により接続し、電気回路部品2,3同士を電気的に接続す
る(第3図(b)参照)。
Then, the connection portion 6 of the one electric circuit component 2 and the bump 8 of the conductive member 4 and the connection portion 7 of the other electric circuit component 3 and the bump 9 of the conductive member 4 are each bonded by, for example, thermocompression bonding or ultrasonic wave. The electrical circuit components 2 and 3 are electrically connected to each other by metallization and / or alloying by a heating method or the like (see FIG. 3B).

ところで上記電気的接続部材1を製造する方法として
第4図(a)〜(e)に示す方法が提案されている。こ
の方法は、まず、導電材製の銅箔10上に前記保持体5と
なる感光性樹脂11を塗布する(第4図(a)参照)。次
に、後工程で前記導電部材4を埋設する所定の位置を露
光、現像することにより、感光性樹脂11に穴12を形成し
て銅箔10を露出させる。次いで、温度を上げて感光性樹
脂11を硬化させる(第4図(b)参照)。そして穴12内
の近傍の銅箔10のエッチングを行ない穴12の下部に凹部
13を形成する(第4図(c)参照)。
By the way, as a method of manufacturing the electrical connection member 1, a method shown in FIGS. 4 (a) to 4 (e) has been proposed. In this method, first, a photosensitive resin 11 serving as the holder 5 is applied on a copper foil 10 made of a conductive material (see FIG. 4A). Next, by exposing and developing a predetermined position where the conductive member 4 is embedded in a later step, a hole 12 is formed in the photosensitive resin 11 to expose the copper foil 10. Next, the temperature is increased to cure the photosensitive resin 11 (see FIG. 4 (b)). Then, etching of the copper foil 10 in the vicinity of the hole 12 is performed, and a concave portion is formed below the hole 12.
13 are formed (see FIG. 4 (c)).

その後、銅箔10に対する金等のめっき処理を行なう事
により、凹部13及び穴12内に導電部材4を充填してい
き、凹部13内に前記バンプ9を形成し、また感光性樹脂
11の上面にバンプ8を形成する(第4図(d)参照)。
Thereafter, the conductive member 4 is filled in the recesses 13 and the holes 12 by plating the copper foil 10 with gold or the like, and the bumps 9 are formed in the recesses 13.
A bump 8 is formed on the upper surface of 11 (see FIG. 4D).

その後、銅箔10を金属エッチングによって除去する事
により、前記電気的接続部材1が完成する(第4図
(e)参照)。
Thereafter, the electrical connection member 1 is completed by removing the copper foil 10 by metal etching (see FIG. 4 (e)).

[発明が解決しようとする課題] しかしながら、上記の第3図に示す様な熱圧着、超音
波加熱法等によって金属化および/又は合金化する事に
より、電気回路部品の接続部と導電部材のバンプとを接
続する方法では、接続時に電気回路部品が熱に曝される
ため低耐熱性のものでは接続できないという問題があ
る。
[Problems to be Solved by the Invention] However, metallization and / or alloying by thermocompression bonding, ultrasonic heating, or the like as shown in FIG. The method of connecting the bumps has a problem that the electric circuit components are exposed to heat during the connection, so that connection cannot be made with a material having low heat resistance.

ところで、高温加熱によらず比較的低温の接着により
電気的接続を図る方法が既に公知になっている(特開昭
63−151031号公報)。この方法は紫外線硬化樹脂が塗布
された回路基板の電極とバンプ付き半導体素子の電極と
を位置決め、圧着し、紫外線を照射して樹脂の硬化収縮
を利用することにより電気的接続を行なうが、この方法
では樹脂の配合が難しく、所望の樹脂を得るのに技術的
な課題が多い。
By the way, a method of making electrical connection by bonding at a relatively low temperature without heating at a high temperature has already been known (Japanese Patent Application Laid-Open No.
No. 63-151031). In this method, the electrodes of the circuit board coated with the ultraviolet curable resin and the electrodes of the semiconductor element with bumps are positioned and pressed, and the electrical connection is made by irradiating ultraviolet rays and utilizing the curing shrinkage of the resin. In the method, it is difficult to mix the resin, and there are many technical problems to obtain a desired resin.

また、接続部に樹脂が含有され易いために接続抵抗値
が大きくなったり、熱膨張係数の差が大きくなるために
品質上の問題が生じたりする。
In addition, the connection portion is likely to contain the resin, so that the connection resistance value is increased, and the difference in thermal expansion coefficient is increased, thereby causing a quality problem.

さらに、隣接する接続部間に樹脂が存在するため熱膨
張係数の差が大きいために、剥れが生じたり、クラック
が生じ易すかったりする等の品質上の問題が生じたりす
る。
Further, since there is a resin between adjacent connection portions, a difference in thermal expansion coefficient is large, so that quality problems such as peeling and cracks are likely to occur.

本発明は、かかる事情に鑑みてなされたものであり、
接続部に比較的容易な方法で形成された導電性接着層を
有する基体を用いることにより、低温で容易に電気回路
部品と基体を接続することが可能で、かつ静電シールド
性の良い電気回路部材を提供することを目的とする。
The present invention has been made in view of such circumstances,
By using a base having a conductive adhesive layer formed by a relatively easy method at the connection part, the electric circuit component and the base can be easily connected at a low temperature, and the electric circuit has a good electrostatic shielding property. An object is to provide a member.

[課題を解決するための手段] すなわち、本発明は、電気的絶縁材からなる保持体
と、該保持体に相互に絶縁状態にて装備された複数の導
電部材とを有し、前記各導電部材の両端が前記保持体の
両面に保持体の面と同一かもしくは突出して露出してい
る電気的接続部材と、 電気的絶縁材上にパターンが描かれている基材の金属
電極上に、超微粒金属粉体又は金属化されたセラミック
粉体の一方又は両方を含有する接着性樹脂溶液から電気
泳動法によって共析形成された導電性接着層を有する接
続部を少なくとも1以上有し、該接続部において前記電
気的接続部材の保持体の一方の面において露出している
導電部材のうちの少なくとも1つの一端が接着により電
気的に接続されている少なくとも1以上の基体と、 少なくとも1以上の接続部を有し、該接続部において
前記電気的接続部材の保持体の他方の面において露出し
ている導電部材のうちの少なくとも1つの一端が電気的
に接続されている少なくとも1以上の電気回路部品とを
有し、 かつ前記基体の前記導電性接着層を有する面とは反対
の面の少なくとも一部分の金属表面上に、超微粒金属粉
体又は金属化されたセラミック粉体の一方又は両方を含
有する接着性樹脂溶液から電気泳動法によって共析形成
された導電性接着層を有することを特徴とする電気回路
部材である。
[Means for Solving the Problems] That is, the present invention includes a holder made of an electrically insulating material, and a plurality of conductive members mounted on the holder in a mutually insulated state. An electrical connection member in which both ends of the member are the same as or protrude from the surface of the holding body on both sides of the holding body, and on a metal electrode of a base material on which a pattern is drawn on an electrical insulating material, At least one or more connection portions having a conductive adhesive layer formed by electrophoresis from an adhesive resin solution containing one or both of ultrafine metal powder or metallized ceramic powder, At least one or more bases having at least one end of at least one of the conductive members exposed on one surface of the holding body of the electrical connection member at the connection portion, the at least one end being electrically connected by adhesion; Connection And at least one electric circuit component to which one end of at least one of the conductive members exposed on the other surface of the holder of the electrical connection member is electrically connected at the connection portion. And an adhesive containing one or both of an ultrafine metal powder or a metallized ceramic powder on at least a part of the metal surface of the substrate opposite to the surface having the conductive adhesive layer. An electric circuit member having a conductive adhesive layer formed by codeposition of a resin solution by electrophoresis.

以下、本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail.

本発明の電気回路部材は、電気的絶縁材からなる保持
体と、該保持体に相互に絶縁状態にて装備された複数の
導電部材とを有する電気的接続部材の一方の面において
露出している導電部材と、電極部に超微粒金属粉体又は
金属化されたセラミック粉体の一方又は両方を含有する
接着性樹脂溶液から電気泳動法によって共析形成された
導電性接着層を有する基体の接続部とが接着により電気
的に接続され、また前記電気的接続部材の他方の面にお
いて露出している導電部材と、電気回路部品の接続部と
が電気的に接続された構成からなるものである。
The electric circuit member of the present invention is exposed on one surface of an electrical connection member having a holder made of an electrically insulating material and a plurality of conductive members mounted on the holder in a mutually insulated state. Of a substrate having a conductive adhesive layer formed on the electrode portion by an electrophoretic method from an adhesive resin solution containing one or both of an ultrafine metal powder or a metallized ceramic powder in an electrode portion. The connection portion is electrically connected by bonding, and the conductive member exposed on the other surface of the electrical connection member and the connection portion of the electric circuit component are electrically connected. is there.

この導電性接着層は通常固体状であるが、本発明はこ
れに限定されず、例えば加熱されてゲル状或いはゾル状
になったものなどを用いる場合も含む。
This conductive adhesive layer is usually in a solid state, but the present invention is not limited to this. For example, a case in which a layer which is heated to a gel state or a sol state is used.

この本発明の電気回路部材は、低耐熱性の基体の場合
でも比較的低温の接着により接続することができるの
で、接続が容易であるとともに、基体の選択の範囲が広
がり応用範囲が広くなる。
Since the electric circuit member of the present invention can be connected by bonding at a relatively low temperature even in the case of a substrate having low heat resistance, the connection is easy, and the range of choice of the substrate is widened and the application range is widened.

また、接続部のみを接続するので熱膨張係数の相違に
よる品質上の問題が回避できるので、品質特性の良い電
気回路部材が得られる。
In addition, since only the connection portion is connected, a quality problem due to a difference in thermal expansion coefficient can be avoided, and an electric circuit member having good quality characteristics can be obtained.

さらに、本発明の電気回路部材は、基体の前記導電性
接着層を有する面とは反対の面の少なくとも一部分の金
属表面上に、超微粒金属粉体又は金属化されたセラミッ
ク粉体の一方又は両方を含有する接着性樹脂溶液から電
気泳動法によって共析形成された導電性接着層を設ける
ことにより、静電シールド性の優れた電気回路部材を得
ることが可能となる。
Further, the electric circuit member of the present invention may be provided on one or both of ultrafine metal powder or metalized ceramic powder on a metal surface of at least a part of a surface of the substrate opposite to the surface having the conductive adhesive layer. By providing a conductive adhesive layer formed by codeposition from an adhesive resin solution containing both of them, it becomes possible to obtain an electric circuit member having excellent electrostatic shielding properties.

また、電気回路部材の基体の電極上に形成される導電
性接着層に含有される超微粒金属粉体の平均粒径は0.01
〜2μm、および金属化されたセラミック粉体の平均粒
径は0.1〜5μmの範囲が望ましい。また、導電性接着
層に含有される超微粒金属粉体又は金属化されたセラミ
ック粉体の一方又は両方の含有量は30〜80wt%の範囲が
望ましい。
The average particle size of the ultrafine metal powder contained in the conductive adhesive layer formed on the electrode of the base of the electric circuit member is 0.01
The average particle size of the metalized ceramic powder is preferably in the range of 0.1 to 5 μm. The content of one or both of the ultrafine metal powder and the metalized ceramic powder contained in the conductive adhesive layer is preferably in the range of 30 to 80 wt%.

また、本発明の電気回路部材に用いられる電気回路部
品としては、例えば樹脂回路基板、金属回路基板、セラ
ミック回路基板、リードフレーム、半導体素子等の電気
回路部品であることが好ましい。また、基体は框体、回
路基板、リードフレームであることが好ましい。
The electric circuit component used in the electric circuit member of the present invention is preferably, for example, an electric circuit component such as a resin circuit board, a metal circuit board, a ceramic circuit board, a lead frame, and a semiconductor element. The base is preferably a frame, a circuit board, or a lead frame.

[実施例] 以下、実施例および参考例を示し本発明をさらに具体
的に説明する。
[Examples] Hereinafter, the present invention will be described more specifically with reference to Examples and Reference Examples.

参考例1 第1図(a),(b)は本発明の電気回路部材の一参
考例を示す模式図である。同図は、導電性接着層を有す
る回路基板と電気回路部品との間に電気的接続部材を介
して電気的接続をしている状態を示し、第1図(a)は
接続前の状態を示し、第1図(b)は接続後の状態を示
す。図中、1は電気的接続部材、3aは回路基板(基
体)、2は電気回路部品(半導体素子)を示す。
Reference Example 1 FIGS. 1A and 1B are schematic views showing one reference example of the electric circuit member of the present invention. FIG. 1A shows a state in which an electric connection is made between a circuit board having a conductive adhesive layer and an electric circuit component via an electric connection member. FIG. 1A shows a state before the connection. FIG. 1 (b) shows the state after connection. In the figure, 1 is an electrical connection member, 3a is a circuit board (base), 2 is an electric circuit component (semiconductor element).

電気的接続部材1は、公知の方法により製造すること
ができる。
The electrical connection member 1 can be manufactured by a known method.

第1図において、電気的接続部材1は、金からなる複
数の導電部材4を夫々の導電部材4同士を電気的に絶縁
して、ポリイミドからなる保持体5中に装備されて構成
されており、導電部材4の一端のバンブ8を電気回路部
品2側に露出させ、導電部材4の他端のバンブ9を回路
基板3a側に露出させている(第1図(a)参照)。
In FIG. 1, an electrical connection member 1 is configured by mounting a plurality of conductive members 4 made of gold in a holding body 5 made of polyimide by electrically insulating the conductive members 4 from each other. The bump 8 at one end of the conductive member 4 is exposed to the electric circuit component 2 and the bump 9 at the other end of the conductive member 4 is exposed to the circuit board 3a (see FIG. 1A).

そして、電気回路部品2のパッシベーション膜16に覆
われていない接続部15と、電気回路部品2側に露出した
導電部材4のバンブ8とを金属化および/又は合金化に
より接続し、回路基板3aの金属電極18上に形成された導
電性接着層14の接続部17と、回路基板3a側に露出した導
電部材4の他端のバンブ9とを接着により接続し電気的
接続を図る(第1図(b)参照)。
Then, the connection portion 15 of the electric circuit component 2 which is not covered with the passivation film 16 and the bump 8 of the conductive member 4 exposed on the electric circuit component 2 side are connected by metallization and / or alloying, and the circuit board 3a The connection portion 17 of the conductive adhesive layer 14 formed on the metal electrode 18 is connected to the bump 9 at the other end of the conductive member 4 exposed on the circuit board 3a side by bonding to achieve electrical connection (first). Fig. (B).

電気回路部品2の接続部のAl材料と導電部材であるAu
材料との接続温度は200〜400℃が望ましい。また、電気
回路部品2の接続部がAu材料の場合も200〜400℃で接続
できた。
Al material of the connection part of the electric circuit component 2 and Au as the conductive member
The connection temperature with the material is desirably 200 to 400 ° C. Also, when the connection portion of the electric circuit component 2 was made of Au material, the connection could be performed at 200 to 400 ° C.

一方、回路基板3aの導電性接着層14の接続部17と導電
部材のバンブ9との接続は180℃以下の低温で接続可能
であり良好な接続が得られた。
On the other hand, the connection between the connection portion 17 of the conductive adhesive layer 14 of the circuit board 3a and the bump 9 of the conductive member can be made at a low temperature of 180 ° C. or less, and good connection was obtained.

なお、接続の場合、電気回路部品2と回路基板3aとの
位置決めは必要であるが、電気的接続部材1の導電部材
4のピッチが電気回路部品2の接続部15および回路基板
3aの接続部17のピッチより小さいために電気的接続部材
1の位置決めは粗略で良い。
In the case of connection, the positioning of the electric circuit component 2 and the circuit board 3a is necessary, but the pitch of the conductive members 4 of the electric connection member 1 is different from the connection portion 15 of the electric circuit component 2 and the circuit board 3a.
Since the pitch of the connecting portion 17 of 3a is smaller than that of the connecting portion 17, the positioning of the electrical connecting member 1 may be rough.

次に、以下に基体の金属電極上に導電性接着層を形成
する方法の一例を示す。
Next, an example of a method for forming a conductive adhesive layer on a metal electrode of a base will be described below.

厚さ18μmの銅箔をアルコール溶剤脱脂後、アルカリ
クリーナ(商品名 パクナ#19 ユケン化学社製)30g/
で浴温70℃、1分間の脱脂を行った後、水洗,10%硫
酸液で酸洗いを30秒行い,水洗,脱塩水水洗して表面活
性処理を完了した。
Alcohol cleaner (Pakna # 19 manufactured by Yuken Chemical Co., Ltd.) 30 g /
After degreasing for 1 minute at a bath temperature of 70 ° C., washing with water and acid pickling with a 10% sulfuric acid solution were performed for 30 seconds, followed by washing with water and washing with demineralized water to complete the surface activation treatment.

次に、ポリエステル系樹脂(商品名FINETEX ES525、
大日本インキ化学社製)60重量部とポリエステル系樹脂
(商品名FINETEX525、大日本インキ化学社製)40重量
部、さらに架橋剤(商品名PERMASTAT R−5、大日本イ
ンキ化学社製)5重量部、触媒(商品名Cat PA−20、大
日本インキ化学社製)2.5重量部の割合で混合し、さら
に平均粒径0.02μmの銅粉体30重量部と平均粒径1μm
のアルミナの表面にニッケルめっきを0.2μmの厚さに
施した粉体20重量部を混合し、ボールミルにて30時間分
散した後、脱塩水にて15wt%に希釈し、25℃、pH8.5の
条件で基材を陽極とし、対極にステンレス板を用いて、
印加電圧100V、処理時間3分の電着処理を行ない、10μ
mの膜厚を得た。その後、被着体金属と貼合せ、50℃,1
0分間加熱して完成した。
Next, polyester resin (FINETEX ES525, trade name)
60 parts by weight of Dainippon Ink and Chemicals, 40 parts by weight of polyester resin (FINETEX525, trade name of Dainippon Ink and Chemicals), and 5 parts by weight of a crosslinking agent (PERMASTAT R-5, trade name of Dainippon Ink and Chemicals) Parts, 2.5 parts by weight of a catalyst (trade name: Cat PA-20, manufactured by Dainippon Ink and Chemicals, Inc.), and further 30 parts by weight of copper powder having an average particle size of 0.02 μm and an average particle size of 1 μm
20 parts by weight of a powder obtained by applying a nickel plating to a thickness of 0.2 μm on the surface of the alumina was dispersed in a ball mill for 30 hours, then diluted with demineralized water to 15% by weight, and the temperature was adjusted to 25 ° C. and pH 8.5. Using the substrate as the anode under the conditions of above and using a stainless steel plate as the counter electrode,
Perform an electrodeposition treatment with an applied voltage of 100 V and a treatment time of 3 minutes, and
m was obtained. Then, it is bonded to the adherend metal, 50 ℃, 1
Heated for 0 minutes to complete.

導電性接着層に用いる樹脂は、ポリエステル系の他ア
クリル系,エポキシ系,ポリアミド系,アクリル・メラ
ミン系,ポリアクリル酸系等の樹脂をベースにしてもよ
い。
The resin used for the conductive adhesive layer may be based on a resin such as an acrylic resin, an epoxy resin, a polyamide resin, an acrylic melamine resin, a polyacrylic acid resin, or the like, in addition to the polyester resin.

超微粒金属粉体には、銅に限らずAu,Ag,Al,Be,Ca,Mg,
Mo,Fe,Ni,Co,Mn,W,Cr,Nb,Zr,Ti,Ta,Zn,Sn,Pb−Sn等が挙
げられる。
Ultrafine metal powders are not limited to copper, but include Au, Ag, Al, Be, Ca, Mg,
Mo, Fe, Ni, Co, Mn, W, Cr, Nb, Zr, Ti, Ta, Zn, Sn, Pb-Sn and the like.

また、セラミック粉体は、SiO2,B2O3,Al2O3,Na2O,K
2O,CaO,ZnO,BaO,PbO,Sb2O3,As2O3,La2O3,ZrO2,P2O5,TiO
2,MgO,SiC,BeO,BP,BN,AlN,B4C,TaC,TiB2,CrB2,TiN,Si3N
4,Ta2O5等のセラミック,ダイヤモンド,ガラス,カー
ボン,ボロン等が挙げられる。
In addition, the ceramic powder is SiO 2 , B 2 O 3 , Al 2 O 3 , Na 2 O, K
2 O, CaO, ZnO, BaO, PbO, Sb 2 O 3 , As 2 O 3 , La 2 O 3 , ZrO 2 , P 2 O 5 , TiO
2, MgO, SiC, BeO, BP, BN, AlN, B 4 C, TaC, TiB 2, CrB 2, TiN, Si 3 N
4 , ceramics such as Ta 2 O 5 , diamond, glass, carbon, boron and the like.

金属化されたセラミック粉体は、上記セラミックス粉
体上に金属材料を付着したものが用いられる。金属材料
を付着する方法はめっき等の湿式でもよいし、または蒸
着,スパッタリング等の乾式方法でもよい。
As the metalized ceramic powder, a ceramic powder obtained by attaching a metal material to the above ceramic powder is used. The method for attaching the metal material may be a wet method such as plating or a dry method such as vapor deposition or sputtering.

また、電気的接続部材の導電部材に形成される導電性
接着層に含有される超微粒金属粉体の平均粒径は0.01〜
2μm、好ましくは0.05〜1.5μm、および金属化され
たセラミック粉体の平均粒径は0.1〜5μm、好ましく
は1.5〜4μmの範囲が望ましい。導電性接着層には、
超微粒金属粉体又は金属化されたセラミック粉体の一方
又は両方が含有されるが、その含有量は通常30〜80wt
%、好ましくは35〜45wt%の範囲が望ましい。
The average particle size of the ultrafine metal powder contained in the conductive adhesive layer formed on the conductive member of the electrical connection member is 0.01 to
2 μm, preferably 0.05 to 1.5 μm, and the average particle size of the metallized ceramic powder is in the range of 0.1 to 5 μm, preferably 1.5 to 4 μm. In the conductive adhesive layer,
One or both of ultra-fine metal powder or metallized ceramic powder is contained, but the content is usually 30 to 80 wt.
%, Preferably in the range of 35 to 45% by weight.

超微粒金属粉体および金属化されたセラミック粉体の
両方が含有される場合には、超微粒金属粉体100重量部
に対して金属化されたセラミック粉体20〜80重量部の割
合に配合した混合粉体が好ましい。
When both the ultrafine metal powder and the metallized ceramic powder are contained, the metallized ceramic powder is blended in a ratio of 20 to 80 parts by weight with respect to 100 parts by weight of the ultrafine metal powder. Mixed powders are preferred.

実施例1 第2図(a),(b)は本発明の電気回路部材の実施
例を示す模式図である。同図は、参考例1の回路基板3a
の導電性接着層14が形成された接続部17が設けられた面
とは反対側の面に銅箔を設け、その銅箔の上に導電性接
着層14bを参考例1の導電性接着層を設けた方法と同じ
方法で設けたものであり、その他は参考例1と同様の構
成からなるものである。この電気回路部材においては、
参考例1と同様に良好な接続が可能となり、さらに反対
面に導電性接着層を設けることにより静電シールド効果
が良い電気回路部材が得られた。
Example 1 FIGS. 2A and 2B are schematic views showing an example of an electric circuit member of the present invention. The figure shows the circuit board 3a of Reference Example 1.
A copper foil is provided on the surface opposite to the surface on which the connecting portion 17 on which the conductive adhesive layer 14 is formed is provided, and the conductive adhesive layer 14b is placed on the copper foil on the conductive adhesive layer of Reference Example 1. Are provided by the same method as the method provided with, and the other configuration is the same as that of the first embodiment. In this electric circuit member,
As in Reference Example 1, good connection was possible, and an electric circuit member having a good electrostatic shielding effect was obtained by providing a conductive adhesive layer on the opposite surface.

[発明の効果] 以上説明した様に、本発明の電気回路部材は、従来よ
りも狭ピッチ,多ピン接合が可能なため高密度な電気回
路部材を得ることができる。また、導電部材の配線長を
短くできるため、低抵抗配線となり、発熱も少なく、ま
た浮遊容量も減少するので、信号の遅れが少ない等の電
気特性が向上するため、電気特性が良い電気回路部材が
得らる。ことに高周波電気回路の場合にこの効果が大き
い。
[Effects of the Invention] As described above, the electric circuit member of the present invention can provide a high-density electric circuit member because it can perform a narrower pitch and more pins than conventional ones. Also, since the wiring length of the conductive member can be shortened, the wiring becomes low-resistance wiring, heat generation is reduced, and stray capacitance is reduced. Therefore, electric characteristics such as signal delay are improved, and electric characteristics are good. Is obtained. This effect is particularly great for high-frequency electric circuits.

また、本発明は、基体の金属電極上に、超微粒金属粉
体又は金属化されたセラミック粉体の一方又は両方を含
有する接着性樹脂溶液から電気泳動法によって共析形成
された導電性接着層を設けているので、接続にあって
は、接着による電気的接続が行なわれるので、比較的低
耐熱性の基材でも用いることが可能で、しかも容易に接
続ができるため応用範囲が広い部品および装置が得られ
る。
Further, the present invention provides a method for forming a conductive adhesive formed on a metal electrode of a base by an electrophoretic method from an adhesive resin solution containing one or both of an ultrafine metal powder and a metalized ceramic powder. Since the layer is provided, electrical connection by adhesion is performed in connection, so it is possible to use even a base material with relatively low heat resistance, and it can be easily connected, so parts with a wide application range And a device.

また、本発明においては、基体の接続部を有する面と
は反対の面の金属表面上に、前記導電性接着層を設けて
いるので、静電シールド効果の良い電気回路部材が得ら
れ、電気回路部材から外界へ、或いは外界から電気回路
部材へ入る電磁気ノイズを比較的遮断し易いため非常に
良好な電気回路部材が得られる。
Further, in the present invention, since the conductive adhesive layer is provided on the metal surface opposite to the surface having the connection portion of the base, an electric circuit member having a good electrostatic shielding effect can be obtained, A very good electric circuit member can be obtained because it is relatively easy to block electromagnetic noise from the circuit member to the outside or from the outside to the electric circuit member.

【図面の簡単な説明】[Brief description of the drawings]

第1図(a),(b)および第2図(a),(b)は各
々本発明の電気回路部材の参考例および実施例を示す模
式図であり、各図の(a)は接続前の状態、(b)は接
続後の状態を示す。第3図(a),(b)は従来例の電
気回路部材を示す模式図であり、(a)は接続前の状
態、(b)は接続後の状態を示す。第4図(a)〜
(e)は従来例の電気的接続部材の製造方法の一例を示
す工程図である。 1……電気的接続部材、2,3……電気回路部品 3a……回路基板(基体)、4……導電部材 5……保持体 6,7,15,17……接続部 8,9……バンプ、10……銅箔 11……感光性樹脂、12……穴 13……凹部 14,14a……導電性接着層 16……パッシベーション膜 18……金属電極
FIGS. 1 (a) and 1 (b) and FIGS. 2 (a) and 2 (b) are schematic views showing a reference example and an example of an electric circuit member according to the present invention, respectively. (B) shows a state before the connection, and (b) shows a state after the connection. 3 (a) and 3 (b) are schematic views showing a conventional electric circuit member, where (a) shows a state before connection and (b) shows a state after connection. Fig. 4 (a)-
(E) is a process drawing showing an example of a conventional method for manufacturing an electrical connection member. DESCRIPTION OF SYMBOLS 1 ... Electrical connection member, 2,3 ... Electrical circuit component 3a ... Circuit board (base), 4 ... Conductive member 5 ... Holder 6,7,15,17 ... Connection part 8,9 ... ... Bump, 10 ... Copper foil 11 ... Photosensitive resin, 12 ... Hole 13 ... Recess 14,14a ... Conductive adhesive layer 16 ... Passivation film 18 ... Metal electrode

フロントページの続き (58)調査した分野(Int.Cl.6,DB名) H01R 11/01 H01R 4/04 H05K 3/36 Continuation of the front page (58) Field surveyed (Int.Cl. 6 , DB name) H01R 11/01 H01R 4/04 H05K 3/36

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】電気的絶縁材からなる保持体と、該保持体
に相互に絶縁状態にて装備された複数の導電部材とを有
し、前記各導電部材の両端が前記保持体の両面に保持体
の面と同一かもしくは突出して露出している電気的接続
部材と、 電気的絶縁材上にパターンが描かれている基材の金属電
極上に、超微粒金属粉体又は金属化されたセラミック粉
体の一方又は両方を含有する接着性樹脂溶液から電気泳
動法によって共析形成された導電性接着層を有する接続
部を少なくとも1以上有し、該接続部において前記電気
的接続部材の保持体の一方の面において露出している導
電部材のうちの少なくとも1つの一端が接着により電気
的に接続されている少なくとも1以上の基体と、 少なくとも1以上の接続部を有し、該接続部において前
記電気的接続部材の保持体の他方の面において露出して
いる導電部材のうちの少なくとも1つの一端が電気的に
接続されている少なくとも1以上の電気回路部品とを有
し、 かつ前記基体の前記導電性接着層を有する面とは反対の
面の少なくとも一部分の金属表面上に、超微粒金属粉体
又は金属化されたセラミック粉体の一方又は両方を含有
する接着性樹脂溶液から電気泳動法によって共析形成さ
れた導電性接着層を有することを特徴とする電気回路部
材。
1. A holding member comprising an electrically insulating material, and a plurality of conductive members mounted on the holding member in a mutually insulated state, and both ends of each of the conductive members are provided on both surfaces of the holding member. An electrical connection member that is the same as or protrudes from the surface of the holding body, and an ultrafine metal powder or metallized metal electrode on a base metal electrode on which a pattern is drawn on an electrical insulating material. At least one or more connection portions having a conductive adhesive layer formed by electrophoresis from an adhesive resin solution containing one or both of the ceramic powders, and the connection portion holds the electrical connection member. At least one end of at least one of the conductive members exposed on one surface of the body has at least one or more bases electrically connected by adhesion, and at least one or more connection parts, and The electrical connection At least one of the conductive members exposed at the other surface of the material holding member, at least one end of which is electrically connected to at least one of the electric circuit components; and the conductive bonding of the base body On a metal surface of at least a part of a surface opposite to a surface having a layer, eutectoid formation from an adhesive resin solution containing one or both of ultrafine metal powder and metalized ceramic powder by electrophoresis. An electric circuit member having a conductive adhesive layer formed thereon.
【請求項2】前記導電性接着層に含有される超微粒金属
粉体の平均粒径は0.01〜2μmおよび金属化されたセラ
ミック粉体の平均粒径は0.1〜5μmであり、かつ導電
性接着層に含有される超微粒金属粉体又は金属化された
セラミック粉体の一方又は両方の含有量は30〜80wt%で
ある請求項1に記載の電気回路部材。
2. The method according to claim 1, wherein the average particle size of the ultrafine metal powder contained in the conductive adhesive layer is 0.01 to 2 μm and the average particle size of the metallized ceramic powder is 0.1 to 5 μm. The electric circuit member according to claim 1, wherein the content of one or both of the ultrafine metal powder and the metalized ceramic powder contained in the layer is 30 to 80 wt%.
【請求項3】電気回路部品は樹脂回路基板、金属回路基
板、セラミック回路基板、リードフレーム及び半導体素
子から選択される少なくとも一つである請求項1または
2に記載の電気回路部材。
3. The electric circuit member according to claim 1, wherein the electric circuit component is at least one selected from a resin circuit board, a metal circuit board, a ceramic circuit board, a lead frame, and a semiconductor element.
【請求項4】基体は框体、回路基板及びリードフレーム
から選択される少なくとも一つである請求項1乃至3の
いずれかの項に記載の電気回路部材。
4. The electric circuit member according to claim 1, wherein the base is at least one selected from a frame, a circuit board, and a lead frame.
JP2121494A 1990-05-11 1990-05-11 Electric circuit members Expired - Fee Related JP2895568B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2121494A JP2895568B2 (en) 1990-05-11 1990-05-11 Electric circuit members
US07/810,444 US5174766A (en) 1990-05-11 1991-12-19 Electrical connecting member and electric circuit member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2121494A JP2895568B2 (en) 1990-05-11 1990-05-11 Electric circuit members

Publications (2)

Publication Number Publication Date
JPH0419970A JPH0419970A (en) 1992-01-23
JP2895568B2 true JP2895568B2 (en) 1999-05-24

Family

ID=14812561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2121494A Expired - Fee Related JP2895568B2 (en) 1990-05-11 1990-05-11 Electric circuit members

Country Status (1)

Country Link
JP (1) JP2895568B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007243223A (en) * 2007-06-08 2007-09-20 Hitachi Chem Co Ltd Electronic component mounting structure
JP5001910B2 (en) * 2008-06-30 2012-08-15 シャープ株式会社 Electrode terminal connection structure and hard disk drive
CN103703671B (en) 2011-04-28 2018-02-23 赛伟科有限责任公司 Motor and motor controller

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63231890A (en) * 1987-03-19 1988-09-27 キヤノン株式会社 Electric connection member and electric circuit member employing the same
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Also Published As

Publication number Publication date
JPH0419970A (en) 1992-01-23

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