JPH0419970A - Electric circuit member - Google Patents

Electric circuit member

Info

Publication number
JPH0419970A
JPH0419970A JP2121494A JP12149490A JPH0419970A JP H0419970 A JPH0419970 A JP H0419970A JP 2121494 A JP2121494 A JP 2121494A JP 12149490 A JP12149490 A JP 12149490A JP H0419970 A JPH0419970 A JP H0419970A
Authority
JP
Japan
Prior art keywords
electric circuit
holder
conductive
adhesive layer
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2121494A
Other languages
Japanese (ja)
Other versions
JP2895568B2 (en
Inventor
Tetsuo Yoshizawa
吉沢 徹夫
Susumu Sumikura
角倉 進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2121494A priority Critical patent/JP2895568B2/en
Priority to US07/810,444 priority patent/US5174766A/en
Publication of JPH0419970A publication Critical patent/JPH0419970A/en
Application granted granted Critical
Publication of JP2895568B2 publication Critical patent/JP2895568B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/811Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector the bump connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/81101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector the bump connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a bump connector, e.g. provided in an insulating plate member

Landscapes

  • Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Combinations Of Printed Boards (AREA)
  • Wire Bonding (AREA)
  • Multi-Conductor Connections (AREA)

Abstract

PURPOSE:To easily connect each of electric circuit parts to a substrate at low temperatures by using a substrate which has a conductive adhesive layer at its connecting portion. CONSTITUTION:An electrically connecting member 1 comprises a plurality of conductive members 4 electrically insulated from each other and each mounted in a support 5 made from polyimide and a bump 8 at one end of each member 4 is exposed to the side of electric circuit parts 2 and a bump 9 at the other end of each conductive member 4 is exposed to the side of a circuit substrate 3a. The connecting portion 15 of the parts 2 which is not covered with a passivation film 16 and the bump 8 of each member 4 exposed to the side of the parts 2 are connected to each other by means of metallization and/or alloying and the connecting portion 17 of a conductive adhesive layer 14 formed on the metal electrode 18 of the circuit substrate 3a and the bump 9 at the other end of each member 4 exposed to the side of the circuit substrate 3a are connected to each other by means of adhesion, for achieving electrical connection. The connecting portion 17 of the layer 14 of the circuit substrate 3a and the bump 9 of each conductive member can be securely connected to each other at low temperatures below 18O deg.C.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は電気回路部材に関し、特に電気回路部品が電気
的接続部材を介して基体に接続されてなる電気回路部材
に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electric circuit member, and particularly to an electric circuit member in which an electric circuit component is connected to a base via an electrical connection member.

[背景の技術] 従来は框体、回路基板等の基体と電気回路部品との接続
はコネクタ一方法、圧着端子方法、はんだ付は方法、ワ
イヤボンディング方法、TAB (ティグ オウトメイ
テエド ポンディング: TapeAutomated
 Bonding)方法、CCB (コンドロールド 
コラアブスト ボンディング: Controlled
collapsed Bonding)方法、異方性導
電膜を用いる方法等が公知である。ところが、これらの
方法においては、隣接する接続部同士が接触しないよう
にする為の最小ピッチが比較的大きい為、接続部同士の
ピッチに小さいものが要求される場合には対応できない
という問題があった。更に、このような方法では配線が
長(なる為に抵抗値の増大、浮遊容量の増大を招くため
に電気的特性上問題があった。特に高周波電気回路では
顕著であった。
[Background technology] Conventionally, the connections between base bodies such as frames and circuit boards and electric circuit components have been made using connectors, crimp terminals, soldering, wire bonding, and TAB (Tape Automated).
bonding) method, CCB (chondral bonding) method,
Cola Abst Bonding: Controlled
A collapsed bonding method, a method using an anisotropic conductive film, and the like are known. However, in these methods, the minimum pitch required to prevent adjacent connection parts from coming into contact with each other is relatively large, so there is a problem that they cannot be used when a small pitch between connection parts is required. Ta. Furthermore, this method has problems in terms of electrical characteristics because the wiring becomes long, resulting in increased resistance and stray capacitance, which is particularly noticeable in high-frequency electrical circuits.

このような問題点を解決すべ(、絶縁保持体中に複数の
導電部材を相互に絶縁して保持させた構成をなす電気的
接続部材、又は絶縁保持体の内部及び/又は保持体面上
で配線されており、接続導電部材の両端が前記保持体の
両面に保持体の面と同一もしくは突出して露出している
構成をなす電気的接続部材を用いて電気回路部品同士を
電気的に接続する方法が提案されている(特開昭632
22437号公報、特開昭63−224235号公報等
)。
It is necessary to solve these problems (i.e., an electrical connection member that has a structure in which a plurality of conductive members are held insulated from each other in an insulating holder, or wiring inside the insulating holder and/or on the holder surface). A method of electrically connecting electrical circuit components using an electrical connecting member configured such that both ends of the connecting conductive member are exposed on both sides of the holder, flush with or protruding from the surface of the holder. has been proposed (Japanese Unexamined Patent Publication No. 632)
22437, JP-A-63-224235, etc.).

第3図(a) 、 (b)は、このような1つの電気的
接続部材を用いた電気回路部品間の電気的接続を示す模
式図であり、図中1は電気的接続部材、23は接続すべ
き電気回路部品を示す。電気的接続部材1は、金属又は
合金からなる複数の棒状の導電部材4を、各々の導電部
材4同士を電気的に絶縁して、電気的絶縁材料からなる
薄板上の保持体5中に保持した構成をなし、導電部材4
の両端を各々バンブ8及び9として電気回路部品2及び
3側に突出しである(第3図(a)参照)。
FIGS. 3(a) and 3(b) are schematic diagrams showing electrical connections between electrical circuit components using one such electrical connection member, in which 1 is the electrical connection member and 23 is the electrical connection member. Indicates electrical circuit components to be connected. The electrical connection member 1 includes a plurality of rod-shaped conductive members 4 made of metal or alloy, each of which is electrically insulated from each other, and held in a holder 5 on a thin plate made of an electrically insulating material. The conductive member 4
Both ends thereof are protruded toward the electric circuit components 2 and 3 as bumps 8 and 9, respectively (see FIG. 3(a)).

そして、一方の電気回路部品2の接続部6と導電部材4
のバンブ8とを、また、他方の電気回路部品3の接続部
7と導電部材4のバンブ9とを各々例えば熱圧着、超音
波加熱法等によって金属化および/又は合金化する事に
より接続し、電気回路部品2,3同士を電気的に接続す
る(第3図(b)参照)。
Then, the connecting portion 6 of one electric circuit component 2 and the conductive member 4
Also, the connecting portion 7 of the other electric circuit component 3 and the bump 9 of the conductive member 4 are connected by metallizing and/or alloying, for example, by thermocompression bonding, ultrasonic heating, etc. , the electric circuit components 2 and 3 are electrically connected to each other (see FIG. 3(b)).

ところで上記電気的接続部材1を製造する方法として第
4図(a)〜(e)に示す方法が提案されている。この
方法は、まず、導電材製の銅箔10上に前記保持体5と
なる感光性樹脂11を塗布する(第4図(a) !照)
。次に、後工程で前記導電部材4を埋設する所定の位置
を露光、現像することにより、感光性樹脂11に穴12
を形成して銅箔10を露出させる。次いで、温度を上げ
て感光性樹脂11を硬化させる(第4図(b)参照)。
By the way, the method shown in FIGS. 4(a) to 4(e) has been proposed as a method for manufacturing the electrical connection member 1. In this method, first, a photosensitive resin 11, which will become the holder 5, is applied onto a copper foil 10 made of a conductive material (see Fig. 4(a)!).
. Next, in a post-process, a predetermined position where the conductive member 4 is to be buried is exposed and developed to form a hole 12 in the photosensitive resin 11.
is formed to expose the copper foil 10. Next, the temperature is raised to harden the photosensitive resin 11 (see FIG. 4(b)).

そして穴12内の近傍の銅WIOのエツチングを行ない
穴12の下部に凹部13を形成する(第4図(c)参照
)。
Then, the copper WIO in the vicinity of the hole 12 is etched to form a recess 13 in the lower part of the hole 12 (see FIG. 4(c)).

その後、銅箔10に対する金等のめっき処理を行なう事
により、凹部13及び穴12内に導電部材4を充填して
いき、凹部13内に前記バンブ9を形成し、また感光性
樹脂11の上面にバンブ8を形成する(第4図(d)参
照)。
Thereafter, by plating the copper foil 10 with gold or the like, the conductive member 4 is filled in the recess 13 and the hole 12, the bump 9 is formed in the recess 13, and the upper surface of the photosensitive resin 11 is A bump 8 is formed on the surface (see FIG. 4(d)).

その後、銅箔10を金属エツチングによって除去する事
により、前記電気的接続部材1が完成する(第4図(e
)参照)。
Thereafter, the electrical connection member 1 is completed by removing the copper foil 10 by metal etching (Fig. 4(e)
)reference).

[発明が解決しようとする課題] しかしながら、上記の第3図に示す様な熱圧着、超音波
加熱法等によって金属化および/又は合金化する事によ
り、電気回路部品の接続部と導電部材のバンブとを接続
する方法では、接続時に電気回路部品が熱に曝されるた
め低耐熱性のものでは接続できないという問題がある。
[Problems to be Solved by the Invention] However, by metallizing and/or alloying by thermocompression bonding, ultrasonic heating, etc. as shown in FIG. In the method of connecting the bumps, there is a problem that the electrical circuit components are exposed to heat during the connection, and therefore it is impossible to connect with materials with low heat resistance.

ところで、高温加熱によらず比較的低温の接着により電
気的接続を図る方法が既に公知になっている(特開昭6
3−151031号公報)。この方法は紫外線硬化樹脂
が塗布された回路基板の電極とバンブ付き半導体素子の
電極とを位置決め、圧着し、紫外線を照射して樹脂の硬
化収縮を利用することにより電気的接続を行なうが、こ
の方法では樹脂の配合が難しく、所望の樹脂を得るのに
技術的な課題が多い。
By the way, there is already a known method for making electrical connections by adhesion at relatively low temperatures without using high-temperature heating (Japanese Unexamined Patent Publication No. 6
3-151031). In this method, the electrodes of the circuit board coated with ultraviolet curable resin and the electrodes of the bumped semiconductor element are positioned, crimped, and irradiated with ultraviolet rays to make electrical connections by utilizing the curing and shrinkage of the resin. With this method, it is difficult to blend the resin, and there are many technical issues in obtaining the desired resin.

また、接続部に樹脂が含有され易いために接続抵抗値が
大きくなったり、熱膨張係数の差が太き(なるために品
質上の問題が生じたりする。
In addition, since resin is likely to be contained in the connection portion, the connection resistance value becomes large, and the difference in thermal expansion coefficients becomes large (because of this, quality problems occur).

さらに、隣接する接続部間に樹脂が存在するため熱膨張
係数の差が大きいために、剥れが生じたり、クラックが
生じ易すがったりする等の品質上の問題が生じたりする
Furthermore, since resin is present between adjacent connection parts, there is a large difference in coefficient of thermal expansion, resulting in quality problems such as peeling and cracking.

本発明は、かかる事情に鑑みてなされたものであり、接
続部に比較的容易な方法で形成された導電性接着層を有
する基体を用いることにより、低温で容易に電気回路部
品と基体を接続することが可能な電気回路部材を提供す
ることを目的とする。
The present invention has been made in view of the above circumstances, and it is possible to easily connect an electric circuit component and a base at a low temperature by using a base having a conductive adhesive layer formed by a relatively easy method at the connection part. The purpose of the present invention is to provide an electric circuit member that can perform the following steps.

[課題を解決するための手段] 即ち、本発明は、電気的絶縁材からなる保持体と、該保
持体に相互に絶縁状態にて装備された複数の導電部材と
を有し、前記各導電部材の両端が前記保持体の両面に保
持体の面と同一かもしくは突出して露出している電気的
接続部材と、電気的絶縁材上にパターンが描かれている
基材の金属電極上に、超微粒金属粉体又は金属化された
セラミック粉体の一方又は両方を含有する接着性樹脂溶
液から電気泳動法によって共析形成された導電性接着層
を有する接続部を少なくとも1以上有し、該接続部にお
いて前記電気的接続部材の保持体の一方の面において露
出している導電部材のうちの少な(とも1つの一端が接
着により電気的に接続されている少なくとも1以上の基
体と、 少なくとも1以上の接続部を有し、該接続部において前
記電気的接続部材の保持体の他方の面において露出して
いる導電部材のうちの少なくとも1つの一端が電気的に
接続されている少なくとも1以上の電気回路部品と を有することを特徴とする電気回路部材である。
[Means for Solving the Problems] That is, the present invention includes a holder made of an electrically insulating material, and a plurality of conductive members installed on the holder in a mutually insulated state, and each of the conductive members An electrical connection member whose both ends are exposed on both sides of the holder at the same level as or protruding from the surface of the holder, and a metal electrode of the base material on which a pattern is drawn on the electrical insulating material, It has at least one connecting portion having a conductive adhesive layer formed by electrophoresis from an adhesive resin solution containing one or both of ultrafine metal powder and metallized ceramic powder, and At least one of the conductive members exposed on one surface of the holder of the electrical connection member at the connection portion (at least one base body to which one end is electrically connected by adhesive, and at least one At least one or more electrically conductive members having the above-mentioned connection portions, and one end of at least one of the conductive members exposed on the other surface of the holder of the electrical connection member at the connection portion is electrically connected. An electric circuit member characterized by having an electric circuit component.

以下、本発明の詳細な説明する。The present invention will be explained in detail below.

本発明の電気回路部材は、電気的絶縁材からなる保持体
と、該保持体に相互に絶縁状態にて装備された複数の導
電部材とを有する電気的接続部材の一方の面において露
出している導電部材と、電極部に超微粒金属粉体又は金
属化されたセラミック粉体の一方又は両方を含有する接
着性樹脂溶液から電気泳動法によって共析形成された導
電性接着層を有する基体の接続部とが接着により電気的
に接続され、また前記電気的接続部材の他方の面におい
て露出している導電部材と、電気回路部品の接続部とが
電気的に接続された構成からなるものである。
The electric circuit member of the present invention includes a holder made of an electrically insulating material and a plurality of electrically conductive members installed on the holder in a mutually insulated state. A substrate having a conductive member and a conductive adhesive layer eutectoid formed by electrophoresis from an adhesive resin solution containing one or both of ultrafine metal powder and metalized ceramic powder in the electrode part. The connecting part is electrically connected by adhesive, and the conductive member exposed on the other surface of the electrical connecting member is electrically connected to the connecting part of the electric circuit component. be.

この導電性接着層は通常固体状であるが、本発明はこれ
に限定されず、例えば加熱されてゲル状或いはゾル状に
なったものなどを用いる場合も含む。
Although this conductive adhesive layer is usually in a solid state, the present invention is not limited thereto, and includes cases in which, for example, it is heated to become a gel or sol.

この本発明の電気回路部材は、低耐熱性の基体の場合で
も比較的低温の接着により接続することができるので、
接続が容易であるとともに、基体の選択の範囲が広がり
応用範囲が広くなる。
The electric circuit member of the present invention can be connected by adhesion at a relatively low temperature even in the case of a substrate with low heat resistance.
Not only is connection easy, but the range of substrate selection is widened, and the range of applications is widened.

また、接続部のみを接続するので熱膨張係数の相違によ
る品質上の問題が回避できるので、品質特性の良い電気
回路部材が得られる。
Further, since only the connecting portions are connected, quality problems due to differences in thermal expansion coefficients can be avoided, so that an electric circuit member with good quality characteristics can be obtained.

また、本発明の電気回路部材においては、電気的接続部
材に設けられている複数の導電部材のうちの所定の導電
部材が相互に導通するように保持体の内部及び/又は保
持体面上で配線されていることが好ましい。
Further, in the electric circuit member of the present invention, wiring is provided inside the holder and/or on the surface of the holder so that predetermined conductive members among the plurality of conductive members provided in the electrical connection member are electrically connected to each other. It is preferable that the

さらに、本発明の電気回路部材は、基体の前記導電性接
着層を有する面とは反対の面の少なくとも一部分の金属
表面上に、超微粒金属粉体又は金属化されたセラミック
粉体の一方又は両方を含有する接着性樹脂溶液から電気
泳動法によって共析形成された導電性接着層を設けるこ
とにより、シールド性の優れた電気回路部材を得ること
が可能となる。
Further, in the electric circuit member of the present invention, one of ultrafine metal powder or metallized ceramic powder or By providing a conductive adhesive layer eutectoidally formed from an adhesive resin solution containing both by electrophoresis, it is possible to obtain an electrical circuit member with excellent shielding properties.

また、電気回路部材の基体の電極上に形成される導電性
接着層に含有される超微粒金属粉体の平均粒径は0.O
1〜2p、m、および金属化されたセラミック粉体の平
均粒径は0.1〜5Hの範囲が望ましい。また、導電性
接着層に含有される超微粒金属粉体又は金属化されたセ
ラミック粉体の一方又は両方の含有量は30〜80wt
%の範囲が望ましい。
Further, the average particle size of the ultrafine metal powder contained in the conductive adhesive layer formed on the electrode of the base of the electric circuit member is 0. O
The average particle size of the metallized ceramic powder is preferably in the range of 1 to 2p, m, and 0.1 to 5H. Further, the content of one or both of the ultrafine metal powder and the metallized ceramic powder contained in the conductive adhesive layer is 30 to 80 wt.
A range of % is desirable.

また、本発明の電気回路部材に用いられる電気回路部品
としては、例えば樹脂回路基板、金属回路基板、セラミ
ック回路基板、リードフレーム、半導体素子等の電気回
路部品であることが好ましい。また、基体は框体、回路
基板、リードフレームであることが好ましい。
Furthermore, the electric circuit components used in the electric circuit member of the present invention are preferably electric circuit components such as resin circuit boards, metal circuit boards, ceramic circuit boards, lead frames, and semiconductor elements. Moreover, it is preferable that the base body is a frame, a circuit board, or a lead frame.

[実施例] 以下、実施例を示し本発明をさらに具体的に説明する。[Example] Hereinafter, the present invention will be explained in more detail with reference to Examples.

実施例1 第1図(a) 、 (b)は本発明の電気回路部材の一
実施例を示す模式図である。同図は、導電性接着層を有
する回路基板と電気回路部品との間に電気的接続部材を
介して電気的接続をしている状態を示し、第1図(a)
は接続前の状態を示し、第1図(b)は接続後の状態を
示す。図中、1は電気的接続部材、3aは回路基板(基
体)、2は電気回路部品(半導体素子)を示す。
Example 1 FIGS. 1(a) and 1(b) are schematic diagrams showing an example of the electric circuit member of the present invention. This figure shows a state in which an electrical connection is made between a circuit board having a conductive adhesive layer and an electric circuit component via an electrical connection member, and FIG.
shows the state before connection, and FIG. 1(b) shows the state after connection. In the figure, 1 is an electrical connection member, 3a is a circuit board (substrate), and 2 is an electric circuit component (semiconductor element).

電気的接続部材1は、公知の方法により製造することが
できる。
The electrical connection member 1 can be manufactured by a known method.

第1図において、電気的接続部材1は、金からなる複数
の導電部材4を夫々の導電部材4同士を電気的に絶縁し
て、ポリイミドからなる保持体5中に装備されて構成さ
れており、導電部材4の端のバンブ8を電気回路部品2
側に露出させ、導電部材4の他端のバンブ9を回路基板
3a側に露出させている(第1図(a) ?照)。
In FIG. 1, the electrical connection member 1 is constructed by installing a plurality of conductive members 4 made of gold in a holder 5 made of polyimide with the conductive members 4 electrically insulated from each other. , the bump 8 at the end of the conductive member 4 is connected to the electric circuit component 2
The bump 9 at the other end of the conductive member 4 is exposed to the circuit board 3a side (see FIG. 1(a)).

そして、電気回路部品2のパッシベーション膜16に覆
われていない接続部15と、電気回路部品2側に露出し
た導電部材4のバンブ8とを金属化および/又は合金化
により接続し、回路基板3aの金属電極18上に形成さ
れた導電性接着層14の接続部17と、回路基板3a側
に露出した導電部材4の他端のバンブ9とを接着により
接続し電気的接続を図る(第1図(b)参照 )。
Then, the connecting portion 15 of the electric circuit component 2 that is not covered with the passivation film 16 and the bump 8 of the conductive member 4 exposed on the side of the electric circuit component 2 are connected by metallization and/or alloying, and the circuit board 3a The connecting portion 17 of the conductive adhesive layer 14 formed on the metal electrode 18 is connected by adhesive to the bump 9 at the other end of the conductive member 4 exposed on the circuit board 3a side to establish an electrical connection (first (see figure (b)).

電気回路部品2の接続部のAP材料と導電部材であるA
u材料との接続温度は200〜400℃が望ましい。ま
た、電気回路部品2の接続部がAu材料の場合も 20
0〜400℃で接続できた。
The AP material of the connection part of the electric circuit component 2 and the conductive member A
The connection temperature with the u material is preferably 200 to 400°C. Also, when the connection part of the electric circuit component 2 is made of Au material, 20
Connection was possible between 0 and 400°C.

一方、回路基板3aの導電性接着層14の接続部17と
導電部材のバンブ9との接続は180℃以下の低温で接
続可能であり良好な接続が得られた。
On the other hand, the connection between the connecting portion 17 of the conductive adhesive layer 14 of the circuit board 3a and the bump 9 of the conductive member was possible at a low temperature of 180° C. or lower, and a good connection was obtained.

なお、接続の場合、電気回路部品2と回路基板3aとの
位置決めは必要であるが、電気的接続部材1の導電部材
4のピッチが電気回路部品2の接続部15および回路基
板3aの接続部17のピッチより小さいために電気的接
続部材lの位置決めは粗略で良い。
In addition, in the case of connection, it is necessary to position the electric circuit component 2 and the circuit board 3a, but the pitch of the conductive members 4 of the electrical connection member 1 is set so that the pitch between the connection portion 15 of the electric circuit component 2 and the connection portion of the circuit board 3a is Since the pitch is smaller than 17, the positioning of the electrical connection member 1 may be rough.

次に、以下に基体の金属電極上に導電性接着層を形成す
る方法の一例を示す。
Next, an example of a method for forming a conductive adhesive layer on a metal electrode of a base will be described below.

厚さ18pmの銅箔をアルコール溶剤脱脂後、アルカリ
クリーナ(商品名 パクナ#19  ユケン化学社製)
 30g/ρで浴温70℃、1分間の脱脂を行った後、
水洗、 10%硫酸液で酸洗いを30秒行い、水洗、脱
塩水水洗して表面活性処理を完了した。
After degreasing 18 pm thick copper foil with alcohol solvent, use alkaline cleaner (product name Pakuna #19, manufactured by Yuken Chemical Co., Ltd.)
After degreasing at 30 g/ρ for 1 minute at a bath temperature of 70°C,
Washing with water, pickling with a 10% sulfuric acid solution for 30 seconds, washing with water, and washing with demineralized water completed the surface activation treatment.

次に、ポリエステル系樹脂(商品名FINETEXES
525、大日本インキ化学社製)60重量部とポリエス
テル系樹脂(商品名FINETEX 525、大日本イ
ンキ化学社製)40重量部、さらに架橋剤(商品名PE
RMASTAT R−5、犬巳本インキ化学社製)5重
量部、触媒(商品名 Cat PA−20、大日本イン
キ化学社製)2.5重量部の割合で混合し、さらに平均
粒径0.02pmの銅粉体30重量部と平均粒径1μm
のアルミナの表面にニッケルめっきを0.2μmの厚さ
に施した粉体20重量部を混合し、ボールミルにて30
時間分散した後、脱塩水にて15wt%に希釈し、25
℃、pHg、 5の条件で基材を陽極とし、対極にステ
ンレス板を用いて、印加電圧100V、処理時間3分の
電着処理を行ない、1101Lの膜厚を得た。その後、
被着体金属と貼合せ、50℃、 10分間加熱して完成
した。
Next, polyester resin (product name FINETEXES)
525, manufactured by Dainippon Ink Chemical Co., Ltd.), 40 parts by weight of polyester resin (trade name: FINETEX 525, manufactured by Dainippon Ink Chemical Co., Ltd.), and a crosslinking agent (trade name: PE
RMASTAT R-5, manufactured by Inumimoto Ink Chemical Co., Ltd.), 5 parts by weight, and a catalyst (trade name: Cat PA-20, manufactured by Dainippon Ink Chemical Co., Ltd.), 2.5 parts by weight, were mixed, and further, an average particle size of 0. 02pm copper powder 30 parts by weight and average particle size 1μm
20 parts by weight of nickel-plated powder with a thickness of 0.2 μm was mixed on the surface of alumina, and 30 parts by weight was mixed in a ball mill.
After being dispersed for a period of time, diluted to 15 wt% with demineralized water,
C., pHg, 5, using the substrate as an anode and a stainless steel plate as a counter electrode, an electrodeposition process was carried out at an applied voltage of 100 V and a processing time of 3 minutes to obtain a film thickness of 1101 L. after that,
It was completed by laminating it to the adherend metal and heating it at 50°C for 10 minutes.

導電性接着層に用いる樹脂は、ポリエステル系の他アク
リル系、エポキシ系、ポリアミド系、アクリル・メラミ
ン系、ポリアクリル酸系等の樹脂をベースにしてもよい
The resin used for the conductive adhesive layer may be based on acrylic, epoxy, polyamide, acrylic/melamine, polyacrylic acid, or other resins in addition to polyester.

超微粒金属粉体には、銅に限らずAu、 Ag+ AR
+Be、 Ca、 Mg、 Mo、 Fe、 Ni、 
Co、 Mn、 W、 Cr、 Nb。
Ultrafine metal powders include not only copper but also Au, Ag+ AR
+Be, Ca, Mg, Mo, Fe, Ni,
Co, Mn, W, Cr, Nb.

Zr、 Ti、 Ta、 Zn、 Sn、 Pb−3n
等が挙げられる。
Zr, Ti, Ta, Zn, Sn, Pb-3n
etc.

また、セラミック粉体は、SiO2,B20a、 Aj
’20a。
In addition, ceramic powders include SiO2, B20a, Aj
'20a.

Na2O,K2O,Cab、 ZnO,Bad、 Pb
O,5b2()3. AS203La203. ZrO
□、 P2O5,Ti0z、 MgO,SiC,Bed
、 BPBN、 AfN、 B4C,TaC,TiBz
、 CrBz、 TiN、 Si3N4゜Ta205等
のセラミック、ダイヤモンド、ガラス。
Na2O, K2O, Cab, ZnO, Bad, Pb
O,5b2()3. AS203La203. ZrO
□, P2O5, Ti0z, MgO, SiC, Bed
, BPBN, AfN, B4C, TaC, TiBz
, CrBz, TiN, ceramics such as Si3N4°Ta205, diamond, glass.

カーボン、ボロン等が挙げられる。Examples include carbon and boron.

金属化されたセラミック粉体は、上記セラミックス粉体
上に金属材料を付着したものが用いられる。金属材料を
付着する方法はめつき等の湿式でもよいし、または蒸着
、スパッタリング等の乾式方法でもよい。
The metallized ceramic powder used is the above-mentioned ceramic powder with a metal material attached thereto. The method for attaching the metal material may be a wet method such as plating, or a dry method such as vapor deposition or sputtering.

また、電気的接続部材の導電部材に形成される導電性接
着層に含有される超微粒金属粉体の平均粒径は0.01
〜2μm、好ましくは0.05〜1.5ルm、および金
属化されたセラミック粉体の平均粒径は0.1〜5pm
、好ましくは1.5〜4μmの範囲が望ましい。導電性
接着層には、超微粒金属粉体又は金属化されたセラミッ
ク粉体の一方又は両方が含有されるが、その含有量は通
常30〜80wt%、好ましくは35〜45wt%の範
囲が望ましい。
Further, the average particle size of the ultrafine metal powder contained in the conductive adhesive layer formed on the conductive member of the electrical connection member is 0.01
~2μm, preferably 0.05-1.5μm, and the average particle size of the metallized ceramic powder is 0.1-5pm
, preferably in the range of 1.5 to 4 μm. The conductive adhesive layer contains one or both of ultrafine metal powder and metalized ceramic powder, and the content is usually 30 to 80 wt%, preferably 35 to 45 wt%. .

超微粒金属粉体および金属化されたセラミック粉体の両
方が含有される場合には、超微粒金属粉体100重量部
に対して金属化されたセラミック粉体20〜80重量部
の割合に配合した混合粉体が好ましい。
When both ultrafine metal powder and metallized ceramic powder are contained, the metalized ceramic powder is mixed at a ratio of 20 to 80 parts by weight to 100 parts by weight of the ultrafine metal powder. It is preferable to use a mixed powder.

実施例2 第2図(a) 、 (b)は本発明の電気回路部材の他
の実施例を示す模式図である。同図は、実施例1の回路
基板3aの導電性接着層14が形成された接続部17が
設けられた面とは反対側の面に銅箔を設け、その銅箔の
上に導電性接着層14bを実施例1の導電性接着層を設
けた方法と同じ方法で設けたものであり、その他は実施
例1と同様の構成からなるものである。この電気回路部
材においては、良好な接続が可能となり、さらにシール
ド効果が良い電気回路部材が得られた。
Embodiment 2 FIGS. 2(a) and 2(b) are schematic diagrams showing another embodiment of the electric circuit member of the present invention. The figure shows that a copper foil is provided on the surface of the circuit board 3a of Example 1 opposite to the surface on which the connection portion 17 on which the conductive adhesive layer 14 is formed, and a conductive adhesive is applied on the copper foil. The layer 14b was provided in the same manner as the conductive adhesive layer in Example 1, and the other components were the same as in Example 1. In this electric circuit member, a good connection was possible and an electric circuit member with a good shielding effect was obtained.

[発明の効果コ 以上説明した様に、本発明の電気回路部材は、従来より
も狭ピッチ、多ビン接合が可能なため高密度な電気回路
部材を得ることができる。また、導電部材の配線長を短
くできるため、低抵抗配線となり、発熱も少なく、また
浮遊容量も減少するので、信号の遅れが少ない等の電気
特性が向上するため、電気特性が良い電気回路部材が得
らる。
[Effects of the Invention] As explained above, the electric circuit member of the present invention allows for narrower pitch and multi-bin joining than conventional ones, so that a high-density electric circuit member can be obtained. In addition, since the wiring length of the conductive member can be shortened, it becomes a low-resistance wiring, generates less heat, and reduces stray capacitance, which improves electrical characteristics such as less signal delay, making it an electrical circuit material with good electrical characteristics. is obtained.

ことに高周波電気回路の場合にこの効果が太きい。This effect is particularly strong in high-frequency electrical circuits.

また、本発明は、基体の金属電極上に、超微粒金属粉体
又は金属化されたセラミック粉体の一方又は両方を含有
する接着性樹脂溶液から電気泳動性によって共析形成さ
れた導電性接着層を設けているので、接続にあっては、
接着による電気的接続が行なわれるので、比較的低耐熱
性の基材でも用いることが可能で、しかも容易に接続が
できるため応用範囲が広い部品および装置が得られる。
Further, the present invention provides a conductive adhesive formed eutectoid by electrophoresis from an adhesive resin solution containing one or both of ultrafine metal powder and metallized ceramic powder on a metal electrode of a substrate. Since there are layers, when it comes to connections,
Since electrical connections are made by adhesion, it is possible to use base materials with relatively low heat resistance, and since connections can be made easily, parts and devices with a wide range of applications can be obtained.

また、本発明においては、基体の接続部を有する面とは
反対の面の金属表面上に、前記導電性接着層を設けてい
るので、シールド効果の良い電気回路部材が得られ、電
気回路部材から外界へ、或いは外界から電気回路部材へ
入る電磁気ノイズを比較的遮断し易いため非常に良好な
電気回路部材が得られる。
Further, in the present invention, since the conductive adhesive layer is provided on the metal surface of the base opposite to the surface having the connecting portion, an electric circuit member with a good shielding effect can be obtained. Since it is relatively easy to block electromagnetic noise entering the electric circuit member from the outside world or from the outside world, a very good electric circuit member can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、(b)および第2図(a) 、 (b)
は各々本発明の電気回路部材の一実施例を示す模式図で
あり、各図の(a)は接続前の状態、(b)は接続後の
状態を示す。第3図(a)、(b)は従来例の電気回路
部材を示す模式図であり、(a)は接続前の状態、(b
)は接続後の状態を示す。第4図(a)〜(e)は従来
例の電気的接続部材の製造方法の一例を示す工程図であ
る。 1・・・電気的接続部材  2,3・・・電気回路部品
3a・・・回路基板(基体)4・・・導電部材5・・・
保持体 6、7.15.17・・・接続部 8.9・・・バンブ    10・・・銅箔11・・・
感光性樹脂    12・・・穴13・・・凹部 14、14a・・・導電性接着層 16・・・パッシベーション膜 18・・・金属電極
Figure 1 (a), (b) and Figure 2 (a), (b)
1A and 1B are schematic diagrams showing one embodiment of the electric circuit member of the present invention, in which (a) in each figure shows a state before connection, and (b) shows a state after connection. FIGS. 3(a) and 3(b) are schematic diagrams showing conventional electric circuit members, in which (a) is the state before connection, (b)
) indicates the status after connection. FIGS. 4(a) to 4(e) are process diagrams showing an example of a conventional method of manufacturing an electrical connection member. 1... Electrical connection member 2, 3... Electric circuit component 3a... Circuit board (base) 4... Conductive member 5...
Holder 6, 7.15.17... Connection portion 8.9... Bump 10... Copper foil 11...
Photosensitive resin 12... Hole 13... Concave portions 14, 14a... Conductive adhesive layer 16... Passivation film 18... Metal electrode

Claims (6)

【特許請求の範囲】[Claims] (1)電気的絶縁材からなる保持体と、該保持体に相互
に絶縁状態にて装備された複数の導電部材とを有し、前
記各導電部材の両端が前記保持体の両面に保持体の面と
同一かもしくは突出して露出している電気的接続部材と
、 電気的絶縁材上にパターンが描かれている基材の金属電
極上に、超微粒金属粉体又は金属化されたセラミック粉
体の一方又は両方を含有する接着性樹脂溶液から電気泳
動法によって共析形成された導電性接着層を有する接続
部を少なくとも1以上有し、該接続部において前記電気
的接続部材の保持体の一方の面において露出している導
電部材のうちの少なくとも1つの一端が接着により電気
的に接続されている少なくとも1以上の基体と、 少なくとも1以上の接続部を有し、該接続部において前
記電気的接続部材の保持体の他方の面において露出して
いる導電部材のうちの少なくとも1つの一端が電気的に
接続されている少なくとも1以上の電気回路部品と を有することを特徴とする電気回路部材。
(1) It has a holder made of an electrically insulating material, and a plurality of conductive members installed in the holder in a mutually insulated state, and both ends of each of the conductive members are attached to the holder on both sides of the holder. an electrical connection member that is exposed on the same side as the surface of The holder of the electrical connection member has at least one connection portion having a conductive adhesive layer formed by electrophoresis from an adhesive resin solution containing one or both of the electrical connection members. At least one end of at least one of the conductive members exposed on one surface has at least one or more base body to which one end is electrically connected by adhesive, and at least one or more connection part, and at the connection part, the An electric circuit member characterized in that it has at least one electric circuit component to which one end of at least one of the conductive members exposed on the other surface of the holder of the electric connection member is electrically connected. .
(2)請求項1に記載の電気回路部材において、電気的
接続部材に設けられている複数の導電部材のうちの所定
の導電部材が相互に導通するように保持体の内部及び/
又は保持体面上で配線されていることを特徴とする電気
回路部材。
(2) In the electric circuit member according to claim 1, the inside of the holder and/or
Or an electric circuit member characterized in that wiring is provided on the surface of the holder.
(3)基体の前記導電性接着層を有する面とは反対の面
の少なくとも一部分の金属表面上に、超微粒金属粉体又
は金属化されたセラミック粉体の一方又は両方を含有す
る接着性樹脂溶液から電気泳動法によって共析形成され
た導電性接着層を有する請求項1または2に記載の電気
回路部材。
(3) An adhesive resin containing one or both of ultrafine metal powder and metallized ceramic powder on at least a portion of the metal surface of the substrate opposite to the surface having the conductive adhesive layer. The electric circuit member according to claim 1 or 2, comprising a conductive adhesive layer formed eutectoid from a solution by electrophoresis.
(4)前記導電性接着層に含有される超微粒金属粉体の
平均粒径は0.01〜2μmおよび金属化されたセラミ
ック粉体の平均粒径は0.1〜5μmであり、かつ導電
性接着層に含有される超微粒金属粉体又は金属化された
セラミック粉体の一方又は両方の含有量は30〜80w
t%である請求項1、2または3に記載の電気回路部材
(4) The average particle size of the ultrafine metal powder contained in the conductive adhesive layer is 0.01 to 2 μm, and the average particle size of the metallized ceramic powder is 0.1 to 5 μm, and The content of one or both of the ultrafine metal powder and the metalized ceramic powder contained in the adhesive layer is 30 to 80 W.
The electric circuit member according to claim 1, 2 or 3, which is t%.
(5)電気回路部品は樹脂回路基板、金属回路基板、セ
ラミック回路基板、リードフレーム、半導体素子である
請求項1乃至4のいずれかの項に記載の電気回路部材。
(5) The electric circuit member according to any one of claims 1 to 4, wherein the electric circuit component is a resin circuit board, a metal circuit board, a ceramic circuit board, a lead frame, or a semiconductor element.
(6)基体は框体、回路基板、リードフレームである請
求項1乃至4のいずれかの項に記載の電気回路部材。
(6) The electric circuit member according to any one of claims 1 to 4, wherein the base body is a frame, a circuit board, or a lead frame.
JP2121494A 1990-05-11 1990-05-11 Electric circuit members Expired - Fee Related JP2895568B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2121494A JP2895568B2 (en) 1990-05-11 1990-05-11 Electric circuit members
US07/810,444 US5174766A (en) 1990-05-11 1991-12-19 Electrical connecting member and electric circuit member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2121494A JP2895568B2 (en) 1990-05-11 1990-05-11 Electric circuit members

Publications (2)

Publication Number Publication Date
JPH0419970A true JPH0419970A (en) 1992-01-23
JP2895568B2 JP2895568B2 (en) 1999-05-24

Family

ID=14812561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2121494A Expired - Fee Related JP2895568B2 (en) 1990-05-11 1990-05-11 Electric circuit members

Country Status (1)

Country Link
JP (1) JP2895568B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007243223A (en) * 2007-06-08 2007-09-20 Hitachi Chem Co Ltd Electronic component mounting structure
JP2010009713A (en) * 2008-06-30 2010-01-14 Sharp Corp Connection structure of electrode terminal
US9654032B2 (en) 2011-04-28 2017-05-16 Sevcon Limited Electric motor and motor controller

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63231890A (en) * 1987-03-19 1988-09-27 キヤノン株式会社 Electric connection member and electric circuit member employing the same
JPH02877A (en) * 1988-02-24 1990-01-05 Canon Inc Nonmagnetic toner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63231890A (en) * 1987-03-19 1988-09-27 キヤノン株式会社 Electric connection member and electric circuit member employing the same
JPH02877A (en) * 1988-02-24 1990-01-05 Canon Inc Nonmagnetic toner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007243223A (en) * 2007-06-08 2007-09-20 Hitachi Chem Co Ltd Electronic component mounting structure
JP2010009713A (en) * 2008-06-30 2010-01-14 Sharp Corp Connection structure of electrode terminal
US9654032B2 (en) 2011-04-28 2017-05-16 Sevcon Limited Electric motor and motor controller

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