JP2868845B2 - Amine sensor - Google Patents

Amine sensor

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Publication number
JP2868845B2
JP2868845B2 JP16033890A JP16033890A JP2868845B2 JP 2868845 B2 JP2868845 B2 JP 2868845B2 JP 16033890 A JP16033890 A JP 16033890A JP 16033890 A JP16033890 A JP 16033890A JP 2868845 B2 JP2868845 B2 JP 2868845B2
Authority
JP
Japan
Prior art keywords
sensor
ruo
atomic
amine
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16033890A
Other languages
Japanese (ja)
Other versions
JPH0450756A (en
Inventor
吉展 松浦
誠 江頭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUIGARO GIKEN KK
Original Assignee
FUIGARO GIKEN KK
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Filing date
Publication date
Application filed by FUIGARO GIKEN KK filed Critical FUIGARO GIKEN KK
Priority to JP16033890A priority Critical patent/JP2868845B2/en
Publication of JPH0450756A publication Critical patent/JPH0450756A/en
Application granted granted Critical
Publication of JP2868845B2 publication Critical patent/JP2868845B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 [発明の利用分野] この発明は、アンモニア、トリメチルアミン、アニリ
ン等のアミン化合物のセンサに関する。
The present invention relates to a sensor for amine compounds such as ammonia, trimethylamine, and aniline.

[従来技術] アンモニア、トリメチルアミン、アニリン等のアミン
化合物は代表的な悪臭物質の1つであり、その臭いは鮮
魚類の腐敗臭として知られている。アミン化合物を代表
するものとしてトリメチルアミンを用いることが一般的
であり、鮮魚類から発生するトリメチルアミン濃度を測
定し、魚介類の鮮度判定を行うことが提案されている。
しかしながら、半導体ガスセンサのアミン化合物への感
度は低く、魚介類の鮮度判定への応用は困難である。な
お特開昭60−202,345号は、WO3に2〜10重量%のRuO2
添加したガスセンサを開示している。このガスセンサは
一酸化炭素用のガスセンサであり、2〜10重量%のRuO2
添加は、Ru/Wの原子比に換算すると3.5〜17原子%の添
加に相当する。発明者らはこのガスセンサの追試を行っ
たが、センサはアミン感度を示さなかった(第3図,第
4図参照)。
[Prior Art] Amine compounds such as ammonia, trimethylamine, and aniline are one of the typical malodorous substances, and the smell is known as putrid smell of fresh fish. It is common to use trimethylamine as a representative of the amine compound, and it has been proposed to measure the concentration of trimethylamine generated from fresh fish to determine the freshness of fish and shellfish.
However, the sensitivity of the semiconductor gas sensor to amine compounds is low, and it is difficult to apply the sensor to freshness determination of fish and shellfish. Note JP 60-202,345 discloses a gas sensor with the addition of RuO 2 2-10 wt% WO 3. This gas sensor is a gas sensor for carbon monoxide, and 2-10% by weight of RuO 2
The addition corresponds to an addition of 3.5 to 17 atomic% in terms of the atomic ratio of Ru / W. The inventors performed an additional test of this gas sensor, but the sensor did not show amine sensitivity (see FIGS. 3 and 4).

[発明の課題] この発明の課題は、アミン化合物に高感度な半導体ガ
スセンサを提供することにある。
[Problem of the Invention] An object of the present invention is to provide a semiconductor gas sensor that is highly sensitive to an amine compound.

[発明の構成] この発明では、WO3にRu/Wの原子比で0.01〜0.6(Ru/W
atm.%)のRuO2を添加する。WO3はアミン感度の高い金
属酸化物半導体であり、これにRu/Wの原子比で0.01原子
%以上のRuO2を添加するとアミン感度が著しく向上し、
0.6%原子程度まで高いアミン感度が得られる。以下Ru/
Wの原子比を%単位で表した単位を、単に%あるいは原
子%という。なおWO3の式量は231.9、RuO2の式量は133.
1であり、Ru/Wで1原子%のRuO2は0.57RuO2/WO3重量%
に相当する。一方1原子%を越えるRuO2添加では、アミ
ン感度は失われてしまう。
[Configuration of the Invention] In the present invention, the WO 3 in atomic ratio of Ru / W 0.01~0.6 (Ru / W
atm.%) of RuO 2 is added. WO 3 is a metal oxide semiconductor having a high amine sensitivity, and the addition of RuO 2 in an atomic ratio of Ru / W of 0.01 atomic% or more significantly improves the amine sensitivity,
High amine sensitivity can be obtained up to about 0.6% atom. Ru /
The unit expressing the atomic ratio of W in units of% is simply referred to as% or atomic%. The formula weight of WO 3 is 231.9, and the formula weight of RuO 2 is 133.
1 and 1 atomic% of RuO 2 in Ru / W is 0.57RuO 2 / WO 3 % by weight
Is equivalent to On the other hand, when RuO 2 exceeds 1 atomic%, amine sensitivity is lost.

RuO2に変えPtやPd,Ir,Auを用いても、アミンへの増感
作用は得られない。
Even if Pt, Pd, Ir, or Au is used instead of RuO 2 , no sensitizing effect on the amine is obtained.

[実施例] センサの調製 タングステン酸アンモニウムを500℃で熱分解し、粉
砕後に塩化ルテニウム(4価)水溶液を含浸させ、500
℃で塩化ルテニウムを熱分解した。塩化ルテニウムを含
浸させたWO3をアルミナパイプの表面に塗布し、700℃で
5分間焼結し、センサとした。塩化ルテニウムに変え、
塩化白金酸、Pdの王水溶液、塩化イリジウム、塩化金酸
の各水溶液を加え、比較例のセンサとした。またタング
ステン酸アンモニウムに変え、WO3を出発母材としたも
のを用い、同様のセンサを調製した。更にWO3に変え、
スズ酸のゾルを500℃で熱分解したものを用い、同様に
塩化ルテニウムの水溶液を含浸させ、熱分解後に焼結し
てセンサとした。
[Example] Preparation of sensor Ammonium tungstate was pyrolyzed at 500 ° C, pulverized, and impregnated with an aqueous ruthenium chloride (tetravalent) solution.
The ruthenium chloride was pyrolyzed at ℃. WO 3 impregnated with ruthenium chloride was applied to the surface of an alumina pipe and sintered at 700 ° C. for 5 minutes to obtain a sensor. Change to ruthenium chloride,
Aqueous solutions of chloroplatinic acid and Pd, aqueous solutions of iridium chloride and chloroauric acid were added to obtain sensors of comparative examples. A similar sensor was prepared using WO 3 as a starting material instead of ammonium tungstate. Further change to WO 3 ,
Using a stannic acid sol that was thermally decomposed at 500 ° C., it was similarly impregnated with an aqueous solution of ruthenium chloride and sintered after thermal decomposition to form a sensor.

WO3の調整方法やRuO2の添加方法、あるいはセンサの
構造は任意である。またセンサには、アルミナゾル、シ
リカゲル等のバインダーを焼結時に加えても良い。なお
タングステン酸アンモニウムを出発材料としたものも、
WO3を出発材料としたものも、同等の結果を示したの
で、以下タングステン酸アンモニウムを出発材料とする
センサについて説明する。
Adjusting method and the method of adding the RuO 2 of WO 3, or the structure of the sensor is optional. A binder such as alumina sol or silica gel may be added to the sensor during sintering. In addition, those using ammonium tungstate as a starting material,
Since the sensor using WO 3 as a starting material showed the same result, a sensor using ammonium tungstate as a starting material will be described below.

第8図に、センサの構造を示す。2はRuO2を添加した
WO3の厚膜、4はアルミナパイプ、6,8は一対の電極、10
はヒータである。
FIG. 8 shows the structure of the sensor. 2 added RuO 2
WO 3 thick film, 4 is an alumina pipe, 6, 8 is a pair of electrodes, 10
Is a heater.

特性 第1図に、WO3に0.1原子%のRuO2を加えたセンサにつ
いて、280℃の結果を示す。結果は、エタノール100ppm
中での抵抗値R0を基準に示す。水素への感度は低く、ト
リメチルアミン(TMA),NH3,エタノールにほぼ同等の
感度を示す。
Characteristics FIG. 1 shows the results at 280 ° C. for a sensor obtained by adding 0.1 atomic% of RuO 2 to WO 3 . The result is 100 ppm ethanol
The resistance value R0 is shown as a reference. Sensitivity to hydrogen is low, showing almost the same sensitivity to trimethylamine (TMA), NH 3 and ethanol.

第2図に、同じセンサについて350℃での結果を示
す。この温度でも、TMAやNH3への感度は高い。
FIG. 2 shows the results at 350 ° C. for the same sensor. Even at this temperature, the sensitivity to TMA and NH 3 is high.

第3図に、RuO2/WO3系センサについて、RuO2濃度の
影響を示す。測定温度は280℃、縦軸は各100ppmのガス
への感度を示す。0.01原子%のRu添加でアミン感度は著
しく増加し、0.1原子%付近に最適値があり、0.5原子%
でも高いアミン感度が得られる。しかし1原子%以上の
添加では、アミン感度は失われる。
FIG. 3 shows the effect of the RuO 2 concentration on the RuO 2 / WO 3 sensor. The measurement temperature was 280 ° C., and the vertical axis represents the sensitivity to 100 ppm of each gas. Amine sensitivity increased markedly with the addition of 0.01 atomic% of Ru, with an optimum value near 0.1 atomic% and 0.5 atomic%.
However, high amine sensitivity can be obtained. However, the addition of 1 atomic% or more results in loss of amine sensitivity.

第4図に、RuO2/WO3系センサについて、350℃でのRu
O2濃度の影響を示す。第3図と同様、0.01〜0.5原子%
で、高いアミン感度が得られる。
FIG. 4 shows Ru at 350 ° C. for the RuO 2 / WO 3 based sensor.
The effect of O 2 concentration is shown. As in Fig. 3, 0.01 to 0.5 atomic%
And high amine sensitivity can be obtained.

第5図に、WO3に対する各0.1原子%の添加効果を示す
(測定温度280℃)。RuO2以外の添加物では、アミンへ
の感度は低い。第6図に、350℃の測定温度での結果を
示す。RuO2以外では、アミン感度は低い。
FIG. 5 shows the effect of adding 0.1 atomic% of each to WO 3 (measuring temperature 280 ° C.). Additives other than RuO 2 are less sensitive to amines. FIG. 6 shows the result at the measurement temperature of 350 ° C. Except for RuO 2 , amine sensitivity is low.

第7図に、430℃でのATMへの応答特性を示す。縦軸は
センサ抵抗Rsを示す。
FIG. 7 shows the response characteristics to ATM at 430 ° C. The vertical axis indicates the sensor resistance Rs.

SnO2/RuO2センサとWO3/RuO2センサの比較結果を表
1に示す。測定温度は280℃である。
Table 1 shows a comparison result between the SnO 2 / RuO 2 sensor and the WO 3 / RuO 2 sensor. The measurement temperature is 280 ° C.

[発明の効果] この発明では、トリメチルアミン等のアミン化合物に
高感度なガスセンサが得られ、魚介類の鮮度判定等の利
用が可能になる。
[Effects of the Invention] According to the present invention, a gas sensor that is highly sensitive to an amine compound such as trimethylamine can be obtained, and can be used for determining the freshness of fish and shellfish.

【図面の簡単な説明】[Brief description of the drawings]

第1図は、実施例の特性図(Ru/Wの原子比0.1%、測定
温度280℃)、 第2図は、実施例の特性図(Ru/Wの原子比0.1%、測定
温度350℃)、 第3図は、Ru/W比を変えた際の実施例の特性図(測定温
度280℃)、 第4図は、Ru/W比を変えた際の実施例の特性図(測定温
度350℃)、 第5図は、添加物の種類の効果を示す特性図(測定温度
280℃)、 第6図は、添加物の種類の効果を示す特性図(測定温度
350℃)、 第7図は、実施例の応答波形を示す特性図(測定温度43
0℃)、 第8図は、実施例のセンサの断面図である。
FIG. 1 is a characteristic diagram of the embodiment (Ru / W atomic ratio 0.1%, measurement temperature 280 ° C.). FIG. 2 is a characteristic diagram of the embodiment (Ru / W atomic ratio 0.1%, measurement temperature 350 ° C.). ), FIG. 3 is a characteristic diagram of the embodiment when the Ru / W ratio is changed (measuring temperature 280 ° C.), and FIG. 4 is a characteristic diagram of the embodiment when the Ru / W ratio is changed (measuring temperature). Fig. 5 is a characteristic diagram showing the effect of the type of additive (measurement temperature)
FIG. 6 is a characteristic diagram (measurement temperature) showing the effect of the type of additive.
FIG. 7 is a characteristic diagram showing the response waveform of the embodiment (measured at 43 ° C).
FIG. 8 is a sectional view of the sensor of the embodiment.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】WO3にRuO2をRu/Wの原子比で、 0.01〜0.6原子%添加した、アミンセンサ。1. An amine sensor in which RuO 2 is added to WO 3 at an atomic ratio of Ru / W of 0.01 to 0.6 atomic%.
JP16033890A 1990-06-18 1990-06-18 Amine sensor Expired - Fee Related JP2868845B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16033890A JP2868845B2 (en) 1990-06-18 1990-06-18 Amine sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16033890A JP2868845B2 (en) 1990-06-18 1990-06-18 Amine sensor

Publications (2)

Publication Number Publication Date
JPH0450756A JPH0450756A (en) 1992-02-19
JP2868845B2 true JP2868845B2 (en) 1999-03-10

Family

ID=15712821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16033890A Expired - Fee Related JP2868845B2 (en) 1990-06-18 1990-06-18 Amine sensor

Country Status (1)

Country Link
JP (1) JP2868845B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6096267A (en) * 1997-02-28 2000-08-01 Extraction Systems, Inc. System for detecting base contaminants in air
US6207460B1 (en) 1999-01-14 2001-03-27 Extraction Systems, Inc. Detection of base contaminants in gas samples
JP4918262B2 (en) * 2006-01-26 2012-04-18 本田技研工業株式会社 Lawn mower
CN113340944B (en) * 2021-06-11 2024-06-28 郑州轻工业大学 Pt-ZnO@TiC ternary material for high-sensitivity aniline detection and preparation method and application thereof
CN113758974B (en) * 2021-08-30 2023-06-27 中国科学院合肥物质科学研究院 Oxide semiconductor gas sensor and preparation method and application thereof

Also Published As

Publication number Publication date
JPH0450756A (en) 1992-02-19

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