JP2850191B2 - Substrate arrangement pitch converter - Google Patents

Substrate arrangement pitch converter

Info

Publication number
JP2850191B2
JP2850191B2 JP2708194A JP2708194A JP2850191B2 JP 2850191 B2 JP2850191 B2 JP 2850191B2 JP 2708194 A JP2708194 A JP 2708194A JP 2708194 A JP2708194 A JP 2708194A JP 2850191 B2 JP2850191 B2 JP 2850191B2
Authority
JP
Japan
Prior art keywords
substrate
substrate holding
holding members
arrangement pitch
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2708194A
Other languages
Japanese (ja)
Other versions
JPH072308A (en
Inventor
浩 佐々木
泰彦 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2708194A priority Critical patent/JP2850191B2/en
Publication of JPH072308A publication Critical patent/JPH072308A/en
Application granted granted Critical
Publication of JP2850191B2 publication Critical patent/JP2850191B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、例えばキャリア方式
による表面処理装置などにおいて、半導体基板等の薄板
状被処理基板(以下単に基板という)を、基板収容カセ
ットから基板移載用ロボットで取り出して配列ピッチの
異なる基板処理用カセットへ差し替える場合等に用いら
れる基板の配列ピッチ変換装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier-type surface treatment apparatus, for example, in which a thin substrate to be processed (hereinafter simply referred to as a "substrate") such as a semiconductor substrate is taken out of a substrate storage cassette by a substrate transfer robot. The present invention relates to a substrate arrangement pitch conversion device used for replacing a substrate processing cassette with a different arrangement pitch.

【0002】[0002]

【技術の背景】近年、半導体技術の高度化とともに基板
の製造工程における高度な品質が要求されるようにな
り、これに伴って基板を搬送用キャリアから表面処理用
のキャリアへ移し換えて表面処理するキャリアバッチ方
式や、キャリアを用いないキャリアレス方式により基板
を表面処理するようになった。両方式ともに可能な限り
塵埃を表面処理槽内に持ち込まないようにしている。
2. Description of the Related Art In recent years, with the advancement of semiconductor technology, a high level of quality in a substrate manufacturing process has been demanded, and accordingly, a substrate has been transferred from a carrier for transport to a carrier for surface treatment to perform surface treatment. Substrates have been surface-treated by a carrier batch method or a carrierless method using no carrier. Both types try to keep dust out of the surface treatment tank as much as possible.

【0003】例えば図7は、2個のキャリア1から2群
の基板W1・W2を取り出して他方の基板処理槽14へ一
括して移し替える工程を示している。ここで、符号2は
上下・左右方向に移動可能なキャリア載置台、5はキャ
リア1内の各基板Wのオリエンテーションフラットを整
合する整合装置、6はキャリア載置台2の水平移動位置
よりも下方に固定配置され、各基板キャリア1内の基板
Wを相対的に押し上げて一括保持する基板保持具、13
は基板保持具6の架台10を相互に接離自在に連結する
リンク、15は基板保持具6で保持したキャリア2個分
(50枚)の基板Wを一括保持して搬送する基板チャッ
クである。
[0003] For example, FIG. 7 shows a process of taking out two groups of substrates W 1 and W 2 from two carriers 1 and collectively transferring them to the other substrate processing tank 14. Here, reference numeral 2 denotes a carrier mounting table movable vertically and horizontally, 5 denotes an alignment device for aligning the orientation flat of each substrate W in the carrier 1, and 6 denotes a lower position than the horizontal movement position of the carrier mounting table 2. A substrate holder 13 that is fixedly arranged and relatively pushes up and holds the substrates W in each substrate carrier 1 collectively;
Is a link connecting the pedestals 10 of the substrate holder 6 so as to be able to come and go with each other, and 15 is a substrate chuck for holding and transporting two (50) substrates W for two carriers held by the substrate holder 6 at a time. .

【0004】上記装置によれば、リンク13で2群の基
板W1・W2を相互に接近させることにより、全ての基板
を整列方向へ略等ピッチに配列し、基板チャック15で
一括保持して移し替えることができる。上記基板の一括
移し替えに際して、配列ピッチのより細かい基板処理槽
14へ基板を移し替えることができれば好都合である。
例えば基板の表面処理においては、基板処理槽14の容
積が小さくて済み、複数の基板処理槽14を有する処理
装置では、処理装置全体の設置面積が小さくなる等の利
点があるからである。
According to the above apparatus, all the substrates are arranged at substantially equal pitches in the alignment direction by bringing the two groups of substrates W 1 and W 2 closer to each other by the link 13, and are held together by the substrate chuck 15. Can be transferred. When transferring the substrates at once, it is convenient if the substrates can be transferred to the substrate processing tank 14 having a finer arrangement pitch.
For example, in the surface treatment of a substrate, the volume of the substrate processing tank 14 may be small, and a processing apparatus having a plurality of substrate processing tanks 14 has advantages such as a reduced installation area of the entire processing apparatus.

【0005】[0005]

【従来の技術】基板の配列ピッチを変換する従来技術と
しては、例えば実公昭56−33149号に開示された
ものが知られている。それは、図8で示すように、基板
Wを受け取るために一列に整列配置された複数の基板保
持部材121と、これらの基板保持部材121を整列
(上下)方向へ等ピッチPに拘束する傾斜揺動部材12
2とを具備して成り、上記傾斜揺動部材122を操作バ
ンドル123で所要角度θになるように傾斜揺動するこ
とにより、複数の基板保持部材121の配列ピッチPを
一括して変換するように構成されている。なお、符号1
01は基板を収納するキャリア、127は傾斜揺動部材
122の揺動支軸である。
2. Description of the Related Art As a conventional technique for converting the arrangement pitch of substrates, for example, the technique disclosed in Japanese Utility Model Publication No. Sho 56-33149 is known. As shown in FIG. 8, a plurality of substrate holding members 121 are arranged in a line to receive a substrate W, and a tilting swing that restrains these substrate holding members 121 at an equal pitch P in the alignment (vertical) direction. Moving member 12
The inclination pitch of the plurality of substrate holding members 121 is changed at a time by tilting the tilt rocking member 122 by the operation bundle 123 so as to have the required angle θ. Is configured. Note that reference numeral 1
Reference numeral 01 denotes a carrier for accommodating the substrate, and 127 denotes a swing support shaft of the tilt swing member 122.

【0006】[0006]

【発明が解決しようとする課題】上記従来例は、基板保
持部材121が直接傾斜揺動部材122に拘束されてい
るため、上記傾斜揺動部材122を傾斜揺動すれば、各
基板保持部材121の整列方向が傾斜し、この基板保持
部材121で支持した基板Wの整列方向も傾斜する。こ
のため、基板の移し替えに際して、別のキャリアを介在
させる必要が生じる等、基板の移し替えに手間取るとい
う問題がある。特に図7で示すような基板チャック15
で基板を一括保持して移し替える場合には実用不可能で
ある。本発明はこのような事情を考慮してなされたもの
で、整列ピッチを一括して変換する際に、基板保持部材
で支持した基板の整列方向が傾斜することのない配列ピ
ッチ変換装置を提供し、もって基板の移し替えを簡便に
することを技術課題とする。
In the above prior art, since the substrate holding member 121 is directly restrained by the tilt rocking member 122, if the tilt rocking member 122 is tilted and rocked, each substrate holding member 121 is tilted. Is inclined, and the direction of alignment of the substrate W supported by the substrate holding member 121 is also inclined. For this reason, there is a problem that it takes time to transfer the substrate, such as the necessity of interposing another carrier when transferring the substrate. In particular, the substrate chuck 15 as shown in FIG.
It is not practical to transfer the substrate while holding the substrate at once. The present invention has been made in view of such circumstances, and provides an arrangement pitch conversion device in which the alignment direction of a substrate supported by a substrate holding member is not inclined when the alignment pitch is changed collectively. Accordingly, it is an object of the present invention to simplify the transfer of a substrate.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に、本発明が採用した手段は、基板を保持するために一
列に整列配置された複数の基板保持部材と、これらの基
板保持部材を整列方向へ等ピッチに拘束する傾斜揺動部
材とを具備して成り、上記傾斜揺動部材を傾斜揺動する
ことにより、複数の基板保持部材の配列ピッチを一括し
て変換するように構成した基板の配列ピッチ変換装置に
おいて、上記複数の基板保持部材を、ガイド支持部材に
より基板の主面と直交する方向へ一列に摺動自在に拘束
し、上記各基板保持部材には、その主面に平行な方向へ
走る被係合部を形成するとともに、上記傾斜揺動部材に
は複数の係合部材を等ピッチで設け、これらの係合部材
を上記各基板保持部材の被係合部に係合することによ
り、複数の基板保持部材を整列方向へ等ピッチに拘束す
るように構成したことを特徴とするものである。
In order to solve the above-mentioned problems, a means adopted by the present invention comprises a plurality of substrate holding members arranged in a line for holding a substrate, and a plurality of the substrate holding members. And a tilt rocking member for restraining the pitch at an equal pitch in the alignment direction. The tilt rocking member tilts and rocks to convert the arrangement pitch of the plurality of substrate holding members at once. In the arrangement pitch conversion device for substrates, the plurality of substrate holding members are slidably restrained in a line in a direction orthogonal to the main surface of the substrate by a guide support member, and each of the substrate holding members has In addition to forming an engaged portion that runs in a parallel direction, the inclined swinging member is provided with a plurality of engaging members at an equal pitch, and these engaging members are engaged with the engaged portions of the substrate holding members. Hold multiple substrates by combining It is characterized in that it has configured to restrain the equal pitch wood into alignment direction.

【0008】[0008]

【発明の作用】本発明は、以下のように作用する。複数
の基板保持部材は、傾斜揺動部材の係合部材を各基板保
持部材の被係合部に係合することにより、整列方向へ等
ピッチて拘束されている。そして、上記傾斜揺動部材を
整列方向に対して傾斜揺動することにより、複数の基板
保持部材の配列ピッチは一括して変換される。このと
き、複数の基板保持部材はガイド支持部材により基板の
主面と直交する方向へ一列に摺動自在に拘束されている
ので、傾斜揺動部材を傾斜揺動しても、各基板保持部材
の整列方向は傾斜することなく配列ピッチのみを変換す
ることができる。
The present invention operates as follows. The plurality of substrate holding members are restrained at an equal pitch in the alignment direction by engaging the engaging members of the tilt swing members with the engaged portions of the respective substrate holding members. The pitch of the plurality of substrate holding members is changed at a time by tilting and rocking the tilt rocking member with respect to the alignment direction. At this time, since the plurality of substrate holding members are slidably restrained in a line in a direction orthogonal to the main surface of the substrate by the guide supporting members, even if the tilting rocking member is tilted and rocked, each substrate holding member is Can be changed only in the arrangement pitch without inclination.

【0009】[0009]

【実施例】以下本発明の実施例を図面に基づいてさらに
詳しく説明する。図1は本発明の第1の実施例に係る基
板の配列ピッチ変換装置の斜視図である。なお、符号2
0は配列ピッチ変換装置全体を示す。この実施例装置2
0は、起立状態で一列に整列配置された複数の基板保持
部材21と、上記複数の基板保持部材21を基板Wの主
面と直交する水平方向へ一列に摺動自在に拘束するガイ
ド支持部材25と、上記基板保持部材21を前後整列方
向へ等ピッチPで拘束する傾斜揺動部材26とを具備し
て成る。
Embodiments of the present invention will be described below in more detail with reference to the drawings. FIG. 1 is a perspective view of a substrate arrangement pitch conversion device according to a first embodiment of the present invention. Note that reference numeral 2
0 indicates the entire arrangement pitch conversion device. This embodiment device 2
Reference numeral 0 denotes a plurality of substrate holding members 21 arranged in a line in a standing state, and a guide support member slidably restraining the plurality of substrate holding members 21 in a line in a horizontal direction orthogonal to the main surface of the substrate W. 25, and an inclined rocking member 26 for restraining the substrate holding member 21 at an equal pitch P in the front-rear alignment direction.

【0010】上記各基板保持部材21の上端部には、基
板Wを起立状態で保持する基板保持溝22が形成され、
略中央部には角棒状のガイド支持部材25が貫通する挿
通孔23が開口形成され、左右両側部には基板Wの主面
に平行な方向へ走る被係合凹部24が形成されている。
なお、符号23aはスライドベアリングである。これに
より、各基板保持部材21は、起立姿勢を維持したまま
ガイド支持部材25に沿って前後方向へ円滑に移動でき
る。なお、基板保持部材21をフッ素樹脂材料で製作
し、スライドベアリングを省略することもできる。
At the upper end of each substrate holding member 21, a substrate holding groove 22 for holding the substrate W in an upright state is formed.
An insertion hole 23 through which a rectangular bar-shaped guide support member 25 penetrates is formed substantially in the center, and an engaged recess 24 that runs in a direction parallel to the main surface of the substrate W is formed in both left and right sides.
Reference numeral 23a denotes a slide bearing. Accordingly, each substrate holding member 21 can move smoothly in the front-rear direction along the guide support member 25 while maintaining the upright posture. Note that the substrate holding member 21 may be made of a fluororesin material, and the slide bearing may be omitted.

【0011】上記傾斜揺動部材26は、前後方向に走る
左右一対の揺動杆26a・26bを連結部材26cで連
結して一体揺動可能に構成され、この揺動杆26a・2
6bの略中央部が揺動支軸27により揺動可能に枢支さ
れている。そして、これら左右の揺動杆26a・26b
の内側面には複数の係合凸部材28が等ピッチPで突設
され、これらの各係合凸部材28を上記各基板保持部材
21の被係合凹部24に係入することにより、複数の基
板保持部材21は前後方向へ等ピッチPで拘束される。
The inclined rocking member 26 is constituted by a pair of right and left rocking bars 26a and 26b running in the front-rear direction and connected by a connecting member 26c so as to be integrally rockable.
A substantially central portion of 6b is pivotally supported by a swing support shaft 27 so as to be swingable. The left and right swinging rods 26a and 26b
A plurality of engaging convex members 28 are protruded from the inner side surface at an equal pitch P. By engaging these engaging convex members 28 with the engaged concave portions 24 of the substrate holding members 21, The substrate holding member 21 is restrained at a constant pitch P in the front-rear direction.

【0012】即ち、上記傾斜揺動部材21を整列方向に
対して所定角度θだけ傾斜揺動することにより、複数の
基板保持部材21の配列ピッチPはP・COSθに変換され
る。このとき、複数の基板保持部材21はガイド支持部
材25により基板Wの主面と直交する前後方向へ一列に
摺動自在に拘束されているので、傾斜揺動部材26を傾
斜揺動しても、各基板保持部材21の整列方向は傾斜す
ることなく配列ピッチPのみを変換することができる。
ちなみに、所定角度θが60゜のときは変換後の配列ピ
ッチは当初の配列ピッチPの1/2になる。
That is, by oscillating the tilt oscillating member 21 by a predetermined angle θ with respect to the alignment direction, the arrangement pitch P of the plurality of substrate holding members 21 is converted to P · COSθ. At this time, since the plurality of substrate holding members 21 are slidably restrained in a line in the front-rear direction orthogonal to the main surface of the substrate W by the guide support members 25, even if the tilt rocking member 26 tilts and rocks. In addition, only the arrangement pitch P can be changed without inclining the alignment direction of each substrate holding member 21.
Incidentally, when the predetermined angle θ is 60 °, the array pitch after conversion is 1 of the initial array pitch P.

【0013】図2は、2個のキャリア1から2群の基板
1・W2を取り出し、上記配列ピッチ変換装置20を適
用して配列ピッチを変換し、それらの基板Wを他方の基
板処理槽14へ一括して移し替える工程を示している。
ここでキャリア載置台2は移動フレーム4に昇降可能に
設けられ、移動フレーム4は左右移動可能に設けられて
いる。また、キャリア載置台2の中央部には後述する基
板保持具6が挿通する挿通孔3が開口形成されている。
そして図2の実線で示すキャリア載置台2の下方には、
整合ローラ5が付設配置されており、この原点位置でキ
ャリア載置台2を下降させ、上記挿通孔3に整合ローラ
5を臨ませて基板Wに当接させ、整合ローラ5を回転す
ることにより、基板Wのオリエンテーション・フラット
を揃えるように構成されている。
FIG. 2 shows that two groups of substrates W 1 and W 2 are taken out of two carriers 1, the arrangement pitch is converted by applying the arrangement pitch conversion device 20, and these substrates W are processed by the other substrate. This shows a step of batch transfer to the tank 14.
Here, the carrier mounting table 2 is provided on a movable frame 4 so as to be able to move up and down, and the movable frame 4 is provided so as to be movable left and right. Further, an insertion hole 3 through which a substrate holder 6 to be described later is inserted is formed at the center of the carrier mounting table 2.
Then, below the carrier mounting table 2 shown by a solid line in FIG.
An alignment roller 5 is additionally provided, and the carrier mounting table 2 is lowered at this origin position, the alignment roller 5 is made to face the insertion hole 3 to make contact with the substrate W, and the alignment roller 5 is rotated. The configuration is such that the orientation flat of the substrate W is aligned.

【0014】上記基板保持具6は、保持具本体7と、保
持具本体7を支える支柱8と、支柱8の下端部を固定支
持する架台10と、スライダー11を介して架台10を
基板整列方向(矢印D)に合致させてガイドする2本の
ガイドレール12・12と、架台10を相互に接離自在
に連結するリンク13と、一方の架台10を矢印D方向
へ接離駆動するエアシリンダー(図示せず)とを具備し
て成り、エアシリンダーを作動させて一方の架台10を
矢印D方向へ相互に接離駆動するように構成されてい
る。また、保持具本体7の上面には、複数の基板Wを一
括して保持する基板保持溝が刻設されており、図2中の
仮想線で示すように、キャリア載置台2を下降させるこ
とにより、キャリア1内の基板を一単位として、2群の
基板W1・W2を各保持具本体7・7で受け取ることがで
きる。
The substrate holder 6 includes a holder main body 7, a column 8 for supporting the holder main body 7, a gantry 10 for fixing and supporting the lower end of the column 8, and a gantry 10 through a slider 11 in a substrate alignment direction. (Arrow D), two guide rails 12 and 12 for guiding, a link 13 for connecting the gantry 10 to be able to come and go with each other, and an air cylinder for driving one gantry 10 to come and go in the arrow D direction. (Not shown), and one of the pedestals 10 is driven to move toward and away from each other in the direction of arrow D by operating the air cylinder. Further, a substrate holding groove for holding a plurality of substrates W collectively is formed on the upper surface of the holder main body 7, and the carrier mounting table 2 is lowered as shown by a virtual line in FIG. Accordingly, two groups of substrates W 1 and W 2 can be received by the holder bodies 7 and 7 with the substrate in the carrier 1 as one unit.

【0015】一方、2つの基板チャック15A・15B
は、図2で示すように共通の基本構造を有して成り、上
下・水平移動可能に設けられた移動本体16と、移動本
体16より前方へ突設された一対のチャック作動杆17
・17と、各チャック作動杆17に固設された一対のチ
ャックアーム18・18と、各チャックアーム18に固
設されたチャックハンド19とから成り、チャックハン
ド19で複数の基板Wを一括保持するように構成されて
いる。なお、2つの基板チャック15A・15Bのうち
一方の基板チャック15Aのチャックハンド19aに
は、キャリア1の基板収納溝(図示せず)と同一ピッチ
Pの基板保持溝が刻設され、他方の基板チャック15B
のチャックハンド19bには、配列ピッチPを変換した
基板Wを一括保持して移し替えることができるように、
キャリア1の基板収納溝の1/2ピッチの基板保持溝が
刻設されている。
On the other hand, two substrate chucks 15A and 15B
2 has a common basic structure as shown in FIG. 2, and includes a movable body 16 provided to be vertically and horizontally movable, and a pair of chuck operating rods 17 projecting forward from the movable body 16.
17, a pair of chuck arms 18, 18 fixed to each chuck operating rod 17, and a chuck hand 19 fixed to each chuck arm 18, and a plurality of substrates W are collectively held by the chuck hands 19. It is configured to be. In the chuck hand 19a of one of the two substrate chucks 15A and 15B, a substrate holding groove having the same pitch P as the substrate storage groove (not shown) of the carrier 1 is engraved, and the other substrate chuck is formed. Chuck 15B
In the chuck hand 19b, the substrate W having the converted arrangement pitch P can be collectively held and transferred.
A substrate holding groove having a half pitch of the substrate storage groove of the carrier 1 is formed.

【0016】以下、図2に基づいて基板Wの移し替え動
作について説明する。先ずキャリア載置台2の上に2組
の基板キャリア1を載置し、キャリア載置台2を下降さ
せ、整合ローラ5を回転させて基板Wのオリエンテーシ
ョンフラットを揃えて整列させ、次にキャリア載置台2
を基板保持具6の上方に移動させ、このキャリア載置台
2を仮想線で示す位置まで下降させる。このとき、各保
持具本体7・7は相互に離間した状態で各基板キャリア
1・1から各25枚の基板Wを受け取る。従ってこの段
階では2個の保持具本体7・7で保持したキャリア2個
分の基板は、それぞれ前群の基板W1と後群の基板W2
に分離した状態になっている。
Hereinafter, the operation of transferring the substrate W will be described with reference to FIG. First, two sets of substrate carriers 1 are mounted on the carrier mounting table 2, the carrier mounting table 2 is lowered, and the alignment roller 5 is rotated to align and align the orientation flat of the substrate W. 2
Is moved above the substrate holder 6, and the carrier mounting table 2 is lowered to a position indicated by a virtual line. At this time, the holder bodies 7, 7 receive 25 substrates W from the substrate carriers 1, 1 in a state of being separated from each other. Accordingly substrate was two minutes carrier held by two holder main body 7, 7 at this stage is in a state separated into a substrate W 2 of the substrate W 1 and the rear group of the front group, respectively.

【0017】次いで、保持具本体7・7を基板整列方向
へ相互に接近させる。これにより前群W1と後群W2に分
離していた基板が略等ピッチPで整列し、基板チャック
15Aのチャックハンド19aの基板保持溝に対して位
置整合する。従って基板保持具6で保持したキャリア2
個分の合計50枚の基板Wを基板チャック15Aで一括
保持することができる。引き続きチャックハンド19a
で基板Wを一括挟持して移送し、本発明に係る配列ピッ
チ変換装置20にそれらの基板Wを移載する。
Next, the holder main bodies 7, 7 are brought closer to each other in the substrate alignment direction. This substrate had separated into the rear group W 2 and the front group W 1 by are aligned at substantially equal pitches P, and aligned with respect to the substrate holding grooves of the chuck hand 19a of the substrate chuck 15A. Therefore, the carrier 2 held by the substrate holder 6
A total of 50 substrates W can be held by the substrate chuck 15A at once. Continue chuck hand 19a
Then, the substrates W are sandwiched and transferred at a time, and the substrates W are transferred to the arrangement pitch conversion device 20 according to the present invention.

【0018】配列ピッチ変換装置20の傾斜揺動部材2
6を所定角度θだけ傾斜揺動することにより、複数の基
板保持部材21の配列ピッチは一括して変換される。な
お、複数の基板保持部材21は、前記のようにガイド支
持部材25により基板Wの主面と直交する前後方向へ一
列に摺動自在に拘束されているので、傾斜揺動部材26
を傾斜揺動しても、各基板保持部材21の整列方向は傾
斜することなく配列ピッチのみが変換される。これによ
り、配列ピッチが変換されたキャリア2個分の基板Wを
他方の基板チャック15Bのチャックハンド19bで一
括挟持することができる。引き続きチャックハンド19
bで基板Wを一括挟持して移送し、処理槽14内に浸漬
する。
The tilt swing member 2 of the arrangement pitch conversion device 20
6 is tilted and swung by a predetermined angle θ, the arrangement pitch of the plurality of substrate holding members 21 is converted at a time. Since the plurality of substrate holding members 21 are slidably restrained in a line in the front-rear direction orthogonal to the main surface of the substrate W by the guide support members 25 as described above, the tilt swing member 26
, The arrangement direction of each of the substrate holding members 21 is converted without changing the arrangement pitch. Thus, the substrates W for two carriers whose arrangement pitch has been changed can be collectively clamped by the chuck hand 19b of the other substrate chuck 15B. Continue chuck hand 19
In step b, the substrate W is transported while being sandwiched and immersed in the processing bath 14.

【0019】なお、処理槽14内には変換された配列ピ
ッチと等ピッチの基板支持溝を切設した基板支持具(図
示せず)が固設されており、基板チャック15Bより一
括して受け取った基板Wを当該溝に差し込んで処理液中
に浸漬した状態で保持し得るようになっている。従って
配列ピッチが小さくなる分だけ処理槽14自体の容積を
小型化でき、この処理槽14の小型化により必要な表面
処理液の総量の少量化が図られる。また、これに伴って
処理液の温度管理、濃度管理等をより容易に行うことが
できる。さらに処理槽14内の各基板W間では処理液の
均一な上昇流が形成される。これにより基板Wの均一な
表面処理をすることができる。
A substrate support (not shown) having a substrate support groove cut at the same pitch as the converted arrangement pitch is fixed in the processing tank 14, and is collectively received from the substrate chuck 15B. The substrate W can be inserted into the groove and held in a state of being immersed in the processing liquid. Therefore, the volume of the processing bath 14 itself can be reduced by an amount corresponding to the decrease in the arrangement pitch, and the reduction in the size of the processing bath 14 can reduce the total amount of the required surface treatment liquid. In addition, temperature management, concentration management, and the like of the processing liquid can be more easily performed. Further, a uniform upward flow of the processing liquid is formed between the substrates W in the processing bath 14. Thereby, a uniform surface treatment of the substrate W can be performed.

【0020】図3は本発明の第2の実施例を示す配列ピ
ッチ変換装置の斜視図である。この実施例装置20は、
第1の実施例装置(図1)と以下の点で異なる。各基板
保持部材21の被係合部24は、上下方向へ走る長孔形
状で、かつ、基板保持部材21を左右に貫通する状態で
形成されている。また、ガイド支持部材25は基板保持
部材21の上方寄り部と下方寄り部を貫通する2本のガ
イドロッド25a・25bから成り、2本のガイドロッ
ド25a・25bで基板保持部材21を前後方向へ一列
に摺動自在に拘束する。なお、符号23aはスライドベ
アリングである。
FIG. 3 is a perspective view of an arrangement pitch conversion apparatus showing a second embodiment of the present invention. This embodiment device 20
The difference from the first embodiment (FIG. 1) is as follows. The engaged portion 24 of each substrate holding member 21 is formed in a long hole shape running vertically, and penetrating the substrate holding member 21 to the left and right. The guide supporting member 25 is composed of two guide rods 25a and 25b penetrating the upper and lower portions of the substrate holding member 21, and the substrate holding member 21 is moved in the front-rear direction by the two guide rods 25a and 25b. It is slidably restrained in a line. Reference numeral 23a denotes a slide bearing.

【0021】上記傾斜揺動部材26は、各揺動杆26a
・26bの一端部が揺動支軸27で揺動可能に枢支され
ている。そして複数の係合部材28は、左右の揺動杆2
6a・26bに等ピッチPで、かつ、回動自在に架着さ
れ、これらの各係合部材28は各基板保持部材21の被
係合部24に挿通されている。これにより、複数の基板
保持部材21を前後方向へ等ピッチPで拘束する。な
お、図4で示すように、各基板保持部材21の左右両側
部には、上下方向へ走る凸条部で被係合部24を形成
し、左右の揺動杆26a・26bの内側面には、図示の
係合部材28を回動可能に付設し、この係合部材28の
凹部28aを凸条部24に係合させるようにしても良
い。その他の点は、第1の実施例と同様に構成され、上
記傾斜揺動部材21を整列方向に対して所定角度θだけ
傾斜揺動することにより、複数の基板保持部材21は傾
斜することなく、基板Wの配列ピッチPのみを変換する
ことができる。
The tilting rocking member 26 includes a rocking rod 26a.
One end of 26 b is pivotally supported by a pivot 27. The plurality of engaging members 28 are connected to the left and right swinging rods 2.
Each of the engaging members 28 is inserted into the engaged portion 24 of each of the substrate holding members 21 at an equal pitch P and rotatably mounted on the 6a and 26b. Thus, the plurality of substrate holding members 21 are restrained at the same pitch P in the front-rear direction. In addition, as shown in FIG. 4, on both left and right sides of each substrate holding member 21, an engaged portion 24 is formed by a ridge that runs in the vertical direction, and is formed on the inner surface of the left and right swinging rods 26 a and 26 b. Alternatively, the illustrated engaging member 28 may be rotatably attached, and the concave portion 28a of the engaging member 28 may be engaged with the ridge portion 24. The other points are the same as those of the first embodiment. By tilting and rocking the tilt rocking member 21 by a predetermined angle θ with respect to the alignment direction, the plurality of substrate holding members 21 do not tilt. , Only the arrangement pitch P of the substrates W can be converted.

【0022】図5は本発明の第3の実施例を示す配列ピ
ッチ変換装置の斜視図である。この実施例装置20は、
水平状態の基板Wを一括保持してキャリアに収納する場
合を想定したもので、第2の実施例装置(図3)と以下
の点で異なる。即ち、この実施例では複数の基板保持部
材21が水平状態で上下一列に整列配置され、各基板保
持部材21の一端部には、基板Wを水平状態で保持する
基板保持部22が段差状に形成されている。その他の点
は、第2の実施例と同様に構成されている。
FIG. 5 is a perspective view of an arrangement pitch conversion device showing a third embodiment of the present invention. This embodiment device 20
It is assumed that the horizontal substrates W are collectively held and stored in a carrier, and differs from the second embodiment (FIG. 3) in the following points. That is, in this embodiment, a plurality of substrate holding members 21 are arranged in a row in a vertical state in a horizontal state, and a substrate holding portion 22 for holding the substrate W in a horizontal state is provided at one end of each of the substrate holding members 21 in a stepped manner. Is formed. Other points are the same as those of the second embodiment.

【0023】図6は本発明の第4の実施例を示す配列ピ
ッチ変換装置の斜視図である。この実施例装置20は、
第2の実施例(図3)と以下の点で異なる。この実施例
では傾斜揺動部材26は、2連の各揺動杆26a・26
a/26b・26bをそれぞれ左右に設け、これらを連
結具26cで連結して成り、各揺動杆26a・26a
は、それぞれ揺動支軸27・27で並行揺動可能に枢支
されている。そして棒状の係合部材28は、左右の揺動
杆26a・26bにわたって架着され、これらの各係合
部材28は各基板保持部材21に形成された長孔状の被
係合部24に挿通されている。その他の点は、第2の実
施例と同様に構成されている。
FIG. 6 is a perspective view of an arrangement pitch conversion device showing a fourth embodiment of the present invention. This embodiment device 20
It differs from the second embodiment (FIG. 3) in the following points. In this embodiment, the tilting rocking member 26 includes two rocking rods 26a and 26a.
a / 26b and 26b are provided on the left and right, respectively, and these are connected by a connecting member 26c.
Are pivotally supported by pivot shafts 27 so that they can pivot in parallel. The rod-shaped engaging members 28 are mounted on the left and right swinging rods 26 a and 26 b, and each of the engaging members 28 is inserted into the long hole-shaped engaged portion 24 formed in each of the substrate holding members 21. Have been. Other points are the same as those of the second embodiment.

【0024】[0024]

【発明の効果】本発明は上記のように構成され、傾斜揺
動部材を整列方向に対して所定角度だけ傾斜揺動するこ
とにより、複数の基板保持部材は傾斜することなく、基
板の配列ピッチのみを変換することができる。これによ
り、従来例のように基板の移し替えに手間取ることもな
く至便である。
According to the present invention, as described above, the tilt swing member is tilted and swung by a predetermined angle with respect to the alignment direction, so that the plurality of substrate holding members are not tilted and the arrangement pitch of the substrates is reduced. Only can be converted. Thereby, it is convenient without having to take time to transfer the substrate as in the conventional example.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施例を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment of the present invention.

【図2】本発明の配列ピッチ変換装置を適用して基板の
配列ピッチを変換して移し替える工程を示す斜視図であ
る。
FIG. 2 is a perspective view showing a process of converting and transferring the arrangement pitch of substrates by applying the arrangement pitch conversion device of the present invention.

【図3】本発明の第2の実施例を示す斜視図である。FIG. 3 is a perspective view showing a second embodiment of the present invention.

【図4】図3中の要部の変形例を示す斜視図である。FIG. 4 is a perspective view showing a modification of the main part in FIG.

【図5】本発明の第3の実施例を示す斜視図である。FIG. 5 is a perspective view showing a third embodiment of the present invention.

【図6】本発明の第4の実施例を示す斜視図である。FIG. 6 is a perspective view showing a fourth embodiment of the present invention.

【図7】基板の移し替え工程を示す斜視図である。FIG. 7 is a perspective view showing a substrate transfer step.

【図8】従来例に係る基板の配列ピッチ変換装置の概要
図である。
FIG. 8 is a schematic diagram of a conventional arrangement pitch conversion device for substrates.

【符号の説明】[Explanation of symbols]

W…基板、P…配列ピッチ、20…配列ピッチ変換装
置、21…基板保持部材、24…被係合部、25…ガイ
ド支持部材、26…傾斜揺動部材、28…係合部材。
W: substrate, P: arrangement pitch, 20: arrangement pitch converter, 21: substrate holding member, 24: engaged portion, 25: guide support member, 26: inclined swing member, 28: engagement member.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭64−48442(JP,A) 特開 平6−302573(JP,A) (58)調査した分野(Int.Cl.6,DB名) B65G 1/00 537 H01L 21/68────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-64-48442 (JP, A) JP-A-6-302573 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) B65G 1/00 537 H01L 21/68

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 基板を保持するために一列に整列配置さ
れた複数の基板保持部材と、これらの基板保持部材を整
列方向へ等ピッチに拘束する傾斜揺動部材とを具備して
成り、上記傾斜揺動部材を傾斜揺動することにより、複
数の基板保持部材の配列ピッチを一括して変換するよう
に構成した基板の配列ピッチ変換装置において、 上記複数の基板保持部材を、ガイド支持部材により基板
の主面と直交する方向へ一列に摺動自在に拘束し、 上記各基板保持部材には、その主面に平行な方向へ走る
被係合部を形成するとともに、上記傾斜揺動部材には複
数の係合部材を等ピッチで設け、これらの係合部材を上
記各基板保持部材の被係合部に係合することにより、複
数の基板保持部材を整列方向へ等ピッチに拘束するよう
に構成したことを特徴とする基板の配列ピッチ変換装
置。
1. A semiconductor device comprising: a plurality of substrate holding members arranged in a line in order to hold a substrate; and an inclined rocking member for restraining the substrate holding members at an equal pitch in the alignment direction. In the substrate arrangement pitch conversion device configured to convert the arrangement pitch of the plurality of substrate holding members collectively by tilting and swinging the inclination swing member, the plurality of substrate holding members are guided by a guide support member. Each of the substrate holding members is formed with an engaged portion that runs in a direction parallel to the main surface of the substrate holding member, and is slidably restrained in a line in a direction orthogonal to the main surface of the substrate. Is provided with a plurality of engaging members at an equal pitch, and by engaging these engaging members with the engaged portions of the respective substrate holding members, the plurality of substrate holding members are restrained at an equal pitch in the alignment direction. Characterized in that Arrangement pitch conversion device of the plate.
JP2708194A 1993-03-26 1994-02-25 Substrate arrangement pitch converter Expired - Fee Related JP2850191B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2708194A JP2850191B2 (en) 1993-03-26 1994-02-25 Substrate arrangement pitch converter

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5-92122 1993-03-26
JP9212293 1993-03-26
JP2708194A JP2850191B2 (en) 1993-03-26 1994-02-25 Substrate arrangement pitch converter

Publications (2)

Publication Number Publication Date
JPH072308A JPH072308A (en) 1995-01-06
JP2850191B2 true JP2850191B2 (en) 1999-01-27

Family

ID=26364971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2708194A Expired - Fee Related JP2850191B2 (en) 1993-03-26 1994-02-25 Substrate arrangement pitch converter

Country Status (1)

Country Link
JP (1) JP2850191B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4033689B2 (en) * 2002-03-01 2008-01-16 東京エレクトロン株式会社 Liquid processing apparatus and liquid processing method
CA2842114C (en) 2011-09-09 2016-03-22 Ventana Medical Systems, Inc. Slide transfer device
CN113611642B (en) * 2021-10-11 2021-12-07 西安奕斯伟硅片技术有限公司 Silicon wafer bearing device and separation equipment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448442A (en) * 1987-08-19 1989-02-22 Texas Instruments Japan Shifter for semiconductor wafer

Also Published As

Publication number Publication date
JPH072308A (en) 1995-01-06

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