JP2824180B2 - Heating press equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating press device used for manufacturing, for example, a multilayer ceramic chip capacitor and the like.

[0002]

2. Description of the Related Art The production of multilayer ceramic chip capacitors is, at a very high level, performed by superposing a plurality of ceramic layers having electrode patterns formed on the surface thereof, thereby arranging a large number of capacitors vertically and horizontally. By forming a single material plate in a connected state, and pressing this material plate while heating it with a pair of heating press molds having a built-in heater,
It is performed in such a procedure that the ceramic layers are pressed together in a single sheet and dried at the same time, and the pressed and dried material plate is broken vertically and horizontally to obtain a single chip capacitor.

[0003] Incidentally, since the inside of the ceramic material plate contains volatile substances contained in additives and air mixed in during kneading, when the material plate is rapidly pressed and heated and pressed, these materials are removed. Volatile components and air remain as bubbles in the material plate, and there is a problem in that delamination occurs in which layers are easily peeled off from one another, resulting in a high incidence of defective products.

For this reason, conventionally, air bubbles have been removed by gradually pressing the material plate over a long period of time.

[0005]

However, in the conventional heating press, it takes a long time to heat the material plate, so that not only the productivity is extremely poor, but also if the material plate is simply pressed, air or volatile substances are not obtained. Since the substance cannot be completely removed, there is a limit in reducing the incidence of delamination and the like.

SUMMARY OF THE INVENTION It is an object of the present invention to remarkably improve the efficiency in hot pressing a material plate made of ceramics or the like and to reduce the rate of defective products caused by the generation of bubbles. It is.

[0007]

In order to achieve this object, the present invention relates to a method of manufacturing a semiconductor device comprising a pair of head members which move away from each other after moving closer to each other. In a heating press device provided with a heating press die for pressing a material plate in a laminating direction, between the two head members, when the two head members move closer to each other, the periphery of the two heating press dies is in a sealed state. A suction member is provided to hold the inside of the sealing member, and a suction port is provided in the sealing member so that the inside of the sealing member is evacuated. A mold is provided in a recess formed in the head member for the one heating press mold so as to be able to protrude and retract from the recess, and the ceramic sheet or the like is provided .
Material plates are stacked in the recess by both heating press molds
In the direction of the first heating
The head member for the headless mold
The one of the heat press dies is configured to move in and out. Is the thing.

[0008]

Operation and effect of the present invention
Before the material plate is pressed in the laminating direction by both heating press dies, volatile substances and air contained in the material plate are forcibly removed by vacuum suction in a sealing member surrounding the material plate. can, in other words, the blank, after forcibly removed volatiles and air contained therein, the stacking direction at both heated press die in the recess in one of the head member, the material sheet Shape of outer peripheral surface at
Since it is possible to heat press while aligning the shape as the inner peripheral surface of the concave portion, it is possible to heat press the material plate in the laminating direction without generating bubbles therein, for example,
As described in Japanese Patent Application Laid-Open No. 60-257509 and the like, the material plate is heated and pressed in the laminating direction while volatile substances and air contained therein are forcibly removed. This can be performed in a short time, and volatile substances and air contained in the material plate can be almost completely eliminated.

Then, the heating press in the laminating direction is completed.
When finished, insert one hot press mold outside the head member.
By these operations, the one heating press mold is housed.
By protruding from the recess, the material plate after hot pressing
The concave portion without deforming the shape of its outer peripheral surface.
You can push it out. Therefore, according to the present invention, when manufacturing various articles through a pressing and heating process like a ceramic capacitor, the efficiency of the heating press process can be remarkably improved, and the generation rate of defective products due to the generation of bubbles Can be significantly reduced.

[0010] Moreover, one of the heated press mold out of the two heated press mold, in a recess formed in the head member relative to said one heat-pressing type, provided to retractably moving with respect to the recess, said ceramic sheets Material board, etc.
Pressing in the stacking direction with both heating press dies in the recess
With such a configuration , the periphery of the raw material plate can be formed into a predetermined shape by the inner surface of the recess provided in the head member, while the raw material plate that has been subjected to the heat press is formed . Breaking the shape around the material plate
And it is possible to reliably remove the material plate from the inside of the recess, so that it is possible to improve the accuracy of the outer diameter of the material plate and the work efficiency, and to reduce the yield rate due to the shape collapse.
The decline can be avoided .

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a heating press for manufacturing a multilayer ceramic chip capacitor will be described with reference to FIGS. In these figures, reference numeral 1 denotes a ceramic material plate (green sheet) in which a large number of chip capacitors are aligned vertically and horizontally and connected in large numbers, and the material plate 1 is formed in a multilayer shape.

Reference numerals 2 and 3 denote a pair of upper and lower head members for heating and pressing the material plate 1 in the laminating direction by the approaching movement of each other. 2 comprises a machine frame 9 and a holder 6 attached to the lower surface thereof.
Is composed of a holding body 7 having a flange 7a at the bottom.

A recess 10 is provided on the lower surface of the holding body 6 in the upper head member 2, and the upper heating press die 4 having a built-in heater is fitted in the recess 10 with respect to the recess 10.
A molding frame 6a is fitted in an opening of the recess 10 on the lower surface of the holding body 6. Also,
On the upper surface of the holding member 7 of the lower head member 3, a lower heating press die 5 having a built-in heater is provided. (If the adhesiveness of the material plate 1 is low, the release sheet 8 is unnecessary).

The upper heating press die 4 of the two heating press dies 4 and 5 has a rod 1 penetrating through the holding body 6 and the machine frame 9.
1 and the rod 11 is slid by an appropriate means such as a hydraulic cylinder so that the rod 10
The rod 11 is fitted with an O-ring 12 for sealing. A molding frame 6a that fits into the lower heating press mold 5 is fitted into the opening of the recess 10 in the holding body 6 of the upper head member 2, and a cutter action between the molding frame 6a and the lower heating press mold 5 is performed. As a result, an extra portion around the material plate 1 is cut out, and the material plate 1 is formed to have a uniform outer shape.

An upper suction port 13 communicating with the recess 10 is opened at one side of the holding member 6 of the upper head member 2.
The upper suction port 13 is connected to a vacuum source 14 and a compressed air source 15, and switching valves 16 and 17 for turning on / off the ventilation of the circuits are provided in the middle of each circuit. The holding body 7 of the lower head member 3 fixes a plunger 18 of a hydraulic drive type or the like.
Is moved up and down by hydraulic pressure or the like to press the material plate 1.

A frame-shaped sealing member 19 is fitted on the holding body 7 of the lower head member 3.
By inserting a compression spring 20 between the lower surface of the holding member 7 and the lower flange portion 7a of the holding member 7, the sealing member 19 is brought into contact with the lower surface of the holding member 6 of the upper head member 2 so that both the upper and lower members are in contact. The approach movement of the head members 2 and 3 is allowed. Further, O-rings 21 and 22 for sealing are mounted on the upper surface and the inner peripheral surface of the seal member 19, respectively.

A lower suction port 23 opening inside the seal member 19 is formed in one side of the seal member 19, and the lower suction port 23 is connected to the vacuum source 14 so as to be connected in the middle of the circuit. A switching valve 24 for turning on / off the vacuum suction is provided in the section. The lower head member mold 3
The vertical movement is guided by a guide member (not shown).

In the above configuration, the material plate 1 is placed on the upper surface of the heating press die 5 of the lower head member 3, and the lower head member 3 is raised while the upper and lower heating press dies 4, 5 are heated. As shown in FIG.
Abuts on the lower surface of the holding body 6 in the upper head member 2 and at the same time, while the ears of the material plate 1 are cut off by the forming frame 6a, the material plate 1 is pushed into the concave portion 10, and before and after that, After the portion surrounded by the seal member 19 is hermetically sealed, the raw material plate 1 is sandwiched between the two heating press dies 4 and 5.

Therefore, the raw material plate 1 is made of two hot press dies 4, 5
The switching valves 16 and 24 between the upper and lower suction ports 13 and 23 and the vacuum source 14 are turned on at about the same time as being sandwiched by the, and the state is maintained for a certain period of time. The vacuum suction is released after sucking and removing the air and the like, and then the raw material plate 1 is strongly pressed in the stacking direction on the upper and lower head members 2 and 3 by the hot press dies 4 and 5. Can be pressed from a multilayer state to a single state (while the material plate 1 is being pressed, vacuum suction may be continued).

In this step, since the volatile substances and air contained in the raw material plate 1 are forcibly removed by suction in a short time, the raw material body 1 is rapidly pressed without generating air bubbles therein. , Can be dried by pressing. When the heating press is completed, the switching valves 16 and 24 are turned off, and then the switching valve 17 between the upper suction port 13 and the compressed air source 15 is turned on as shown in FIG. 13
The lower head member 3 is lowered while the compressed air is being blown from the upper heating press mold 4 so as to project from the recess 10 by operating the rod 10 at the same time as or slightly after the lowering movement of the lower head member 3. And lower head member 3
The upper heating press mold 4 is moved up before the bottom of the mold is completely lowered.

Then, as shown in FIG. 7, the material plate 1 hot-pressed in the laminating direction is moved from the inside of the concave portion 10 to the outside thereof.
It is extruded without causing a shape collapse on the periphery, and is placed on the upper surface of the heating press die 5 in the lower head member 3, so that it can be easily taken out. As in this example,
When the compressed air is ejected from the upper suction port 13 during the protruding movement of the heating press mold 4 from the recess 10 in the upper head member 2, even if the material plate 1 is stuck to the heating press mold 4, The material plate 1 can be reliably peeled from the hot press mold 4.

Further, if the peripheral edge of the raw material plate 1 is cut off by the forming frame 6a, there is an advantage that the heating press of the raw material plate 1 and the process of aligning the outer shape can be performed simultaneously. Further, the upper heating press die 4 is configured to be able to move out and in from the recess 10 in which the upper heating press die 4 is housed, so that the peripheral edge of the raw material plate 1 is cut off by the forming frame 6a. Even if the outer peripheral surface of 1 is in close contact with the inner peripheral surface of the forming frame 6a, the material plate 1 can be forcibly pushed out of the forming frame 6a, so that the material plate 1 can be easily taken out.

Further, it goes without saying that the present invention can be widely applied not only to a case where a ceramic material plate is pressed in the laminating direction but also to a case where a ceramic plate is joined to a metal, for example.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a first embodiment.

FIG. 2 is a vertical sectional front view of the first embodiment.

FIG. 3 is a plan sectional view taken along line III-III of FIG. 2;

FIG. 4 is a plan view taken along line IV-IV of FIG. 2;

FIG. 5 is a diagram showing an operation.

FIG. 6 is a diagram showing an operation.

FIG. 7 is a diagram showing an operation.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Material board 2 Upper head member 3 Lower head member 4, 5 Heating head type 6, 7 Holder 10 Depression 13, 23 Suction port 19 Seal member

Claims (1)

(57) [Claims] A pair of head members which move away from each other after moving closer to each other are provided with a heating press die for pressing a material plate such as a ceramic sheet in a laminating direction by the closer movements of these head members. In the heating press device, a seal member is provided between the two head members so as to keep the periphery of the two heat press dies in a closed state when the two head members approach each other, In addition, while providing a suction port for making the inside sealed by the seal member a vacuum state, one of the two heating press molds was formed in the head member for the one heating press mold. The ceramic sheet is provided in the recess so as to be able to move in and out of the recess.
Material plate, etc., in both concave and convex molds in the recess
It is configured to be pressed in the laminating direction, and
The head member for the hot press mold is
So that one of the heating press molds can be moved up and down from the side
Heating press apparatus characterized by constituting the.