JP2820779B2 - Ultrasonic probe - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an ultrasonic probe, more specifically, an ultrasonic endoscope,
The present invention relates to an improvement of an ultrasonic probe used for an ultrasonic diagnostic apparatus and other ultrasonic devices.

[Conventional technology]

This type of conventional ultrasonic probe includes the actual
And the like are disclosed in Japanese Patent Application Publication No.

The structure of the ultrasonic probe disclosed in Japanese Utility Model Application Publication No. 60-45007 discloses a piezoelectric vibrator 105 as shown in FIG.
a, an ultrasonic vibrator 105 formed by laminating a backing material 105b and an acoustic matching layer 105c is disposed at the tip of a lower case 102 attached to an upper case 101, and one extraction electrode added to the vibrator 105 106a is arranged in the opening 104 of the lower case 102, and the other extraction electrode 106b is arranged in the lower case 102 after being arranged along the outer peripheral wall of the lower case 102.
04 is filled with a damper 107 and the lower case 102 is covered with a cap case 103.

Then, in the ultrasonic probe configured as described above, at the time of forming the lower case 102, the ultrasonic transducer 105 and the damper 107 are attached at the same time, and the cap case 103 is formed integrally. Has become.

In addition, as shown in FIG. 29, in addition to the conventional ultrasonic probe, a pre-wired ultrasonic vibrator 201 is integrally formed with a damper 202 at the time of forming a case 203, as shown in FIG. Some are fixed in the case 203, and then are configured by mounting an elastic body 204 such as urethane rubber.

[Problems to be solved by the invention]

By the way, in the structure of the conventional ultrasonic probe disclosed in the above-mentioned Japanese Utility Model Application Publication No. 60-45007, in the process of manufacturing the probe, the extraction electrodes 106a and 106b are connected to the ultrasonic vibrator 105 in advance.
When setting in a mold for integral molding, problems such as disconnection of wiring with the vibrator are likely to occur, and the yield is poor. In addition, since the vibrator is attached by integral molding, there is a disadvantage that it is difficult to hold the vibrator at a position for holding and shaping the vibrator.

Further, also in the conventional probe shown in FIG. 29, the vibrator must be formed together with the lead wire, and therefore, the disadvantages of the conventional probe shown in FIG. It has similar problems.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an ultrasonic probe having a structure which is inexpensive and easy to manufacture, eliminating the above-mentioned disadvantages of the conventional ultrasonic probe.

[Means for solving the problem]

An ultrasonic probe according to the present invention has an acoustic matching layer, a piezoelectric element, and a backing material that are sequentially stacked, and transmits and receives ultrasonic waves formed by exposing electrodes of the piezoelectric element to the outside. An ultrasonic vibrator, an insulating housing for positioning and fixing the ultrasonic vibrator, and molded integrally with the housing, in a state where the ultrasonic vibrator is mounted and fixed on the housing. A signal extracting means disposed with an end exposed near an exposed electrode of the piezoelectric element, and an exposed electrode of the ultrasonic vibrator in a state where the ultrasonic vibrator is mounted and fixed on the housing. And conductive means for connecting the exposed end of the signal extraction means.

That is, as shown in the conceptual diagram of the present invention in FIG. 1, a signal extraction means 2 provided near the position where the concave portion 7 for positioning and mounting the ultrasonic transducer 5 and the transducer electrode 6 is provided.
Are provided integrally by molding processing when the housing 1 is molded. Then, the vibrator 5 is fixed to the formed concave portion 7 of the housing 1 by bonding or the like. The end of the electrode 6 of the fixed vibrator 5 and the signal extracting means 2
Are connected by a conductive member 3. Further, an electrically conductive portion around the vibrator for electrically insulating the periphery of the vibrator is sealed with the insulating material 4.

The ultrasonic vibrator 5 is arranged on the acoustic matching layer 1 in order from the top.
1, a piezoelectric element 9 and a backing material 10 are laminated, and the vibrator electrode 6 is provided on both upper and lower surfaces of the piezoelectric element 9.

〔Example〕

 Hereinafter, the present invention will be described with reference to the illustrated embodiments.

2 to 4 are enlarged sectional views of the ultrasonic probe showing the first embodiment of the present invention.

The basic configuration of the ultrasonic probe in each embodiment described below is substantially the same as that of the ultrasonic probe described in the conceptual diagram of FIG. Are denoted by the same reference numerals, and only different portions will be described.

The housing 1 formed by molding is formed in a horizontally long short columnar shape, a relatively deep concave portion 7 is formed in the center of the upper peripheral surface, and the concave portion 7 is connected to both sides of the concave portion 7. And a connection area 8 is formed. The connection area 8 is formed by a concave portion having a depth of about half the depth of the concave portion 7.
Are disposed such that one end of each of the conductive wires bent into an L-shape is exposed. The other end of the conductive wire is led out in parallel with one end surface of the housing 1.

As shown in an enlarged cross section in FIG. 4, the concave portion 7 of the housing 1 has a piezoelectric element 9 formed so that the electrode 6 has a side electrode 6a, a backing material 10, and the acoustic matching layer 11. The ultrasonic vibrator 5 configured by laminating
The two side electrodes 6a are dropped and mounted so as to face each one end of the signal extracting means 2 exposed in each of the connection areas 8. Then, as shown in FIGS.

Next, a conductive member 3 for electrically connecting each end exposed in the area 8 of the both signal extracting means 2 and the side electrode 6a of the piezoelectric element 9 is introduced into the connection area 8, and the signal extracting means 2 and the side electrode 6a are connected. Thereafter, the conductive portion in the area 8 including the conductive member 3 is covered with the insulating material 4 filled in the connection area 8 to insulate so that the conductive portion is not entirely exposed to the outside. At this time, the surfaces of the ultrasonic vibrator 5 and the insulating material 4 do not protrude from the outer peripheral surface of the housing 1.

The material of the housing 1 may be any material that can be molded, and specifically, a phenol resin, a furan resin,
Thermosetting resin such as xylene formaldehyde resin, melamine resin, polyester, epoxy urea resin, thermoplastic such as polyethylene, polypropylene, polystyrene, polyvinyl acetate, polyacrylate, methacrylic resin, polyvinyl chloride, fluoroplastic, polycarbonate, polyurethane, etc. Plastics, silicones, rubbers, and substances obtained by mixing fine powders of metals, ceramics, glass balloons, glass, resins, fibers of wood, paper, and the like are used.

The conductive member 3 is made of solder, conductive paste, conductive adhesive, or the like.
In addition to being used from the same materials as the material of the housing 1, ceramic, glass, resin-based coating,
Insulation coating or the like may be used.

The same materials for the housing 1, the conductive member 3, and the insulating material 4 are used in each of the embodiments described below.

In the ultrasonic probe of the first embodiment configured as described above, at the time of use, a driving pulse voltage is applied from a power supply unit (not shown) to the conductive wire serving as the signal extracting means 2 so that the transducer 5 Is driven, and an ultrasonic pulse is transmitted from the transducer 5 toward the portion to be measured. The ultrasonic pulse reflected by the test portion is received by the vibrator 5, converted into an electric signal, and output to the outside through the signal extracting means 2.

As described above, according to the ultrasonic probe of the first embodiment, since the signal extracting portion (signal extracting means 2) is arranged on one end face of the housing 1, it is connected to the external lead wire. In addition, the lead wire treatment becomes very easy, and the vibrator surface does not protrude from the outer peripheral surface of the housing 1, so that the vibrator surface is protected by the housing 1 and damages the vibrator surface. The effect that there is no thing is acquired.

FIG. 5 is a sectional view of a second embodiment of the present invention, and FIG.
FIG. 7 and FIG. 7 show sectional views of two modifications of the second embodiment. The ultrasonic probe shown in FIGS. 5 to 7 is provided with pockets 12 and 13 for storing the adhesive at the upper peripheral edge of the transducer mounting recess 7 of the housing 1.

That is, in FIG.
In FIG. 6, pockets 13 each having an inclined surface are provided at the upper peripheral edge of the recess 7. In FIG. 7, in addition to the pocket 12 having a stepped recess,
The backing material 10 disposed therein is formed large so as to protrude by a length 1 with respect to the piezoelectric element 9 and the acoustic matching layer 11, and the upper edge of the backing material 10 is also provided with an adhesive pool. A pocket 15 is provided.

Other configurations are exactly the same as those of the first embodiment.

By providing the pockets 12, 13, and 15 for storing the adhesive in this way, when the vibrator 5 is bonded and fixed in the concave portion 7 of the housing 1, it overflows from the gap 16 between the side wall of the concave portion 7 and the side wall of the backing material 10. The adhesive 14 accumulates in the pockets 12, 13, and 15 described above.

When the vibrator 5 is fixed by the adhesive 14, it is important to prevent air from entering the gap 16 and forming an air layer on the way to ensure the fixing to the housing 1. For this reason, it is easier to perform the work and the quality is more stable if the adhesive 14 is applied in a large amount and overflows from the gap 16. However, on the other hand, the surface of the side electrode 6a of the piezoelectric element 9 is more likely to be covered with the overflowed adhesive, and a trouble occurs in the conductive process in the next step. Actually, with an ultrasonic transducer of about 15 MHz,
When the thickness t including a is about 150 μm and the adhesive 14 overflows, the side electrode 6a is immediately covered.

In order to prevent this, as shown in FIGS. 5 to 7, it is very effective to provide the pockets 12, 13, and 15 for storing the adhesive which overflows in the housing 1. As shown in the modified example of FIG. 7, the pocket has the same effect even if it is provided in the backing material 10, and if the distance 1 between the side surface electrode 6a of the piezoelectric element 9 and the side wall surface of the housing recess 7 is increased, The effect is further increased.

FIG. 8 is a cross-sectional view of an ultrasonic probe developed in a process leading to the present invention. In this ultrasonic probe, one of signal extraction means (conductive wires) is connected to the housing 1.

The housing 1 shown in FIG. 8 is formed of a conductive material such as a metal, and has a conductive wire supporting portion 1a on the side in the drawing direction of the conductive wire.
Are integrally formed to protrude. A relatively deep recess 7 is formed at the center of the upper peripheral surface of the housing 1, and
A connection area 8 is formed on one side of the recess 7 so as to be connected to the recess 7.
Is formed.

Then, the ultrasonic vibrator 5 formed by laminating the piezoelectric element 9 having the electrode 6 having the side electrode 6 a in the concave portion 7 of the housing 1, the backing material 10, and the acoustic matching layer 11 is biased toward the connection area 8. It is dropped and placed. In this case, one of the side electrodes 6a is exposed to the connection area 8 and the other is exposed to the surplus space 7a of the concave portion 7. Also,
Where the backing material 10 matches the electrode 6, an insulating member
10a is provided to prevent a short circuit between the electrodes.

Next, the coaxial cable which is a conductive wire is connected to the conductive wire support portion.
The end is drawn out into the surplus space 7a of the recess 7 through 1a.
One of the conductive wires is a surplus space of the concave portion 7 via the conductive member 3.
It is electrically connected to the side electrode 6a exposed on 7a. Further, the other conductive wire 2a is inserted into a hole 1b formed so as to penetrate from the surplus space of the concave portion 7 to the lower peripheral surface of the housing 1, and is electrically connected through the conductive member 3. Further, the conductive member 3 is inserted near the side surface electrode 6a exposed in the connection area 8, and is electrically connected to the housing 1. As described above, the side surface electrode 6a exposed in the connection area 8 and the conductive wire 2a integrally connected to the housing 1 make the housing 1 a part of a conduction path so as to be electrically connected.

According to the ultrasonic probe configured as described above, since the conductive wire does not pass under the backing material 10, the thickness of this part of the housing 1 can be reduced, and the ultrasonic probe can be further thinned. The size can be reduced. Further, since the housing 1 is formed of a conductive material such as a metal, an effect of shielding the piezoelectric element 9 from external noise can be obtained.

FIG. 9 is a sectional view of another ultrasonic probe developed in the process leading to the present invention. In this ultrasonic probe, a fine powder of a sound absorbing material is mixed into a housing forming material, and the housing 1A is molded so that the housing material also serves as a backing material. Thus, housing 1A
Is formed, the depth of the vibrator mounting concave portion 7 may be the same as the depth of the concave portion of the connection area 8, and the vibrator 5a without the backing material is directly bonded and fixed to the concave portion 7A. Other configurations are the same as those of the first embodiment.

In this ultrasonic probe, since the housing 1A also serves as a backing material, the depth of the vibrator mounting concave portion 7A of the housing may be formed to the same depth as the connection area 8; The mold structure is simple and can be manufactured at low cost. As compared with the first embodiment shown in FIG. 2, the housing has the same outer diameter and the thickness H of the backing material is increased, so that the performance can be improved. Further, the step of attaching the backing material to the vibrator 5A can be achieved. Is also remarkable.

Next, FIG. 10 shows a third embodiment of the present invention. In the ultrasonic probe according to the third embodiment, the signal extracting means 2 provided by integral molding at the time of molding the housing 1 is constituted by a coaxial cable 19.

That is, the coaxial cable 19 is separated into a core wire 17 and an outer wire 18 inside the housing, and each of the coaxial cable wires 19 is disposed so that its distal end is exposed in each connection area 8 and is integrally formed with the housing. In this case, the connecting portion 21 is shaped so as to gradually reduce the cross-sectional area of the housing 1 so that concentrated stress is not applied to the outside of the coaxial cable 19. Other configurations are the same as in the first embodiment.

According to the third embodiment configured as described above, the vibrator 5 and the amplifier 20 can be connected only by the coaxial cable line 19, without connecting by a solder or the like in the middle. Therefore, as compared with the above-described embodiments, a dedicated signal lead-out means using two conductors is not required, so that the cost is low, and the signal lead-out means is not required to be connected to a lead wire by soldering or the like. Can be reduced, the cost can be reduced, and the strength of the draw-out connection portion 21 can be further increased, so that the effect of withstanding more severe use can be obtained.

FIG. 11 is a cross-sectional view of yet another ultrasonic probe developed in the process leading to the present invention. In this ultrasonic probe, the signal extracting means is constituted by a flexible printed circuit board (hereinafter, referred to as FPC) 22. That is, the connection area 8A provided in the housing 1B is formed by cutting out a flat portion about 2/3 of a rear portion of the upper peripheral surface of the housing 1B formed in the short columnar body, and vibrating in the center thereof. A child mounting recess 7 is provided. The ultrasonic transducer 5 is bonded and fixed in the concave portion 7, and thereafter, an opening 22a having substantially the same shape as the concave portion 7 is formed, and conductive patterns 22b and 22c as lead electrode terminals are printed on the upper surface. FPC
22 is adhered and fixed on the connection area 8A composed of the flat portion so that the opening 22a matches the concave portion 7 and the conductive patterns 22b and 22c approach the side surface electrode 6a. Then, the conductive patterns 22b and 22c of the FPC 22 and the side electrodes 6a of the piezoelectric element 9 are connected by the conductive member 3, and the conductive member 3 and the upper surfaces of the conductive patterns 22b and 22c are made of an insulating material as in the first embodiment. 4 (not shown). Other configurations are the same as in the first embodiment.

As described above, the FPC 22 constitutes a signal extracting unit, and thereby, exchanges a signal with the outside.

According to this ultrasonic probe, it is not necessary to simultaneously form the signal extracting means at the time of molding the housing, so that the molding of the housing is facilitated and the cost is reduced.

In the above ultrasonic probe, FPC was used, but instead of this, vapor deposition, plating,
The same effect can be obtained even if the conductive pattern is formed by painting, printing, or the like.

FIGS. 12 and 13 are sectional views showing a fourth embodiment and a fifth embodiment of the present invention, respectively. These embodiments differ from the first embodiment in the structure of the housing.

That is, the housing IC shown in FIG. 12 has a tip portion formed into a truncated cone type 1Ca. When the distal end portion of the housing is shaped like a truncated cone as described above, when disposing the ultrasonic probe in the tube 23 for insertion into the subject,
Not only does the sliding resistance at the time of the insertion arrangement decrease, but also the load on an actuator (not shown) for driving the probe disposed in the tube 23 decreases, thereby causing the speed unevenness of the probe during rotational scanning. Is eliminated, wow of the encoder and the tip portion at hand is reduced, and an accurate image can be obtained. The shape of the tip is not limited to a truncated cone, but may be a pyramid, a cone, a spindle, or the like, as long as it reduces sliding and frictional resistance to the tube 23.

Further, the housing 1D shown in FIG. 13 is provided with a female screw hole 24 at the center of the distal end surface thereof, and a male screw 26 having a round head 25 is screwed into the female screw hole 24, so that the ultrasonic probe shown in FIG. A similar effect is obtained. Thus the housing 1D
If the tip of the round head 25 is configured to be detachable, the round head 25 is removed, and instead of this, a grease pack, a needle, a magnet, etc. are attached using the female screw hole 24. This has the effect that it can be transported simultaneously with the probe.

FIG. 14 and FIG. 15 are cross-sectional views of still another ultrasonic probe developed in the course of reaching the present invention. In this ultrasonic probe, the acoustic matching layer 11 (see FIGS. 2, 8, and 9) of the vibrator 5 fixed in the recess 7 of the housing 1 is made of an insulating material that covers the conductive member 3. It is something to do. That is, this ultrasonic probe is the electrode 6a of the piezoelectric element 9 of the vibrator 5.
And the signal extracting means 2 are connected by a conductive member 3, and this is covered with an electric insulating material 4.

On the other hand, as described above, the ultrasonic vibrator 5 fixed in the concave portion 7 has the backing material 10 on the back side with the piezoelectric element 9 interposed therebetween.
An acoustic matching layer 11 (see FIGS. 2, 9, and 10) is provided on the front side. The acoustic matching layer 11 is for matching acoustic impedance and is formed of an electrical insulating material.

In this ultrasonic probe, an insulating material 4 that covers the conductive member 3 is used, and an acoustic matching layer of the vibrator 5 is also formed therefrom. That is, the insulating material 4 is extended to the surface side of the vibrator 5 and is applied to the thickness H ₁ (see FIG. 15) in a controlled manner to form the acoustic matching layer 27. With this configuration, the insulating coating material of the conductive member 3 can be used also as the acoustic matching layer 27 of the vibrator 5.

Therefore, according to this ultrasonic probe, since the insulating material is used for the acoustic matching layer, the acoustic matching layer 11 (second, ninth, and tenth) is attached to the transducer 5.
This step can be omitted without the need to provide the vibrator 5 (see the figure), and the manufacturing cost of the vibrator 5 can be reduced.

In addition, as shown in FIG. 16, the surface of the acoustic matching layer 27 also serving as the insulating material can be made to function as an acoustic lens by forming the surface of the acoustic matching layer 27A as a curved acoustic matching layer 27A. When the curvature is matched with the curvature of the cylindrical surface of the housing 1, workability is also improved.

 Next, FIG. 17 shows a sixth embodiment of the present invention.

In the ultrasonic probe according to the sixth embodiment, a connection connector 28 is further fixed to the end of the housing 1 on the side of the signal extracting means 2 by integral molding with the housing 1, and the signal extracting means 2 is attached thereto. The connection facilitates transmission of signals to the outside.

That is, one end of the signal extraction means 2 is connected to one end of the housing 1 from which the signal extraction means 2 is led out.
28a, and a connecting connector 28 configured by connecting a conductive pipe portion 28b disposed therearound to the other of the signal extracting means 2 so that approximately half of the connector 28 projects outward. When the housing 1 is formed, the housing 1 is integrally fixed to form a so-called connection plug. A male screw part 29 for coupling is provided on the outer periphery of the housing in the vicinity of the connector 28 fixed thereto, and an O-ring 31 for waterproofing is fitted to a protruding part 30 connected to the screw part 29. Have been.
Other configurations of the probe are the same as those of the ultrasonic probe shown in FIG.

On the other hand, the other connecting connector 32 which is detachably coupled to the connecting connector 28 to input a signal from the signal extracting means 2 to an amplifier or the like has a small diameter into which the center shaft portion 28a is tightly fitted. It is composed of a conductive pipe part 33 and a large-diameter conductive pipe part 34 disposed around the conductive pipe part 28b, into which the conductive pipe part 28b is inserted. It is embedded and fixed in the formed coupling receiving portion 35. The coupling receiving portion 35 has a stepped portion 35a having a large diameter in the first half, and is formed,
A shoulder 36 formed of a concave portion to be fitted to the projection 3 is formed at the tip, and approximately half of the connection connector 3 projects from the center of the tip. And this receiving part 35
The large-diameter portion including the connector 32 is configured to be located in a cap nut 37 for connecting and fixing the connectors 28 and 32. The cap nut 37 has a female screw 38 screwed into the coupling male screw 29 on the inner peripheral surface of the distal end thereof, and is provided rotatably with respect to the connector 32.

In the ultrasonic probe according to the sixth embodiment configured as described above, one connector 28 provided integrally with the probe is connected to the other connector 32 connected to an amplifier or the like. When the female screw 38 of the cap nut 37 is screwed into the male screw 29 of the housing 1 and the nut 37 is rotated, as the screwing proceeds, the nut 37 pushes the step 35a of the receiving portion 35. As a result, the connectors 28 and 32 are connected, and the cap nut 37 prevents the connectors from coming off, so that the connectors are fixedly connected.

According to the sixth embodiment, since the attachment and detachment operation of the ultrasonic probe can be easily performed by the connector, it is very easy to cope with the case where the probe is damaged and replaced, and the probe having different driving frequencies is used. You can easily change children,
The effect of expanding the inspection range can be obtained.

Further, the fastening means is not limited to the means of the above-described embodiment, and a member for restricting rotation by providing a connecting pin and a hole may be added, or a spring member may be used. Alternatively, a unit that can be connected with one touch may be adopted.

FIGS. 18 and 19 show modifications of the signal extracting means 2 of the sixth embodiment, respectively.

In other words, the signal extracting means 2 shown in FIG. 18 is formed by shaft ends 2A and 2B having different lengths, each of which is formed of a conductive shaft and extends outward from the housing 1.
In addition, each shaft end 2A, 2B is provided with a click stop recess 2Aa, 2Bb at the connector portion, and correspondingly, the external connection portion 40 is elastically fitted with a conductive material to be inserted into the shaft end 2A, 2B. The connector portion including the receiving portions 41A, 41B is provided, and the elastic fitting receiving portions 41A, 41B are also provided with the click stop recesses 2Aa, 2A.
Click stop projections 41Aa and 41Ba facing Ba are provided.

The connector portion composed of the shaft ends 2A and 2B and the elastic fitting portion 41
According to the fastening means of the connector portion composed of A and 41B, since the signal portion and the coupling force can be transmitted at the connector portion, the structure is simplified, the attaching / detaching operation is easy, the handling is easy, and the manufacturing cost is extremely low. Has the effect of becoming

Next, a modified example of the signal extracting means 2 shown in FIG. 19 is that the signal extracting means is constituted by the coaxial cable 19 as described in the third embodiment (see FIG. 10).
A power transmission means 42 is provided around 19.

That is, the coaxial cable 19 for signal transmission is connected to the housing 1.
Inside, the core wire 17 and the outer wire 18 are separated, and the respective tips are arranged so as to be exposed in the respective connection areas 8 and are integrally formed with the housing 1, and the probe is rotated for scanning. The power transmission means 42 to be driven is formed of a double tightly wound flexible elastic coil sheath, the tip of which is attached to the signal extraction end of the housing 1 by integral molding, and the coaxial cable 19 The driving force is applied to the proximal end of the power transmission means 42 by the driving unit.

The drive section includes a motor 43, an output gear 44 of the motor, and a drive gear 45 fixed to the sheath and meshing with the output gear 44. The coaxial cable 19 inserted into the coil sheath is connected to the amplifier 20 via a joint 46 at its end.

In the ultrasonic probe of the modified example of FIG. 19 configured as described above, the rotational force of the motor 43 is transmitted to the probe by the power transmission means 42, whereby the probe rotates and the test object Is scanned. The signal received by the vibrator 5 passes through the coaxial cable 19 and the amplifier 20 through the joint 46.
Is input to

According to the probe of this modification, since the power transmission means is attached at the time of integral molding, the number of connection steps is reduced, and the cost is accordingly reduced. In addition, since they are integrally formed, the strength of the connection portion is increased, and thereby the durability is increased. Further, since the coaxial cable is protected, there is an effect that the handling becomes easy.

FIG. 20 is a sectional view of an ultrasonic probe according to a seventh embodiment of the present invention. In the probe of this embodiment, a coil 47 for impedance matching between the vibrator 5 and an external electric circuit is disposed inside the probe.

In the probe according to the seventh embodiment, the signal extracting means 2 side of the housing 1 is extended, and the outer peripheral surface of the extended cylindrical portion is cut off to form a small-diameter concave portion 1a. An impedance matching coil 47 having an appropriate number of turns is wound around the small-diameter concave portion 1a, and both ends 47a and 47b of the coil 47 are connected to respective distal ends of the signal extraction means 2. The coil 47 is covered with the insulating material 4 including the inside of the small-diameter recess 1a and the end in contact with the conductive member 3. Other configurations are the same as those of the first embodiment (second embodiment).
(See the figure).

In the seventh embodiment, the impedance is matched between the external circuit portion (not shown) and the vibrator 5 by the coil 47 wound around the small-diameter concave portion 1a and built in the housing 1, so that the performance is improved.

In addition, the coil 47 can be easily wound since the outer peripheral surface of the cylindrical housing 1 is used, and the number of turns can be controlled since the coil can be wound after the transducer 5 is connected to the signal line. In addition, since it is formed integrally with the housing, the effect of being compact can be obtained.

FIG. 21 shows an eighth embodiment of the present invention. The ultrasonic probe shown in the eighth embodiment also has a housing 1
In which an impedance matching means is incorporated. That is, in this embodiment, in order to perform impedance matching, when the housing 1 is formed, the inductance element 48 is provided in the housing 1 and its lead wire is provided.
After the connection to the signal extraction means 2 at 49, molding is performed.

With this configuration, it is not necessary to wind the coil 47 as compared with the seventh embodiment, so that the cost is lower.

Although the inductance is connected in parallel to the vibrator 5 in the seventh and eighth embodiments, it goes without saying that the inductance may be connected in series. Further, an IC chip including a transmission / reception circuit may be built in instead of the inductance element. In this case, a signal extracting means for a power supply is additionally formed in the housing. Needless to say, other electric circuit elements may be formed at the same time.

Next, steps for manufacturing the ultrasonic probe described in each of the above embodiments and modifications will be described with reference to FIGS. 22 to 27. The ultrasonic probe manufactured by this manufacturing process is the same as the probe of the first embodiment of the present invention shown in FIG.

As shown in FIG. 23, a mold for molding the housing 1 in the first embodiment includes a mold 50A and a mold 50B having a shape as shown in FIG. , Two cord receiving members 51A and 51B and a middle plate
52 and a resin pot 53.

The two cord receiving members 51A and 51B and the middle plate 52 are used for arranging two conductive wires as signal extracting means 2 in a molded housing.
It is arranged beforehand in the molding dies 50A and 50B with the conductive wires interposed therebetween. These two cord receiving members 51A, 51
B is formed of a plate material having the same shape and the same size and a front shape of an inverted channel. Then, as shown in FIG. 24, one of the cord receiving members 51A is
At the same position on the opposing inner surfaces of A and 51B, conductive wire arrangement grooves 54A and 54B are provided. Then, as shown in FIG. 24, the conductive wires 2 are supported by inserting the conductive wires 2 into the arrangement grooves 54A and 54B, respectively, and sandwiching the middle plate 52 therebetween. Also, when this sandwiched state is viewed from the bottom, it becomes as shown in FIG. 26,
A convex portion for forming the concave portion 7 in the housing 1 is formed on the middle plate 52.
55 are provided. After supporting the conductive wire 2 in this manner, the two cord receiving members 51A, 51B and the intermediate plate 52 are aligned and integrated with bolts 56, 57 (see FIG. 23) as shown in FIG. 27. It is fitted to the upper part of the molds 50Ad and 50B. Thus, the conductive wire 2 is provided in the molding die.

Further, as shown in FIG. 23, the housing forming recesses in the two molds 50A, 50B are split mold recesses 50Aa, 50Ba (one of the 50A
a is not shown). A molding material is injected into the split concave portions 50Aa and 50Ba from the resin pot 53.

FIGS. 22 (A) to 22 (D) show the steps of manufacturing the ultrasonic probe. In the first step of FIG. 22 (A), first, the forming die is assembled as described above. Thereafter, a resin is injected into the split mold recesses 50Aa and 50Ba by the resin pot 53. At this time, if the injection of the resin into the mold is promoted by using a vacuum or the like, the injection efficiency is good, and the release property is improved by applying a release agent in advance in the split mold concave portions 50Aa, 50Ba. . After the injected resin is cured, the molded housing 1 is removed from the molds 50A and 50B.
At this time, the removed housing 1 is washed, and the release agent is dropped from the housing 1.

By the first step, the housing 1 molded with resin in which the signal extracting means 2 is integrally fixed inside is
In the second step, as shown in FIG.
Backing material 10 and acoustic matching layer 11
The ultrasonic transducer 5, which is laminated and externally assembled, is fixed in the concave portion 7 of the housing 1 with the adhesive 14. At this time, the adhesive 14
It is preferable to provide an adhesive reservoir pocket or the like as shown in the modified example of FIGS. 5, 6, and 7 so as not to adhere to the side electrode 6a.

Next, in a third step, as shown in FIG. 22 (C), the side electrode 6a of the piezoelectric element 9 and the signal extracting means 2 are connected by the conductive member 3.

Then, the ultrasonic probe is completed by covering the insulating material 4 except for the upper surface of the transducer 5 in the fourth step.

In each of the above steps, heat treatment may be optionally performed to accelerate the curing of the resin.

As described above, the ultrasonic probe according to the present invention creates an integrally molded housing of the signal extracting means using a resin, and mounts and fixes the ultrasonic transducer assembled in a separate process on the housing. Electrically connected to the signal extraction means,
Next, it is manufactured by performing insulation from the outside.

According to this method of manufacturing an ultrasonic probe, the external shape of the probe can be arbitrarily determined, and each step can be performed by a relatively simple operation. An inexpensive probe with stable quality can be produced. Also, since there is no place to perform complicated processing in the manufacturing process, it is suitable for manufacturing an ultrasonic probe having a minute shape.

〔The invention's effect〕

As described above, according to the present invention, the signal extracting means and the housing are formed integrally, and thereafter, the ultrasonic transducer is mounted and fixed, and the electrical connection is performed. Accordingly, it is possible to provide an ultrasonic probe that can eliminate such conventional disadvantages.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of an ultrasonic probe showing a conceptual view of the present invention, FIG. 2 is a cross-sectional view of an ultrasonic probe showing a first embodiment of the present invention, and FIG. FIG. 4 is a sectional view taken along line XX in FIG. 2, FIG. 4 is an enlarged sectional view showing only the piezoelectric element taken out of FIG. 2, and FIG. 5 is a sectional view of a second embodiment of the present invention. 6 and 7 are cross-sectional views showing two modified examples of the second embodiment, and FIG. 8 is an ultrasonic probe developed in a process leading to the present invention. FIG. 9 is a cross-sectional view of another ultrasonic probe developed in the process leading to the present invention, and FIG. 10 is a cross-sectional view of an ultrasonic probe showing a third embodiment of the present invention. FIG. 11, FIG. 11 is a cross-sectional view of still another ultrasonic probe developed in the process leading to the present invention, FIG. 12 is a cross-sectional view of an ultrasonic probe showing a fourth embodiment of the present invention, FIG. 13 shows a fifth embodiment of the present invention. FIG. 14 is a cross-sectional view of an ultrasonic probe showing an example, FIG. 14 is a cross-sectional view of still another ultrasonic probe developed in a process leading to the present invention, FIG. 15 is a Y-Y line in FIG. FIG. 16 is a cross-sectional view showing a modification of the ultrasonic probe shown in FIG. 14, FIG. 17 is a cross-sectional view of an ultrasonic probe showing a sixth embodiment of the present invention, 18 and 19 are cross-sectional views each showing a modification of the signal extracting means of the sixth embodiment. FIG. 20 is a cross-sectional view of an ultrasonic probe showing a seventh embodiment of the present invention. FIG. 21 is a cross-sectional view of an ultrasonic probe showing an eighth embodiment of the present invention. FIGS. 22 (A) to (D) explain each step of manufacturing the ultrasonic probe of the present invention. FIG. 23 is an exploded perspective view of a molding die used in a manufacturing process of the ultrasonic probe, and FIG. 24 is a perspective view showing one cord receiving member fitted to the molding die. , Figure 25 fits into the mold 26 is a perspective view showing a pair of cord receiving members and a middle plate, FIG. 26 is a bottom view of the pair of cord receiving members and the middle plate shown in FIG. 25, and FIG. 27 is an assembled mold FIG. 28 is a cross-sectional view showing an example of a conventional ultrasonic probe, and FIG. 29 is a cross-sectional view showing another example of a conventional ultrasonic probe. 1, 1A, 1B, 1C, 1D ... housing 2 ... signal extraction means 19 ... coaxial cable line (signal extraction means) 22 ... FPC (signal extraction means) 3 ... conductive wire member (conductive means) 4 ... ... Insulation material 5 ... Ultrasonic probe 6 ... Electrode 6a ... Side electrode 7 ... Recess

──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Tadashi Abe 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (56) References JP-A-58-17359 (JP, A) JP-A-58-206732 (JP, A) JP-A-61-112500 (JP, A) JP-A-58-168308 (JP, U) JP-A-61-180004 (JP, U) (58) Fields investigated (Int) .Cl. ⁶ , DB name) A61B 8/00 G01N 29/24

Claims (1)

(57) [Claims] An ultrasonic transducer for transmitting and receiving ultrasonic waves, comprising: an acoustic matching layer, a piezoelectric element, and a backing material, which are sequentially laminated, and formed by exposing electrodes of the piezoelectric element to the outside. An insulating housing for positioning and mounting and fixing the ultrasonic vibrator; and an integrally formed housing with the ultrasonic vibrator mounted and fixed to the housing. A signal extracting means having an end exposed near the exposed electrode; and an electrode exposed by the ultrasonic vibrator in a state where the ultrasonic vibrator is mounted and fixed on the housing; and And a conductive means for connecting the exposed end of the means.