JP3589169B2 - Ultrasonic probe and manufacturing method thereof - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultrasonic probe used for an ultrasonic measuring device such as a medical ultrasonic diagnostic device, an industrial flaw detection device, and a commercial fish finder.
[0002]
[Prior art]
Conventionally, an ultrasonic probe of this type is disclosed in Japanese Patent Application Laid-Open No. Hei 7-131895. As shown in FIG. 15, the structure of this ultrasonic probe is such that the signal line 28 passes through the inside of the back load member 27 and is electrically connected to the electrode on the back of the piezoelectric body 26 divided into a plurality of parts by the groove 30. The electrodes on the transmitting and receiving surfaces of the piezoelectric body 26 are connected to the common electrode 31 via the conductive adhesive 29.
[0003]
[Problems to be solved by the invention]
However, the conventional ultrasonic probe has a structure in which the signal line passes through the inside of the back load material,
(1) It is easy to pick up external noise. (2) It is easy to emit unnecessary radiation. (3) When a plurality of piezoelectric bodies are provided, there is a problem that a crosstalk is easily generated between signal lines.
[0004]
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to reduce the influence of external noise and signal leakage from a signal line by providing a shield portion around the signal line.
[0005]
[Means for Solving the Problems]
In order to solve this problem, the present invention provides a plurality of piezoelectric bodies having electrodes in two directions of a front side for transmitting and receiving ultrasonic waves and a back side opposed to the front side, and a back side of the plurality of piezoelectric bodies. The provided rear load material, a plurality of signal lines that can be electrically connected to the electrodes on the back side of the plurality of piezoelectric bodies and are disposed through the inside of the back load material, and each of the plurality of signal lines. is for closed and a plurality of shield portions which electromagnetically shielded, and a back ground body to be the piezoelectric body of the backing material and provided on the opposite side fixedly connected to the plurality of shield portions.
[0006]
According to the above invention, since the shield portion is provided around the signal line, it is prevented that the signal line receives external noise, so that the S / N of the received signal can be improved and the electromagnetic wave leaked from the signal line can be improved. Is also prevented from being radiated to the outside, so that unnecessary radiation and crosstalk can be reduced.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
A first embodiment of the present invention includes a plurality of piezoelectric bodies having electrodes in two directions, a front side for transmitting and receiving ultrasonic waves and a back side opposed to the front side, and a plurality of piezoelectric bodies provided on the back side of the plurality of piezoelectric bodies. And a plurality of signal lines that are electrically connectable to the electrodes on the back side of the plurality of piezoelectric bodies and are disposed through the inside of the back load material, and each of the plurality of signal lines is electromagnetically coupled. An ultrasonic probe comprising: a plurality of shield portions for electrically shielding, and a back ground body provided on the side opposite to the piezoelectric body of the back load member and fixedly connected to the plurality of shield portions , and an external noise And the effect that unnecessary radiation can be reduced.
[0008]
A second embodiment of the present invention includes a plurality of piezoelectric bodies having electrodes in two directions, a front side for transmitting and receiving ultrasonic waves and a back side opposed to the front side, and a plurality of piezoelectric bodies provided on the back side of the plurality of piezoelectric bodies. Back load material, a plurality of signal lines that can be electrically connected to electrodes on the back side of the plurality of piezoelectric bodies, are arranged through the inside of the back load material, and each of the plurality of signal lines is electromagnetically connected. And a plurality of shield portions for shielding, the shield portion is an ultrasonic probe arranged in a lattice shape inside the back load member , and can reduce the influence of external noise and unnecessary radiation. It has the action of:
[0009]
In the third embodiment of the present invention , preferably , at least the side wall surface of the back load member is an ultrasonic probe having conductivity, and the influence of external noise and unnecessary radiation can be reduced with a simple configuration. It has the action of:
[0010]
In the fourth embodiment of the present invention, preferably , at least the side wall surface of the back load member is an ultrasonic probe having conductivity, and the influence of external noise due to the double shielding effect on the signal line is reduced. It has an effect that unnecessary radiation can be further reduced.
[0011]
The fifth embodiment of the present invention is preferably an ultrasonic probe in which two or more signal lines are connected to one piezoelectric body, and the reliability of connection between the piezoelectric body and the signal lines can be improved. Has an action.
[0012]
A sixth embodiment of the present invention preferably includes a plurality of piezoelectric bodies, and at least one signal line is connected to one piezoelectric body, and one piezoelectric line is provided around all the signal lines connected to one piezoelectric body. This is an ultrasonic probe having two shield portions, and has an effect that crosstalk between signal lines can be reduced.
[0013]
The seventh embodiment of the present invention is an ultrasonic probe in which the signal line and the shield portion are preferably coaxial lines integrated with each other, and the rear load member, the signal line, and the shield portion are assembled. It has the effect of being easy.
[0014]
An eighth embodiment of the present invention is an ultrasonic probe in which a plurality of shield portions are preferably electrically connected inside the back load member, and further reduces the influence of external noise and unnecessary radiation. It has the effect of being able to.
[0015]
In the ninth embodiment of the present invention, preferably, the shield part is an ultrasonic probe which is an elastic body having conductivity, the reflection of the ultrasonic wave at the shield part can be reduced, and the reception signal can be reduced. S / N can be further improved.
[0016]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, components denoted by the same reference numerals are the same components, and a detailed description thereof will be omitted.
[0017]
(Embodiment 1)
FIG. 1 is an exploded perspective view of a part of an ultrasonic probe according to an embodiment of the present invention. In FIG. 1, 1 is an ultrasonic probe, 2 is a piezoelectric body arranged in an array divided by a groove 3, 4 is a back load member, and 5 is a signal line disposed through the back load member 4. Reference numeral 6 denotes a cylindrical shield body disposed around the signal line 5, reference numeral 7 denotes a back ground body connected to the cylindrical shield body 6, and reference numeral 8 denotes a common electrode connected to the transmitting / receiving surface electrode 2a of the piezoelectric body 2. is there.
[0018]
First, a method of assembling the ultrasonic probe 1 constituting a two-dimensional array probe having a frequency of 2.5 MHz and a number of elements of 64 elements vertically and 64 elements horizontally will be described with reference to FIGS. However, in the drawings used for description, only a part of the configuration of the 64 elements vertically and the 64 elements horizontally is shown as a schematic configuration.
[0019]
As shown in FIG. 2, a cylindrical shield body 6 made of a copper cylinder is arranged on a rear ground body 7 made of a copper plate having a hole of 0.2 mm in diameter, and an adjacent cylindrical shield body 6 is formed of a copper cylinder. They are mounted so that they do not touch each other and are almost vertical.
[0020]
As shown in FIG. 3A, the rear ground body 7 to which the cylindrical shield body 6 is attached is disposed on the rear load material producing jig 10 so that the cylindrical shield body 6 is on the lower side. The depth of the back load material producing jig 10 used here is slightly longer than the length of the cylindrical shield body 6.
[0021]
As shown in FIG. 3 (b), the signal line mounting plate 9 is placed on the rear surface such that the hole 11 having a diameter of 0.05 mm provided in the signal line mounting plate 9 made of a resin base and the cylindrical shield body 6 are substantially concentric. The ground body 7 is bonded and fixed with an epoxy adhesive.
[0022]
As shown in FIG. 3 (c), the signal line 5 is inserted from the hole 11, and the tip of the signal line 5 reaches the back load material forming jig 10 and is arranged substantially perpendicular to the back load material forming jig 10. I do.
[0023]
After arranging the signal lines 5 in all the holes 11, the signal lines 5 are fixed to the signal line mounting plate 9 with an epoxy-based adhesive. At this time, the signal line 5 is not brought into contact with the cylindrical shield body 6 and the back ground body 7. A rubber-based material 12 containing an attenuation medium such as iron powder is injected into a rear-loading material forming jig 10 from a rear-loading material injection port (not shown), and the rubber-based material 12 is cured to form the rear-loading material 4. Create
[0024]
After adjusting the length of the signal line 5 protruding from the signal line mounting plate 9, the rear load member 4 is removed from the rear load member forming jig 10. The upper end surface 13 of the back load member 4 is shaped by cutting, polishing, or the like as necessary. At this time, it is preferable to shape the back load member 4 so that the end surface 14 of the signal line 5 is substantially coplanar with the upper end surface 13.
[0025]
The piezoelectric body 2 is adhered and fixed on the upper end surface 13 of the back load member 4 with an epoxy-based adhesive, and the electrical connection between the back electrode 2b of the piezoelectric body 2 and the signal line 5 is simultaneously performed. For example, grooves 3 having a depth reaching from the upper part of the piezoelectric body 2 to a part of the back load member 4 are provided in a lattice shape so as to have 64 elements vertically and 64 elements horizontally by an element dividing device such as a dicing saw. Split.
[0026]
A common electrode 8 made of copper foil is bonded to the transmitting / receiving surface electrode 2a of the piezoelectric body 2 using an epoxy-based adhesive, and all the transmitting / receiving surface electrodes 2a of the divided piezoelectric body 2 are electrically connected to each other. Assemble the probe 1. A connecting connector (not shown), a signal transmission cable, and the like are connected to the assembled ultrasonic probe 1 to form an ultrasonic probe.
[0027]
Next, the operation and operation of the ultrasonic probe 1 will be described. The piezoelectric body 2 divided in the horizontal direction and the vertical direction is driven via the signal line 5 to transmit an ultrasonic wave, and the piezoelectric body 2 receives a reflected signal from the measurement target portion again. At this time, the ultrasonic beam is controlled by controlling the timing of driving each piezoelectric body 2 and the number of elements of the piezoelectric body 2 driven simultaneously.
[0028]
Since the drive signal has a high voltage of about several tens of volts to about one hundred and several tens of volts, an electromagnetic wave is generated when the signal propagates through the signal line 5 and is received by the adjacent signal line 5, and a leakage signal generated from the received electromagnetic wave and the drive signal The adjacent piezoelectric body 2 may be driven by the combined signal of
[0029]
If the piezoelectric body 2 is driven by the combined signal in this manner, it becomes difficult to control a desired ultrasonic beam. On the other hand, in the ultrasonic probe 1, the cylindrical shield 6 is provided outside the signal line 5, so that the shield effect of the cylindrical shield 6 prevents electromagnetic waves from leaking.
[0030]
Therefore, the drive signal is less susceptible to electromagnetic wave interference from the adjacent signal line 5, and desired ultrasonic beam control can be performed. Also, since all the cylindrical shields 6 are connected to the back ground body 7, all the cylindrical shields 6 can be easily grounded.
[0031]
In the present embodiment, one signal line 5 is disposed on one cylindrical shield 6, but as shown in FIG. 6, one signal line 5 is provided to improve the reliability of electrical connection with the piezoelectric body 2. Two or more signal lines 5 may be arranged on one cylindrical shield.
[0032]
Further, although the cylindrical shield 6 is arranged concentrically with the signal line 5, a cable in which the signal line 5 and the cylindrical shield 6 are integrated, such as a coaxial cable or a semi-rigid cable, may be used.
[0033]
(Embodiment 2)
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 7 is an exploded perspective view of a part of the ultrasonic probe according to the present embodiment. 1 is an ultrasonic probe, 2 is a piezoelectric body arranged in an array divided by a groove 3, 4 is a back load member, 5 is a signal line disposed through the back load member 4, and 7 is a back surface. The ground body 8 is a common electrode connected to the wave transmitting / receiving surface electrode 2a of the piezoelectric body 2, and has the same configuration as that of FIG. The difference from the configuration of FIG. 1 is that shield portions 15 made of a conductive elastic body are arranged in a grid around the signal line 6.
[0034]
As in the first embodiment, a method of assembling the ultrasonic probe 1 constituting a two-dimensional array probe having a frequency of 2.5 MHz, the number of elements is 64 elements vertically, and 64 elements horizontally is described with reference to FIGS. Will be explained. However, in the drawings used for explanation, only a part of the structure of 64 elements vertically and 64 elements horizontally is schematically shown.
[0035]
As shown in FIG. 8, a shield forming die 16 provided with a hole 18 having a diameter of about 0.2 mm is formed by cutting a brass block, for example.
[0036]
As shown in FIG. 9A, the groove forming portion 19 of the shield portion forming die 16 is placed on the back load material forming jig 10 in a downward direction. It is assumed that the depth of the back load material creating jig 10 used here is slightly deeper than the height of the groove forming portion 19.
[0037]
As shown in FIG. 9B, the signal line 5 is inserted through a hole 18 provided in a pedestal 17 of a shield forming die 16 and its tip reaches the rear load material forming jig 10 to form the rear load material. It is arranged so as to be substantially perpendicular to the jig 10. After arranging the signal lines 5 in all the holes 18, an epoxy resin material 20 containing a damping medium consisting of a hollow glass sphere is introduced into the jig 10 from the back load material injection port (not shown). Then, the epoxy resin material 20 is thermally cured.
[0038]
The shield portion forming die 16 is removed, and the elastic body 21 made of, for example, conductive silicon rubber is poured into the space formed by the groove forming portion 19 to form the grid-shaped shield portion 15.
[0039]
As shown in FIG. 9 (c), the back ground body 7 is bonded and fixed with an epoxy-based adhesive so that the back ground body 7 can be electrically contacted with the shield portion 15, and the signal line mounting plate 9 is mounted on the back ground body 7. Adhesively fix with epoxy adhesive. The hole 11 of the signal line mounting plate 9 and the signal line 5 are fixed with an epoxy adhesive. At this time, the signal line 5 and the back ground body 7 are not brought into contact.
[0040]
After adjusting the length of the signal line 5 protruding from the signal line mounting plate 9, the rear load member 4 is removed from the rear load member forming jig 10. Subsequent assembling methods, operations, and operations of the ultrasonic probe are the same as those in the first embodiment, and thus will not be described.
[0041]
Since the shield part 15 is formed of the elastic body 21, the amount of the ultrasonic wave radiated from the piezoelectric body 2 to the back load member 4 can be reduced by the shield part 15, so that the influence of the back reflection on the transmission and reception signal of the ultrasonic wave can be reduced. Can be reduced.
[0042]
In the present embodiment, the shield portions 15 having conductivity are arranged around the signal line 6 in a lattice shape. However, the present invention is not limited to the above conditions. The honeycomb structure 22 may be connected to the rear ground body 7.
[0043]
In addition, although the method using the mold 16 for forming the shield part was used to form the shield part 15, the method is not limited to the above-described method. The groove is formed by a dividing device such as a dicing saw and the shield part 15 is provided. It does not matter.
[0044]
Further, the shield portion 15 is connected to the rear ground body 7, but the rear ground body 7 may not be used.
[0045]
Although the groove forming portions 19 of the shield portion forming die 16 are all connected, the provision of the groove forming portions 23a and 23b as shown in FIG. 11 makes it possible to provide two independent shield portions. , B mode and Doppler mode can be simultaneously performed.
[0046]
(Embodiment 3)
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 12 is an exploded perspective view of a part of the ultrasonic probe according to the present embodiment. 1 is an ultrasonic probe, 2 is a piezoelectric body arranged in an array divided by a groove 3, 4 is a back load material, 5 is a signal line disposed through the back load material 4, and 8 is a piezoelectric material. A common electrode 9 connected to the transmitting / receiving surface electrode 2a of the body 2 is a signal line mounting plate, which has the same configuration as that of FIG. The difference from the configuration of FIG. 1 is that no shield portion is provided around the rear shield body 7 and the signal line 6.
[0047]
As in the first embodiment, a method of assembling the ultrasonic probe 1 constituting a two-dimensional array probe having a frequency of 2.5 MHz, the number of elements is 64 elements in length, and 64 elements in width will be described with reference to FIGS. Will be explained. However, in the drawings used for explanation, only a part of the structure of 64 elements vertically and 64 elements horizontally is schematically shown. As shown in FIG. 13A, the signal line mounting plate 9 is disposed on the back load material creating jig 10. As shown in FIG. 13B, the signal line 5 is inserted from the hole 11, and the end of the signal line 5 reaches the back load material creating jig 10 and is arranged so as to be substantially perpendicular to the back load material creating jig 10. I do.
[0048]
After arranging the signal lines 5 in all the holes 11, the signal lines 5 are fixed to the signal line mounting plate 9 with an epoxy-based adhesive. An electromagnetic wave absorbing material 24 containing an electromagnetic wave absorber such as iron powder is injected into the inside of the rear load material producing jig 10 from a rear load material injection port (not shown), and the electromagnetic wave absorbing material 24 is cured to form the rear load material 4 Create Subsequent assembling methods, operations, and operations of the ultrasonic probe are the same as those in the first embodiment, and thus will not be described.
[0049]
Since the back load member 4 is made of the radio wave absorbing material 24, it is possible to prevent the electromagnetic wave radiated from the signal line 5 from being received by the adjacent signal line 5 or the electromagnetic wave noise floating in the air from being received by the signal line 5. Therefore, it is possible to reduce crosstalk and improve S / N with a very simple configuration.
[0050]
(Embodiment 4)
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 14 is an exploded perspective view of a part of the ultrasonic probe according to the present embodiment. 1 is an ultrasonic probe, 2 is a piezoelectric element arranged in an array divided by a groove 3, 4 is a back load member, 5 is a signal line disposed through the back load member 4, and 6 is a signal. A cylindrical shield body 8 arranged around the line 5 is a common electrode connected to the transmitting / receiving surface electrode 2a of the piezoelectric body 2, and the above is the same as the configuration of FIG. The difference from the configuration of FIG. 1 is that a side wall shield body 25 having conductivity is provided on the side wall surface of the back load member 4.
[0051]
As in the first embodiment, a method of assembling the ultrasonic probe 1 constituting a two-dimensional array probe having a frequency of 2.5 MHz, the number of elements is 64 elements vertically and 64 elements horizontally will be described with reference to FIG. . However, in the drawings used for explanation, only a part of the structure of 64 elements vertically and 64 elements horizontally is schematically shown.
[0052]
After assembling the back load member 4 in the same manner as in the first embodiment, a side wall shield body 25 made of copper foil having a thickness of, for example, 0.2 mm is provided on all the side wall surfaces (four surfaces) of the back load member 4 as shown in FIG. Is fixed with an epoxy adhesive. At this time, the side wall shield 25 is configured so as not to contact the back electrode 2b of the piezoelectric body 2 and the back shield 7 not shown.
[0053]
By providing the side wall shield body 25 and the back shield body 7 in this manner, the outer periphery of the back load member 4 is substantially covered with the conductor, so that unnecessary radiation from the signal line 5 is reduced and the signal line 5 floats in the air. The effect of electromagnetic wave noise can be reduced.
[0054]
In the present embodiment, the side wall shield body 25 made of copper foil is provided on the side wall surface of the back load member 4. However, the present invention is not limited to the above conditions. You may apply the paint which has.
[0055]
Although the cylindrical shield 6 is provided around the signal line 5, it is not necessary to provide the cylindrical shield 6 if the back load member 4 is made of a radio wave absorbing material.
[0056]
In the first to fourth embodiments, the ultrasonic probe constituting the two-dimensional array probe having a frequency of 2.5 MHz and the number of elements of 64 elements vertically and 64 elements horizontally is limited to the above condition. However, the frequency and the number of vertical and horizontal elements may be changed as needed.
[0057]
In addition, although the creation method of the back load material, the material to be used, and the dimensions are shown, the invention is not limited to the above conditions, and any method, material, and dimensions may be selected as long as equivalent functions can be obtained. Absent.
[0058]
Also, a dicing saw was used to divide the piezoelectric body by providing grooves in a grid shape with a depth reaching from the upper part of the piezoelectric body to a part of the back load material, but when using a composite piezoelectric body consisting of a piezoelectric body and a resin It is not necessary to provide grooves in a grid pattern, and a method suitable for the piezoelectric body may be selected.
[0059]
Although the ultrasonic probe is a two-dimensional probe, various probes such as a 1.25D probe and a 1.5D probe can be used as long as the ultrasonic probe has a signal line penetrating the back load member. Or an ultrasonic sensor.
[0060]
Although nothing is connected to the surface of the common electrode 8 facing the piezoelectric body 2, one or more matching layers or acoustic lenses may be provided as necessary.
[0061]
Although the wave transmitting / receiving surface electrode 2a of the piezoelectric body 2 is connected to the common electrode 8, the common electrode 8 need not be provided if a conductive material such as a graphite material is used for the first matching layer.
[0062]
Although an epoxy-based adhesive was used to simultaneously perform the adhesive fixing and the electrical connection, the present invention is not limited to the above conditions, and another conductive material may be used.
[0063]
As is clear from the above description, according to the present embodiment , the following effects can be obtained.
The first ultrasonic probe includes a piezoelectric body having electrodes in two directions, a front side for transmitting and receiving ultrasonic waves, and a back side opposed to the front side, and a back load provided on the back side of the piezoelectric body. Material, and a signal line that is electrically connectable to an electrode on the back side of the piezoelectric body and is disposed through the inside of the back load material. An advantageous effect is obtained that an ultrasonic probe with reduced influence of noise and unnecessary radiation can be obtained.
[0064]
The second ultrasonic probe includes a piezoelectric body having electrodes in two directions, a front side for transmitting and receiving ultrasonic waves and a back side opposed to the front side, and a back load provided on the back side of the piezoelectric body. Material, and a signal line that is electrically connectable to an electrode on the back side of the piezoelectric body and is disposed through the inside of the back load material. The back load material is made of a radio wave absorbing material, so that a simple configuration is provided. Thus, an advantageous effect that an ultrasonic probe in which the influence of external noise and unnecessary radiation is reduced can be obtained.
[0065]
The third ultrasonic probe includes a piezoelectric body having electrodes in two directions, a front side for transmitting and receiving ultrasonic waves and a back side opposed to the front side, and a back load provided on the back side of the piezoelectric body. Material, comprising a signal line that can be electrically connected to the electrode on the back side of the piezoelectric body and is disposed through the inside of the back load material, and at least the side wall surface of the back load material has conductivity, An advantageous effect is obtained in that an ultrasonic probe with a simple configuration and reduced influence of external noise and unnecessary radiation can be obtained.
[0066]
The fourth ultrasonic probe is different from the first and second ultrasonic probes in that at least the side wall surface of the back load member is conductive, so that a double shield effect is applied to the signal line. An advantageous effect is obtained that an ultrasonic probe in which the influence of external noise and unnecessary radiation is further reduced can be obtained.
[0067]
In the fifth ultrasonic probe, in one of the first to third ultrasonic probes, two or more signal lines are connected to one piezoelectric body. An advantageous effect is obtained that an ultrasonic probe with improved connection reliability can be obtained.
[0068]
The sixth ultrasonic probe is different from the first ultrasonic probe in that a plurality of piezoelectric bodies are provided, and at least one signal line is connected to one piezoelectric body and connected to one piezoelectric body. Since one shield portion is provided around all signal lines, an advantageous effect that an ultrasonic probe with reduced crosstalk between signal lines can be obtained can be obtained.
[0069]
The seventh ultrasonic probe is different from the sixth ultrasonic probe in that a plurality of piezoelectric bodies are provided and the signal line and the shield portion are integrated coaxial lines. An advantageous effect is obtained in that an ultrasonic probe in which the wire and shield portions can be easily assembled can be obtained.
[0070]
The eighth ultrasonic probe is different from the sixth ultrasonic probe in that a plurality of shield portions are electrically connected inside the back load member, so that the influence of external noise and unnecessary radiation are further reduced. The advantageous effect that an ultrasonic probe can be obtained is obtained.
[0071]
The ninth ultrasonic probe is different from the first ultrasonic probe in that, since the shield portion is an elastic body having conductivity, the reflection of ultrasonic waves at the shield portion can be reduced, and An advantageous effect that an ultrasonic probe with further improved signal S / N can be obtained is obtained.
[0072]
【The invention's effect】
As is clear from the above description, according to the present invention, the following effects can be obtained.
A plurality of piezoelectric bodies having electrodes in two directions of a front side for transmitting and receiving ultrasonic waves and a back side opposed to the front side, a back load member provided on the back side of the plurality of piezoelectric bodies, and A plurality of signal lines that can be electrically connected to the electrode on the back side of the piezoelectric body and are disposed through the inside of the back load member, and a plurality of shield portions that electromagnetically shield each of the plurality of signal lines, By providing a back ground body fixedly connected to the plurality of shield portions provided on the side opposite to the piezoelectric body of the back load member, an ultrasonic probe with reduced influence of external noise and unnecessary radiation is obtained. This has the advantageous effect of being able to do so.
[Brief description of the drawings]
1 is an exploded perspective view of a part of an ultrasonic probe according to an embodiment of the present invention; FIG. 2 is a perspective view of a shield part of the ultrasonic probe; FIG. FIG. 4 is a cross-sectional view showing the procedure for assembling the rear load member of the probe. FIG. 4 is a cross-sectional view showing the procedure for assembling the ultrasonic probe. FIG. 5 is a cross-sectional view showing the procedure for assembling the ultrasonic probe. FIG. 7 is a cross-sectional view of a modified example of the ultrasonic probe. FIG. 7 is an exploded perspective view of a part of the ultrasonic probe according to an embodiment of the present invention. FIG. 8 is a shield section of the ultrasonic probe. FIG. 9 is a cross-sectional view showing a procedure for assembling a back load member of the ultrasonic probe. FIG. 10 is a perspective view of a modified example of the ultrasonic probe. FIG. FIG. 12 is a perspective view of a modified example of a mold for forming a shield portion of a probe. FIG. 12 is an exploded perspective view of a part of an ultrasonic probe according to an embodiment of the present invention. Sectional view showing an assembly procedure [14] a perspective view and FIG. 15 is a cross-sectional view of a conventional ultrasonic probe was degraded portion of the ultrasonic probe according to an embodiment of the present invention Description of Reference Numerals]
DESCRIPTION OF SYMBOLS 1 Ultrasonic probe 2 Piezoelectric body 2a Transmitting and receiving surface electrode 2b Back electrode 3 Groove 4 Back load material 5 Signal line 6 Cylindrical shield 7 Back ground body 8 Common electrode 9 Signal line mounting plate 10 Back load material creation jig 11 Hole DESCRIPTION OF SYMBOLS 12 Rubber-based material 13 Upper end surface 14 End surface 15 Shield part 16 Shield part forming die 17 Pedestal 18 Hole 19 Groove forming part 20 Epoxy resin material 21 Elastic body 22 Honeycomb structure 23a, b Groove forming part 24 Radio wave absorbing material 25 Side wall Shield body 26 Piezoelectric body 27 Back load material 28 Signal line 29 Conductive adhesive 30 Groove 31 Common electrode

Claims (8)

A plurality of piezoelectric material having a front side and the electrode in two directions on the back side facing the front side for transmitting and receiving ultrasonic waves, a backing load member provided on the back side of the plurality of piezoelectric, said plurality of A plurality of signal lines that can be electrically connected to the electrode on the back side of the piezoelectric body and are disposed through the inside of the back load member , and a plurality of shield portions that electromagnetically shield each of the plurality of signal lines , An ultrasonic probe having a back ground member fixedly connected to the plurality of shield portions and provided on a surface of the back load member opposite to the piezoelectric body . A plurality of piezoelectric material having a front side and the electrode in two directions on the back side facing the front side for transmitting and receiving ultrasonic waves, a backing load member provided on the back side of the plurality of piezoelectric, said plurality of A plurality of signal lines that can be electrically connected to the electrode on the back side of the piezoelectric body and are disposed through the inside of the back load material , and a plurality of shield portions that electromagnetically shield each of the plurality of signal lines. An ultrasonic probe , wherein the shield portion is arranged in a lattice shape inside the back load member . The ultrasonic probe according to claim 2, further comprising a back ground member provided on a surface of the back load member opposite to the piezoelectric body and fixedly connected to the plurality of shield portions . The ultrasonic probe according to claim 1, wherein at least a side wall surface of the back load member has conductivity. 4. The ultrasonic probe according to claim 1, wherein two or more signal lines are connected to one piezoelectric body. The ultrasonic probe according to claim 2, wherein the shield portion is an elastic body having conductivity. A step of disposing a rear ground body to which a plurality of shield parts are attached on a rear load material producing jig; a step of inserting and arranging a signal line in the shield part; and injecting a rubber-based material into the rear load material producing jig. Hardening to create a back load material including the shield portion therein; removing the back load material from the back load material creating jig; and smoothing an end face of the back load material facing the back ground body. Exposing the end surface of the signal line, bonding a piezoelectric body to the exposed surface of the rear load material with the signal line end surface exposed, and connecting a part of the piezoelectric element and the back load material to the signal line. Manufacturing a plurality of electrically independent elements by cutting at intervals based on, and bonding an integral common electrode to a surface of the plurality of piezoelectric elements facing the backing load material. Ultrasound Method of manufacturing a probe. Arranging a shield forming mold on a back load material forming jig; arranging a plurality of signal lines at desired intervals by the shield forming mold; A step of injecting a resin material and thermosetting to produce a back load material including the signal line therein; a step of removing the shield portion forming mold from the back load material; and removing the shield portion forming mold. Forming a grid-shaped shield portion for shielding each of the plurality of signal lines by pouring a conductive elastic body into the portion, and bonding a back ground body to an exposed surface side of the shield portion. Removing the back load member from the back load member forming jig; smoothing an end surface of the back load member facing the back ground body to expose an end surface of the signal line; Bonding a piezoelectric body to the surface of the material where the signal line end face is exposed, and fabricating a plurality of electrically independent elements by cutting the piezoelectric element and a part of the back load material at intervals based on the signal line. And a step of adhering an integral common electrode to a surface of the plurality of piezoelectric elements facing the back load member. A method of manufacturing an ultrasonic probe, comprising:

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