JP2782838B2 - Disk spin dryer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method of spinning a disk for performing high-speed spin drying after cleaning a disk formed of an annular plate, such as a magnetic disk or an optical disk. It relates to a drying device.

[Prior Art] For example, after a magnetic disk is polished or the like, the disk must be cleaned. However, in order to dry the disk after the cleaning without using Freon, the disk must be cleaned. In general, a method of rotating a disk at a high speed and spinning out a cleaning material attached to the surface thereof from an outer peripheral edge portion by the action of centrifugal force, that is, a so-called spin drying method is employed. For this,
Conventionally, a structure is used in which chuck means comprising at least three chuck members are used at the tip of a spindle, and the spindle is rotated at a high speed while the inner peripheral edge of the disk is checked by each chuck member. .

[Problems to be Solved by the Invention] As described above, when the inner peripheral edge of the disk is checked and rotated, the contact portion between the chuck means and the disk is always constant even during rotation. Therefore, the liquid slightly adhering to the contact portion between the chuck means and the disk stays without flowing out smoothly. If the liquid stays in this way, the spin-drying ends, and after the rotation of the disk is stopped, or when the chucking means is separated from the disk, the liquid staying in the relevant portion is removed. There is an inconvenience of flowing out along the disk surface and causing spots on the disk surface.

The inventors of the present invention have studied the cause of dripping after drying on the disk surface, and have obtained the following findings to complete the present invention. That is, when the disk is rotated, the liquid adhering to the surface of the disk is allowed to flow smoothly toward the outer peripheral side by the action of the centrifugal force, but the liquid at the inner peripheral surface is located at a position where it comes into contact with the chuck member. It is difficult to apply a centrifugal force that is sufficient to cause the fluid to flow toward the outer peripheral side. However, in the contact portion between the chuck member and the disk, the one attached to the front portion in the rotation direction of the disk is smoothly discharged by the action of the wind pressure due to the rotation of the disk.
However, since the rear part of the chuck member has a negative pressure, it is extremely difficult to discharge the liquid in this part. Then, after the spin drying is completed and the disk surface is in a dry state, the liquid remaining in this portion stops rotating and flows out to the surface of the disk until the chuck member is released. This causes the above-mentioned stain on the disk surface.

The present invention has been made in view of the above points, and its purpose is to rotate a disk at a high speed.
An object of the present invention is to provide an apparatus for spin-drying a disk, which can completely dry the disk and does not cause a spot on the disk surface due to dripping after drying.

[Means for Solving the Problems] In order to achieve the above-described object, the present invention provides a method for cleaning a disk made of an annular plate, and then performing a high-speed spin-drying by attaching a plurality of chuck members to a tip of a spindle. In a configuration in which the disk is protruded and chucked in a state where the disk is erected by the chuck members, and the disk is rotated at a high speed, a rear side in a rotational direction of a contact portion between the chuck member and the disk. And an air supply unit for supplying air toward the air conditioner.

[Operation] As described above, by supplying air to a position in the rotation direction of the disk, which is the most difficult part to discharge the liquid, at the contact portion between the chuck member and the disk, the force of this air is Accordingly, the liquid at the contact portion can be smoothly discharged without staying. As a result,
After the disk is dried, the surface of the disk will not be stained again, and it is possible to prevent inconvenience such as generation of spots on the surface of the disk.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

 First, FIG. 1 shows the entire configuration of a spin dryer.

As is clear from the figure, after the disc D has been washed and rinsed, the disc D is sent to the drying section by appropriate handling means, and the spindle 10 installed in the drying section is moved to the drying section.
, And is rotated at high speed by the spindle 1 to perform high-speed spin drying.

As described above, in order to rotate the disk D, the spindle 10 has the rotating part 11, and three chuck members 12 for chucking the inner circumference of the disk D are mounted on the tip of the rotating part 11. In order to bring these chuck members 12 into and out of contact with the inner peripheral surface of the disk D, each of the chuck members 12
The spherical portion 1 is provided at an intermediate position of the shaft 13 to which the shaft is attached, and the spherical portion is received by a spherical receiving portion 16 provided on an end plate 15 provided at the tip of the rotating portion 11. A cam follower 17 is attached to the other end of the shaft 13, and the cam follower 17 is rotatably inserted into a cam portion 19 of a cam block 18 of the rotating portion 11. Therefore, when the cam follower 17 is located inside the cam portion 19 of the cam follower 18,
The shaft 13 is maintained in a substantially horizontal state, and is at a chucking position for chucking the disk D.
When 18 is displaced in the direction of the arrow in the figure, the cam follower
As the roller 18 rolls along the cam portion 19, the chuck member 12 is at the chuck release position separated from the inner peripheral portion of the disk D.

Then, in order to rotationally drive the rotating unit 11, the rotating unit 11
Is inserted into a bush 20 extending through the partition wall of the device. The pulley 11a provided on the rotating portion 11
Is provided with a transmission belt 21 wound therearound. The transmission belt 21 is wound around a drive pulley 23 attached to a motor 22. Therefore, by operating the motor 22, the rotating portion 11 of the spindle 10 can be rotationally driven.

In order to displace the chuck member 12 between the chuck position and the chuck release position, an engaging plate 24 is attached to an end of the rotating unit 11, and the engaging plate 24 is
5 are provided. This pull member 25 can be pulled in the direction of the arrow in FIG. 1 by a cylinder 26, whereby the rotating part 11 is displaced rightward in the figure, and the swing shaft 13 moves the spherical part 14 It swings as a center and can be separated from the inner peripheral surface of the disk D.

Next, FIGS. 2 and 3 show the structure of the chuck member 12. FIG. As can be seen from the figure, the chuck member 12 has opposed tapered surfaces 12a and 12a that contact the inner peripheral edge of the disk D.
a, and a bottom wall portion 12b between the tapered portions 12a, 12a, and the edge of the disk D comes into contact with the tapered portions 12a, 12a. Notches 12c, 12c are formed on both sides of the contact portion to the disc D, and the portions other than the contact portion of the chuck member 12 to the disc D are formed by the notches 12c, 12c as much as possible. The disc D is separated from the inner surface of the disc D so that the liquid can be prevented from staying in the contact portion between the disc D and the chuck member 12. Moreover, a ventilation hole 27 is formed obliquely at the position of the bottom wall portion 12b of the chuck member 12 so as to face from the front to the rear in the rotation direction. The opening is provided at a position separated from the inner peripheral surface of the disk D, and the rear side in the rotational direction is opened at a position close to the inner surface of the disk D.

This embodiment is configured as described above, and after performing cleaning and rinsing of the cleaning liquid, the disk D to be dried is chucked to the chuck member 12 provided on the spindle 10 by an appropriate handling means. Then, after separating the above-described disk handling means, the rotating unit 11 is driven to rotate by the motor 22. As a result, the liquid adhering to the surface of the disk D moves toward the outer peripheral side by the action of the centrifugal force and is spun out from the outer peripheral edge, thereby performing high-speed spin drying.

Thus, the liquid adhering to the surface of the disk D and the liquid adhering to the outer peripheral surface can be removed smoothly by rotating the disk D at a high speed. Most of the liquid adhering to the inner peripheral surface of the disk D also flows out from the inner peripheral surface to the disk surface and is removed from the outer peripheral edge by the action of centrifugal force. However, the liquid interposed between the chuck member 12 and the inner peripheral surface of the disk D may not be able to be removed due to the above-described centrifugal force.

By the way, since the notch 12c is formed on both sides of the contact portion of the chuck member 12 with the disk D, the liquid intervening therebetween is prevented as much as possible. Further, the wind pressure directly acts on the position of the chuck member 12 in the rotation direction of the disk D when the disk D rotates, so that the liquid is discharged by the wind pressure. However, since the portion located behind the chuck member 12 in the rotation direction becomes a negative pressure during the rotation, it is extremely difficult to discharge the liquid remaining in this portion. However, in the present invention, a ventilation hole 27 is formed in the chuck member 12 from the front side to the rear side in the rotation direction to allow air to flow therethrough so as to guide air to the rear side of the chuck member 12. Therefore, the liquid staying at the site is conveyed to this air flow,
It becomes possible to discharge smoothly.

As a result, the entire disk D including the contact portion with the chuck member 12 is surely dried. After the drying is completed, the rotation of the disk D is stopped, and the chuck member 12 is separated from the disk D. In the meantime, the liquid flows out to the surface of the disk D, and once the surface of the disk D is dried, the surface of the disk D is re-contaminated, so that the occurrence of spots can be reliably prevented.

In the above-described embodiment, as a means for supplying air to a rearward position in the rotation direction of the contact portion of the disc in the chuck member, a configuration in which a vent hole is provided in the chuck member has been described. Instead of the air holes, a configuration may be adopted in which an air ejection nozzle for ejecting air toward the relevant portion is provided.

[Effects of the Invention] As described above, according to the present invention, in order to rotate a disk, air is supplied toward the rear side in the rotation direction of the contact portion between the chuck member and the disk that abut on the disk. Since the supply section is provided, the liquid adhering to the disk can be completely dried, including the portion of the inner peripheral surface that comes into contact with the chuck member. Inconveniences such as generation of spots due to adhesion of the liquid can be reliably prevented.

[Brief description of the drawings]

FIG. 1 shows an embodiment of the present invention. FIG. 1 is an overall configuration diagram of a spin dryer, FIG. 2 is an external view of a chuck member, and FIG. 3 is a cross-sectional view taken along the line III-III of FIG. It is. 10: spindle, 11: rotating part, 12: chuck member, 12a: tapered surface, 12b: bottom wall, 12c: notch, 27: vent, D: disk.

Claims (1)

(57) [Claims] After washing a disk made of an annular plate, a plurality of chuck members are protrudingly provided at the tip of a spindle for high-speed spin drying, and the chucks are held upright by the respective chuck members. The disk is configured to be rotated at a high speed, and an air supply unit that supplies air toward a rear side in a rotation direction of a contact portion between each of the chuck members and the disk is provided. Features a disk spin dryer.