JP2010170637A - Spin dryer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spin dryer preventing the generation of drying stain. <P>SOLUTION: The spin dryer spin-drying a disk like substrate 2A having a center hole by rotating the substrate 2A after washing it by a washing liquid includes a plurality of chucking members 1A holding an inner peripheral part of the substrate 2A and a spindle motor rotationally driving the substrate 2A held by the chucking members 1A. A groove 3 with which an inner peripheral part of the substrate 2A is engaged is formed at an outer peripheral part of the chucking members 1A, and the groove 3 includes: a bottom surface 3a abutting on an inner peripheral end surface 2c of the substrate 2A; a pair of abutment surfaces 3b formed to obliquely stand toward the outer side from both ends of the bottom surface 3a and abutting on inclined surfaces 2d formed between both principal surfaces 2a and 2b and the inner peripheral end surface 2c of the substrate 2A; and a pair of non-contact surfaces 3c formed to obliquely stand toward the outer side from the pair of abutment surfaces 3b and not contacting with the inner peripheral part of the substrate 2A. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a spin drying apparatus for cleaning a disk-shaped substrate having a central hole with a cleaning liquid and then spinning the substrate by rotating the substrate.

  For example, a disk-shaped magnetic recording medium substrate having a central hole is used in a hard disk drive or the like mounted on an information device or the like. Such a magnetic recording medium substrate is manufactured by using a substrate made of an aluminum alloy, glass, or the like, through various processing steps such as a cutting step, a grinding step, a polishing step, a sputtering step, and a plating step. . Further, after these processing steps are performed, a step of cleaning and drying the surface of the substrate is performed.

  By the way, in recent years, the recording density of magnetic recording media has been increasing more and more due to the demand for larger capacity of recording media and downsizing of information equipment. Also, such a magnetic recording medium substrate is required to have a high flatness that can cope with a low flying height of a magnetic head that floats on the recording surface.

  For this reason, in the magnetic recording medium substrate, after performing various surface treatments such as polishing, an advanced cleaning method that can remove dust and the like adhering to the substrate surface, and the cleaned magnetic recording medium substrate is cleanly dried. There is a need for a drying method.

  Conventionally, as a method for cleaning and drying a substrate, in the case of a large-diameter substrate, a large number of substrates are housed in a container called a carrier, and after scrub cleaning with a large number of cleaning brushes while transporting the cleaning liquid. The substrate is rotated and spin-dried.

  In addition, after a surface treatment such as polishing is performed on the surface of a magnetic disk substrate or the like, the work is moved by a conveyor using a plurality of cleaning tanks in order to remove foreign matters adhering to the surface of the work. There has been proposed a cleaning apparatus that uses a liquid while transporting (see Patent Document 1).

  In addition, a semiconductor substrate is used as a wafer, and a cassette containing a plurality of wafers is stored in a cradle. On the other hand, a wafer drying apparatus that rotates a cradle has been proposed (see Patent Document 2).

  Further, in the spin drying apparatus that removes the cleaning liquid adhering to the disk-shaped disk having an opening in the center by rotating the disk, the contact portion where the chuck member that chucks the outer periphery and the disk to be chucked contacts It has been proposed that a part is a non-contact portion where the chuck member and the disk are not in contact with each other, and the cleaning liquid staying on the chuck member is efficiently removed (see Patent Document 3).

  Further, in the spin drying apparatus that removes the cleaning liquid adhering to the disk-shaped disk having an opening in the center by rotating the disk, the disk is chucked in a state where the disk is set up by the chuck member that chucks the inner peripheral part, It has been proposed to provide an air supply part for supplying air toward the rear side in the rotation direction of the contact part between the chuck member and the disk, and to efficiently remove the cleaning liquid staying on the chuck member (Patent Document 4). See).

  However, even if the dust attached to the magnetic recording medium substrate is separated from the substrate surface using such a high-performance cleaning device, unless the cleaning liquid containing the separated dust is reliably removed from the substrate surface, There arises a problem that dust or the like reattaches to the magnetic recording medium substrate. That is, after cleaning the magnetic recording medium substrate, if any cleaning liquid remains on the substrate, dust or the like contained in the cleaning liquid remaining after drying will reattach to the substrate surface. In addition, there is a problem that dust in the atmosphere is easily attached by the remaining cleaning liquid.

  Here, as a method of holding the substrate (referred to as chucking) in a spin drying apparatus in which the magnetic recording medium substrate is washed with a cleaning liquid and then spin-dried by rotating the substrate, for example, as shown in FIG. As described above, there are a method of chucking the inner peripheral portion of the substrate W with a plurality of chuck members 100 and a method of chucking the outer peripheral portion of the substrate W with a plurality of chuck members 200 as shown in FIG. However, in any of the methods, water droplets may remain on the chuck portion after spin drying, and the residual water droplets may cause a dry stain on the main surface of the substrate.

  For example, as shown in FIG. 4, in the method of chucking the inner periphery of the substrate W with the plurality of chuck members 100, the rotational moment of the chuck member 100 is small and the centering at the time of rotation is easy. Although excellent in performance, the centrifugal force applied to the chuck member 100 is smaller than that of the outer peripheral portion of the substrate W, so that the possibility that water droplets remain on the inner peripheral portion of the substrate W increases. Further, the water droplets remaining on the inner peripheral portion of the substrate W move from the chuck member 100 toward the outer peripheral portion while the substrate W is rotating, in particular, after the substrate surface is dried. It tends to occur.

  On the other hand, as shown in FIG. 5, in the method of chucking the outer peripheral portion of the substrate W with the plurality of chuck members 200, such a dry stain is unlikely to occur, but in order to maintain the gripping force of the substrate W during high-speed rotation. Therefore, the balancer 201 may generate turbulent flow around the substrate during high-speed rotation, and induce reattachment of dirt and droplets to the substrate surface.

JP 2001-96245 A JP-A-8-45894 Japanese Patent Laid-Open No. 2003-257017 Japanese Patent No. 2782838

  The present invention has been proposed in view of such conventional circumstances, in a spin drying apparatus that spin-drys by rotating the substrate after cleaning the disc-shaped substrate having a central hole with a cleaning liquid, An object of the present invention is to provide a spin drying apparatus that prevents the occurrence of dry stain.

In order to solve the above problems, the present invention provides the following means.
(1) A spin drying apparatus that spin-drys the substrate by rotating the substrate after cleaning the disc-shaped substrate having a central hole with a cleaning liquid,
A plurality of chuck members for holding the inner periphery of the substrate;
A spindle motor that rotationally drives the substrate held by the chuck member;
In the outer peripheral portion of the chuck member, a groove portion that is engaged with the inner peripheral portion of the substrate is provided,
The groove portion is formed between a bottom surface that is in contact with the inner peripheral end surface of the substrate and an obliquely rising outward from both ends of the bottom surface, and is provided between both main surfaces of the substrate and the inner peripheral end surface. A pair of contact surfaces that are in contact with the inclined surfaces and a pair of non-contacts that are formed to rise obliquely outward from the pair of contact surfaces and are not in contact with the inner peripheral portion of the substrate A spin drying apparatus having a surface.

  As described above, in the spin drying apparatus according to the present invention, when the inner peripheral portion of the substrate is engaged with the groove portion provided on the outer peripheral portion of the chuck member, the bottom surface of the groove portion contacts the inner peripheral end surface of the substrate. At the same time, the pair of contact surfaces are in contact with the inclined surface of the substrate, so that no gap is generated between the groove portion of the chuck member and the inner peripheral portion of the substrate. Thereby, it is possible to prevent the cleaning liquid from remaining between the groove portion of the chuck member and the inner peripheral portion of the substrate.

  Further, since the water droplets adhering to the chuck member are spun off along the non-contact surface by the centrifugal force while the substrate rotates, the water droplets hardly remain on the chuck member. Therefore, it is possible to prevent water droplets coming out of the groove from moving on both main surfaces of the substrate after the rotation of the substrate is stopped.

  Therefore, in the spin drying apparatus according to the present invention, it is possible to efficiently remove the cleaning liquid adhering to the substrate by rotationally driving the substrate held by the plurality of chuck members with a spindle motor. It is possible to prevent dry stains from occurring on the surface of the substrate.

FIG. 1 is a side view showing an example of a chuck member used in a spin drying apparatus to which the present invention is applied. FIG. 2 is a side view showing another example of the chuck member used in the spin drying apparatus to which the present invention is applied. FIG. 3 is a side view of a conventional chuck member shown as a comparative example. FIG. 4 is a side view of a mechanism for holding the inner periphery of the substrate with a plurality of chuck members. FIG. 5 is a side view of a mechanism for holding the outer peripheral portion of the substrate with a plurality of chuck members.

Hereinafter, a spin drying apparatus to which the present invention is applied will be described in detail with reference to the drawings.
In the spin drying apparatus to which the present invention is applied, a disk-shaped substrate having a central hole is washed with a cleaning solution, and then the substrate is rotated to spin-dry.

  Specifically, a spin drying apparatus to which the present invention is applied includes a plurality of chuck members that hold the inner periphery of the substrate and a spindle motor that rotationally drives the substrate held by the plurality of chuck members. Has been.

  The plurality of chuck members can enter the inside of the center hole of the substrate via the inner periphery chuck mechanism attached to the tip of the spindle of the spindle motor, and can contact and separate from the inner periphery of the substrate. It is supported so that it can move in any direction.

  The plurality of chuck members are arranged side by side at a fixed interval (for example, 120 ° interval) around the rotation axis of the spindle motor so as to support the inner periphery of the substrate at at least three points. ing. Further, the plurality of chuck members are formed of a long shaft body, and are arranged in a state in which the axis lines of the chuck members are arranged in parallel in a direction coinciding with the rotation axis of the spindle motor.

  Here, as a characteristic part of the spin drying apparatus to which the present invention is applied, a groove portion that is engaged with the inner peripheral portion of the substrate is provided on the outer peripheral portion of the chuck member. Then, the groove is formed between the bottom surface of the substrate and the inner peripheral end surface, which is formed so as to rise obliquely outward from both ends of the bottom surface. A pair of contact surfaces that are in contact with the inclined surfaces, and a pair of non-contact surfaces that are formed to rise obliquely outward from the pair of contact surfaces and are not in contact with the substrate. It is characterized by.

  In this spin drying apparatus, for example, after performing water cleaning or the like on the magnetic recording medium substrate, the wet magnetic recording medium substrate is rotated at a high speed to dry the water droplets while shaking off with centrifugal force. Is preferably used.

  Hereinafter, the case where the chuck members 1A and 1B shown in FIGS. 1 and 2 are used as an embodiment of the present invention, and the case where the conventional chuck member 100A shown in FIGS. 3A and 3B is used as a comparative example. From this comparison, the present invention will be described more specifically.

  Each of the magnetic recording medium substrates shown in FIGS. 1 to 3 is a disk-shaped substrate 2A, 2B having a center hole, and the burrs generated on the end face during substrate processing are removed from the substrates 2A, 2B. If the end of the substrate is sharp for the purpose and when handling the substrate, the chuck member is scraped off at this portion and dust is generated. For this purpose, both the main surfaces 2a and 2b and the inner peripheral end surface 2c are prevented. Chamfering is performed to chamfer the edge between the two. Then, by applying such chamfering to the substrates 2A and 2B, a pair of chamfer surfaces 2d and 2d which are inclined surfaces between the main surfaces 2a and 2b and the inner peripheral end surface 2c are formed. Is provided.

  In addition, the board | substrate 2A shown in FIG. 1 and the board | substrate 2B shown in FIG. 2 have shown the case where the width | variety of the inner peripheral end surface 2c and the inclination angle of the chamfer surface 2d differ. 3A has the same shape as the substrate 2A shown in FIG. 1, and the magnetic recording medium substrate shown in FIG. 3B has the same shape as the substrate 2B shown in FIG. In addition, although illustration is abbreviate | omitted, the same chamfer process is given also to the outer peripheral part of board | substrate 2A, 2B.

  Here, as shown in FIG. 1, the chuck member 1A according to the present invention has a groove portion 3 with which the inner peripheral portion of the substrate 2 is engaged. The groove portion 3 is formed so as to rise obliquely outward from both ends of the bottom surface 3a and a bottom surface 3a that contacts the inner peripheral end surface 2c of the substrate 2, and contacts the chamfer surface 2d of the substrate 2. A pair of contact surfaces 3b, 3b and a pair of non-contact surfaces 3c that are formed to rise obliquely outward from the pair of contact surfaces 3b, 3b and are not in contact with the inner periphery of the substrate 2 , 3c, and is provided over the entire circumference of the chuck member 1A.

  Among these, the width of the bottom surface 3 a of the groove portion 3 substantially matches the width of the inner peripheral end surface 2 c of the substrate 2. Further, the angle formed by the pair of contact surfaces 3 b and 3 b with respect to the bottom surface 3 a of the groove portion 3 is substantially the same as the angle formed by the chamfer surface 2 d with respect to the inner peripheral end surface 2 c of the substrate 2. The pair of non-contact surfaces 3c and 3c are inclined at an angle larger than the angle formed by the contact surface 3b with respect to the bottom surface 3a.

  As a result, the chuck member 1A has the bottom surface 3a of the groove portion 3 in contact with the inner peripheral end surface 2c of the substrate 2 when the inner peripheral portion of the substrate 2 is engaged with the groove portion 3 provided on the outer peripheral portion thereof. At the same time, the pair of contact surfaces 3b and 3b are in contact with the chamfer surfaces 2d and 2d of the substrate 2, so that no gap is generated between the groove 3 and the inner peripheral portion of the substrate 2. .

  On the other hand, as shown in FIG. 2, the chuck member 1B of the present invention has a groove portion 4 with which the inner peripheral portion of the substrate 2 is engaged with the outer peripheral portion thereof. The groove portion 4 is formed so as to rise obliquely outward from both ends of the bottom surface 4a and a bottom surface 4a that is in contact with the inner peripheral end surface 2c of the substrate 2, and is in contact with the chamfer surface 2d of the substrate 2. A pair of contact surfaces 4b, 4b and a pair of non-contact surfaces 4c that are formed to rise obliquely outward from the pair of contact surfaces 4b, 4b and are not in contact with the inner periphery of the substrate 2. , 4c, and is provided over the entire circumference of the chuck member 1B.

  Among these, the width of the bottom surface 4 a of the groove portion 4 substantially coincides with the width of the inner peripheral end surface 2 c of the substrate 2. Further, the angle formed by the pair of contact surfaces 4 b and 4 b with respect to the bottom surface 4 a of the groove portion 4 is substantially the same as the angle formed by the chamfer surface 2 d with respect to the inner peripheral end surface 2 c of the substrate 2. Further, the pair of non-contact surfaces 4c, 4c are inclined at the same angle as the angle formed by the contact surface 3b with respect to the bottom surface 3a, and are formed continuously with the pair of contact surfaces 4b, 4b. .

  As a result, the chuck member 1B has the bottom surface 4a of the groove portion 4 in contact with the inner peripheral end surface 2c of the substrate 2 when the inner peripheral portion of the substrate 2 is engaged with the groove portion 4 provided on the outer peripheral portion thereof. At the same time, the pair of contact surfaces 4 b and 4 b are in contact with the chamfer surfaces 2 d and 2 d of the substrate 2, so that no gap is generated between the groove portion 4 and the inner peripheral portion of the substrate 2. .

  On the other hand, in the conventional chuck member 100A, as shown in FIGS. 3A and 3B, a vinyl tube 102 is attached to a cylindrical rod portion 101 having a constriction 101a at a position where the inner peripheral portion of the substrate 2 abuts. It has a structure covered.

  Thus, the chuck member 100A allows the inner periphery of the substrate 2 to be slightly bent while the inner periphery of the substrate 2 is in contact with the vinyl tube 102 at the position where the constriction 101a is formed. It is possible to hold the part.

  However, in the configuration of the conventional chuck member 100A, a slight amount of water droplets may remain between the chamfer surfaces 2d of the substrates 2A and 2B. That is, in this chuck member 100A, dry stains may occur irregularly depending on the amount of bending of the vinyl tube 102 and the amount of wear of the vinyl tube 102.

  On the other hand, in the chuck members 1A and 1B of the present invention, when the inner peripheral portions of the substrates 2A and 2B are engaged with the groove portions 3 and 4 as described above, the bottom surfaces 3a and 4a of the groove portions 3 and 4 are engaged. Is brought into contact with the inner peripheral end surface 2c of the substrates 2A and 2B, and the pair of contact surfaces 3b and 4b are brought into contact with the chamfer surfaces 2d and 2d of the substrate 2, whereby the grooves 3 and 4 and the substrate 2 are contacted. In order to prevent a gap from being formed between the inner peripheral portion and the inner peripheral portion, water droplets hardly remain in this portion.

  Further, since the water droplets adhering to the chuck members 1A and 1B are spun off along the non-contact surfaces 3c and 4c by the centrifugal force while the substrates 2A and 2B rotate, the water droplets hardly remain on the chuck members 1A and 1B. Become. Therefore, it is possible to prevent the water droplets coming out of the grooves 3 and 4 from moving on both the main surfaces 2a and 2b of the substrates 2A and 2B after the rotation of the substrates 2A and 2B is stopped.

  Further, in the chuck members 1A and 1B of the present invention, since the contact area between the groove portions 3 and 4 and the inner peripheral portions of the substrates 2A and 2B is large, and the deformation (deflection) of the chuck members 1A and 1B is small, wear is reduced. And less dust adheres to the substrates 2A and 2B.

  As described above, in the spin drying apparatus to which the present invention is applied, the water droplets attached to the substrates 2A and 2B are driven by rotating the substrates 2A and 2B held by the plurality of chuck members 1A and 1B with the spindle motor. Can be efficiently removed, and it is possible to prevent dry stains from occurring on the surfaces of the substrates 2A and 2B.

In addition, this invention is not necessarily limited to the thing of the said embodiment, A various change can be added in the range which does not deviate from the meaning of this invention.
For example, the spin drying apparatus to which the present invention is applied is not limited to the case of drying the magnetic recording medium substrate described above, but when the disk-shaped substrate having the central hole is washed with a cleaning liquid and then the substrate is spin-dried. It can be used widely.

  Hereinafter, the effects of the present invention will be made clearer by examples. In addition, this invention is not limited to a following example, In the range which does not change the summary, it can change suitably and can implement.

In this example, the substrate was actually cleaned and spin-dried under the following conditions.
<Board shape>
Board outer diameter: 65mm
Substrate thickness: 1.27 mm
Center hole diameter: 20 mm
Chamfer surface length: 0.15mm
Tilt angle of chamfer surface to main surface: 25 °

  In this embodiment, three chuck members 1A having the shape shown in FIG. 1 are used, the substrate is rotated at a low speed (1000 rpm) by a spindle motor while holding the inner peripheral portion of the substrate, and pure water is supplied as a cleaning liquid from the nozzle. The substrate was sprayed uniformly and the substrate was cleaned for 30 seconds. Then, after stopping the ejection of the cleaning liquid, the substrate was rotated at a high speed (5000 rpm) by a spindle motor, and the substrate was spin-dried for 15 seconds.

  When the surface of the substrate after drying was observed with a differential interference optical microscope (600 times), no deposits such as uneven drying and water spots were observed on the substrate surface after spin drying.

  DESCRIPTION OF SYMBOLS 1A, 1B ... Chuck member 2A, 2B ... Board | substrate 2a, 2b ... Main surface 2c ... Inner peripheral end surface 2d ... Chamfer surface (inclined surface) 3 ... Groove 3a ... Bottom surface 3b ... Contact surface 3c ... Non-contact surface 4a ... Bottom surface 4b: Contact surface 4c: Non-contact surface

Claims (1)

A spin drying apparatus that spin-drys the substrate by rotating the substrate after cleaning the disc-shaped substrate having a central hole with a cleaning liquid,
A plurality of chuck members for holding the inner periphery of the substrate;
A spindle motor that rotationally drives the substrate held by the chuck member;
In the outer peripheral portion of the chuck member, a groove portion that is engaged with the inner peripheral portion of the substrate is provided,
The groove portion is formed between a bottom surface that is in contact with the inner peripheral end surface of the substrate and an obliquely rising outward from both ends of the bottom surface, and is provided between both main surfaces of the substrate and the inner peripheral end surface. A pair of contact surfaces that are in contact with the inclined surfaces, and a pair of non-contact surfaces that are formed to rise obliquely outward from the pair of contact surfaces and are not in contact with the substrate. A spin dryer characterized by that.

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