JP4400797B2 - Disc spin dryer - Google Patents

Description

  The present invention relates to a disk spin drying apparatus for drying a disk-shaped disk such as a magnetic disk or an optical disk after washing.

  Conventionally, a disk such as a magnetic disk or an optical disk has been cleaned after processing such as polishing or after film formation. After cleaning the disc, the cleaning solution adhering to the surface of the disc must be removed, but in order to remove the cleaning solution adhering to the disc surface, the disc is rotated at high speed and the centrifugal force is used. A method of removing the cleaning liquid adhering to the surface of the disk to the outside of the disk is employed.

  As a method of removing the cleaning liquid adhering to the surface by rotating the disk in this way, there is a method of rotating the disk while the inner peripheral edge of the disk is chucked. Specifically, at least three chuck members are attached to the tip of the spindle, and the spindle is rotated while the inner peripheral edge of the disk is chucked by the chuck member. As the spindle rotates, the chuck member also rotates and the disk rotates. A method for removing the cleaning liquid adhering to the surface of the disk in this way has been conventionally used.

  By the way, as described above, when the cleaning liquid is removed by rotating the inner peripheral edge in a chucked state, the cleaning liquid adhering to the surface of the disk can be removed, but the contact between the inner peripheral edge of the disk and the chuck member is possible. It is not possible to remove the cleaning liquid slightly accumulated in the part. The cleaning liquid staying slightly in this manner flows out to the surface of the disk when the chuck member is separated from the inner peripheral edge of the disk after the rotation of the disk is completed, and may cause a stain on the surface of the disk. .

In order to solve the above-described problems, Patent Document 1 discloses spin drying of a disc provided with an air supply unit that supplies air toward the rear side in the rotation direction of the contact portion between the chuck member and the disc. An apparatus is disclosed. In the invention disclosed in Patent Document 1, in order to remove the cleaning liquid staying at the rear side in the contact portion between the chuck member and the disk, the chuck member is inclined so as to face the disk from the front to the rear in the rotation direction of the disk. Are provided with vent holes. The cleaning liquid staying in the contact portion is removed using the air ejected from the vent hole.
Japanese Patent No. 2782838

  By the way, in the above-described disk spin drying apparatus according to the prior art, the cleaning liquid staying on the front side in the contact portion between the chuck member and the disk is removed by the wind pressure when the disk is rotated. At this time, the cleaning liquid staying at both end portions of the disc in the plate thickness maintaining direction is blown off toward the outside in the plate thickness direction of the disc by the wind pressure. However, the cleaning liquid staying at the central portion in the thickness direction of the disk stays slightly without being blown off by the wind pressure.

  In order to solve the above-described problem, a disk spin drying apparatus is known that chucks the outer peripheral edge instead of chucking the inner peripheral edge of the disk. When the outer peripheral edge of the disk is chucked, a place far from the center of the disk is chucked as compared with the case where the inner peripheral edge is chucked. For this reason, since the speed of the chuck member in the tangential direction of the disk becomes high, the attached cleaning liquid can be more efficiently removed. Further, when chucking the inner peripheral edge of the disk, the front and rear portions of the contact portion between the disk and the chuck member draw an arc in the same direction, so that the distance between the disk and the chuck member is narrow. On the other hand, when chucking the outer peripheral edge of the disk, the front and rear portions of the contact portion between the disk and the chuck member draw an arc in the opposite direction, so the disk and chuck are compared with the case of chucking the inner peripheral edge of the disk. Spacing between members is wide. Since the cleaning liquid tends to stay at the portion where the disk and the chuck member are in contact with each other, the cleaning liquid can be efficiently removed when the distance between the disk and the chuck member is wide.

  Since the chuck member has a cylindrical shape, when the disk is brought into contact with the disk, the distance between the disk and the chuck member continuously increases from the contact portion toward the front and rear in the disk rotation direction. For this reason, the cleaning liquid tends to stay on the outer peripheral surface of the disk and the outer peripheral surface of the chuck member, and the cleaning liquid tends to stay in a portion where the distance is continuously increased. In some cases, it cannot be removed, and some cleaning liquid remains at the contact portion between the disk and the chuck member.

  In recent years, the density and capacity of disks have been increased, and the disks have become very precise. Therefore, as described above, if the cleaning liquid remains even a little, the cleaning liquid flows out on the surface of the disk after the rotation of the disk is completed, and the precision of the disk is impaired.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a disk spin drying apparatus that can completely remove a cleaning liquid from a contact portion between a disk and a chuck member.

In order to achieve the above-mentioned object, the present invention is a disk spin drying apparatus for removing cleaning liquid adhering to a disk by rotating the disk, and a plurality of chucks for chucking the outer peripheral surface of the disk to a spindle. A chuck member is provided, and each chuck member is formed with a contact portion that comes into contact with the outer peripheral surface of the disk so as to make a linear contact, and each chuck member has a rotation direction in the spindle rotation direction. The front and back surfaces are flat surfaces, and the space between the two flat surfaces is formed so as to become narrower toward the contact portion. By forming a recess in the contact portion, the disc is inserted into the recess. A non-contact portion that does not contact, and a ventilation groove that generates a negative pressure suction force by forming an air flow in the rotation direction of the disk with respect to the non-contact portion. Configuration and the fact that its said that.

  Since the chuck member chucks the outer peripheral surface of the disk, when the disk is rotated at high speed by the spindle, the concave portion constituting the non-contact portion becomes a ventilation groove, and a negative pressure suction force is generated in the concave portion. Accordingly, the cleaning liquid removal capability is further enhanced by the action of the negative pressure suction force. Since the chuck member contacts the outer peripheral side of the disk, it is necessary to increase the chucking force in order to stably hold the disk during rotation. For this reason, there is a possibility that dents, cracks, chips, etc. may occur on the outer periphery of the disk from the chuck member. However, if the contact part of the chuck member to the disk is formed of an elastic member, the disk is protected.

  The distance between the front and rear in the rotation direction at the contact portion of the chuck member with the disk forms a flat surface with a narrower distance toward the contact portion, and a recess is formed on the contact surface. By using a non-contact portion, the cleaning liquid stays in the vicinity of the contact portion between the disk and the chuck member, and the cleaning liquid adhering to this portion is reliably removed by rotating the disk at high speed. be able to.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, in FIG. 1, 1 is a disk to be spin-dried. The chuck means 11 is a means for chucking the disk 1, and includes a chuck member 2, an arm 3, a swing shaft 4, a spherical surface portion 5, and a cam follower 6. The chuck means 11 is provided at three locations so as to form an angle of 120 degrees in the circumferential direction.

  As shown in FIG. 1, the chuck member 2 is provided at one end of the arm 3 via a mounting portion 13 described later. Further, one end of the swing shaft 4 is connected to the opposite surface of the arm 3 to the other end. A spherical surface portion 5 is connected to an intermediate portion of the swing shaft 4, and a cam follower 6 is attached to the other end portion of the spherical surface portion 5. The drive unit 12 is a unit that performs control for the chuck member 2 to chuck the disk 1 and to release the chuck, and includes a drive shaft 8, a cam block 9, and a cam groove 10. The drive shaft 8 is connected to the cam block 9 at one end. The cam block 9 is provided with a cam groove 10 for the cam follower 6 to move. The spindle 7 is a member that rotates the disk 1 chucked by the chuck means 11.

  When a drive device (not shown) connected to the drive shaft 8 moves the drive shaft 8 in the direction of arrow A, the cam block 9 similarly operates in the direction of arrow A. When the cam block 9 moves in the direction of the arrow A, the cam follower 6 moves along the cam groove 10 so as to spread in the back direction of the cam groove 10. Thus, when the cam follower 6 moves in the expanding direction, the force is transmitted to the spherical surface portion 5 and the spherical surface portion 5 rotates. When the spherical surface portion 5 rotates, the swing shafts 4 connected to the spherical surface portion 5 operate in directions that become narrower to each other. Similarly, the chuck member 2 connected to the swing shaft 4 via the arm 3 also operates in a direction of narrowing each other. Thereby, the chuck member 2 chucks the disk 1.

  Further, if the drive shaft 8 moves in the direction of the arrow B, the cam follower 6 moves in the direction of narrowing along the cam groove 10, so that the swing shaft 4 operates in the direction of expanding each other. Accordingly, the chuck member 2 moves in a direction to release the disk 1 from the chuck. As a result, the chuck member 2 releases the chuck of the disk 1.

  As described above, the chuck of the disk 1 and the release thereof are performed. In this embodiment, a motor (not shown) rotates the spindle 7 with the disk 1 being chucked as described above. As the spindle 7 rotates, the chuck member 2 rotates and the disk 1 also rotates. Thus, as the disk 1 rotates, the cleaning liquid adhering to the surface of the disk 1 moves from the inner side to the outer side of the disk 1 and eventually scatters outside the disk.

  Next, the configuration of the chuck member 2 in the present embodiment will be described with reference to FIGS. 2 and 3. The chuck member 2 of FIG. 2 is provided with two tapered surfaces 21 at both end faces and is provided with a contact portion 22 to the disk 1. In the central portion of the contact portion 22, a recess groove having a predetermined width and depth is provided as the non-contact portion 23. The outer peripheral surface of the disk 1 is in line contact with the chuck member 2 formed in this way at the contact portion 22, but the non-contact portion 23 and the disk 1 are not in contact with each other.

  As described above, in this embodiment, the non-contact portion 23 is a recess having a predetermined width and depth, and functions as a ventilation groove, so that a gap is generated between the disk 1 and the non-contact portion 23. When the disk 1 and the chuck member 2 are rotating, an air flow is generated in this gap. This air flow generates a negative pressure suction force, and the cleaning liquid staying in the vicinity of the contact portion between the contact portion 22 and the disk 1 is removed. Thereby, in this Embodiment, removal of a washing | cleaning liquid is performed efficiently.

  FIG. 3 shows a shape of the chuck member 2 excluding the tapered surfaces 21 provided at both ends. The chuck member 2 is provided with a contact portion 22 and a non-contact portion 23. The contact portion 22 has a narrow surface, and the front and rear surfaces of the chuck member 2 in the rotational direction face the contact portion 22. The flat portion 24 has a narrow interval, and the portion of the contact portion 22 has the smallest interval. That is, the cross-sectional shape of the chuck member 2 is substantially a fan shape. Further, the non-contact portion 23 is formed by providing a recess at an intermediate position of the contact portion 22, and the non-contact portion 23 has a predetermined depth at an intermediate position in the left-right direction of the contact portion 22.

  Accordingly, the chuck member 2 chucks the disk 1 as shown in FIG. 4 and drives the spindle 7 to spin dry the disk 1. That is, in FIG. 4, when the disk 1 rotates in the direction of the arrow C, the cleaning liquid adhering to the surface of the disk 1 moves away from the center of the disk 1 as indicated by the arrow D. Scatter. At this time, an air flow is generated in the direction of arrow E as the disk 1 rotates in the non-contact portion 23 of the chuck member 2. Thus, when an air flow is generated in the non-contact portion, a negative pressure suction force acts on the cleaning liquid staying at the contact portion between the disk 1 and the contact portion 22. Due to this negative pressure suction force, the staying cleaning liquid is scattered outside the disk 1, thereby removing the cleaning liquid. Since the chuck member 2 chucks the outer peripheral edge of the disk 1 and the disk 1 rotates in a tangential direction at a high speed, the cleaning liquid can be efficiently removed.

  Moreover, in the chuck member 2, the front and rear portions of the contact portion 22 in the rotation direction are flat portions 24, and the interval is narrowed toward the contact portion 22. In addition, the distance from the disk 1 is wider than in the case of a cylindrical shape. For this reason, in the chuck member 2, it becomes difficult for the cleaning liquid to adhere near the contact portion between the contact portion 22 and the disk 1. Therefore, the cleaning liquid is completely removed from the disk 1, and after the rotation of the disk 1 is completed, the cleaning liquid does not flow out on the surface of the disk 1 to form a stain.

  Here, since the chuck member 2 performs spin drying by chucking the outer peripheral edge of the disk 1 and rotating it at a high speed, the chuck member 2 must increase the chucking force in order to improve the stability of the disk 1. However, as the force for chucking the disk 1 is increased, the disk 1 is likely to be dented, cracked, or chipped. In order to prevent such dents, cracks, and chips, the elastic member 25 can be provided at the contact portion 22 where the chuck member 2 contacts the disk 1 as shown in FIG. As a result, the disk 1 is protected.

It is sectional drawing which shows the principal part structure of the spin drying apparatus of a disk. It is a front view which shows the state which made the chuck | zipper member in contact with the disk in embodiment of this invention contact. It is a schematic block diagram of the chuck member which abbreviate | omits a taper surface and is shown. In embodiment of this invention, it is effect | action explanatory drawing which shows the state which is performing the spin drying of the disk. It is a block diagram similar to FIG. 3 which shows the modification of a chuck member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Disc 2 Chuck member 22 Contact part 23 Non-contact part 24 Plane part 25 Elastic body

Claims (2)

In the spin drying apparatus of the disk that removes the cleaning liquid adhering to the disk by rotating the disk,
A plurality of chuck members for chucking the outer peripheral surface of the disk are provided on the spindle,
Each chuck member is formed with a contact portion that comes into contact so that the outer peripheral surface of the disk is in line contact,
In each chuck member, the front and rear surfaces in the rotation direction of the spindle are flat surfaces, and the interval between the two flat surfaces is formed so as to narrow toward the contact portion.
By forming a concave portion in the contact portion, a non-contact portion in which the disk does not contact is formed in the concave portion, and an air flow in the rotation direction of the disk is formed with respect to the non-contact portion to generate a negative pressure suction force. A spin drying apparatus for a disc, characterized in that it is configured to be a ventilation groove for generating air . 2. The disk spin drying apparatus according to claim 1, wherein the chuck member is provided with an elastic member at a contact portion with the disk.

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