JP2008282865A - Scrubbing cleaning equipment, and roll sponge assembly for use therein - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide scrubbing cleaning equipment exhibiting high cleaning capability through a simple structure, and to provide a roll sponge for use therein. <P>SOLUTION: The roll sponge assembly for scrubbing cleaning equipment comprises a supporting portion for holding a roll sponge and supports formed on the opposite sides of the supporting portion while integrating the rotating shaft, and the roll sponge being held on the supports by fitting the supporting portion in the hollow hole of the roll sponge. The supporting portion of the support of this roll sponge assembly is formed such that the outside diameter is varied continuously to enlarge gradually in the longitudinal direction, and the roll sponge held on the other support is formed such that the outside and inside diameters vary gradually in accordance with variation in outside diameter of the supporting portion. The scrubbing cleaning equipment cleans a cleaning object by moving it in the longitudinal direction between a pair of roll sponge assemblies which are rotating the cleaning object. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a scrub cleaning device for a circular or rectangular plate such as a metal or glass substrate for a magnetic disk or a semiconductor wafer, and a roll sponge assembly used therefor.

  2. Description of the Related Art In recent years, magnetic disk drives have been in the trend of expanding usage and miniaturization, and even higher magnetic recording density is required for magnetic disks mounted on drives. A magnetic disk is configured by forming a thin film such as a magnetic layer on a substrate made of a metal such as aluminum or glass. In the magnetic disk, a substrate capable of further reducing the distance (magnetic spacing) between the magnetic head and the magnetic disk has been rapidly developed in response to the above requirements. For example, as disclosed in Patent Document 1, after the surface of the substrate is precisely polished with fine abrasive grains, an ultra-smooth substrate having a surface roughness Ra of 0.3 nm or less is obtained.

  However, no matter how highly the substrate is polished, a high smoothness cannot be obtained if foreign matter adheres to the substrate, and a cleaning method after precision polishing is extremely important. Along with the demand for high smoothness, the size of abrasive grains used in precision polishing has become smaller. In recent years, even large ones are about 1 μm, and small ones are as small as several tens of nm. Therefore, it is very difficult to always maintain the cleaning quality at a high level from both the required cleaning level and the size of the foreign matter to be removed.

  In general, ultrasonic cleaning and scrub cleaning are known as methods for cleaning a substrate after precision polishing. As disclosed in Patent Document 2, it is difficult to reliably drop the fine abrasive grains as described above even if relatively large abrasive deposits can be removed by ultrasonic cleaning alone. It was necessary to prepare a washing tank for this, which resulted in production disadvantages such as a longer washing time. On the other hand, in scrub cleaning, as shown in FIGS. 1A and 1B, foreign matter can be removed by physically rubbing the surface of the substrate 1 with the roll sponge 3, so that a large amount of foreign matter is deposited on the substrate 1. Can be removed to a certain extent at a stroke, and it is more effective than ultrasonic cleaning that requires a plurality of cleaning tanks. At present, as disclosed in Patent Document 2, by using the above two cleaning methods in combination, more efficient substrate cleaning is performed.

JP-A-10-241144 JP 2002-74653 A

By the way, there are the following three problems with the scrub cleaning described above.
(1) Difficulties in optimizing the pressing force of the sponge to the substrate (2) Recontamination of the substrate due to accumulation of dirt on the sponge (3) Considering the problems (1) and (2) above Increasing the size of the apparatus due to multi-stage scrub cleaning Problem (1) is caused by foreign materials of various materials or sizes adhering to the substrate to be cleaned. As described in Patent Document 2, in the precision polishing process, the material and size of the abrasive grains are changed according to the target smooth quality, and the adhesion between the substrate material and the abrasive grains, in other words, from the substrate. The difficulty of removing the abrasive grains differs in each case. In addition, substrate shavings and polishing pad scraps generated during polishing, dust generation from the apparatus driving unit, and the like are added, and the types, sizes, and shapes of foreign matters attached to the substrate are various.

  In order to increase the cleaning power during scrub cleaning, it is conceivable to increase the force for pressing the roll sponge against the substrate. However, as shown in FIG. 1 (c), by increasing the pressing force of the roll sponge 3 against the substrate 1, depending on the shape and material of the adhered foreign matter, the substrate is reversed when the foreign matter is scraped off by the sponge. There is a risk of hurting 1. That is, as shown in FIG. 5A, the possibility of generating a defect that impairs the smoothness of the substrate 1 becomes extremely high.

  Regarding the problem (2), in scrub cleaning, since the roll sponge attached to the apparatus processes a large amount of substrates, dirt is gradually accumulated on the roll sponge. As the accumulation of dirt increases, the dirt is returned to the substrate that should have been washed, and a predetermined washing quality cannot be obtained. Further, as described in the above problem (1), since various foreign substances of size, shape, and material are captured by the roll sponge, depending on the captured foreign substances, the surface of the substrate to be processed thereafter is damaged. Continue to generate defects such as worsening the yield.

  Regarding the problem (3), in consideration of the above problems (1) and (2), multi-stage scrub cleaning has been attempted. However, the apparatus having a drive unit is connected to form a considerably large apparatus. The current situation is that the maintenance is also worsened. For these reasons, there is a strong demand for smarter and more efficient cleaning devices.

  An object of the present invention is to provide a scrub cleaning device capable of solving the problems (1) to (3) and a roll sponge used therefor.

  In order to achieve the above object, a roll sponge assembly for a scrub cleaning device according to the present invention comprises a support part for holding the roll sponge, a support having a rotating shaft integrally formed on both sides of the support part, and a roll sponge. A roll sponge held by the support is provided by fitting the support portion of the support into the hollow hole. The support part of the support of this roll sponge assembly is formed so that its outer diameter gradually increases in the longitudinal direction, while the roll sponge held by the support has its outer diameter and The inner diameter of the hollow hole is formed so as to continuously change in accordance with the change in the outer diameter of the support portion.

  Alternatively, in the roll sponge assembly for a scrub cleaning apparatus according to the present invention, for example, the outer diameter of the roll sponge held by the support and the inner diameter of the hollow hole may be constant.

  Furthermore, a roll sponge assembly for a scrub cleaning device according to the present invention includes a support body portion that holds a plurality of roll sponges, a support body on which rotating shafts are integrally formed on both sides of the support body portion, and a plurality of roll sponge hollows. A plurality of roll sponges are provided that are held by the support by fitting the support portion of the support into the hole. The outer diameter of the support portion of the support of this roll sponge assembly changes so as to increase stepwise in the longitudinal direction, and the plurality of roll sponges each have an outer diameter and an inner diameter of a hollow hole. It may be formed so as to correspond to a plurality of outer diameters that change stepwise, and the outer diameter and the inner diameter of the hollow hole are constant in the longitudinal direction.

  Further, the scrub cleaning apparatus according to the present invention includes at least a plurality of rollers that vertically support the object to be cleaned and rotate the object to be cleaned, and a roll sponge assembly that is horizontally and parallelly arranged in pairs. Prepare. The scrub cleaning apparatus is characterized in that the object to be cleaned is cleaned by moving the object to be cleaned in the longitudinal direction between the pair of rotating sponge assemblies rotating.

  Further, the scrub cleaning method according to the present invention includes a step of rotating the object to be cleaned vertically supported by a plurality of rollers, a step of rotating a roll sponge assembly arranged in a pair and horizontally, and a plurality of rollers. At least the step of moving the object to be cleaned between the pair of rotating roll sponge assemblies in the longitudinal direction of the roll sponge assembly.

  In the present invention, by changing the outer diameter of the roll sponge in the roll sponge assembly for the scrub cleaning device, the pressing force of the roll sponge against the substrate that is the cleaning target can be continuously changed as the substrate moves. it can. In other words, as the scrub cleaning progresses, the substrate, which is the cleaning object, is sent in the longitudinal direction of the roll sponge, so that a pressing force according to the cleaning stage can be provided between the roll sponges. Further, in the present invention, the use part of the roll sponge can be changed according to the stage of cleaning by feeding the substrate in the longitudinal direction.

  Furthermore, the present invention only changes the outer diameter of the roll sponge for the scrub cleaning device, and does not complicate the device, and the scrub cleaning is effective and highly clean according to the stage during the substrate cleaning. Can be provided.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

Example 1
FIGS. 2A and 2B are schematic views of the scrub cleaning apparatus according to the first embodiment of the present invention. FIGS. 3A to 3C are diagrams illustrating a substrate cleaning process by the scrub cleaning apparatus. FIGS. 6A and 6B are diagrams comparing the conventional example showing the effect of cleaning in Example 1, and FIG. 6A is an exploded view of the roll sponge assembly used in the scrub cleaning apparatus.

  The scrub cleaning apparatus according to the present embodiment generally includes a plurality of rollers 202 for supporting and rotating the cleaning object 1 and a pair of roll sponge assemblies 201 for cleaning the cleaning object 1.

  In the scrub cleaning apparatus according to the present embodiment, the cleaning object 1 is an annular magnetic disk substrate. As clearly shown in FIG. 2B, the substrate 1 that is the object to be cleaned is provided with a plurality of support points (in this embodiment) along the periphery thereof by a plurality of (three in this embodiment) rollers 202. Then, it is supported vertically at three locations. When the number of rollers 202 is three as in the present embodiment, as shown in FIG. 2B, two are arranged horizontally on the lower side of the substrate 1, and the remaining one is arranged horizontally. It is preferable that the support point is located at a position on the vertical bisector of the line segment connecting the support points of the two rollers 202 and intersecting the periphery of the substrate 1. Furthermore, in the case of the present embodiment, it is most preferable that the three rollers 202 are arranged along the periphery of the substrate 1 so that the support points are equilateral triangles.

  At least one of the plurality of rollers 202 is rotationally driven, and the driving force rotates the substrate 1 via the support point. The other rollers 202 rotate together to assist the rotation of the substrate 1 while supporting the substrate 1 vertically. The plurality of rollers 202 are supported by shafts and arms (not shown), and the substrate 1 is held in the longitudinal direction of the roll sponge 203 (in the direction of the arrow 205) in a state where the relative positional relationship between the rollers does not change. It is configured to be able to move while rotating. The method for supporting or transporting the substrate 1 can be variously changed depending on the structure of the substrate and the apparatus configuration, and is not limited to the present embodiment.

  In this embodiment, as shown in FIG. 6A, the roll sponge assembly 201 supports a roll sponge 203 for cleaning the substrate 1 and a support body 204 as a rotating shaft that supports and rotates the roll sponge 203. Is included.

As shown in FIG. 2B, the outer contour of the roll sponge 203 of the present embodiment is gradually increased from D ₂ to D ₁ (D ₁ > D ₂ ) according to the moving direction of the substrate 1 (the direction of the arrow 205). It has a truncated cone shape that expands. At the center of the roll sponge 203 in the longitudinal direction (arrow 205 direction), as with the outer diameter, a truncated cone shape whose inner diameter gradually increases from D ₃ to D ₄ (D ₄ > D ₃ ) according to the moving direction of the substrate 1. The hollow hole 203c is formed. The hollow hole 203c is formed concentrically with the outer contour. In the case of the present embodiment, the roll sponge 203 is (D1-D4) = (D2-D3), that is, the thickness of the roll sponge 203 is constant in the longitudinal direction (the direction of the arrow 205). Is formed. However, the wall thickness of the roll sponge 203 is not necessarily limited to this. The roll sponge 203 is preferably made of a polyvinyl acetal (PVA) resin as disclosed in Japanese Patent Application Laid-Open Nos. 2000-246187 and 2000-31863. The PVA resin is softened in a wet state, excellent in water absorption and water retention, exhibits flexibility and impact resilience, and is excellent in wear resistance.

  The support body 204 includes a support body portion 204b and rotating shafts 204a disposed at both ends of the support body portion 204b.

The support part 204b has substantially the same shape as the hollow hole 203c of the roll sponge 203. That is, in FIG. 6A, a frustoconical shape is formed in which the outer diameter gradually increases from D ₃ to D ₄ from right to left (in the direction of arrow 205 in FIG. 2A). The length of the support portion 204b in the longitudinal direction (the direction of the arrow 205 in FIG. 2A) is not limited to this, but is preferably the same as the length of the roll sponge 203. The support body portion 204b is fitted into the hollow hole 203c of the roll sponge 203, and fixes and holds the roll sponge 203.

Rotary shaft 204a, in the present embodiment, as shown in FIG. 6 (a), has the same outer diameter as the minimum outer diameter D ₃ of the support portion 204b, a support portion 204b coaxially, the support It is integrally formed at both ends of the portion 204b. At least one of the rotating shafts 204a arranged on both sides of the support member 204b is connected to a rotation driving unit (not shown), and thereby the roll sponge assembly 201 can be driven to rotate. The outer diameter of the rotary shaft 204a is the same need not be the minimum outer diameter D ₃ of the support portion 204b as in the present embodiment, for example, may be smaller than the minimum outer diameter D _3.

In the scrub cleaning apparatus according to the present embodiment, as shown in FIG. 2A, the roll sponge assembly 201 is arranged in a pair so as to sandwich both surfaces of the substrate 1. In the present embodiment, the paired roll sponge assemblies 201 and 201 are parallel to each other with a predetermined interval that the center axis of the supports 204 and 204 is smaller than the maximum outer diameter (D ₁ ) of the roll sponge 203. It is arranged to be. Note that the interval between the supports 204 and 204 is not limited to this, and is appropriately set according to various conditions such as the thickness of the substrate and the required cleaning ability. Further, the rotation axis of the roll sponge assembly 201 and the rotation axis of the roller 202 that vertically supports the substrate 1 are arranged so as to form a right angle when viewed from above.

  As described above, the substrate 1 that is the object to be cleaned moves from the right to the left in FIG. 2A between the rotating roll sponge assemblies 201 and 201 that make a pair while rotating by the roller 202. The moving speed of the substrate 1 is appropriately controlled according to the shape, size, etc. of the substrate 1.

  The cleaning operation of the substrate 1 by the scrub cleaning apparatus having the above configuration and the effect thereof will be described with reference to FIGS. 3 (a) to 3 (c) and FIG.

  As shown in FIG. 3A, foreign substances of various shapes, sizes, and materials are attached to the surface of the substrate 1 before cleaning. The substrate 1 in such a state enters between the pair of roll sponge assemblies 201, 201, and scrub cleaning is started.

  As shown in FIG. 3B, in the initial stage of cleaning, since the outer diameters of the opposing roll sponges 203 and 203 are small, the contact pressure (pushing force) of the roll sponges 203 and 203 on both surfaces of the substrate 1 is small. As a result, foreign matter that is lightly adhered to the surface 1 of the substrate 1 or large foreign matter that is easily captured by the roll sponge 203 even with a weak pushing force is removed from the substrate 1. The trapped foreign matter is also in a state of being easily detached from the roll sponge 203 due to a small pushing force, and is easily detached from the rotating roll sponge 203 by an action such as centrifugal force, and remains attached to the roll sponge 203. Almost never.

  Thereafter, as shown in FIG. 3C, the substrate 1 is sent to the side having the larger outer diameter of the roll sponge 203 indicated by the arrow 205. As the outer diameter of the roll sponge 203 increases, the pressing force of the roll sponges 203, 203 against both surfaces of the substrate 1 increases, thereby performing stronger scrub cleaning of the substrate 1. Since foreign substances having a size and adhesion force corresponding to the pressing force of the roll sponge 203 are sequentially removed, even if the pressing force is increased, defects such as scratches caused by large foreign substances as shown in FIG. It does not occur on the surface of the substrate 1. In addition, an effective detergency can be exhibited against small foreign matters that could not be removed in the previous stage. Further, the increase in the outer diameter of the roll sponge 203 increases the centrifugal force on the outer peripheral surface of the roll sponge 203, and assists the detachment of the attached small foreign matter from the surface of the roll sponge 203.

  Further, since the use site of the roll sponge 203 changes in the longitudinal direction according to the stage of the substrate 1 dirt, the accumulation of dirt on the roll sponge 203 is dispersed compared to the conventional case, and the maintenance life of the roll sponge 203 can be extended. . In addition, it is possible to avoid the occurrence of defects such as recontamination and scratches on the generated substrate 1 as compared with the conventional case where the substrate 1 is continuously used at the same site.

  Further, since a pair of roll sponge assemblies 201 is sufficient, the rotational drive unit of the apparatus is also compatible with the roll sponge assembly 201, and the maintainability of the apparatus is good. In addition, there is no need for multi-stages using a conventional plurality of units, and the same effect can be realized with less space than such multi-stages.

(Example 2)
FIG. 6B is an exploded view of the roll sponge assembly used in the scrub cleaning apparatus according to the second embodiment of the present invention.

  This embodiment basically conforms to the first embodiment, but considers the productivity of the roll sponge 203, which is a consumable, and is designed so that the same diameter roll sponge, which is a conventional production method, can be simply cut and used. Has been. That is, the present embodiment is different from the first embodiment only in the structure of the roll sponge, and the other configuration is exactly the same as the first embodiment.

  In this embodiment, the roll sponge assembly 401 includes a roll sponge 403 for cleaning the substrate and a support 404 that supports the roll sponge 403, as shown in FIG. 6B.

The outer diameter of the outer contour of the roll sponge 403 in this embodiment is constant in the longitudinal direction and is equal to the minimum outer diameter D ₂ of the roll sponge 203 of the first embodiment. The inner diameter of the hollow hole 403c is also constant in the lengthwise direction is the same as the minimum inner diameter D ₃ of the hollow hole 203c of the roll sponge 203 of the first embodiment. Therefore, the thickness of the roll sponge 403 is also constant in the longitudinal direction.

  As described above, the roll sponge 403 is formed as a hollow cylindrical body whose outer diameter and inner diameter are constant in the longitudinal direction, so that mass production is possible, and the roll sponge 403 is a consumable item in the scrub cleaning apparatus. If this is taken into consideration, the manufacturing cost of the cleaning device can be kept low.

  The support body 404 in the present embodiment has the same shape as that of the first embodiment, and includes a support body portion 404b and rotating shafts 404a disposed at both ends of the support body portion 404b.

The support body 404b has a solid truncated cone shape whose outer diameter gradually increases from D ₃ to D ₄ from right to left in FIG. 6B. The length of the support portion 404b in the longitudinal direction is not limited to this, but is preferably substantially the same as the length of the roll sponge 403. The support body 404b is fitted into the hollow hole 403c of the roll sponge 403, and fixes and holds the roll sponge 403.

  In the case of the present embodiment, when the support body portion 404b is fitted into the hollow hole 403c of the roll sponge 403, the roll sponge 403 has flexibility, so that the outer contour of the roll sponge 403 also becomes the support body 404b. A frustoconical shape in which the outer diameter gradually increases in accordance with the outer contour of the lens. As a result, the roll sponge assembly 401 in the present embodiment has almost the same shape as the roll sponge assembly 201 (see FIG. 2B) of the first embodiment.

  Therefore, by applying the roll sponge assembly 401 of this embodiment to a scrub cleaning device, the same effects as those of the first embodiment can be obtained in substrate cleaning.

(Example 3)
FIG. 6C is an exploded view of the roll sponge assembly used in the scrub cleaning apparatus according to the third embodiment of the present invention.

  This example also conforms to Example 1 above, but improves the shape of the roll sponge and the support for fixing and supporting the roll sponge. Therefore, the present embodiment is different from the first embodiment only in the structure of the roll sponge assembly, and the other configuration is exactly the same as the first embodiment.

In this embodiment, the roll sponge assembly 501 includes a roll sponge 503 for cleaning a substrate and a support 504 for supporting the roll sponge 503 as shown in FIG. 6C.
Similar to the roll sponge 203 of the first embodiment, the outer contour of the roll sponge 503 in the present embodiment has a truncated cone shape in which the outer diameter gradually increases from D ₂ to D ₁ from right to left. A hollow hole 503 c is formed at the center of the roll sponge 503. The inner diameter of the hollow hole 503c is different from the roll sponge 203 of the first embodiment is constant in the lengthwise direction is the same as the minimum inner diameter D ₃ of the hollow hole 203c of the roll sponge 203 of the first embodiment. Accordingly, the thickness of the roll sponge 503 is gradually increased from right to left.

  Thus, since the roll sponge 403 of this embodiment is formed as a hollow cylindrical body whose inner diameter is constant in the longitudinal direction, it is easier to manufacture than the roll sponge 203 of Embodiment 1, and the cleaning device The manufacturing cost can be kept low.

  The support body 504 in the present embodiment supports the roll sponge 503 and also functions as a rotating shaft of the roll sponge assembly 501. As shown in FIG. 6C, the support body 504 is formed as a solid cylindrical body (column) having a constant outer diameter in the longitudinal direction, and has an outer diameter D3 substantially the same as the inner diameter of the roll sponge 503. Have. The length of the support 504 is set to be larger than the length of the roll sponge 503 by the length used as the rotation axis. The support body 504 in the present embodiment has a simple cylindrical structure as shown in the drawing, and is easy to manufacture. In this embodiment, the roll sponge support part of the support body 504 and the rotation shaft have the same diameter, but these diameters may be varied as necessary.

  The support body 504 is fitted into the hollow hole 503c of the roll sponge 503, and fixes and holds the roll sponge 503. Moreover, the part which penetrates roll sponge 503 and protrudes from both ends is used as a rotating shaft. As a result, the roll sponge assembly 501 in the present embodiment has substantially the same shape as the roll sponge assembly 201 of the first embodiment (see FIG. 2B).

  Therefore, by applying the roll sponge assembly 501 of this embodiment to a scrub cleaning device, the same effects as those of the first embodiment can be obtained in cleaning the substrate 1.

Example 4
FIGS. 4A to 4C show a scrub cleaning apparatus according to a fourth embodiment of the present invention, and FIG. 7A shows an exploded view of a roll sponge assembly used therefor.

  The present embodiment basically conforms to the first embodiment, but as in the second embodiment, in consideration of the productivity of a consumable roll sponge, the same diameter roll sponge as a conventional production method is simply cut. It is devised so that it can be used. That is, the present embodiment is substantially the same as the first embodiment except for the structure of the roll sponge assembly, which is substantially different from the first embodiment. Therefore, there is no particular difference in the function and effect achieved.

  In the present embodiment, as shown in FIG. 7A, the roll sponge assembly 301 includes a roll sponge 303 including two roll sponges 303a and 303b for cleaning the substrate 1, and the two roll sponges 303a, A support 304 that supports 303b is included. In the present embodiment, the roll sponge assembly 301 has a structure in which the outer diameter of the outer contour is changed stepwise as shown in FIG.

The outer diameter of the outer contour of the small diameter roll sponge 303a in this embodiment is constant in the lengthwise direction, equal to the minimum outside diameter D ₂ of the roll sponge 203 of the first embodiment. The inner diameter of the hollow hole 303c is also constant in the lengthwise direction is the same as the minimum inner diameter D ₃ of the hollow hole 203c of the roll sponge 203 of the first embodiment. Therefore, the wall thickness of the small-diameter roll sponge 303a is also constant in the longitudinal direction. On the other hand, the outer diameter of the outer contour of the large diameter roll sponge 303b is constant as in the small diameter roll sponge 303a in the longitudinal direction, but equal to the maximum outer diameter D ₁ of the roll sponge 203 of the first embodiment. The inner diameter of the center hole 303d of the large diameter roll sponge 303b is also constant in the lengthwise direction and the outer diameter of the outer contour, equal to the maximum internal diameter D ₄ of the roll sponge 203 of the first embodiment.

  Thus, since the roll sponge 303 is formed as a hollow cylindrical body whose outer diameter and inner diameter are constant in the longitudinal direction, mass production is possible, and the roll sponge 303 is a consumable item in the scrub cleaning apparatus. If this is taken into consideration, the manufacturing cost of the cleaning device can be kept low.

  As shown in FIG. 7A, the support 304 in this embodiment includes a rotation shaft 304a, a first support 304b, and a second support 304c from the left.

As shown in FIG. 7A, the rotating shaft 304a is formed as a solid cylindrical body having a constant outer diameter in the longitudinal direction (the direction of the arrow 205 in FIG. 4A). Rotary shaft 304a has the same outer diameter D ₃ and the outer diameter of the second support portion 304c to be described later, is arranged in the first support portion 304b coaxially. The rotation shaft 304a is connected to a rotation driving unit (not shown), and thereby can rotate the roll sponge assembly 301 in cooperation with the second support member 304c.

First support portion 304b is formed as a solid cylindrical body having a constant outer diameter in the lengthwise direction, it has approximately the same outer diameter D ₄ and the inner diameter of the hollow hole 303d of the large diameter roll sponge 303b. The length of the first support 304b in the longitudinal direction is not limited to this, but is preferably the same as the length of the large-diameter roll sponge 303b. The first support 304b is fitted into the hollow hole 303d of the large diameter roll sponge 303b, and fixes and holds the large diameter roll sponge 303b.

  The second support member 304 c supports the small-diameter roll sponge 303 a and also functions as a rotating shaft of the roll sponge assembly 301. As shown in FIG. 7A, the second support portion 304c is formed as a solid cylindrical body having a constant outer diameter in the longitudinal direction, and is substantially the same as the inner diameter of the small-diameter roll sponge 303a. It has a diameter D3. The length of the second support portion 304c in the longitudinal direction is longer than the length of the small-diameter roll sponge 303a in consideration of the fact that the second support portion 304c also functions as the rotation shaft. It is set longer by (the same length as the rotating shaft 304a). The second support 304c is fitted into the hollow hole 303c of the small-diameter roll sponge 303a to fix and hold the roll sponge 303a, and the right side portion protruding through the roll sponge 303a serves as a rotating shaft. Used. Note that the large-diameter roll sponge 303b and the small-diameter roll sponge 303a that are fixed and held on the first and second support portions 304b and 304c, respectively, have gaps between the sponges as shown in FIG. It is preferable to arrange them continuously so as not to make the

  In the roll sponge assembly 301 of the present embodiment, the outer diameter is described as being changed in two stages, but the present invention is not limited to this, and the outer diameter may be changed in three stages or more. Good. Needless to say, the setting of the outer diameter and inner diameter of the roll sponge 303 or the outer diameter of the support is not limited to that described above.

As shown in FIG. 4A, the scrub cleaning apparatus in the present embodiment is arranged in pairs so that the roll sponge assembly 301 sandwiches both surfaces of the substrate 1 as in the first embodiment. The paired roll sponge assemblies 301 and 301 are arranged so that the central axes of the supports 304 and 304 are parallel to each other with a predetermined interval smaller than the outer diameter D _{1 of the} large diameter roll sponge 303. Has been. However, the interval between the supports 304 and 304 is not limited to this, and is appropriately set according to various conditions such as the thickness of the substrate and the required cleaning ability.

  As in the first embodiment, the substrate 1 to be cleaned is rotated between a plurality of rolls while rotating between a pair of rotating roll sponge assemblies 301 and 301, as shown in FIG. Move to.

  The cleaning operation of the substrate 1 and its effect by the scrub cleaning apparatus of the present embodiment having the above-described configuration are generally the same as those of the first embodiment, but will be briefly described with reference to FIGS. .

  As shown in FIG. 4A, foreign substances of various shapes, sizes, and materials are attached to the surface of the substrate 1 before cleaning. The substrate 1 in such a state enters between the pair of roll sponge assemblies 301 and 301 to start scrub cleaning.

  As shown in FIG. 4B, in the initial stage of cleaning, since the outer diameters of the opposed small-diameter roll sponges 303a and 303a are small, the contact pressure (pushing force) of the roll sponges 303a and 303a on both surfaces of the substrate 1 Is small. As a result, foreign matters that are lightly adhered to the surface 1 of the substrate 1 or large foreign matters that are easily captured by the roll sponge 303a even if the pressing force is weak are removed from the substrate 1. The trapped foreign matter is also in a state of being easily detached from the roll sponge 303a due to a small pushing force, and is easily detached from the rotating roll sponge 303a by an action such as centrifugal force, and remains attached to the roll sponge 303a. Almost never.

  Thereafter, as shown in FIG. 4C, the substrate 1 is sent between a pair of large-diameter roll sponges 303b and 303b as indicated by an arrow 205. In the state of FIG. 4C, the outer diameter of the roll sponge 303b is large, and the pressing force of the roll sponges 303b and 303b against both surfaces of the substrate 1 is increased, whereby stronger scrub cleaning of the substrate 1 is performed. Since the large foreign matter is removed by cleaning between the small-diameter roll sponges 303a and 303a, even if the pressing force is increased, defects such as scratches due to the large foreign matter do not occur on the surface of the substrate 1 at this stage. In addition, an effective detergency can be exhibited against small foreign matters that could not be removed in the previous stage. In addition, since the outer diameter of the roll sponge 303b is large, the centrifugal force on the outer peripheral surface of the roll sponge 303b is increased, and the adhering small foreign matter is released from the surface of the roll sponge 303b.

  Further, since the use site of the roll sponge 303 changes in the longitudinal direction through 303a and 303b according to the stage of cleaning the substrate 1, the maintenance life of the roll sponge 303 can be extended in this embodiment as well as the first embodiment. . Furthermore, it is possible to avoid the occurrence of defects such as recontamination and scratches on the generated substrate 1 as compared with the conventional case where the substrate 1 is continuously used at the same site.

  Furthermore, since only one pair of roll sponge assemblies 301 is required, the rotation drive unit of the apparatus may correspond to the roll sponge assembly 301, and the maintenance of the apparatus is also good. In addition, there is no need for multi-stages using a conventional plurality of units, and the same effect can be realized with less space than such multi-stages.

(Example 5)
FIG. 7A shows an exploded view of a roll sponge assembly used in a scrub cleaning apparatus according to Embodiment 5 of the present invention.

  The roll sponge assembly according to the present embodiment basically conforms to the fourth embodiment. That is, the roll sponge assembly of the present embodiment also has substantially the same structure as that of the above-described fourth embodiment, and therefore, there are no particular differences in the functions and effects achieved as compared with the fourth embodiment.

  In this embodiment, the roll sponge assembly 601 includes a roll sponge 603 for cleaning the substrate 1 and a support 704 that supports the roll sponge 603, as shown in FIG. 7B. In the present embodiment, the roll sponge assembly 301 has a structure in which the outer diameter of the outer contour is changed stepwise as in the fourth embodiment.

The roll sponge 603 in this embodiment has a small-diameter portion 603a and a large-diameter portion 603b, and the small-diameter portion 603a and the large-diameter portion 603b are integrally formed continuously. Outer diameter of the outer contour of the small diameter portion 603a of the roll sponge 603 is constant in the lengthwise direction, equal to the minimum outside diameter D ₂ of the roll sponge 203 of the first embodiment. Further, the inner diameter of the hollow hole 603c is also constant in the lengthwise direction is set to be slightly larger inner diameter D ₅ than the minimum internal diameter D ₃ of the hollow hole 203c of the roll sponge 203 of the first embodiment. In this embodiment, the inner diameter D ₅ of the small diameter portion 603a, but is made different to Example 4, the inner diameter of the same smaller diameter portion 603a of Example 4 may be D _3.

  On the other hand, the outer diameter of the outer contour of the large-diameter portion 603b of the roll sponge 603 is constant in the longitudinal direction as in the small-diameter roll sponge 603a, but is equal to the maximum outer diameter D1 of the roll sponge 203 of the first embodiment. The inner diameter of the hollow hole 603d of the large-diameter portion 303b is constant in the longitudinal direction, like the outer diameter of the outer contour, and is equal to the maximum inner diameter D4 of the roll sponge 203 of the first embodiment.

  As shown in FIG. 7B, the support 304 in this embodiment includes a left rotation shaft 604a, a first support portion 604b, a second support portion 604c, and a right rotation shaft 604a from the left. Yes.

As shown in FIG. 7B, the left and right rotating shafts 604a are formed as solid cylindrical bodies (columns) having a constant outer diameter in the longitudinal direction. Rotary shaft 604a of the right and left have the same outer diameter D ₃ and the outer diameter of the rotating shaft of the Examples 1 to 4 are arranged on the first support portion 604b and the second support portion 604c coaxially . The left and right rotating shafts 604a are connected to a rotation driving unit (not shown) in the same manner as in the first to fourth embodiments, whereby the roll sponges cooperate with the first and second support members 604b and 604c. The assembly 601 can be rotationally driven.

The first support portion 604b is formed as a solid cylindrical body (column) having a constant outer diameter in the longitudinal direction, and has an outer diameter D substantially the same as the inner diameter of the hollow hole 603d of the large-diameter portion 603b of the roll sponge. _{Has 4} . The length of the first support portion 604b in the longitudinal direction is not limited to this, but is preferably the same as the length of the large-diameter portion 603b of the roll sponge. The first support portion 604b is fitted into the hollow hole 303d of the large diameter portion 303b of the roll sponge 603, and fixes and holds the large diameter portion 603b of the roll sponge.

The second support portion 604c fixes and supports the small diameter portion 603a of the roll sponge 603. As shown in FIG. 7B, the second support portion 604c is also formed as a solid cylindrical body having a constant outer diameter in the longitudinal direction, and is almost equal to the inner diameter of the small diameter portion 603a of the roll sponge 603. It has the same outer diameter D _5. The length in the longitudinal direction of the second support body portion 604c is preferably the same as the length of the small diameter portion 603a of the roll sponge 603. The second support 604c is fitted into the hollow hole 603c of the small diameter portion 603a of the roll sponge 603, and fixes and holds the small diameter portion 603a of the roll sponge 603.

  In the roll sponge assembly 601 of this embodiment, the outer diameter is described as being changed in two steps, but the present invention is not limited to this, and the outer diameter is changed in three steps or more. There may be. Needless to say, the setting of the outer diameter and inner diameter of the roll sponge 603 or the outer diameter of the support is not limited to that described above.

  As a result, the roll sponge assembly 601 in the present embodiment has substantially the same shape as the roll sponge assembly 301 of the fourth embodiment. Therefore, by applying the roll sponge assembly 601 of this embodiment to a scrub cleaning device, the same effects as those of the above-described embodiment 4 can be obtained in cleaning the substrate 1.

(Example 6)
FIG. 7C shows an exploded view of the roll sponge assembly used in the scrub cleaning apparatus according to Embodiment 6 of the present invention.

  This embodiment is basically devised so as to be able to use a single roll sponge having the same diameter, in accordance with the fourth and fifth embodiments. That is, this example is different from Example 5 only in the structure of the roll sponge, and the other configuration is exactly the same as Example 5.

  In this embodiment, the roll sponge assembly 701 includes a roll sponge 703 for cleaning the substrate and a support 704 for supporting the roll sponge 703 as shown in FIG. 7C.

Outer diameter of the outer contour of the roll sponge 703 in this embodiment is constant in the lengthwise direction, equal to the outer diameter D ₂ of the small diameter portion 603a of the roll sponge 603 of Example 5. The inner diameter of the hollow hole 703c is also constant in the lengthwise direction is the same as the inner diameter D ₅ of the hollow hole 603c of the small diameter portion 603a of the roll sponge 603 of the fifth embodiment. Therefore, the thickness of the roll sponge 703 is also constant in the longitudinal direction.

  Thus, since the roll sponge 703 is formed as a hollow cylindrical body whose outer diameter and inner diameter are constant in the longitudinal direction, mass production is possible as in the second and fourth embodiments. Considering that the scrub cleaning apparatus is a consumable item, the manufacturing cost of the cleaning apparatus can be kept low.

  The support body 704 in the present embodiment has the same shape as that of the fifth embodiment, and thus the description thereof is omitted.

  The first support portion 704b and the second support portion 704c are fitted into the hollow hole 703c of the roll sponge 703, and fix and hold the roll sponge 403.

  In the case of the present embodiment, as in the second embodiment, the roll sponge 703 has flexibility, so that the outer contour of the roll sponge 703 has the first support body portion 704b and the second support body portion. Following the outer contour of 704c, the outer diameter changes in multiple steps. As a result, the roll sponge assembly 701 in the present embodiment has substantially the same shape as the roll sponge assembly 301 of the fourth embodiment.

  Therefore, by applying the roll sponge assembly 701 of this embodiment to a scrub cleaning device, the same effects as those of the above-described embodiment 4 can be obtained in substrate cleaning.

(Example 7)
FIG. 7D is an exploded view of the roll sponge assembly used in the scrub cleaning apparatus according to the seventh embodiment of the present invention.

  This embodiment is basically compliant with the above-described embodiment 4, and is devised so that a plurality of roll sponges in which the inner diameters of the hollow holes of the respective roll sponges are the same can be used. Therefore, in this embodiment, the structure of the roll sponge and the support is more simplified than in the fifth embodiment, and other configurations are the same as those in the fourth embodiment.

  In this embodiment, as shown in FIG. 7D, the roll sponge assembly 801 includes a roll sponge 803 having two roll sponges 803a and 803b for cleaning the substrate, and the two roll sponges 803a and 803b. Is included.

The roll sponge 803 in this embodiment includes a small-diameter roll sponge 803a and a large-diameter roll sponge 803b. The outer diameter of the outer contour of the small diameter roll sponge 803a is constant in the lengthwise direction, equal to the outer diameter D ₂ of the roll sponge 303a of Example 4. The inner diameter of the hollow hole 803c is also constant in the lengthwise direction is the same as the outer diameter D ₃ of the support 804 to be described later. The wall thickness of the small-diameter roll sponge 803a is constant in the longitudinal direction. On the other hand, the outer diameter of the outer contour of the large-diameter roll sponge 803b is constant in the longitudinal direction like the small-diameter roll sponge 803a, but is equal to the outer diameter D1 of the roll sponge 303b of the fourth embodiment. The inner diameter of the hollow hole 803d of the roll sponge 803b of large diameter is also constant in the lengthwise direction and the outer diameter of the outer contour is the same as the outer diameter D ₃ of the support 804 to be described later.

  As described above, the roll sponge 803 is formed as a hollow cylindrical body whose outer diameter and inner diameter are constant in the longitudinal direction, so that mass production is possible, and the roll sponge 803 is a consumable item in the scrub cleaning apparatus. If this is taken into consideration, the manufacturing cost of the cleaning device can be kept low.

The support 804 in the present embodiment supports the roll sponge 803 (more specifically, the small-diameter roll sponge 803a and the large-diameter roll sponge 803b) and the rotation of the roll sponge assembly 801 as in the third embodiment. It also functions as an axis. As shown in FIG. 7 (d), the support 804 is formed as a solid cylindrical body (column) having a constant outer diameter in the longitudinal direction, and has a small diameter roll sponge 803a and a large diameter roll sponge 803b. Has an outer diameter D ₃ that is substantially the same as the inner diameter. The length of the support 804 is set to be larger than the total length of the small-diameter roll sponge 803a and the large-diameter roll sponge 803b by the length used as the rotation axis. The support body 804 in this embodiment has a simple columnar structure as shown in the figure, and is easy to manufacture. In this embodiment, the roll sponge support portion and the rotary shaft portion of the support 804 have the same diameter, but the diameters of these portions may be appropriately changed.

  The support 804 is fitted into the hollow hole 503c of the small diameter roll sponge 803a and the hollow hole 803d of the large diameter roll sponge 803b, and fixes and holds the small diameter roll sponge 803a and the large diameter roll sponge 803b. Moreover, the part which penetrates roll sponge 803 and protrudes from both ends is used as a rotating shaft.

  As a result, the roll sponge assembly 701 in the present embodiment has substantially the same shape as the roll sponge assembly 301 of the fourth embodiment. Therefore, by applying the roll sponge assembly 801 of this embodiment to a scrub cleaning device, the same effects as those of the above-described embodiment 4 can be obtained in substrate cleaning.

(Example 8)
FIG. 7 (e) shows an exploded view of the roll sponge assembly used in the scrub cleaning apparatus according to the eighth embodiment of the present invention.

  This embodiment basically conforms to the fourth, fifth, and seventh embodiments.

  In this embodiment, as shown in FIG. 7E, the roll sponge assembly 901 includes a roll sponge 803 having two roll sponges 803a and 803b for cleaning a substrate, and the two roll sponges 803a and 803b. Is included.

The roll sponge 903 in this embodiment has a small diameter portion 603a and a large diameter portion 603b, and the small diameter portion 903a and the large diameter portion 903b are integrally formed continuously. Outer diameter of the outer contour of the small diameter portion 903a of the roll sponge 903 is constant in the lengthwise direction, equal to the outer diameter D ₂ of the roll sponge 303a of small diameter Example 4. On the other hand, the outer diameter of the outer contour of the large diameter portion 903b of the roll sponge 903 is constant in the longitudinal direction as in the small diameter roll sponge 603a, but the outer diameter D ₁ of the large diameter roll sponge 303b of the fourth embodiment. be equivalent to. The inner diameter of the hollow hole 903c of the roll sponge 903 is also constant in the lengthwise direction and the outer diameter of the outer contour, equal to the outer diameter D ₃ of the support 904 to be described later.

  Thus, since the roll sponge 903 of the present embodiment is formed as a hollow cylindrical body whose inner diameter is constant in the longitudinal direction, it is easier to manufacture than the roll sponge 603 of the fifth embodiment, and the cleaning device The manufacturing cost can be kept low.

As in the third embodiment, the support body 904 in the present embodiment supports the roll sponge 903 and also functions as a rotating shaft of the roll sponge assembly 801. As shown in FIG. 7 (e), the support 904 is formed as a solid cylindrical body (column) having a constant outer diameter in the longitudinal direction. As described above, the hollow hole 903c of the roll sponge 903 is formed. Has an outer diameter D ₃ that is substantially the same as the inner diameter. The length of the support 904 is set to be larger than the length of the roll sponge 903 by the length used as the rotation axis. The support body 904 in the present embodiment has a simple cylindrical structure as shown in the figure, and is easy to manufacture. In this embodiment, the roll sponge support portion of the support 904 and the rotation shaft have the same diameter, but the diameters of these portions may be appropriately changed.

  The support 904 is fitted into the hollow hole 903c of the roll sponge 903, and fixes and holds the roll sponge 903. Moreover, the part which penetrates roll sponge 903 and protrudes from both ends is used as a rotating shaft.

  As a result, the roll sponge assembly 901 in the present embodiment has substantially the same shape as the roll sponge assembly 301 of the fourth embodiment. Therefore, by applying the roll sponge assembly 901 of this embodiment to a scrub cleaning device, the same effects as those of the above-described embodiment 4 can be obtained in substrate cleaning.

FIG. 1 shows a conventional schematic scrub cleaning apparatus, in which (a) is a schematic vertical sectional view of a main part of the scrub cleaning apparatus, and (b) is a schematic diagram of a substrate at the start of cleaning and the main components of the scrub cleaning apparatus shown in (a). FIG. 4C is a schematic horizontal cross-sectional view of the main part of the scrub cleaning apparatus in the same scrubbing apparatus as in FIG. 5B in which the pressing force to the substrate and the substrate during cleaning is increased. 1 shows a schematic scrub cleaning apparatus according to one embodiment of the present invention, in which (a) is a schematic horizontal sectional view of a main part of the scrub cleaning apparatus, and (b) is a schematic view of the scrub cleaning apparatus shown in (a). It is a principal part side view. FIGS. 3A and 3B are diagrams for explaining a substrate cleaning process by the schematic scrub cleaning apparatus shown in FIG. 2, where FIG. 3A is a state immediately before the start of substrate cleaning, FIG. c) shows the state at the end of cleaning. 4A and 4B are diagrams for explaining a substrate cleaning process by a schematic scrub cleaning apparatus according to another embodiment of the present invention, in which FIG. 5A is a state immediately before the start of substrate cleaning, and FIG. The state of the stage, (c) shows the state of the end stage of cleaning. It is a figure which shows the comparison result of the cleaning effect by this invention and a conventional apparatus. FIGS. 2 and 3 show an example of a roll sponge assembly used in the scrub cleaning apparatus according to the present invention, wherein (a) is an exploded view of the roll sponge assembly according to Example 1, and (b) is Example 2. (C) is an exploded view of the roll sponge assembly according to the third embodiment. The example of the roll sponge assembly used for the scrub cleaning apparatus which concerns on this invention shown by FIG. 4 is shown, (a) is an exploded view of the roll sponge assembly which concerns on Example 4, (b) is the roll which concerns on Example 5. FIG. (C) is an exploded view of the roll sponge assembly according to the sixth embodiment, (d) is an exploded view of the roll sponge assembly according to the seventh embodiment, and (e) is according to the eighth embodiment. FIG. 3 is an exploded view of a roll sponge assembly.

Explanation of symbols

1 Object to be cleaned (substrate)
201 Roll sponge assembly (Example 1)
203 Roll sponge 204 Support body 204a Rotating shaft 204b Support section 301 Roll sponge assembly (Example 4)
303 (303a, 303b) Roll sponge 304 Support 304a Rotating shaft 304b First support 304c Second support 401 Roll sponge assembly (Example 2)
501 Roll sponge assembly (Example 3)
601 Roll sponge assembly (Example 5)
701 Roll sponge assembly (Example 6)
801 Roll sponge assembly (Example 7)
901 Roll sponge assembly (Example 8)

Claims (10)

A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a roll sponge having a hollow hole held in the support by fitting the support portion of the support.
The outer diameter of the support portion of the support continuously changes so as to gradually expand in the longitudinal direction,
The roll sponge assembly characterized in that the outer diameter of the roll sponge and the inner diameter of the hollow hole continuously change in accordance with the change in the outer diameter of the support portion. A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a roll sponge having a hollow hole held in the support by fitting the support portion of the support.
The outer diameter of the support portion of the support continuously changes so as to gradually expand in the longitudinal direction,
The roll sponge assembly according to claim 1, wherein an outer diameter of the roll sponge and an inner diameter of the hollow hole are constant in a longitudinal direction. A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a roll sponge having a hollow hole held in the support by fitting the support portion of the support.
The outer diameter of the support portion of the support is constant in the longitudinal direction,
The outer diameter of the roll sponge continuously changes so as to gradually expand in the longitudinal direction,
The roll sponge assembly according to claim 1, wherein an inner diameter of the hollow hole of the roll sponge is constant in a longitudinal direction. A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a plurality of roll sponges having hollow holes held in the support by fitting the support portion of the support;
The outer diameter of the support portion of the support changes so as to expand stepwise in the longitudinal direction,
The plurality of roll sponges correspond to a plurality of outer diameters in which the outer diameter and the inner diameter of the hollow hole change stepwise of the support portion, and the outer diameter and the inner diameter of the hollow hole are in the longitudinal direction. A roll sponge assembly characterized by being formed to be constant. A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a roll sponge having a hollow hole held in the support by fitting the support portion of the support.
The outer diameter of the support portion of the support changes so as to expand stepwise in the longitudinal direction,
The roll sponge assembly according to claim 1, wherein an outer diameter of the roll sponge and an inner diameter of the hollow hole are changed stepwise corresponding to a plurality of stepwise changing outer diameters of the support body portion. A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a roll sponge having a hollow hole held in the support by fitting the support portion of the support.
The outer diameter of the support portion of the support changes so as to expand stepwise in the longitudinal direction,
The roll sponge assembly characterized in that the outer diameter of the roll sponge and the inner diameter of the hollow hole are constant in the longitudinal direction. A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a plurality of roll sponges having hollow holes held in the support by fitting the support portion of the support;
The outer diameter of the support portion of the support is constant in the longitudinal direction,
The roll sponge assembly is characterized in that each of the plurality of roll sponges is formed so that the outer diameter thereof changes stepwise and the outer diameter and the inner diameter of the hollow hole are constant in the longitudinal direction. . A support body and a support body having rotational axes at both ends of the support body section;
A roll sponge assembly for a scrub cleaning device, comprising: a roll sponge having a hollow hole held in the support by fitting the support portion of the support.
The outer diameter of the support portion of the support is constant in the longitudinal direction,
An outer diameter of the roll sponge changes stepwise in the longitudinal direction, and an inner diameter of a hollow hole of the roll sponge is constant in the longitudinal direction. A plurality of rollers for vertically supporting the object to be cleaned and rotating the object to be cleaned;
A roll sponge assembly according to any of claims 1 to 8, arranged in pairs horizontally and parallel;
In a scrub cleaning device comprising at least
A scrub cleaning apparatus for cleaning the object to be cleaned by moving it in a longitudinal direction between the pair of rotating roll sponge assemblies rotating. Rotating the object to be cleaned while vertically supporting the object to be cleaned by a plurality of rollers;
Rotating the roll sponge assembly according to any one of claims 1 to 8, wherein the roll sponge assemblies are arranged in pairs and arranged horizontally and parallel;
Moving the object being rotated by the plurality of rollers in the longitudinal direction of the roll sponge assembly between the rotating pair of roll sponge assemblies;
A scrub cleaning method for an object to be cleaned.

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