JPH03245530A - Spin-drying system for disc - Google Patents

Abstract

PURPOSE:To dry up a disc smoothly and efficiently while preventing the surface from staining by a method wherein a magnetic disc after cleaning process with its outer diameter chucked is rotated to prevent a cleaning fluid in drip state from stagnating in the inner edge part and then the disc is rotated at high rate with its inner diameter chucked by an inner diameter chuck member. CONSTITUTION:A disc D, after cleaning process with a cleaning fluid adhering to the surface as it is, is rotated with the outer diameter thereof chucked by the rollers 7 of outer diametral chuck members 5 having the chuck rollers 7 on the end of a rotary axle 6 to remove the cleaning fluid adhering to the inner edge part of the disc D. At this time, the rotation may be at relatively low rate if only the cleaning fluid in the state of drips does not stagnate in the inner edge part. Next, the members 5 are converted to an inner diametral chuck member 1 having a chuck member 2, spindles 3 to hold and shift the disc D to a drying part and then the spindles 3 are driven at high rate to scatter the cleaning fluid out of the outer peripheral part of the disc D by the centrifugal force. Later, the surface and rear surface, inner and outer edge parts are spin-dried up.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to high-speed storage of disks such as magnetic disks.

[Prior Art 1] In the manufacturing process of a magnetic disk, before and after forming a magnetic recording film, the surface of the magnetic recording film is cleaned to remove dust, dirt, etc. attached thereto. Here, the disk is cleaned by brush cleaning using a cleaning liquid, high frequency cleaning, etc., but after cleaning the disk, the disk must be dried. In order to efficiently dry this disk without using fluorocarbon gas, a high-speed spin drying method has generally been adopted in recent years.

That is, the chuck member provided on the spindle is brought into contact with the cleaned disk, and the spindle is rotated at high speed.
The cleaning liquid adhering to the surface is scattered from the outer peripheral edge portion by the action of centrifugal force. To perform spin drying of this disk, the inner diameter of the disk is usually chucked.

Problem 1 to be Solved by the Invention By the way, as mentioned above, when spin drying is performed with the inner diameter of the disk chucked, it is difficult to notice it with the naked eye. A slight amount of familiarity occurs on the surface. The cause of this smearing is that after the disk has been cleaned, droplets adhere not only to its surface but also to its inner edge. When the disk rotates, liquid accumulates in the contact area of this chuck member, and when the disk changes from a high-speed rotation state to a low-speed state until it stops, this liquid is deposited on the already dry surface of the disk. This is due to the fact that the disk is partially contaminated by migration.

The present invention has been made in view of the above-mentioned points, and its purpose is to completely dry the disk evenly and without causing surface bleed during high-speed spin drying of the disk. An object of the present invention is to provide a spin drying method for a disk.

[Means for Solving the Problems 1] In order to achieve the above-mentioned object, the present invention provides an inner chuck member that chucks and rotates the inner diameter of a disk such as a magnetic disk, and a chuck member that chucks and rotates the outer diameter of a disk such as a magnetic disk. and an outer diameter chuck member that chucks the outer diameter of the disk and rotates it a predetermined number of times to remove the cleaning liquid adhering to the inner edge of the disk. By separating the member from the disk and chucking the inner diameter of the disk by the inner diameter chuck member to rotate the disk at high speed,
The feature is that spin drying is performed.

[Function] By adopting such a configuration, the cleaning liquid accumulated on the inner edge of the disk is first removed, and then the inner diameter chuck member is brought into contact with the inner edge of the disk. Cleaning liquid no longer accumulates between the member and the inner edge of the disk. Therefore, when the disk is rotated by the outer diameter chuck member, it is not necessarily necessary to completely remove the liquid from the inner edge of the disk, but it is only necessary to remove liquid in the form of droplets. The rotation speed of the disk by the outer diameter chuck member is relatively low, and the rotation can be performed in a short time.

The entire disk is dried by rotating the disk at high speed while being chucked by the inner diameter chuck member.

[Embodiment 1] An embodiment of the present invention will be described below in detail based on the drawings.

The drawing shows a schematic configuration of an apparatus for performing high-speed spin drying of a disk D according to the method of the present invention.

In the figure, reference numeral 1 denotes an inner chuck member, and the inner chuck member 1 is constructed by mounting three chuck pieces 3 movable in the radial direction on the tip of a spindle 2. Reference numeral 5 designates an outer diameter chuck member, and a chuck roller 7 is attached to the tip of the outer diameter chuck member 5 (the rotary shaft 6 and the chuck roller 7 are assembled in three sets). Each rotating shaft 6 is connected to a rotation driving means (not shown) and is movable in the direction shown by an arrow in the drawing, that is, in the direction toward and away from the disk D.

The disk p is spin-dried using the apparatus having the above-mentioned configuration, and the drying method will now be described.

The disk D is cleaned and, with the cleaning liquid still attached to its surface, is transported to a drying section by a robot equipped with an appropriate handling mechanism, for example, a chuck mechanism that chucks the outer diameter of the disk D. Therefore, first, the disk D is chucked by the chuck roller 7 constituting the outer diameter chuck member 5, and the chuck mechanism on the robot side is separated from the disk D, thereby transferring the disk D.

Therefore, the disk D is rotated by the outer diameter chuck member 5 to remove the cleaning liquid adhering to its inner edge. Here, the rotation by the outer diameter chuck 5 is not intended to completely dry the disk D, but may be sufficient to prevent the cleaning liquid adhering to the inner edge from becoming droplets and staying. , the disk D may be rotated at a relatively low speed and for a short period of time.

Even after performing the preliminary treatment to prevent droplets from staying on the inner edge of the disk D in this way, a thin liquid film remains on the surface and inner and outer edges of the disk D. ing. Therefore, the disk D is transferred from the outer diameter chuck member 5 to the inner diameter chuck member l. That is, first, the inner diameter chuck member 1 is operated to chuck the inner diameter with its chuck piece 3, and then the chuck roller 7 of the outer diameter chuck member 5 is separated from the disk D.

Then, by rotating the spindle 2 at high speed,
By scattering the cleaning liquid adhering to the surface of the disk D from its outer periphery by the action of centrifugal force, the front and back surfaces and the inner and outer edges are spin-dried.

Therefore, the cleaning liquid does not stay in the form of droplets between the chaff member 3 and the inner edge of the disk D, so the spin drying process described above is completed and the spindle is decelerated from the high speed rotation state. Until it is stopped, there is no risk that the liquid will flow out from the inner edge and re-stain the surface of the disk D, which has already been dried. Therefore, the surface of the disk D will be completely dried without any stains or the like. You will be able to do things.

In the above-described embodiment, the outer diameter chuck member 5 is provided separately from the handling mechanism that transports the disk D from the cleaning section to the drying section. The hunt link mechanism may be configured to be able to rotate the disc D, and by rotating it while the disc D is being fed into the drying section, the cleaning liquid on the inner edge may be removed to a large extent. .

[Advantageous Effects of the Invention 1] As explained above, in the present invention, the outer diameter of the disk after cleaning is chucked and rotated to prevent the cleaning liquid from accumulating in the form of droplets on the inner edge of the disk. By chucking the inner diameter of the disk and rotating it at high speed, the disk is spin-dried at high speed, so that the disk can be dried extremely smoothly and efficiently without causing any stains or the like on the surface of the disk. It's coming.

[Brief explanation of drawings]

The drawing is an explanatory diagram of the configuration of a spin drying apparatus showing an embodiment of the present invention. 1. Inner chuck member, 2: Chuck piece, 3 Varnish bottle, 5: Outer chuck member, 6: Rotating shaft, 7: Chuck roller.

Claims (1)

[Claims] It has an inner diameter chuck member that chucks and rotates the inner diameter of a disk such as a magnetic disk, and an outer diameter chuck member that chucks and rotates its outer diameter. After rotating the disk several times to remove cleaning liquid adhering to the inner edge of the disk, the outer diameter chuck member is separated from the disk, and the inner diameter of the disk is chucked by the inner diameter chuck member to rotate the disk at high speed. A disk spin drying method characterized in that spin drying is performed by spin drying.