JP2765916B2 - Ultrasonic inspection equipment - Google Patents

Description

Description: BACKGROUND OF THE INVENTION The present invention relates to an ultrasonic inspection apparatus for inspecting a test material using ultrasonic waves.

[Conventional technology]

An ultrasonic inspection apparatus can detect a defect inside a test material without destroying the test material, and is used in many fields. The presence or absence of a defect inside the test material is often checked in a predetermined range of the test material. In this case, the above range on the surface of the test material is scanned with a probe to perform the inspection. . Hereinafter, such an ultrasonic inspection apparatus will be described.

FIG. 3 is a system diagram of a conventional ultrasonic inspection apparatus. In the figure, 1 is a water tank for inspection, 2 is water put in the water tank 1, and 3 is a test material placed on the bottom surface of the water tank 1. Reference numeral 4 denotes a scanner, which comprises the following members. That is, 5 is a scanner table on which the water tank 1 is placed, 6 is a frame fixed to the scanner table 5, 8 is an arm mounted on the frame 6, 8 is a holder mounted on the arm 7, and 9 is a holder 8 The pole, 10 is a probe. The frame 6 can drive the arm 7 in the Y-axis direction by a mechanism not shown,
The arm 7 can drive the holder 8 in the X-axis direction by a mechanism (not shown). Further, the holder 8 cooperates with the pole 9 by using a mechanism (not shown) to move the probe 10 in the Z-axis direction (X-axis and (A direction orthogonal to the Y axis).

Reference numeral 11 denotes a pulsar receiver, which applies a pulse signal to the probe 10 to radiate an ultrasonic wave to the test material 3 and
The ultrasonic signal (electric signal) from the probe 10 that has received the reflected wave is amplified. Reference numeral 12 denotes an oscilloscope that displays an ultrasonic waveform based on an output signal of the pulsar receiver 11.
Reference numeral 13 denotes a peak detector which takes out only the signal of the ultrasonic signal amplified by the pulser / receiver 11 at an arbitrary time by a gate, holds the peak value of the taken out signal, and outputs it. A / A 14 converts the peak value into a digital value.
D converter.

Reference numeral 15 denotes a microcomputer for performing predetermined processing on the value converted by the A / D converter 14, 16 a keyboard for inputting setting conditions relating to the processing to the microcomputer 15, 17 a setting condition and an ultrasonic inspection device. A CRT 18 for displaying the overall control state is an external storage device for storing the result of processing by the microcomputer 15, and 19 is an addition processor for performing addition, which will be described later. Reference numeral 20 denotes an image memory for storing data to be displayed processed by the microcomputer 15 and displaying the data on a monitor television (monitor TV) 21. An X, Y, Z motor controller 22 controls a motor for driving the probe 10 in the X-axis, Y-axis, and Z-axis directions.

Next, the operation of the ultrasonic inspection apparatus will be described with reference to FIG. FIG. 4 is a plan view of the test material 3. In the drawing, a plurality of black points shown on the test material 3 are a part of sampling points for collecting ultrasonic data, and only the end sampling points are indicated in parentheses by coordinates.
Further, X _R, Y _R is X axis direction, Y axis direction of the measurement range,
p is a measurement pitch (sampling pitch). In addition,
In the figure, the measurement pitch p is set equal for both the X axis and the Y axis.
Naturally, any pitch can be selected for each axis and Y axis.

The micro computer 15 first gives a command to the X, Y, Z motor controller 22 to position the probe 10 on the sampling point (X ₀ , Y ₀ ) which is the measurement start position, and causes the pulser receiver 11 to output a pulse. . As a result, the probe 10 emits ultrasonic waves to the test material 3 and converts the reflected waves into electric signals (ultrasonic signals) corresponding to the ultrasonic waves and outputs the electric signals. The pulsar receiver 11 amplifies the ultrasonic signal and outputs it to the peak detector 13. The peak detector 13 is provided with a temporal gate, and a signal within a certain time period among the ultrasonic signals (this signal is a signal from an inspection site at a predetermined depth from the surface of the test material 3). ), And the signal of the maximum value is output from the peak detector 13. The signal of the maximum value is converted into a corresponding digital value by the A / D converter 14 and input to the micro computer 15. The micro computer 15 stores the converted signal (sampling data) in the image memory 20 according to a predetermined procedure.
At a predetermined address. When the storing process is completed, the microcomputer 15 outputs a command to the X, Y, Z motor controller 22, moves the probe 10 by the measuring pitch p in the X-axis direction, and sets the new sampling point (X ₁ , At X ₀ ), sampling data is collected again by the same operation as described above and stored in the image memory 20.

In this way, when the data of the sampling point (X _i , Y ₀ ) is stored and the first scanning in the X-axis direction by the probe 10 is completed, the probe 10 measures in the Y-axis direction. It is moved by the pitch p and positioned at the sampling point (X _i , Y ₁ ). The probe 10 moves X from this sampling point.
Scanning is performed in the opposite direction on the axis, and the second scanning in the X-axis direction ends at the sampling point (X ₀ , Y ₁ ). The probe 10 is scanned in a meandering manner in this manner, and
Ends the first scan. Meanwhile, scanning in the X-axis direction is performed (j + 1) times. The data sampled in the first scan is temporarily stored in the image memory 20, and is completely stored in the external storage device 18 after the first scan.

Scanning for data collection of the test material 3 by the probe 10 is performed not only once but also a predetermined number of times (n times).
All data collected by the n scans are stored in the external storage device 18. Then, when the predetermined number of scans n are completed, the microcomputer 15 is connected to the external storage device.
With respect to the n scan data of 18 times, n data are taken out at each sampling point, and these are added by the adder 19. The added value is input to the image memory 20,
After a predetermined process, it is displayed on the monitor TV21. As described above, data is collected n times for the same sampling point and the display is performed by adding the data. If a defect exists in the test material 3, the defect is highlighted and displayed on the monitor TV 21 for inspection. Can be easily performed.

[Problems to be solved by the invention]

By the way, in the inspection by the ultrasonic inspection apparatus, the defect of the test material 3 can be emphasized and displayed by repeating the scan n times, but from the start of the test to the display of the ultrasonic image of the test material 3. Has the problem that it takes a considerable amount of time. Also, if you want to emphasize the defects even more,
The number of scans may be increased, but the number of scans is limited by the storage capacity of the external storage device 18 for storing data, and the number of scans cannot be arbitrarily increased, and a desired display cannot be obtained. There was also a problem. further,
The probe 10 sets a scanning end point (X _i , Y _j ) every time one scanning ends.
To the scanning start point (X ₀ , Y ₀ ), a slight displacement occurs at each sampling point in each scan during a plurality of scans, and an accurate ultrasonic image may not be obtained. There was.

SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic inspection apparatus which solves the above-mentioned problems in the prior art, shortens the inspection time, can perform an arbitrary number of scans, and can obtain an accurate ultrasonic image. To be.

[Means for solving the problem]

In order to achieve the above object, the present invention relates to a method in which a test material is placed on a plane defined by a first direction and a second direction by a plane range defined by a predetermined measurement pitch and the number of pixels in each of the directions. Is mechanically scanned by ultrasonic waves a predetermined number of times, and each scan data obtained by each of these scans is added for each position,
In the ultrasonic inspection apparatus that displays the total added value for each position on the display unit via the image memory, the scan data is immediately stored in the image memory with the data at the same position each time the scan data is collected. Adding means for adding, and means for storing the value obtained by the adding means at the storage address at the same position in the image memory; and collecting the scan data is performed continuously in the first direction. Mechanical scanning is performed a predetermined number of times, followed by mechanical scanning at a predetermined measurement pitch in a second direction, and further mechanical scanning is continuously performed at the position in the first direction a predetermined number of times.

(Operation)

The data obtained by the first scan is immediately stored in the image memory without being temporarily stored in the external storage device. Next, the data obtained by the second scan is input to the addition processor without being stored in the external storage device. Then, the data is sequentially added to the corresponding data among the first data stored in the image memory, and the added value is stored in the image memory instead of the first data. Similar processing is performed in each subsequent scan. When the predetermined number of scans is completed, the added value of each scan is stored in the image memory. Further, in the present invention, in the above processing, scanning in the first direction is continuously performed a predetermined number of times, and then one pitch is moved in the second direction and scanning in the first direction is continuously performed a predetermined number of times again. Such scanning is performed up to the final pitch in the second direction.

〔Example〕

 Hereinafter, the present invention will be described with reference to the illustrated embodiments.

FIG. 1 is a system diagram of an ultrasonic inspection apparatus according to an embodiment of the present invention. In the figure, the same parts as those shown in FIG. 24 is an external storage device, and 25 is a microcomputer. Whereas the external storage device 18 in the conventional device is used to store all data obtained by each scan, the external storage device 24 of this embodiment adds Is not used at all in the process of displaying the information, and is unnecessary when it is not used for other purposes. The processing content of the microcomputer 25 is different from that of the microcomputer 15 of the conventional device. The other configuration of the present embodiment is the same as the configuration of the conventional device shown in FIG.

Next, the operation of this embodiment will be described with reference to the flowcharts shown in FIGS. 2 (a) and 2 (b). First, the operator inputs each measurement condition to the micro computer 25 using the keyboard 16 (procedure S ₁ shown in FIG. 2 (a)).
That is, the coordinates X ₀ , Y _{0 of} the measurement start position, the measurement range X _R , Y _R , the measurement pitch p, and the predetermined number of additions n shown in FIG.
Is entered. Next, based on the input values, the monitor TV
The number of pixels used in 21 is calculated, and a data area of the image memory 20 is set and data is cleared (procedure).
S _2). The number of pixels is calculated by the following equation, where X _{m is} the number of pixels in the X-axis direction and Y _m is the number of pixels in the Y-axis direction.

Then, the data area of the image memory 20 is set based on the number of pixels. Further, P ₀ (x,
y) = 0 and clear data. Where x
Is 1 ≦ x ≦ X _m , y is in the range of 1 ≦ y ≦ Y _m , and both x and y are positive integers starting from 1. Furthermore,
X-axis direction of the number of scans the code I, the number of each pitch in the Y-axis direction every and y _A, Ochiite the above procedure S _2, the reference numerals I and 1, and No. 1 to No. y _A.

Microcomputer 25, X, Y, instructs the Z measurement start position set in step S ₁ to the motor controller _{22 (X 0, Y 0)} , the probe 10 is moved to a position corresponding thereto. Thereafter, the ultrasonic scanning is started. As described above, the scanning is performed by n pitches continuously in the X-axis direction, then moved by one pitch p in the Y-axis direction. The method of continuously performing the scanning in the axial direction n times is repeated.
First, at the first position in the Y-axis direction, the first position in the X-axis direction
To collect the data performs a round of scanning (Step S _3). Data P ₁ (x) of each sampling point obtained by this scanning
Is immediately stored in the corresponding address of the image memory 20 without being input to the external storage device 24 (step S ₄ ).
When the first scan of the X-axis direction is completed, the numerical value 1 is added to the code I (Step S _5), the second (I = 2) the data P to implement scanning of the X-axis direction ₂ Collect (x) (Step S ₆ ). The second scan may be performed in the opposite direction from the last position of the first scan, or may be performed in the same direction from the last position to the first position.

Each data of the second scan taken in the processing of Step S ₆
This time, P ₂ (x) is sequentially transferred to the addition processor 19. On the other hand, the micro computer 25 stores the transferred data P
_The data P ₁ (x) from the _first scan (of the same sampling point) corresponding to ₂ (x) is fetched from the image memory. The extracted data P ₁ (x) is data P ₀ (x, y _A ) stored at a predetermined address in the image memory. Addition processor
In 19, the transferred data P ₂ (x) and the extracted data
P ₀ (x, y _A ) is added, and the added value is stored as new data at the predetermined address of the image memory 20 (step S ₇ ). That is, with respect to a certain sampling point on a scanning line, the data of the sampling point in the first scan is stored at a predetermined address in the image memory 20, and the data of the sampling point in the second scan is added to the adder. 19 and is added to the data of the first scan taken out from the predetermined address of the image memory 20.
The added value is stored as a new value at the predetermined address in the image memory 20. Processing in steps S _7, the probe 10 is performed while moving from one sampling point to next sampling point.

When the processing of Step S ₇ for the final sampling point in the second time scan is completed, the microcomputer 25
Determines whether equal to the addition number n of current code I has been set (Step S ₈ shown in FIG. 2 (b)), if not equal, the process returns to step S ₅ again. Thus, steps S ₅ ~
Processing of S ₈ are repeated, when it is determined that I = n in step S _8, Y-axis 1st position in a direction (y _A = 1) scanning a predetermined number of X-axis direction is terminated at its The integrated value of the n data for each sampling point on the scanning line is stored in each predetermined address of the image memory 20 corresponding to each sampling point.

In Step S _8, it is determined that I = n, then, y _A = y _m (Y
It is determined whether or not the position in the axial direction is the m-th position (step S ₉ ),
If the y _A does not reach the y _m is the microcomputer
25, X, Y, and outputs a command to the Z motor controller 22, the probe 10 is moved by one pitch p in the Y-axis direction, 1 is added to y _A (Step S _10), processing again Procedure S It returns to ₃ , and scanning in the X-axis direction at a new position in the Y-axis direction is started. The above operation is repeated, in step S _9, when it is judged that y _A = Y _m, operation is completed. At this time, the image memory 20 is in a state where the integrated value of the ultrasonic data at each sampling point of the test material 3 is stored. Then, based on these data, the image memory 20 displays an ultrasonic image of the test material 3 on the monitor TV 21.

As described above, in the present embodiment, the data obtained by scanning is not stored in the external storage device 24, but is immediately added to the integrated value of the data of the previous scanning, and the added value is stored in the image memory. As a result, the inspection time can be reduced as compared with a conventional device in which all data is temporarily stored in the external storage device 18. Further, since the external storage device 24 is not used, the number of additions is not limited by the capacity thereof, and the number of additions can be freely selected. Furthermore, since there is no movement from the last sampling point to the first sampling point, the accuracy of an image can be improved as compared with a conventional apparatus which performs the movement for each scan.

〔The invention's effect〕

As described above, in the present invention, the collected scan data is not stored in the external storage device, but is immediately added to the integrated value of the scan data at the same position in the image memory. The inspection time can be reduced, and the number of additions can be freely selected. In addition, mechanical scanning in the first direction is performed continuously for a predetermined number of times, and thereafter, mechanical scanning is performed in the second direction at a predetermined measurement pitch, and mechanical scanning is continuously performed in the first direction for a predetermined number of times at that position. Is repeated, it is possible to prevent a displacement at each sampling point for each scan, to greatly improve the accuracy of an ultrasonic image, and to shorten the time required for scanning.

[Brief description of the drawings]

FIG. 1 is a system diagram of an ultrasonic inspection apparatus according to an embodiment of the present invention, FIGS. 2 (a) and 2 (b) are flow charts for explaining the operation of the apparatus shown in FIG. 1, and FIG. Fig. 4 is a plan view of the test material, Fig. 4 is a plan view of the test material, 3 ... test material, 10 ... probe, 11 ... pulser receiver,
14 ... A / D converter, 19 ... Addition processor, 20 ... Image memory, 21 ... Monitor TV, 25 ... Microcomputer.

Claims (1)

(57) [Claims] An object is mechanically scanned by ultrasonic waves a predetermined number of times over a plane range defined by a predetermined measurement pitch and a predetermined number of pixels for each direction in a plane defined by a first direction and a second direction. In the ultrasonic inspection apparatus which adds each scan data obtained by each of these scans for each position and displays a total addition value for each position on a display unit via an image memory, Adding means for immediately adding the scan data to the data at the same position stored in the image memory each time sampling is performed, and means for storing the value obtained by the adding means at the storage address at the same position in the image memory And collecting the scanning data, the mechanical scanning is continuously performed the predetermined number of times in the first direction, and then the mechanical scanning is performed in the second direction at a predetermined measurement pitch. Continuously ultrasonic inspection apparatus and recovering repeatedly performed to the predetermined number of times mechanical scanning.