JP2709887B2 - 光記録媒体およびその製造方法 - Google Patents
光記録媒体およびその製造方法Info
- Publication number
- JP2709887B2 JP2709887B2 JP1796893A JP1796893A JP2709887B2 JP 2709887 B2 JP2709887 B2 JP 2709887B2 JP 1796893 A JP1796893 A JP 1796893A JP 1796893 A JP1796893 A JP 1796893A JP 2709887 B2 JP2709887 B2 JP 2709887B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- recording
- recording medium
- optical recording
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000010410 layer Substances 0.000 claims description 177
- 239000000463 material Substances 0.000 claims description 46
- 239000003989 dielectric material Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 23
- 238000004544 sputter deposition Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 13
- 239000011241 protective layer Substances 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- 230000007704 transition Effects 0.000 description 12
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- 239000012071 phase Substances 0.000 description 8
- 230000002829 reductive effect Effects 0.000 description 8
- 229910052984 zinc sulfide Inorganic materials 0.000 description 8
- 238000002310 reflectometry Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 230000003252 repetitive effect Effects 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 238000010583 slow cooling Methods 0.000 description 5
- 229910052797 bismuth Inorganic materials 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000010791 quenching Methods 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 3
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000013081 microcrystal Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052711 selenium Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- -1 Si 3 N 4 Chemical compound 0.000 description 2
- 229910003564 SiAlON Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052951 chalcopyrite Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052950 sphalerite Inorganic materials 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical compound [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000012982 x-ray structure analysis Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24306—Metals or metalloids transition metal elements of groups 3-10
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24308—Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/2431—Metals or metalloids group 13 elements (B, Al, Ga, In)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24314—Metals or metalloids group 15 elements (e.g. Sb, Bi)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/254—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers
- G11B7/2542—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers consisting essentially of organic resins
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/913—Material designed to be responsive to temperature, light, moisture
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/146—Laser beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1796893A JP2709887B2 (ja) | 1992-06-12 | 1993-01-08 | 光記録媒体およびその製造方法 |
| US08/074,447 US5418030A (en) | 1992-06-12 | 1993-06-10 | Optical recording medium and method for making |
| EP19930109470 EP0574025B1 (en) | 1992-06-12 | 1993-06-14 | Optical recording medium and method for making the same |
| DE69313926T DE69313926T2 (de) | 1992-06-12 | 1993-06-14 | Optisches Aufzeichungsmedium und Verfahren zur Herstellung desselben |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17926792 | 1992-06-12 | ||
| JP4-179267 | 1992-06-12 | ||
| JP1796893A JP2709887B2 (ja) | 1992-06-12 | 1993-01-08 | 光記録媒体およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0660419A JPH0660419A (ja) | 1994-03-04 |
| JP2709887B2 true JP2709887B2 (ja) | 1998-02-04 |
Family
ID=26354566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1796893A Expired - Fee Related JP2709887B2 (ja) | 1992-06-12 | 1993-01-08 | 光記録媒体およびその製造方法 |
Country Status (4)
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4231069A1 (de) * | 1992-09-17 | 1994-03-24 | Leica Mikroskopie & Syst | Variabler Auflicht-Interferenzansatz nach Mirau |
| JP3566743B2 (ja) * | 1993-12-13 | 2004-09-15 | Ｔｄｋ株式会社 | 光記録媒体 |
| WO1995026549A1 (fr) * | 1994-03-25 | 1995-10-05 | Toray Industries, Inc. | Support d'enregistrement optique et son procede de fabrication |
| US6300039B1 (en) | 1994-03-25 | 2001-10-09 | Toray Industries, Inc. | Optical recording medium |
| WO1995026550A1 (fr) * | 1994-03-25 | 1995-10-05 | Toray Industries, Inc. | Support d'enregistrement optique |
| JP2990011B2 (ja) * | 1994-03-29 | 1999-12-13 | ティーディーケイ株式会社 | 光記録媒体 |
| JP3506491B2 (ja) * | 1994-06-23 | 2004-03-15 | Ｔｄｋ株式会社 | 光情報媒体 |
| US5581539A (en) * | 1994-08-12 | 1996-12-03 | Mitsubishi Chemical Corporation | Optical recording medium |
| JP3068416B2 (ja) * | 1994-08-26 | 2000-07-24 | 日本電気株式会社 | 情報記録媒体 |
| US5785828A (en) | 1994-12-13 | 1998-07-28 | Ricoh Company, Ltd. | Sputtering target for producing optical recording medium |
| JPH08287515A (ja) * | 1995-02-13 | 1996-11-01 | Matsushita Electric Ind Co Ltd | 光学的情報記録媒体 |
| JP2990036B2 (ja) * | 1995-02-13 | 1999-12-13 | ティーディーケイ株式会社 | 光記録媒体およびその製造方法 |
| JP3268157B2 (ja) * | 1995-02-21 | 2002-03-25 | ティーディーケイ株式会社 | 光記録媒体 |
| JP3150267B2 (ja) * | 1995-03-31 | 2001-03-26 | ティーディーケイ株式会社 | 光記録媒体 |
| US5591501A (en) * | 1995-12-20 | 1997-01-07 | Energy Conversion Devices, Inc. | Optical recording medium having a plurality of discrete phase change data recording points |
| JP3525197B2 (ja) | 1996-02-27 | 2004-05-10 | 株式会社リコー | 相変化型光記録媒体 |
| US6821707B2 (en) * | 1996-03-11 | 2004-11-23 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information |
| JPH1049915A (ja) * | 1996-07-29 | 1998-02-20 | Denso Corp | 光情報記録媒体 |
| US6242157B1 (en) * | 1996-08-09 | 2001-06-05 | Tdk Corporation | Optical recording medium and method for making |
| JPH10289479A (ja) * | 1997-04-10 | 1998-10-27 | Tdk Corp | 光記録媒体 |
| JP3159374B2 (ja) * | 1997-06-03 | 2001-04-23 | 日本電気株式会社 | 光学的情報記録媒体 |
| US6503690B1 (en) | 1997-08-12 | 2003-01-07 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium, method for producing the same, and method for recording and reproducing optical information |
| JPH11134720A (ja) | 1997-08-28 | 1999-05-21 | Matsushita Electric Ind Co Ltd | 光学的情報記録媒体及びその記録再生方法 |
| US6231945B1 (en) | 1997-09-09 | 2001-05-15 | Hitachi, Ltd. | Information recording medium |
| US6343062B1 (en) | 1997-09-26 | 2002-01-29 | Matsushita Electric Industrial Co., Ltd | Optical disk device and optical disk for recording and reproducing high-density signals |
| KR19990042064A (ko) * | 1997-11-25 | 1999-06-15 | 윤종용 | 귀금속 반사층을 구비한 상변화 광디스크 |
| JPH11250502A (ja) * | 1998-02-26 | 1999-09-17 | Sony Corp | 光ディスク |
| TW448443B (en) | 1998-08-05 | 2001-08-01 | Matsushita Electric Ind Co Ltd | Optical information storage media and production method as well as the storage reproducing method and device |
| US20020101816A1 (en) * | 1999-05-20 | 2002-08-01 | Michael F. Braitberg | Removable optical storage device and system |
| US7161894B2 (en) * | 2001-06-21 | 2007-01-09 | Quantum Corporation | Optical recording article |
| JPWO2003036632A1 (ja) * | 2001-10-19 | 2005-02-17 | 松下電器産業株式会社 | 光学的情報記録媒体及びその製造方法 |
| JP2003168242A (ja) * | 2001-11-29 | 2003-06-13 | Tdk Corp | 追記型光記録媒体の反射率の調整方法及び追記型光記録媒体 |
| JP3963781B2 (ja) * | 2002-05-31 | 2007-08-22 | Ｔｄｋ株式会社 | 光記録媒体 |
| JP2004017394A (ja) * | 2002-06-14 | 2004-01-22 | Tdk Corp | 光記録媒体 |
| TWI226058B (en) * | 2002-09-11 | 2005-01-01 | Tdk Corp | Optical recording medium |
| TW200523914A (en) * | 2004-01-15 | 2005-07-16 | Daxon Technology Inc | Phase change optical media and fabrication method thereof |
| US7235501B2 (en) | 2004-12-13 | 2007-06-26 | Micron Technology, Inc. | Lanthanum hafnium oxide dielectrics |
| US7560395B2 (en) | 2005-01-05 | 2009-07-14 | Micron Technology, Inc. | Atomic layer deposited hafnium tantalum oxide dielectrics |
| US7410910B2 (en) | 2005-08-31 | 2008-08-12 | Micron Technology, Inc. | Lanthanum aluminum oxynitride dielectric films |
| US7733684B2 (en) | 2005-12-13 | 2010-06-08 | Kabushiki Kaisha Toshiba | Data read/write device |
| US7776765B2 (en) | 2006-08-31 | 2010-08-17 | Micron Technology, Inc. | Tantalum silicon oxynitride high-k dielectrics and metal gates |
| US7605030B2 (en) | 2006-08-31 | 2009-10-20 | Micron Technology, Inc. | Hafnium tantalum oxynitride high-k dielectric and metal gates |
| US7563730B2 (en) | 2006-08-31 | 2009-07-21 | Micron Technology, Inc. | Hafnium lanthanide oxynitride films |
| US7759747B2 (en) | 2006-08-31 | 2010-07-20 | Micron Technology, Inc. | Tantalum aluminum oxynitride high-κ dielectric |
| US7544604B2 (en) | 2006-08-31 | 2009-06-09 | Micron Technology, Inc. | Tantalum lanthanide oxynitride films |
| US7432548B2 (en) * | 2006-08-31 | 2008-10-07 | Micron Technology, Inc. | Silicon lanthanide oxynitride films |
| WO2008061166A2 (en) * | 2006-11-14 | 2008-05-22 | Boise State University | Multi-state memory and multi-functional devices comprising magnetoplastic or magnetoelastic materials |
| JP7096113B2 (ja) * | 2018-09-19 | 2022-07-05 | デクセリアルズ株式会社 | Ｍｎ－Ｔａ－Ｗ－Ｃｕ－Ｏ系スパッタリングターゲット及びその製造方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH669748A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1984-11-28 | 1989-04-14 | Feintool Int Holding | |
| JPS61219692A (ja) * | 1985-03-26 | 1986-09-30 | Matsushita Electric Ind Co Ltd | 光学情報記録部材 |
| JPS61270190A (ja) * | 1985-05-24 | 1986-11-29 | Matsushita Electric Ind Co Ltd | 光学情報記録部材 |
| JPH0673991B2 (ja) * | 1985-07-18 | 1994-09-21 | 松下電器産業株式会社 | 光学情報記録素子 |
| JPS6273438A (ja) * | 1985-09-25 | 1987-04-04 | Matsushita Electric Ind Co Ltd | 光学情報記録部材 |
| JPS62154244A (ja) * | 1985-12-26 | 1987-07-09 | Fuji Photo Film Co Ltd | 光学記録媒体 |
| JPS63188836A (ja) * | 1987-01-30 | 1988-08-04 | Sanyo Electric Co Ltd | 光学記録媒体 |
| US4900598A (en) * | 1987-09-22 | 1990-02-13 | Kabushiki Kaisha Toshiba | Information storage medium |
| JPH01104766A (ja) * | 1987-10-16 | 1989-04-21 | Hitachi Ltd | 光記録媒体用スパツタリングターゲット |
| US4956213A (en) * | 1988-02-17 | 1990-09-11 | Fuji Photo Film Co., Ltd. | Information recording medium |
| JPH0264929A (ja) * | 1988-08-31 | 1990-03-05 | Toshiba Corp | 情報記録媒体 |
| JPH0264930A (ja) * | 1988-08-31 | 1990-03-05 | Toshiba Corp | 情報記録媒体 |
| CA2017284C (en) * | 1989-07-04 | 1995-10-03 | Kazutomi Suzuki | Optical recording medium |
| JPH03224790A (ja) * | 1990-01-31 | 1991-10-03 | Toshiba Corp | 情報記録媒体 |
| JPH0494965A (ja) * | 1990-08-13 | 1992-03-27 | Ricoh Co Ltd | 光情報記録媒体 |
-
1993
- 1993-01-08 JP JP1796893A patent/JP2709887B2/ja not_active Expired - Fee Related
- 1993-06-10 US US08/074,447 patent/US5418030A/en not_active Expired - Lifetime
- 1993-06-14 DE DE69313926T patent/DE69313926T2/de not_active Expired - Fee Related
- 1993-06-14 EP EP19930109470 patent/EP0574025B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0574025B1 (en) | 1997-09-17 |
| DE69313926T2 (de) | 1998-04-09 |
| JPH0660419A (ja) | 1994-03-04 |
| EP0574025A2 (en) | 1993-12-15 |
| DE69313926D1 (de) | 1997-10-23 |
| EP0574025A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1994-01-19 |
| US5418030A (en) | 1995-05-23 |
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