JP2694875B2 - Contactor solder alloy film removal jig for semiconductor device measurement - Google Patents

Contactor solder alloy film removal jig for semiconductor device measurement

Info

Publication number
JP2694875B2
JP2694875B2 JP11650889A JP11650889A JP2694875B2 JP 2694875 B2 JP2694875 B2 JP 2694875B2 JP 11650889 A JP11650889 A JP 11650889A JP 11650889 A JP11650889 A JP 11650889A JP 2694875 B2 JP2694875 B2 JP 2694875B2
Authority
JP
Japan
Prior art keywords
contact
alloy film
semiconductor device
solder alloy
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11650889A
Other languages
Japanese (ja)
Other versions
JPH02298422A (en
Inventor
邦宏 重友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11650889A priority Critical patent/JP2694875B2/en
Publication of JPH02298422A publication Critical patent/JPH02298422A/en
Application granted granted Critical
Publication of JP2694875B2 publication Critical patent/JP2694875B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 被測定の半導体装置のリードとの接触作用により、測
定用接触子にできたはんだ合金膜を除くための、半導体
装置の測定用接触子はんだ合金膜除去治具に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] A measuring contact solder of a semiconductor device for removing a solder alloy film formed on a measuring contact by a contact action with a lead of a semiconductor device to be measured. The present invention relates to an alloy film removing jig.

〔従来の技術〕[Conventional technology]

測定装置の測定用接触子は、多数の半導体装置のリー
ドに接触し通電して測定を繰返しているうちに、リード
のはんだめつきの影響を受け、接触面に硬質のはんだ合
金膜が形成される。このはんだ合金膜は絶縁性のため、
接触不良が生じる。
The measuring contact of the measuring device is affected by soldering of the lead while contacting the leads of a large number of semiconductor devices and energizing and repeating the measurement, and a hard solder alloy film is formed on the contact surface. It Since this solder alloy film is insulating,
Poor contact occurs.

このため、従来は、測定用接触子にできたはんだ合金
膜を、人手によりカツタナイフ,ブラシなどで除去して
いた。
For this reason, conventionally, the solder alloy film formed on the measuring contact has been manually removed by a cutter knife, a brush or the like.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

上記のような従来の半導体装置の測定用接触子のはん
だ合金膜除去手段では、人手によりこすり取つており作
業性が悪く、その都度測定作業を中止しなければならな
いという問題点があつた。また、除去手入れを怠ると、
被測定の良品の半導体装置(例えばIC)が測定で接触不
良のため不良品と判定されることが多発するという問題
点があつた。さらに、はんだ合金膜の除去掃除作業の際
に、測定用接触子は破損することがあるという問題点が
あつた。
The above-described conventional solder alloy film removing means for the measuring contact of the semiconductor device has a problem that the workability is poor because it is scraped by hand and the measurement work must be stopped each time. Also, if you do not care for removal,
There has been a problem that a semiconductor device (for example, an IC) that is a non-defective product to be measured is often determined to be defective due to poor contact in measurement. Further, there is a problem that the measurement contact may be damaged during the cleaning work for removing the solder alloy film.

この発明は、このような問題点を解決するためになさ
れたもので、半導体装置の測定の流れ作業を行つている
うちに、測定用接触子のはんだ合金膜を除去することが
でき、接触不良や接触子の破損がなくされる半導体装置
の測定用接触子はんだ合金膜除去治具を得ることを目的
としている。
The present invention has been made to solve such a problem, and the solder alloy film of the contact for measurement can be removed while performing the measurement work of the semiconductor device, resulting in poor contact. It is an object of the present invention to obtain a contact solder alloy film removal jig for a semiconductor device, in which damage to the contact and the contact is eliminated.

〔課題を解決するための手段〕[Means for solving the problem]

この発明にかかる半導体装置の測定用接触子はんだ合
金膜除去治具は、半導体装置の外形に類似した形状に
し、測定用接触子に対応する、接触受片の接触面又は接
触受片の接触側に取付けた板ばねの接触面にやすり状粗
面を形成し、治具の接触受片を測定用接触子に相対的押
圧することにより、はんだ合金膜を除去するようにした
ものである。
A measuring contact solder alloy film removing jig for a semiconductor device according to the present invention has a shape similar to the outer shape of a semiconductor device, and corresponds to the measuring contact, the contact surface of the contact receiving piece or the contact side of the contact receiving piece. A file-like rough surface is formed on the contact surface of the leaf spring attached to, and the solder alloy film is removed by relatively pressing the contact receiving piece of the jig against the measuring contact.

〔作用〕[Action]

この発明においては、測定の流れ作業がされている半
導体装置群のうち、適宜にはんだ合金膜除去治具を替り
として投入して測定装置に流し、半導体装置と同様の扱
いで接触作用を行い、接触受片のやすり状粗面で測定用
接触子のはんだ合金膜を除去する。
In the present invention, among the semiconductor device group in which measurement work is performed, a solder alloy film removing jig is appropriately inserted as a substitute and flown into the measuring device, and a contact action is performed in the same manner as the semiconductor device, Remove the solder alloy film of the contact for measurement on the rough surface of the contact receiving piece.

〔実施例〕〔Example〕

第1図はこの発明の一実施例によるはんだ合金膜除去
治具の斜視図である。1ははんだ合金膜除去治具で、被
測定の半導体装置の外形に類似の形状にされており、パ
ツケージに相当する本体部1aから、半導体装置の並列に
出された多数のリード群に相当する一体の接触受片1bが
出されている。接触受片1bの測定用接触子に対応する接
触面には、やすり状粗面1cが形成されている。
FIG. 1 is a perspective view of a solder alloy film removing jig according to an embodiment of the present invention. Reference numeral 1 denotes a solder alloy film removing jig, which has a shape similar to the outer shape of the semiconductor device to be measured, and corresponds to a large number of leads grouped in parallel from the main body portion 1a corresponding to the package. The integral contact receiving piece 1b is exposed. A file-like rough surface 1c is formed on the contact surface of the contact receiving piece 1b corresponding to the contact for measurement.

このはんだ合金膜除去治具1を、第2図に示すよう
に、測定装置2のプツシヤー4上に、測定の流れ工程の
半導体装置のうちの替りとして位置決めして載置する。
測定装置2から出された測定用接触子3の接触面3aが上
方から接触受片1bに対応している。各測定用接触子3の
接触面3aには、前に測定した各半導体装置の各リードへ
の接触通電作用によるはんだ合金膜5が形成されてい
る。第2図(a)のA部を第2図(b)に拡大図で示
す。
As shown in FIG. 2, the solder alloy film removing jig 1 is positioned and placed on the pusher 4 of the measuring device 2 as a substitute for the semiconductor device in the flow of measurement.
The contact surface 3a of the measuring contact 3 taken out from the measuring device 2 corresponds to the contact receiving piece 1b from above. On the contact surface 3a of each measuring contact 3, a solder alloy film 5 is formed by the contact current-carrying action to each lead of each semiconductor device measured previously. The portion A of FIG. 2 (a) is shown in an enlarged view in FIG. 2 (b).

ここで、プツシヤー4を上昇させると、はんだ合金膜
除去治具1が上昇され、接触受片1bにやすり状粗面1cが
測定用接触子3に接し押上げる。これにより、接触子3
は接触方向に対し直角方向、すなわちB方向へ滑り、接
触面3aのはんだ合金膜5がやすり状粗面1cによりこすら
れ削り取られる。
Here, when the pusher 4 is raised, the solder alloy film removing jig 1 is raised, and the file-shaped rough surface 1c contacts the contact receiving piece 1b and pushes it up. As a result, the contact 3
Slides in the direction perpendicular to the contact direction, that is, in the B direction, and the solder alloy film 5 on the contact surface 3a is scraped off by the roughened surface 1c.

第3図はこの発明の第2の実施例を示し、はんだ合金
膜除去治具1の接触受片1bの接触側に、板ばね6が外端
側で固着され、内端側は自由端になつている。板ばね6
の上面の接触面はやすり状粗面6aにされている。
FIG. 3 shows a second embodiment of the present invention, in which the leaf spring 6 is fixed to the contact side of the contact receiving piece 1b of the solder alloy film removing jig 1 at the outer end side and the inner end side to the free end. I'm running. Leaf spring 6
The contact surface of the upper surface of the is a roughened surface 6a.

プツシヤー4の上昇により膜除去治具1が上昇する
と、接触子3に押圧接触する板ばね6の粗面6aが矢印c
方向へ変位することにより、はんだ合金膜5をこすり効
果的に除去する。
When the film removing jig 1 rises due to the rise of the pusher 4, the rough surface 6a of the leaf spring 6 that press-contacts the contact 3 has an arrow c.
By displacing in the direction, the solder alloy film 5 is scraped and effectively removed.

上記第1の実施例では、半導体装置のリードがSOP形
の場合の適用例を示したが、第4図にこの発明の他の各
実施例を、各形にそれぞれ適用する場合のはんだ合金膜
除去治具にていて示す。
In the above-mentioned first embodiment, the application example in the case where the leads of the semiconductor device are of the SOP type is shown, but FIG. 4 shows the solder alloy film in the case of applying each of the other examples of the present invention to each type. A removal jig is shown.

第4図(a)は第3の実施例を示し、QFP形の半導体
装置に適用する。合金膜除去治具11には、本体部11aか
ら出された接触受片11bの上面の接触面にやすり状粗面1
1cが形成され、接触片3の接触面3aに対応している。
FIG. 4A shows a third embodiment, which is applied to a QFP type semiconductor device. In the alloy film removing jig 11, the contact surface of the upper surface of the contact receiving piece 11b taken out from the main body portion 11a has a rough surface like a file 1
1c is formed and corresponds to the contact surface 3a of the contact piece 3.

第4図(b)は第4の実施例を示し、PLCC,SOJ形の半
導体装置に適用する。合金膜除去治具12には、本体部12
aから出された接触受片12bの外側面の接触面にやすり状
粗面12cが形成され、測定用接触子21の接触面21aに押圧
接触している。プツシヤー4の上昇により、はんだ合金
膜5を除去する。
FIG. 4B shows a fourth embodiment, which is applied to a PLCC, SOJ type semiconductor device. The alloy film removal jig 12 has a main body 12
A file-like rough surface 12c is formed on the contact surface of the outer side surface of the contact receiving piece 12b that is taken out from a, and is in pressure contact with the contact surface 21a of the measurement contact 21. The solder alloy film 5 is removed by raising the pusher 4.

第4図(c)は第5の実施例を示し、ZIP形の半導体
装置に適用する。合金膜除去治具13には、本体部13aか
ら一側方に出された上下の接触受片13bの各工程の接触
面にやすり状粗面13cが形成され、各接触子3の各接触
面3aに対応している。
FIG. 4C shows a fifth embodiment, which is applied to a ZIP type semiconductor device. In the alloy film removing jig 13, a file-like rough surface 13c is formed on the contact surface of each step of the upper and lower contact receiving pieces 13b which are projected to one side from the main body 13a, and each contact surface of each contact 3 is formed. It corresponds to 3a.

第4図(d)は第6の実施例を示し、ZIP形の半導体
装置をリード側を下方にした立て姿勢の場合に適用す
る。合金膜除去治具14には、本体部14aから下方に出さ
れ両側に開いた接触受片14bの各両側の接触面にやすり
状粗面14cが形成され、各測定用接触子22の接触面22aに
挾付けられている。合金膜除去治具14はプツシヤー24に
より押下げられる。
FIG. 4D shows a sixth embodiment, which is applied to a ZIP type semiconductor device in a standing posture with the lead side facing downward. The alloy film removing jig 14 has filed rough surfaces 14c formed on the contact surfaces on both sides of the contact receiving pieces 14b which are exposed downward from the main body portion 14a and open on both sides, and the contact surface of each contact 22 for measurement. It is attached to 22a. The alloy film removing jig 14 is pushed down by the pusher 24.

第4図(e)は第7の実施例を示し、DIP形の半導体
装置に適用する。合金膜除去治具15には、本体部15aの
両側から接触受片15bが出され下方に折曲げられてお
り、外側の接触面にやすり状粗面15cが形成され、各測
定用接触子23の接触面23aに対応している。合金膜除去
治具15はプツシヤー25により押下げられる。
FIG. 4E shows a seventh embodiment, which is applied to a DIP type semiconductor device. In the alloy film removing jig 15, contact receiving pieces 15b are projected from both sides of the main body 15a and bent downward, and a file-like rough surface 15c is formed on the outer contact surface, and each measuring contact 23 Corresponding to the contact surface 23a. The alloy film removing jig 15 is pushed down by the pusher 25.

〔発明の効果〕〔The invention's effect〕

以上のように、この発明によれば、はんだ合金膜除去
治具を半導体装置の外形に類似した形状にし、リードに
相当する接触受片の接触面又は接触受片の接触側に取付
けた板ばねの接触面をやすり状粗面に形成したので、測
定装置に流している半導体装置と同様に替りとして適宜
流すことができ、測定ラインの流れを止めておくことな
く、測定用接触子のはんだ合金膜が容易に除去でき、測
定時の接触不良をなくし、また、測定用接触子の破損が
防止され、生産性が高められる。
As described above, according to the present invention, the solder alloy film removing jig has a shape similar to the outer shape of the semiconductor device, and the leaf spring is attached to the contact surface of the contact receiving piece corresponding to the lead or the contact side of the contact receiving piece. Since the contact surface of is formed into a rough surface like a file, it can be flowed as an alternative as well as the semiconductor device that is flowing into the measuring device, and without interrupting the flow of the measuring line, the solder alloy of the measuring contact The film can be easily removed, contact failure at the time of measurement is eliminated, and damage to the contact for measurement is prevented, so that productivity is improved.

【図面の簡単な説明】[Brief description of the drawings]

第1図はこの発明の第1の実施例による半導体装置の測
定用接触子はんだ合金膜除去治具の斜視図、第2図
(a)は第1図の除去治具を測定装置に載置しはんだ合
金膜除去している状態の正面図、第2図(b)は第2図
(a)のA部拡大図、第3図はこの発明の第2の実施例
によるはんだ合金膜除去治具の動作状態の正面図、第4
図(a)〜(e)はこの発明の第3〜7の実施例を示す
はんだ合金膜除去治具の動作状態の正面図である。 1,11〜15……はんだ合金膜除去治具、1a,11a〜15a……
本体部、1b,11b〜15b……接触受片、1c,11c〜15c……や
すり状粗面、2……測定装置、3,21〜23……測定用接触
子、3a,21a〜23a……接触面、4,24,25……プツシヤー、
5……はんだ合金膜 なお、図中同一符号は同一又は相当部分を示す。
FIG. 1 is a perspective view of a measuring contact solder alloy film removing jig of a semiconductor device according to a first embodiment of the present invention, and FIG. 2 (a) shows the removing jig of FIG. 1 placed on a measuring device. FIG. 2 (b) is an enlarged view of part A of FIG. 2 (a), and FIG. 3 is a solder alloy film removal treatment according to the second embodiment of the present invention. Front view of the operating state of the tool, No. 4
(A)-(e) is a front view of the operating state of the solder alloy film removing jig showing the third to seventh embodiments of the present invention. 1,11〜15 …… Solder alloy film removal jig, 1a, 11a〜15a ……
Main body, 1b, 11b to 15b ... Contact receiving piece, 1c, 11c to 15c ... Rough surface, 2 ... Measuring device, 3, 21 to 23 ... Measuring contact, 3a, 21a to 23a ... … Contact surface, 4,24,25 …… Pusher,
5 ... Solder alloy film The same reference numerals in the drawings indicate the same or corresponding portions.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】パツケージから複数のリードが配列して出
された半導体装置の外形と類似の形状にされており、本
来の製品と同等に装置内をハンドリングが可能で、上記
パツケージに相当する本体部と、この本体部から出され
上記各リードの配列体に相当する接触受片とを備え、 測定装置の測定用接触子の接触面に対応し相対的押圧接
触する、上記接触受片の接触面又は接触受片の接触側に
取付けた板ばねの接触面にやすり状粗面を形成したこと
を特徴とする半導体装置の測定用接触子はんだ合金膜除
去治具。
1. A main body corresponding to the package, which has a shape similar to the outer shape of a semiconductor device in which a plurality of leads are arrayed from the package and can handle the inside of the device in the same manner as the original product. And a contact receiving piece which is taken out from this main body and corresponds to the array of the leads, and which makes relative pressure contact corresponding to the contact surface of the measuring contact of the measuring device, the contact of the contact receiving piece A measuring contact solder alloy film removing jig for a semiconductor device, wherein a file-like rough surface is formed on a contact surface of a surface or a contact side of a contact receiving piece.
JP11650889A 1989-05-09 1989-05-09 Contactor solder alloy film removal jig for semiconductor device measurement Expired - Lifetime JP2694875B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11650889A JP2694875B2 (en) 1989-05-09 1989-05-09 Contactor solder alloy film removal jig for semiconductor device measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11650889A JP2694875B2 (en) 1989-05-09 1989-05-09 Contactor solder alloy film removal jig for semiconductor device measurement

Publications (2)

Publication Number Publication Date
JPH02298422A JPH02298422A (en) 1990-12-10
JP2694875B2 true JP2694875B2 (en) 1997-12-24

Family

ID=14688880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11650889A Expired - Lifetime JP2694875B2 (en) 1989-05-09 1989-05-09 Contactor solder alloy film removal jig for semiconductor device measurement

Country Status (1)

Country Link
JP (1) JP2694875B2 (en)

Also Published As

Publication number Publication date
JPH02298422A (en) 1990-12-10

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