JP2613473B2 - Method for producing dielectric ceramic sheet - Google Patents
Method for producing dielectric ceramic sheetInfo
- Publication number
- JP2613473B2 JP2613473B2 JP1070967A JP7096789A JP2613473B2 JP 2613473 B2 JP2613473 B2 JP 2613473B2 JP 1070967 A JP1070967 A JP 1070967A JP 7096789 A JP7096789 A JP 7096789A JP 2613473 B2 JP2613473 B2 JP 2613473B2
- Authority
- JP
- Japan
- Prior art keywords
- base film
- dielectric ceramic
- film
- ceramic sheet
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Laminated Bodies (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
【発明の詳細な説明】 イ.発明の目的 〔産業上の利用分野〕 本発明は積層セラミックコンデンサや積層圧電アクチ
ュエータ等に使用される誘電体セラミックシートの製造
方法に係り、グリーンシートの製造方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a dielectric ceramic sheet used for a multilayer ceramic capacitor, a multilayer piezoelectric actuator, and the like, and more particularly to a method for manufacturing a green sheet.
従来、誘電体セラミックシートを作成するためのグリ
ーンシートの製造は、誘電体セラミック粉末、結合剤、
分散剤、溶剤、可塑剤等からなるスラリーを、ポリエス
テルフィルムの表面をシリコーンコートしたベースフィ
ルム上にドクターブレイド法等を用いて成膜、乾燥する
という工程で作成されている。しかしこの方法を用いた
場合シリコーンコートしたベースフィルム上面全面に結
合剤が層状に形成される為、膜をベースフィルムより剥
ぎ取る際、剥がし難いという問題がある。従って、せっ
かく成膜した膜でもベースフィルムから剥離出来ない為
使えなかったり、又剥がしても完全なものでなく欠陥の
ある場合がある。これは膜が薄くなる程顕著になってく
る傾向があり剥離の容易なコート材の開発や製造法が検
討されている。Conventionally, the production of a green sheet for making a dielectric ceramic sheet includes a dielectric ceramic powder, a binder,
It is formed by a process of forming a slurry composed of a dispersant, a solvent, a plasticizer and the like on a base film having a polyester film surface coated with silicone by using a doctor blade method or the like, and drying the film. However, when this method is used, the binder is formed in a layer on the entire surface of the silicone-coated base film, so that there is a problem that it is difficult to peel off the film from the base film. Therefore, even a film formed with great care cannot be used because it cannot be peeled off from the base film, or even if it is peeled off, it is not perfect and has defects. This tends to become more pronounced as the film becomes thinner, and the development and manufacturing method of a coating material that is easy to peel off is being studied.
本発明は前述の問題を解決するため、あらかじめベー
スフィルム上に膜が剥離しやすい様、極微小の厚みで誘
電体セラミック粉末を島状にコートしておき、その上に
従来の方法で、前述のスラリーを成膜する方法により、
剥離の容易なグリーンシートが得られる製造方法を提供
しようとするものである。即ち膜割れ、切れがなくな
り、積層セラミックコンデンサ等に使用した場合信頼性
の高い製品が供給できる、剥離の容易なグリーンシート
による誘電体セラミックスシートの製造方法を提供する
ことを目的としたものである。In order to solve the above-mentioned problem, the present invention coats a dielectric ceramic powder in an island shape with a very small thickness in advance so that the film is easily peeled off on the base film, and then coats it with a conventional method. By the method of forming a slurry of
An object of the present invention is to provide a manufacturing method capable of obtaining a green sheet that can be easily peeled. That is, it is an object of the present invention to provide a method of manufacturing a dielectric ceramic sheet by using a green sheet that can be easily peeled and can provide a highly reliable product when used for a multilayer ceramic capacitor or the like without film cracking and cutting. .
ロ.発明の構成 〔課題を解決するための手段〕 本発明は、積層セラミックスコンデンサ等に使用する
誘電体セラミックシートの作成に際し、誘電体のセラミ
ック粉末、結合剤、分散剤等を含むスラリーをシリコー
ンコートしたベースフィルム上に成膜する方法におい
て、誘電体セラミックシートに含まれるものと同材質の
誘電体セラミック粉末を、あらかじめベースフィルム上
にコートしておき、この上に前記スラリーを成膜するこ
とで、グリーンシートが剥離し易く、膜切れのない誘電
体セラミックシートの製造方法を提供するものである。B. Configuration of the Invention [Means for Solving the Problems] The present invention, when producing a dielectric ceramic sheet used for a multilayer ceramic capacitor and the like, a slurry containing a dielectric ceramic powder, a binder, a dispersant, etc. was silicone-coated. In the method of forming a film on the base film, a dielectric ceramic powder of the same material as that contained in the dielectric ceramic sheet is coated on the base film in advance, and the slurry is formed on the base film, An object of the present invention is to provide a method for manufacturing a dielectric ceramic sheet in which a green sheet is easily peeled and a film is not broken.
誘電体セラミックシートのグリーンシートの作成にお
いて、基台となるベースフィルム上に、成膜される誘電
体と同材質の粉末を島状に塗布した後スラリーを塗布し
成膜するとベースフィルムとスラリー中の結合剤との接
触面積が減少しグリーンシートとベースフィルムの接着
力が低下し剥離しやすくなる。In producing a green sheet of a dielectric ceramic sheet, a powder of the same material as the dielectric to be formed is applied in an island shape on a base film serving as a base, and then a slurry is applied to form a film. Of the green sheet and the base film is reduced, and the adhesive strength between the green sheet and the base film is reduced, and the green sheet is easily peeled.
本発明の一実施例を図面を用いて説明する。 An embodiment of the present invention will be described with reference to the drawings.
第1図は本発明の一実施例を示し、(a)は誘電体セ
ラミックシートのグリーンシート成膜前のベースフィル
ム5に誘電体のセラミック粉末1を島状にコートした断
面図、(b)は(a)のベースフィルム上に成膜した状
態を示し、図面右端部は一部剥離させた状態を示す断面
図である。FIG. 1 shows an embodiment of the present invention, in which (a) is a cross-sectional view in which a dielectric ceramic powder 1 is coated in an island shape on a base film 5 before forming a green sheet of a dielectric ceramic sheet, and (b). FIG. 3A is a cross-sectional view illustrating a state where a film is formed on the base film in FIG.
チタン酸バリウムを誘電体材料としたセラミック粉末
1で、平均粒径0.5μm程度の微粉を島状に約4μm程
度の厚さで、表面の約30%を覆う様にベースフィルム5
上に付着させる(第1図(a)参照)。付着させる方法
はベースフィルムに帯電させた静電気を利用する為に風
力分級法により特徴のみを集め、これをベースフィルム
に近づけチタン酸バリウムの粉末を島状にベースフィル
ムに吸着させる。このベースフィルムにチタン酸バリウ
ム粉末、ポリビニールブチラール(PVB,結合剤)、エチ
ルセロソルブ(溶剤)、ブチルカルビトール(BPBG,可
塑剤)からなるスラリーをドクターブレイド法により約
20μmに成膜する。更に、ベースフィルムより膜を剥が
し取り、このグリーンシートに積層セラミックコンデン
サを製造する為の内部電極を印刷する。その後、積層、
熱プレス、切断、脱バインダ、焼結、外部電極付を行な
い積層セラミックコンデンサを作成した。本実施例に用
いたグリーンシートと前述の従来の方法(第1図参照)
で作成したグリーンシート及び各々のグリーンシートよ
り作成された誘電体セラミックシートより成る積層セラ
ミックコンデンサの特性を表1に示す。A ceramic powder 1 made of barium titanate as a dielectric material. A fine powder having an average particle size of about 0.5 μm is formed into an island shape with a thickness of about 4 μm and a base film 5 covering about 30% of the surface.
Attached on top (see FIG. 1 (a)). The method of attaching is to collect only the features by the air classification method in order to utilize the static electricity charged on the base film, bring the powder close to the base film, and adsorb the barium titanate powder on the base film in an island shape. A slurry consisting of barium titanate powder, polyvinyl butyral (PVB, binder), ethyl cellosolve (solvent), and butyl carbitol (BPBG, plasticizer) was applied to this base film by the doctor blade method.
Form a film to a thickness of 20 μm. Further, the film is peeled off from the base film, and an internal electrode for manufacturing a multilayer ceramic capacitor is printed on the green sheet. Then lamination,
A multilayer ceramic capacitor was prepared by performing hot pressing, cutting, binder removal, sintering, and attaching external electrodes. Green sheet used in this example and the above-mentioned conventional method (see FIG. 1)
Table 1 shows the characteristics of the multilayer ceramic capacitor including the green sheets prepared in the above and the dielectric ceramic sheets prepared from the respective green sheets.
表1の結果に示すように、本発明の方法は剥離強度は
1/2に減少され、剥離した膜にも全く欠陥は見当たらな
い。又コンデンサに完成した状態の不良発生率も従来方
法に比べ改善されていることがわかる。As shown in the results of Table 1, the method of the present invention has a peel strength of
It was reduced to 1/2, and no defects were found in the peeled film. Also, it can be seen that the failure rate of the completed capacitor is improved as compared with the conventional method.
ハ.発明の効果 〔発明の効果〕 本発明の方法によるグリーンシートの剥離が簡単で信
頼性の高い誘導体セラミックシートが提供でき、経済的
な積層コンデンサーやアクチュエータが提供できる。 C. Effects of the Invention [Effects of the Invention] A highly reliable derivative ceramic sheet that can be easily peeled off by the method of the present invention can be provided, and an economical multilayer capacitor and actuator can be provided.
第1図は本発明の実施例を示し、(a)は誘電体セラミ
ックシートのグリーンシート作成前のベースフィルムに
誘電体セラミック粉末を島状にコートした断面図、
(b)は(a)のベースフィルム上に成膜した状態を示
し、図右端は一部剥離させた状態を示す断面図。 第2図は従来の誘電体セラミックシートのグリーンシー
ト成膜状態を示し、(a)はベースフィルムの断面図、
(b)はベースフィルム上に成膜した状態を示し、図右
端は一部剥離させた状態を示す断面図。 1……セラミック粉末、2……結合剤、3……空孔、4
……グリーンシート、5……ベースフィルム。FIG. 1 shows an embodiment of the present invention, in which (a) is a cross-sectional view in which a dielectric ceramic powder is coated in an island shape on a base film before a green sheet of the dielectric ceramic sheet is prepared,
FIG. 2B is a cross-sectional view showing a state where the film is formed on the base film of FIG. FIG. 2 shows a state of forming a green sheet of a conventional dielectric ceramic sheet, (a) is a cross-sectional view of a base film,
(B) is a cross-sectional view showing a state where the film is formed on the base film, and a right end of the figure is a state where the film is partially peeled. 1 ... ceramic powder, 2 ... binder, 3 ... pores, 4
… Green sheet, 5… Base film.
Claims (1)
電体セラミックシートの作成に際し、誘電体のセラミッ
ク粉末、結合剤、分散剤等を含むスラリーをシリコンコ
ートしたベースフィルム上に成膜する方法において、誘
電体セラミックシートに含まれるものと同材質の誘電体
セラミック粉末をあらかじめベースフィルム上にコート
しておき、この上に前記スラリーを成膜することを特徴
とする誘電体セラミックシートの製造方法。1. A method of forming a dielectric ceramic sheet for use in a multilayer ceramic capacitor or the like, comprising forming a slurry containing a ceramic powder of a dielectric substance, a binder, a dispersant, and the like on a silicon-coated base film. A method of manufacturing a dielectric ceramic sheet, comprising: coating a dielectric ceramic powder of the same material as that contained in a body ceramic sheet on a base film in advance; and forming the slurry on the base film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1070967A JP2613473B2 (en) | 1989-03-22 | 1989-03-22 | Method for producing dielectric ceramic sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1070967A JP2613473B2 (en) | 1989-03-22 | 1989-03-22 | Method for producing dielectric ceramic sheet |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02248359A JPH02248359A (en) | 1990-10-04 |
JP2613473B2 true JP2613473B2 (en) | 1997-05-28 |
Family
ID=13446804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1070967A Expired - Lifetime JP2613473B2 (en) | 1989-03-22 | 1989-03-22 | Method for producing dielectric ceramic sheet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2613473B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014005197A (en) * | 2013-08-05 | 2014-01-16 | Seiko Epson Corp | Ceramic composition, producing method for the same, liquid injection head and liquid injection device |
-
1989
- 1989-03-22 JP JP1070967A patent/JP2613473B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02248359A (en) | 1990-10-04 |
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