JP2584196Y2 - 移動テーブル - Google Patents
移動テーブルInfo
- Publication number
- JP2584196Y2 JP2584196Y2 JP1990115044U JP11504490U JP2584196Y2 JP 2584196 Y2 JP2584196 Y2 JP 2584196Y2 JP 1990115044 U JP1990115044 U JP 1990115044U JP 11504490 U JP11504490 U JP 11504490U JP 2584196 Y2 JP2584196 Y2 JP 2584196Y2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- movable
- platen
- moving table
- movable platen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008602 contraction Effects 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 description 15
- 238000001514 detection method Methods 0.000 description 14
- 238000005096 rolling process Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Positioning Apparatuses (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990115044U JP2584196Y2 (ja) | 1990-10-31 | 1990-10-31 | 移動テーブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990115044U JP2584196Y2 (ja) | 1990-10-31 | 1990-10-31 | 移動テーブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0473434U JPH0473434U (enrdf_load_stackoverflow) | 1992-06-26 |
| JP2584196Y2 true JP2584196Y2 (ja) | 1998-10-30 |
Family
ID=31862778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990115044U Expired - Fee Related JP2584196Y2 (ja) | 1990-10-31 | 1990-10-31 | 移動テーブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2584196Y2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012101332A (ja) * | 2010-11-11 | 2012-05-31 | Freebear Corp | ワーク位置決めシステム |
| JP6520073B2 (ja) * | 2014-11-25 | 2019-05-29 | 日本精工株式会社 | テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械 |
| JP6353373B2 (ja) * | 2015-01-16 | 2018-07-04 | 東京エレクトロン株式会社 | 接合装置、接合システムおよび接合方法 |
| JP6693132B2 (ja) * | 2016-01-12 | 2020-05-13 | 日本精工株式会社 | テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5750623A (en) * | 1980-09-12 | 1982-03-25 | Hitachi Ltd | Spectral irradiation apparatus |
| NL8500930A (nl) * | 1985-03-29 | 1986-10-16 | Philips Nv | Verplaatsingsinrichting met voorgespannen contactloze lagers. |
| JPS62123882U (enrdf_load_stackoverflow) * | 1986-01-31 | 1987-08-06 | ||
| JPH04148528A (ja) * | 1990-10-12 | 1992-05-21 | Hitachi Ltd | 試料位置決め装置 |
-
1990
- 1990-10-31 JP JP1990115044U patent/JP2584196Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0473434U (enrdf_load_stackoverflow) | 1992-06-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |