JP2561859Y2 - 多室式ローラハース型プラズマ処理炉 - Google Patents

多室式ローラハース型プラズマ処理炉

Info

Publication number
JP2561859Y2
JP2561859Y2 JP131791U JP131791U JP2561859Y2 JP 2561859 Y2 JP2561859 Y2 JP 2561859Y2 JP 131791 U JP131791 U JP 131791U JP 131791 U JP131791 U JP 131791U JP 2561859 Y2 JP2561859 Y2 JP 2561859Y2
Authority
JP
Japan
Prior art keywords
plasma processing
chamber
furnace
type plasma
roller hearth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP131791U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0497296U (enExample
Inventor
吉計 下里
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP131791U priority Critical patent/JP2561859Y2/ja
Publication of JPH0497296U publication Critical patent/JPH0497296U/ja
Application granted granted Critical
Publication of JP2561859Y2 publication Critical patent/JP2561859Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Tunnel Furnaces (AREA)
JP131791U 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉 Expired - Lifetime JP2561859Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP131791U JP2561859Y2 (ja) 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP131791U JP2561859Y2 (ja) 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉

Publications (2)

Publication Number Publication Date
JPH0497296U JPH0497296U (enExample) 1992-08-24
JP2561859Y2 true JP2561859Y2 (ja) 1998-02-04

Family

ID=31728596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP131791U Expired - Lifetime JP2561859Y2 (ja) 1991-01-21 1991-01-21 多室式ローラハース型プラズマ処理炉

Country Status (1)

Country Link
JP (1) JP2561859Y2 (enExample)

Also Published As

Publication number Publication date
JPH0497296U (enExample) 1992-08-24

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