JP2548482Y2 - Ｉｃ搬送機構 - Google Patents

Ｉｃ搬送機構

Info

Publication number
JP2548482Y2
JP2548482Y2 JP1990001972U JP197290U JP2548482Y2 JP 2548482 Y2 JP2548482 Y2 JP 2548482Y2 JP 1990001972 U JP1990001972 U JP 1990001972U JP 197290 U JP197290 U JP 197290U JP 2548482 Y2 JP2548482 Y2 JP 2548482Y2
Authority
JP
Japan
Prior art keywords
rail
sliding rail
nozzle
sliding
rails
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990001972U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0395649U (enrdf_load_stackoverflow
Inventor
釼平 鈴木
浩二 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP1990001972U priority Critical patent/JP2548482Y2/ja
Publication of JPH0395649U publication Critical patent/JPH0395649U/ja
Application granted granted Critical
Publication of JP2548482Y2 publication Critical patent/JP2548482Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990001972U 1990-01-12 1990-01-12 Ｉｃ搬送機構 Expired - Fee Related JP2548482Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990001972U JP2548482Y2 (ja) 1990-01-12 1990-01-12 Ｉｃ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990001972U JP2548482Y2 (ja) 1990-01-12 1990-01-12 Ｉｃ搬送機構

Publications (2)

Publication Number Publication Date
JPH0395649U JPH0395649U (enrdf_load_stackoverflow) 1991-09-30
JP2548482Y2 true JP2548482Y2 (ja) 1997-09-24

Family

ID=31505856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990001972U Expired - Fee Related JP2548482Y2 (ja) 1990-01-12 1990-01-12 Ｉｃ搬送機構

Country Status (1)

Country Link
JP (1) JP2548482Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6317728A (ja) * 1986-07-07 1988-01-25 Sony Corp エア浮上式搬送装置
JPS6345827A (ja) * 1986-08-13 1988-02-26 Toshiba Corp テストヘツド部
JPH0436463Y2 (enrdf_load_stackoverflow) * 1987-02-13 1992-08-27

Also Published As

Publication number Publication date
JPH0395649U (enrdf_load_stackoverflow) 1991-09-30

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Legal Events

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