JP2543506Y2 - 着脱式放電電極 - Google Patents
着脱式放電電極Info
- Publication number
- JP2543506Y2 JP2543506Y2 JP1988093084U JP9308488U JP2543506Y2 JP 2543506 Y2 JP2543506 Y2 JP 2543506Y2 JP 1988093084 U JP1988093084 U JP 1988093084U JP 9308488 U JP9308488 U JP 9308488U JP 2543506 Y2 JP2543506 Y2 JP 2543506Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge electrode
- bottom plate
- mold
- present
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 15
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- -1 or the like Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093084U JP2543506Y2 (ja) | 1988-07-15 | 1988-07-15 | 着脱式放電電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093084U JP2543506Y2 (ja) | 1988-07-15 | 1988-07-15 | 着脱式放電電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215723U JPH0215723U (OSRAM) | 1990-01-31 |
| JP2543506Y2 true JP2543506Y2 (ja) | 1997-08-06 |
Family
ID=31317534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988093084U Expired - Lifetime JP2543506Y2 (ja) | 1988-07-15 | 1988-07-15 | 着脱式放電電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2543506Y2 (OSRAM) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0750701B2 (ja) * | 1985-04-01 | 1995-05-31 | 日電アネルバ株式会社 | 放電反応装置 |
-
1988
- 1988-07-15 JP JP1988093084U patent/JP2543506Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0215723U (OSRAM) | 1990-01-31 |
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