JP2537739Y2 - 静電吸着装置 - Google Patents

静電吸着装置

Info

Publication number
JP2537739Y2
JP2537739Y2 JP1989135585U JP13558589U JP2537739Y2 JP 2537739 Y2 JP2537739 Y2 JP 2537739Y2 JP 1989135585 U JP1989135585 U JP 1989135585U JP 13558589 U JP13558589 U JP 13558589U JP 2537739 Y2 JP2537739 Y2 JP 2537739Y2
Authority
JP
Japan
Prior art keywords
groove
plate
insulator
wafer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989135585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373453U (enExample
Inventor
一誠 巻口
元一 金沢
治 松本
和夫 日浦
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1989135585U priority Critical patent/JP2537739Y2/ja
Publication of JPH0373453U publication Critical patent/JPH0373453U/ja
Application granted granted Critical
Publication of JP2537739Y2 publication Critical patent/JP2537739Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP1989135585U 1989-11-22 1989-11-22 静電吸着装置 Expired - Lifetime JP2537739Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989135585U JP2537739Y2 (ja) 1989-11-22 1989-11-22 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989135585U JP2537739Y2 (ja) 1989-11-22 1989-11-22 静電吸着装置

Publications (2)

Publication Number Publication Date
JPH0373453U JPH0373453U (enExample) 1991-07-24
JP2537739Y2 true JP2537739Y2 (ja) 1997-06-04

Family

ID=31682846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989135585U Expired - Lifetime JP2537739Y2 (ja) 1989-11-22 1989-11-22 静電吸着装置

Country Status (1)

Country Link
JP (1) JP2537739Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4504174B2 (ja) * 2004-12-15 2010-07-14 大日本印刷株式会社 マチ付き封筒

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115047U (enExample) * 1979-02-06 1980-08-13
JPS5922340A (ja) * 1982-07-29 1984-02-04 Toshiba Corp 静電チヤツク装置
JPH0622213B2 (ja) * 1983-11-28 1994-03-23 株式会社日立製作所 試料の温度制御方法及び装置
JPH0719831B2 (ja) * 1986-10-13 1995-03-06 日本電信電話株式会社 静電チヤツク
JPH01200625A (ja) * 1988-02-05 1989-08-11 Toshiba Corp 半導体ウェーハ処理装置
JPH01135585U (enExample) * 1988-03-09 1989-09-18
JP2680338B2 (ja) * 1988-03-31 1997-11-19 株式会社東芝 静電チャック装置
JP2900709B2 (ja) * 1992-07-03 1999-06-02 日本電気株式会社 動画像フィルタ

Also Published As

Publication number Publication date
JPH0373453U (enExample) 1991-07-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term