JP2537739Y2 - 静電吸着装置 - Google Patents
静電吸着装置Info
- Publication number
- JP2537739Y2 JP2537739Y2 JP1989135585U JP13558589U JP2537739Y2 JP 2537739 Y2 JP2537739 Y2 JP 2537739Y2 JP 1989135585 U JP1989135585 U JP 1989135585U JP 13558589 U JP13558589 U JP 13558589U JP 2537739 Y2 JP2537739 Y2 JP 2537739Y2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- plate
- insulator
- wafer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Weting (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989135585U JP2537739Y2 (ja) | 1989-11-22 | 1989-11-22 | 静電吸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989135585U JP2537739Y2 (ja) | 1989-11-22 | 1989-11-22 | 静電吸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0373453U JPH0373453U (US06826419-20041130-M00005.png) | 1991-07-24 |
JP2537739Y2 true JP2537739Y2 (ja) | 1997-06-04 |
Family
ID=31682846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989135585U Expired - Lifetime JP2537739Y2 (ja) | 1989-11-22 | 1989-11-22 | 静電吸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2537739Y2 (US06826419-20041130-M00005.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4504174B2 (ja) * | 2004-12-15 | 2010-07-14 | 大日本印刷株式会社 | マチ付き封筒 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55115047U (US06826419-20041130-M00005.png) * | 1979-02-06 | 1980-08-13 | ||
JPS5922340A (ja) * | 1982-07-29 | 1984-02-04 | Toshiba Corp | 静電チヤツク装置 |
JPH0622213B2 (ja) * | 1983-11-28 | 1994-03-23 | 株式会社日立製作所 | 試料の温度制御方法及び装置 |
JPH0719831B2 (ja) * | 1986-10-13 | 1995-03-06 | 日本電信電話株式会社 | 静電チヤツク |
JPH01200625A (ja) * | 1988-02-05 | 1989-08-11 | Toshiba Corp | 半導体ウェーハ処理装置 |
JPH01135585U (US06826419-20041130-M00005.png) * | 1988-03-09 | 1989-09-18 | ||
JP2680338B2 (ja) * | 1988-03-31 | 1997-11-19 | 株式会社東芝 | 静電チャック装置 |
JP2900709B2 (ja) * | 1992-07-03 | 1999-06-02 | 日本電気株式会社 | 動画像フィルタ |
-
1989
- 1989-11-22 JP JP1989135585U patent/JP2537739Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0373453U (US06826419-20041130-M00005.png) | 1991-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |