JP2536994Y2 - 半導体製造装置のボート搬送装置 - Google Patents
半導体製造装置のボート搬送装置Info
- Publication number
- JP2536994Y2 JP2536994Y2 JP1990126608U JP12660890U JP2536994Y2 JP 2536994 Y2 JP2536994 Y2 JP 2536994Y2 JP 1990126608 U JP1990126608 U JP 1990126608U JP 12660890 U JP12660890 U JP 12660890U JP 2536994 Y2 JP2536994 Y2 JP 2536994Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- handler
- diameter portion
- measuring tube
- temperature measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title description 5
- 239000004065 semiconductor Substances 0.000 title description 5
- 239000002516 radical scavenger Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 7
- 239000010453 quartz Substances 0.000 description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 29
- 238000010438 heat treatment Methods 0.000 description 13
- 238000009529 body temperature measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126608U JP2536994Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体製造装置のボート搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126608U JP2536994Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体製造装置のボート搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0485726U JPH0485726U (show.php) | 1992-07-24 |
| JP2536994Y2 true JP2536994Y2 (ja) | 1997-05-28 |
Family
ID=31874153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990126608U Expired - Lifetime JP2536994Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体製造装置のボート搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2536994Y2 (show.php) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0783003B2 (ja) * | 1986-07-09 | 1995-09-06 | 国際電気株式会社 | ウエ−ハボ−トの搬送方法 |
-
1990
- 1990-11-30 JP JP1990126608U patent/JP2536994Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0485726U (show.php) | 1992-07-24 |
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