JP2528138Y2 - 緩衝機構付き真空パッド - Google Patents

緩衝機構付き真空パッド

Info

Publication number
JP2528138Y2
JP2528138Y2 JP1990089798U JP8979890U JP2528138Y2 JP 2528138 Y2 JP2528138 Y2 JP 2528138Y2 JP 1990089798 U JP1990089798 U JP 1990089798U JP 8979890 U JP8979890 U JP 8979890U JP 2528138 Y2 JP2528138 Y2 JP 2528138Y2
Authority
JP
Japan
Prior art keywords
rod
vacuum
pad
flange
suction pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990089798U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447988U (enrdf_load_stackoverflow
Inventor
茂和 永井
修三 桜井
勅 川本
Original Assignee
エスエムシー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エスエムシー株式会社 filed Critical エスエムシー株式会社
Priority to JP1990089798U priority Critical patent/JP2528138Y2/ja
Publication of JPH0447988U publication Critical patent/JPH0447988U/ja
Application granted granted Critical
Publication of JP2528138Y2 publication Critical patent/JP2528138Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1990089798U 1990-08-28 1990-08-28 緩衝機構付き真空パッド Expired - Lifetime JP2528138Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990089798U JP2528138Y2 (ja) 1990-08-28 1990-08-28 緩衝機構付き真空パッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990089798U JP2528138Y2 (ja) 1990-08-28 1990-08-28 緩衝機構付き真空パッド

Publications (2)

Publication Number Publication Date
JPH0447988U JPH0447988U (enrdf_load_stackoverflow) 1992-04-23
JP2528138Y2 true JP2528138Y2 (ja) 1997-03-05

Family

ID=31824042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990089798U Expired - Lifetime JP2528138Y2 (ja) 1990-08-28 1990-08-28 緩衝機構付き真空パッド

Country Status (1)

Country Link
JP (1) JP2528138Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108163533A (zh) * 2016-12-07 2018-06-15 红塔烟草(集团)有限责任公司 一种真空吸盘保护装置
CN107891441A (zh) * 2017-12-25 2018-04-10 无锡特恒科技有限公司 一种微浮动的上料抓取机构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222052Y2 (enrdf_load_stackoverflow) * 1973-04-24 1977-05-20
JPS6094487U (ja) * 1983-11-30 1985-06-27 東芝機械株式会社 ウエハ吸着装置
JPH0647673Y2 (ja) * 1988-08-22 1994-12-07 エスエムシー株式会社 真空圧用バッファ

Also Published As

Publication number Publication date
JPH0447988U (enrdf_load_stackoverflow) 1992-04-23

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