JP2526852Y2 - 酸化物超伝導薄膜の気相成長装置 - Google Patents

酸化物超伝導薄膜の気相成長装置

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Publication number
JP2526852Y2
JP2526852Y2 JP1989125002U JP12500289U JP2526852Y2 JP 2526852 Y2 JP2526852 Y2 JP 2526852Y2 JP 1989125002 U JP1989125002 U JP 1989125002U JP 12500289 U JP12500289 U JP 12500289U JP 2526852 Y2 JP2526852 Y2 JP 2526852Y2
Authority
JP
Japan
Prior art keywords
substrate
reaction tube
gas
supply pipe
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989125002U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363571U (enExample
Inventor
晋二 合田
Original Assignee
大同ほくさん株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大同ほくさん株式会社 filed Critical 大同ほくさん株式会社
Priority to JP1989125002U priority Critical patent/JP2526852Y2/ja
Publication of JPH0363571U publication Critical patent/JPH0363571U/ja
Application granted granted Critical
Publication of JP2526852Y2 publication Critical patent/JP2526852Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1989125002U 1989-10-25 1989-10-25 酸化物超伝導薄膜の気相成長装置 Expired - Fee Related JP2526852Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989125002U JP2526852Y2 (ja) 1989-10-25 1989-10-25 酸化物超伝導薄膜の気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989125002U JP2526852Y2 (ja) 1989-10-25 1989-10-25 酸化物超伝導薄膜の気相成長装置

Publications (2)

Publication Number Publication Date
JPH0363571U JPH0363571U (enExample) 1991-06-20
JP2526852Y2 true JP2526852Y2 (ja) 1997-02-26

Family

ID=31672891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989125002U Expired - Fee Related JP2526852Y2 (ja) 1989-10-25 1989-10-25 酸化物超伝導薄膜の気相成長装置

Country Status (1)

Country Link
JP (1) JP2526852Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101231205B1 (ko) * 2011-08-01 2013-02-07 (주)용진일렉콤 광케이블용 컨넥터 어셈블리

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63307277A (ja) * 1987-06-05 1988-12-14 Kawasaki Steel Corp 金属酸化物薄膜作製用の光ｍｏｃｖｄ装置
JP2721888B2 (ja) * 1987-10-01 1998-03-04 アネルバ株式会社 減圧気相成長装置

Also Published As

Publication number Publication date
JPH0363571U (enExample) 1991-06-20

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