JP2526475Y2 - 真空チャンバ - Google Patents

真空チャンバ

Info

Publication number
JP2526475Y2
JP2526475Y2 JP1989042310U JP4231089U JP2526475Y2 JP 2526475 Y2 JP2526475 Y2 JP 2526475Y2 JP 1989042310 U JP1989042310 U JP 1989042310U JP 4231089 U JP4231089 U JP 4231089U JP 2526475 Y2 JP2526475 Y2 JP 2526475Y2
Authority
JP
Japan
Prior art keywords
door
hinge
fulcrum shaft
vacuum chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989042310U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02134178U (en, 2012
Inventor
光男 内藤
Original Assignee
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー電子工業株式会社 filed Critical セイコー電子工業株式会社
Priority to JP1989042310U priority Critical patent/JP2526475Y2/ja
Publication of JPH02134178U publication Critical patent/JPH02134178U/ja
Application granted granted Critical
Publication of JP2526475Y2 publication Critical patent/JP2526475Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Hinges (AREA)
  • Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
JP1989042310U 1989-04-11 1989-04-11 真空チャンバ Expired - Lifetime JP2526475Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989042310U JP2526475Y2 (ja) 1989-04-11 1989-04-11 真空チャンバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989042310U JP2526475Y2 (ja) 1989-04-11 1989-04-11 真空チャンバ

Publications (2)

Publication Number Publication Date
JPH02134178U JPH02134178U (en, 2012) 1990-11-07
JP2526475Y2 true JP2526475Y2 (ja) 1997-02-19

Family

ID=31553745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989042310U Expired - Lifetime JP2526475Y2 (ja) 1989-04-11 1989-04-11 真空チャンバ

Country Status (1)

Country Link
JP (1) JP2526475Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014190357A (ja) * 2013-03-26 2014-10-06 Udono Iki:Kk 圧力容器の扉開閉機構

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159961U (en, 2012) * 1984-09-26 1986-04-22
JPH0212610U (en, 2012) * 1988-07-08 1990-01-26

Also Published As

Publication number Publication date
JPH02134178U (en, 2012) 1990-11-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term