JP2524692Y2 - 被研磨物保持具 - Google Patents

被研磨物保持具

Info

Publication number
JP2524692Y2
JP2524692Y2 JP9446090U JP9446090U JP2524692Y2 JP 2524692 Y2 JP2524692 Y2 JP 2524692Y2 JP 9446090 U JP9446090 U JP 9446090U JP 9446090 U JP9446090 U JP 9446090U JP 2524692 Y2 JP2524692 Y2 JP 2524692Y2
Authority
JP
Japan
Prior art keywords
polished
template
backing material
holder
recess hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9446090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451358U (enrdf_load_stackoverflow
Inventor
好胤 繁田
Original Assignee
ロデール・ニッタ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロデール・ニッタ株式会社 filed Critical ロデール・ニッタ株式会社
Priority to JP9446090U priority Critical patent/JP2524692Y2/ja
Publication of JPH0451358U publication Critical patent/JPH0451358U/ja
Application granted granted Critical
Publication of JP2524692Y2 publication Critical patent/JP2524692Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP9446090U 1990-09-07 1990-09-07 被研磨物保持具 Expired - Lifetime JP2524692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9446090U JP2524692Y2 (ja) 1990-09-07 1990-09-07 被研磨物保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9446090U JP2524692Y2 (ja) 1990-09-07 1990-09-07 被研磨物保持具

Publications (2)

Publication Number Publication Date
JPH0451358U JPH0451358U (enrdf_load_stackoverflow) 1992-04-30
JP2524692Y2 true JP2524692Y2 (ja) 1997-02-05

Family

ID=31832428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9446090U Expired - Lifetime JP2524692Y2 (ja) 1990-09-07 1990-09-07 被研磨物保持具

Country Status (1)

Country Link
JP (1) JP2524692Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2540674Y2 (ja) * 1992-12-10 1997-07-09 ロデール・ニッタ株式会社 被研磨物保持具
JP4597972B2 (ja) * 2003-03-31 2010-12-15 東京エレクトロン株式会社 処理部材上に隣接するコーティングを接合する方法。
JP2010201534A (ja) * 2009-03-02 2010-09-16 Fujibo Holdings Inc 保持具
TW201505763A (zh) * 2013-05-20 2015-02-16 Success Yk 半導體晶圓保持用治具、半導體晶圓硏磨裝置、及工件保持用治具
CN107457688A (zh) * 2017-10-01 2017-12-12 德清凯晶光电科技有限公司 大基片游星轮

Also Published As

Publication number Publication date
JPH0451358U (enrdf_load_stackoverflow) 1992-04-30

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