JP2524692Y2 - 被研磨物保持具 - Google Patents

被研磨物保持具

Info

Publication number
JP2524692Y2
JP2524692Y2 JP9446090U JP9446090U JP2524692Y2 JP 2524692 Y2 JP2524692 Y2 JP 2524692Y2 JP 9446090 U JP9446090 U JP 9446090U JP 9446090 U JP9446090 U JP 9446090U JP 2524692 Y2 JP2524692 Y2 JP 2524692Y2
Authority
JP
Japan
Prior art keywords
polished
template
backing material
holder
recess hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9446090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451358U (enrdf_load_stackoverflow
Inventor
好胤 繁田
Original Assignee
ロデール・ニッタ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロデール・ニッタ株式会社 filed Critical ロデール・ニッタ株式会社
Priority to JP9446090U priority Critical patent/JP2524692Y2/ja
Publication of JPH0451358U publication Critical patent/JPH0451358U/ja
Application granted granted Critical
Publication of JP2524692Y2 publication Critical patent/JP2524692Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP9446090U 1990-09-07 1990-09-07 被研磨物保持具 Expired - Lifetime JP2524692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9446090U JP2524692Y2 (ja) 1990-09-07 1990-09-07 被研磨物保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9446090U JP2524692Y2 (ja) 1990-09-07 1990-09-07 被研磨物保持具

Publications (2)

Publication Number Publication Date
JPH0451358U JPH0451358U (enrdf_load_stackoverflow) 1992-04-30
JP2524692Y2 true JP2524692Y2 (ja) 1997-02-05

Family

ID=31832428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9446090U Expired - Lifetime JP2524692Y2 (ja) 1990-09-07 1990-09-07 被研磨物保持具

Country Status (1)

Country Link
JP (1) JP2524692Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2540674Y2 (ja) * 1992-12-10 1997-07-09 ロデール・ニッタ株式会社 被研磨物保持具
KR100918528B1 (ko) * 2003-03-31 2009-09-21 도쿄엘렉트론가부시키가이샤 처리부재 상에 인접한 코팅을 결합시키는 방법
JP2010201534A (ja) * 2009-03-02 2010-09-16 Fujibo Holdings Inc 保持具
TW201505763A (zh) * 2013-05-20 2015-02-16 Success Yk 半導體晶圓保持用治具、半導體晶圓硏磨裝置、及工件保持用治具
CN107457688A (zh) * 2017-10-01 2017-12-12 德清凯晶光电科技有限公司 大基片游星轮

Also Published As

Publication number Publication date
JPH0451358U (enrdf_load_stackoverflow) 1992-04-30

Similar Documents

Publication Publication Date Title
JPH0335063B2 (enrdf_load_stackoverflow)
US4918872A (en) Surface grinding apparatus
JP3024373B2 (ja) シート状弾性発泡体及びウェーハ研磨加工用治具
EP1073542B1 (en) Chemical mechanical polishing with multiple polishing pads
JP2524692Y2 (ja) 被研磨物保持具
JP2005294412A (ja) 研磨パッド
JP4273444B2 (ja) 研磨用被加工物保持具及びこれを用いた研磨方法
CN104972387A (zh) 研磨方法和保持器具
JP5275012B2 (ja) 研磨パッド及びその製造方法
JP2004202668A (ja) 研磨クロス
KR102404979B1 (ko) 보유 지지구 및 그 제조 방법
JP2003236743A5 (enrdf_load_stackoverflow)
JP2592394B2 (ja) 被研磨物保持具
JP2000042910A (ja) 研磨用被加工物保持具
JP6004329B2 (ja) 保持具及びその製造方法
JP2540674Y2 (ja) 被研磨物保持具
JP2006142440A (ja) 研磨パッドおよびこれを用いた研磨方法
JP4417755B2 (ja) ２枚一体型研磨パッド
JP2006142439A (ja) 研磨パッドおよびこれを用いた研磨方法
CN111318958A (zh) 玻璃基板的保持用膜体和玻璃基板的研磨方法
JP4710684B2 (ja) 研磨パッドの空気抜き方法
JPS5845861A (ja) 表面加工用ポリシヤ
JP2003115468A (ja) 研摩マット
JPH0731260U (ja) 被研磨体保持具
JP2598221Y2 (ja) 被研磨物保持具

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R323533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term