JP2517936Y2 - フォトマスク又はフォトマスク用基板の収納容器 - Google Patents

フォトマスク又はフォトマスク用基板の収納容器

Info

Publication number
JP2517936Y2
JP2517936Y2 JP1988162858U JP16285888U JP2517936Y2 JP 2517936 Y2 JP2517936 Y2 JP 2517936Y2 JP 1988162858 U JP1988162858 U JP 1988162858U JP 16285888 U JP16285888 U JP 16285888U JP 2517936 Y2 JP2517936 Y2 JP 2517936Y2
Authority
JP
Japan
Prior art keywords
photomask
container
substrate
lid
case body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988162858U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0282042U (enrdf_load_stackoverflow
Inventor
豊 佐藤
豊重 長橋
千裕 田淵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP1988162858U priority Critical patent/JP2517936Y2/ja
Publication of JPH0282042U publication Critical patent/JPH0282042U/ja
Application granted granted Critical
Publication of JP2517936Y2 publication Critical patent/JP2517936Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988162858U 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器 Expired - Lifetime JP2517936Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988162858U JP2517936Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988162858U JP2517936Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器

Publications (2)

Publication Number Publication Date
JPH0282042U JPH0282042U (enrdf_load_stackoverflow) 1990-06-25
JP2517936Y2 true JP2517936Y2 (ja) 1996-11-20

Family

ID=31447069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988162858U Expired - Lifetime JP2517936Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の収納容器

Country Status (1)

Country Link
JP (1) JP2517936Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007091296A (ja) * 2005-09-29 2007-04-12 Hoya Corp マスクブランク収納容器、マスクブランクの収納方法及びマスクブランク収納体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6290381U (enrdf_load_stackoverflow) * 1985-11-26 1987-06-09
JPH056377Y2 (enrdf_load_stackoverflow) * 1986-04-07 1993-02-18

Also Published As

Publication number Publication date
JPH0282042U (enrdf_load_stackoverflow) 1990-06-25

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