JP2510416C - - Google Patents

Info

Publication number

JP2510416C

JP2510416C JP2510416C JP 2510416 C JP2510416 C JP 2510416C JP 2510416 C JP2510416 C JP 2510416C

Authority

JP

Japan

Prior art keywords

dicing

pressure

sensitive adhesive

resin

resin sheet

Prior art date

1997-12-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000000853 adhesive Substances 0.000 claims description 57
• 230000001070 adhesive Effects 0.000 claims description 57
• 239000011347 resin Substances 0.000 claims description 54
• 229920005989 resin Polymers 0.000 claims description 54
• 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 50
• 239000004014 plasticizer Substances 0.000 claims description 21
• 239000004065 semiconductor Substances 0.000 claims description 20
• NIXOWILDQLNWCW-UHFFFAOYSA-M acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 19
• 229920000642 polymer Polymers 0.000 claims description 18
• 229920001577 copolymer Polymers 0.000 claims description 16
• 239000003505 polymerization initiator Substances 0.000 claims description 16
• IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
• 125000005396 acrylic acid ester group Chemical group 0.000 claims description 8
• 239000011261 inert gas Substances 0.000 claims description 8
• 230000001678 irradiating Effects 0.000 claims description 7
• 229920000058 polyacrylate Polymers 0.000 claims description 6
• 229920001225 Polyester resin Polymers 0.000 claims description 5
• 229910052757 nitrogen Inorganic materials 0.000 claims description 5
• 239000004645 polyester resin Substances 0.000 claims description 5
• BZHJMEDXRYGGRV-UHFFFAOYSA-N vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 claims description 4
• 229920000915 polyvinyl chloride Polymers 0.000 claims description 3
• 239000004800 polyvinyl chloride Substances 0.000 claims description 3
• 239000000203 mixture Substances 0.000 description 43
• 235000012431 wafers Nutrition 0.000 description 29
• -1 and if necessary Substances 0.000 description 23
• 239000010410 layer Substances 0.000 description 20
• 238000006116 polymerization reaction Methods 0.000 description 13
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 12
• 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 9
• 239000003112 inhibitor Substances 0.000 description 8
• 230000002401 inhibitory effect Effects 0.000 description 8
• KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 7
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
• 229910052710 silicon Inorganic materials 0.000 description 7
• 239000010703 silicon Substances 0.000 description 7
• 229910001220 stainless steel Inorganic materials 0.000 description 7
• 239000010935 stainless steel Substances 0.000 description 7
• 239000002253 acid Substances 0.000 description 6
• 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
• 150000002148 esters Chemical class 0.000 description 5
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
• 239000003292 glue Substances 0.000 description 5
• LYCAIKOWRPUZTN-UHFFFAOYSA-N glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
• 229920000728 polyester Polymers 0.000 description 5
• 239000004925 Acrylic resin Substances 0.000 description 4
• CXMXRPHRNRROMY-UHFFFAOYSA-N Sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 4
• 238000004132 cross linking Methods 0.000 description 4
• 239000011521 glass Substances 0.000 description 4
• 239000000178 monomer Substances 0.000 description 4
• PPBRXRYQALVLMV-UHFFFAOYSA-N styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
• YXFVVABEGXRONW-UHFFFAOYSA-N toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 4
• 239000000654 additive Substances 0.000 description 3
• 239000011248 coating agent Substances 0.000 description 3
• 238000000576 coating method Methods 0.000 description 3
• 238000001035 drying Methods 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 238000004519 manufacturing process Methods 0.000 description 3
• 238000006068 polycondensation reaction Methods 0.000 description 3
• 239000000758 substrate Substances 0.000 description 3
• 150000003505 terpenes Chemical class 0.000 description 3
• 235000007586 terpenes Nutrition 0.000 description 3
• WERYXYBDKMZEQL-UHFFFAOYSA-N 1,4-Butanediol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
• XXMIOPMDWAUFGU-UHFFFAOYSA-N 1,6-Hexanediol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 2
• WNLRTRBMVRJNCN-UHFFFAOYSA-N Adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
• QUOZWMJFTQUXON-UXXRCYHCSA-N Androsin Natural products COC1=CC(C(C)=O)=CC=C1O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 QUOZWMJFTQUXON-UXXRCYHCSA-N 0.000 description 2
• 229920001634 Copolyester Polymers 0.000 description 2
• 239000004593 Epoxy Substances 0.000 description 2
• 239000004743 Polypropylene Substances 0.000 description 2
• 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 2
• 229940081735 acetylcellulose Drugs 0.000 description 2
• 125000002723 alicyclic group Chemical group 0.000 description 2
• 125000001931 aliphatic group Chemical group 0.000 description 2
• 230000000111 anti-oxidant Effects 0.000 description 2
• 239000003963 antioxidant agent Substances 0.000 description 2
• XKRFYHLGVUSROY-UHFFFAOYSA-N argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• 150000008365 aromatic ketones Chemical class 0.000 description 2
• 125000003118 aryl group Chemical group 0.000 description 2
• QIGBRXMKCJKVMJ-UHFFFAOYSA-N benzohydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
• 239000003086 colorant Substances 0.000 description 2
• 235000014113 dietary fatty acids Nutrition 0.000 description 2
• 238000005516 engineering process Methods 0.000 description 2
• 125000002587 enol group Chemical group 0.000 description 2
• 125000003700 epoxy group Chemical class 0.000 description 2
• 239000000194 fatty acid Substances 0.000 description 2
• 239000000945 filler Substances 0.000 description 2
• 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• CERQOIWHTDAKMF-UHFFFAOYSA-N methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
• 238000002156 mixing Methods 0.000 description 2
• 229920000098 polyolefin Polymers 0.000 description 2
• 229920001155 polypropylene Polymers 0.000 description 2
• DNIAPMSPPWPWGF-UHFFFAOYSA-N propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
• 239000007787 solid Substances 0.000 description 2
• 239000002904 solvent Substances 0.000 description 2
• 229920001187 thermosetting polymer Polymers 0.000 description 2
• FJKVRVFGUXMMAO-UHFFFAOYSA-N (3-methylphenyl) diphenyl phosphate Chemical compound CC1=CC=CC(OP(=O)(OC=2C=CC=CC=2)OC=2C=CC=CC=2)=C1 FJKVRVFGUXMMAO-UHFFFAOYSA-N 0.000 description 1
• LGXVIGDEPROXKC-UHFFFAOYSA-N 1,1-Dichloroethene Chemical compound ClC(Cl)=C LGXVIGDEPROXKC-UHFFFAOYSA-N 0.000 description 1
• MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
• FJMKXRHMJBDWHX-UHFFFAOYSA-L 2-(2-hexadecoxy-2-oxoethyl)-2-hydroxybutanedioate Chemical compound CCCCCCCCCCCCCCCCOC(=O)CC(O)(C([O-])=O)CC([O-])=O FJMKXRHMJBDWHX-UHFFFAOYSA-L 0.000 description 1
• LJKDOMVGKKPJBH-UHFFFAOYSA-L 2-ethylhexyl phosphate Chemical class CCCCC(CC)COP([O-])([O-])=O LJKDOMVGKKPJBH-UHFFFAOYSA-L 0.000 description 1
• WOBHKFSMXKNTIM-UHFFFAOYSA-N 2-hydroxyethyl 2-methylacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
• FDPIMTJIUBPUKL-UHFFFAOYSA-N 3-Pentanone Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 1
• 229920000178 Acrylic resin Polymers 0.000 description 1
• IANQTJSKSUMEQM-UHFFFAOYSA-N Benzofuran Chemical compound C1=CC=C2OC=CC2=C1 IANQTJSKSUMEQM-UHFFFAOYSA-N 0.000 description 1
• RWCCWEUUXYIKHB-UHFFFAOYSA-N Benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
• IRIAEXORFWYRCZ-UHFFFAOYSA-N Benzyl butyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCC1=CC=CC=C1 IRIAEXORFWYRCZ-UHFFFAOYSA-N 0.000 description 1
• BJQHLKABXJIVAM-UHFFFAOYSA-N Bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
• PGIBJVOPLXHHGS-UHFFFAOYSA-N Di-n-decyl phthalate Chemical compound CCCCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCCCC PGIBJVOPLXHHGS-UHFFFAOYSA-N 0.000 description 1
• VJHINFRRDQUWOJ-UHFFFAOYSA-N Dioctyl sebacate Chemical compound CCCCC(CC)COC(=O)CCCCCCCCC(=O)OCC(CC)CCCC VJHINFRRDQUWOJ-UHFFFAOYSA-N 0.000 description 1
• 239000005977 Ethylene Substances 0.000 description 1
• VOZRXNHHFUQHIL-UHFFFAOYSA-N Glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
• LVHBHZANLOWSRM-UHFFFAOYSA-N Itaconic acid Chemical compound OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
• 229920002601 Oligoester Polymers 0.000 description 1
• 239000004825 One-part adhesive Substances 0.000 description 1
• XNGIFLGASWRNHJ-UHFFFAOYSA-N Phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 1
• OXNIZHLAWKMVMX-UHFFFAOYSA-N Picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 1
• 229920001283 Polyalkylene terephthalate Polymers 0.000 description 1
• 239000004952 Polyamide Substances 0.000 description 1
• 239000004698 Polyethylene (PE) Substances 0.000 description 1
• 239000004372 Polyvinyl alcohol Substances 0.000 description 1
• 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
• DAKWPKUUDNSNPN-UHFFFAOYSA-N TMPTA Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
• YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 description 1
• KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 1
• OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
• XZZNDPSIHUTMOC-UHFFFAOYSA-N Triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
• MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
• NBIIXXVUZAFLBC-UHFFFAOYSA-K [O-]P([O-])([O-])=O Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
• 150000007513 acids Chemical class 0.000 description 1
• HRPVXLWXLXDGHG-UHFFFAOYSA-N acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
• 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
• 239000003522 acrylic cement Substances 0.000 description 1
• NLHHRLWOUZZQLW-UHFFFAOYSA-N acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
• 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
• WNLRTRBMVRJNCN-UHFFFAOYSA-L adipate(2-) Chemical compound [O-]C(=O)CCCCC([O-])=O WNLRTRBMVRJNCN-UHFFFAOYSA-L 0.000 description 1
• 239000001361 adipic acid Substances 0.000 description 1
• 235000011037 adipic acid Nutrition 0.000 description 1
• 150000001298 alcohols Chemical class 0.000 description 1
• 125000005250 alkyl acrylate group Chemical group 0.000 description 1
• 150000001408 amides Chemical class 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
• KGQLBLGDIQNGSB-UHFFFAOYSA-N benzene-1,4-diol;methoxymethane Chemical compound COC.OC1=CC=C(O)C=C1 KGQLBLGDIQNGSB-UHFFFAOYSA-N 0.000 description 1
• 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
• 230000005540 biological transmission Effects 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• ZDWGXBPVPXVXMQ-UHFFFAOYSA-N bis(2-ethylhexyl) nonanedioate Chemical compound CCCCC(CC)COC(=O)CCCCCCCC(=O)OCC(CC)CCCC ZDWGXBPVPXVXMQ-UHFFFAOYSA-N 0.000 description 1
• CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
• 125000002843 carboxylic acid group Chemical group 0.000 description 1
• 238000006243 chemical reaction Methods 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 238000005660 chlorination reaction Methods 0.000 description 1
• DHZSIQDUYCWNSB-UHFFFAOYSA-N chloroethene;1,1-dichloroethene Chemical compound ClC=C.ClC(Cl)=C DHZSIQDUYCWNSB-UHFFFAOYSA-N 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 238000004581 coalescence Methods 0.000 description 1
• 239000011247 coating layer Substances 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 150000001875 compounds Chemical class 0.000 description 1
• 239000004020 conductor Substances 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 230000003247 decreasing Effects 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 229920001971 elastomer Polymers 0.000 description 1
• 239000000806 elastomer Substances 0.000 description 1
• 238000006735 epoxidation reaction Methods 0.000 description 1
• VGGSQFUCUMXWEO-UHFFFAOYSA-N ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
• 150000004665 fatty acids Chemical class 0.000 description 1
• 238000005755 formation reaction Methods 0.000 description 1
• 238000009472 formulation Methods 0.000 description 1
• 125000000524 functional group Chemical group 0.000 description 1
• 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 239000001307 helium Substances 0.000 description 1
• 229910052734 helium Inorganic materials 0.000 description 1
• SWQJXJOGLNCZEY-UHFFFAOYSA-N helium(0) Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
• 239000003999 initiator Substances 0.000 description 1
• 238000010030 laminating Methods 0.000 description 1
• 239000000155 melt Substances 0.000 description 1
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
• 229910052753 mercury Inorganic materials 0.000 description 1
• 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
• CERQOIWHTDAKMF-UHFFFAOYSA-M methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
• 230000005012 migration Effects 0.000 description 1
• 239000012046 mixed solvent Substances 0.000 description 1
• CTQNGGLPUBDAKN-UHFFFAOYSA-N o-xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000003973 paint Substances 0.000 description 1
• 239000003208 petroleum Substances 0.000 description 1
• 239000005011 phenolic resin Substances 0.000 description 1
• 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
• 239000010452 phosphate Substances 0.000 description 1
• 239000003504 photosensitizing agent Substances 0.000 description 1
• 229940114148 picric acid Drugs 0.000 description 1
• 238000005498 polishing Methods 0.000 description 1
• 229920002647 polyamide Polymers 0.000 description 1
• 239000011528 polyamide (building material) Substances 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000573 polyethylene Polymers 0.000 description 1
• 229920000139 polyethylene terephthalate Polymers 0.000 description 1
• 239000005020 polyethylene terephthalate Substances 0.000 description 1
• 239000002952 polymeric resin Substances 0.000 description 1
• 229920002451 polyvinyl alcohol Polymers 0.000 description 1
• 239000005033 polyvinylidene chloride Substances 0.000 description 1
• 238000003825 pressing Methods 0.000 description 1
• 239000011342 resin composition Substances 0.000 description 1
• 150000003839 salts Chemical class 0.000 description 1
• 231100000489 sensitizer Toxicity 0.000 description 1
• 239000011780 sodium chloride Substances 0.000 description 1
• 235000012424 soybean oil Nutrition 0.000 description 1
• 239000003549 soybean oil Substances 0.000 description 1
• 239000003381 stabilizer Substances 0.000 description 1
• 239000000057 synthetic resin Substances 0.000 description 1
• 229920003002 synthetic resin Polymers 0.000 description 1
• 229950002929 trinitrophenol Drugs 0.000 description 1
• WVPGXJOLGGFBCR-UHFFFAOYSA-N trioctyl phosphate Chemical compound CCCCCCCCOP(=O)(OCCCCCCCC)OCCCCCCCC WVPGXJOLGGFBCR-UHFFFAOYSA-N 0.000 description 1
• XTXRWKRVRITETP-UHFFFAOYSA-N vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
• 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
• 229910052724 xenon Inorganic materials 0.000 description 1
• FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon(0) Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
• 239000008096 xylene Substances 0.000 description 1