JP2508271Y2 - ウエハ―キャリア - Google Patents

ウエハ―キャリア

Info

Publication number
JP2508271Y2
JP2508271Y2 JP11463990U JP11463990U JP2508271Y2 JP 2508271 Y2 JP2508271 Y2 JP 2508271Y2 JP 11463990 U JP11463990 U JP 11463990U JP 11463990 U JP11463990 U JP 11463990U JP 2508271 Y2 JP2508271 Y2 JP 2508271Y2
Authority
JP
Japan
Prior art keywords
wafer
wafer carrier
teflon
groove
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11463990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0470750U (enrdf_load_stackoverflow
Inventor
徹 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11463990U priority Critical patent/JP2508271Y2/ja
Publication of JPH0470750U publication Critical patent/JPH0470750U/ja
Application granted granted Critical
Publication of JP2508271Y2 publication Critical patent/JP2508271Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
JP11463990U 1990-10-30 1990-10-30 ウエハ―キャリア Expired - Lifetime JP2508271Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11463990U JP2508271Y2 (ja) 1990-10-30 1990-10-30 ウエハ―キャリア

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11463990U JP2508271Y2 (ja) 1990-10-30 1990-10-30 ウエハ―キャリア

Publications (2)

Publication Number Publication Date
JPH0470750U JPH0470750U (enrdf_load_stackoverflow) 1992-06-23
JP2508271Y2 true JP2508271Y2 (ja) 1996-08-21

Family

ID=31862346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11463990U Expired - Lifetime JP2508271Y2 (ja) 1990-10-30 1990-10-30 ウエハ―キャリア

Country Status (1)

Country Link
JP (1) JP2508271Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0470750U (enrdf_load_stackoverflow) 1992-06-23

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