JP2507648Y2 - 半導体圧力センサ装置 - Google Patents
半導体圧力センサ装置Info
- Publication number
- JP2507648Y2 JP2507648Y2 JP1990108268U JP10826890U JP2507648Y2 JP 2507648 Y2 JP2507648 Y2 JP 2507648Y2 JP 1990108268 U JP1990108268 U JP 1990108268U JP 10826890 U JP10826890 U JP 10826890U JP 2507648 Y2 JP2507648 Y2 JP 2507648Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- substrate
- casing
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990108268U JP2507648Y2 (ja) | 1990-10-15 | 1990-10-15 | 半導体圧力センサ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990108268U JP2507648Y2 (ja) | 1990-10-15 | 1990-10-15 | 半導体圧力センサ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0464741U JPH0464741U (US06521211-20030218-C00004.png) | 1992-06-03 |
JP2507648Y2 true JP2507648Y2 (ja) | 1996-08-14 |
Family
ID=31855174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990108268U Expired - Lifetime JP2507648Y2 (ja) | 1990-10-15 | 1990-10-15 | 半導体圧力センサ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2507648Y2 (US06521211-20030218-C00004.png) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0628664Y2 (ja) * | 1987-05-09 | 1994-08-03 | 三菱電機株式会社 | 半導体圧力検出装置 |
-
1990
- 1990-10-15 JP JP1990108268U patent/JP2507648Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0464741U (US06521211-20030218-C00004.png) | 1992-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |