JP2506919B2 - Development device - Google Patents

Description

The present invention relates to an improvement of a developing device for developing a substrate having a photosensitive portion.

[Prior Art] Generally, a developing process of a semiconductor, a liquid crystal display device or the like is performed as follows. That is, the developing solution is sprayed on the substrate having the photosensitive portion exposed by the predetermined pattern, and the developing treatment (fixing of the developing solution) is uniformly performed on the surface of the substrate for a certain time. Then, after the developing solution is removed from the surface of the substrate, the developing solution adhering to the surface of the substrate is further washed away by the cleaning solution. In such a developing process, conventionally, the following developing devices have been used.

That is, as shown in FIG. 4 and FIG.
Is a processing tank 6 for spreading the developing solution 4 on the substrate 2, the substrate 2
Is sequentially provided with a buffer tank 7 for fixing the developing solution 4 and a water washing tank 8 for washing the substrate 2 by an arbitrary means. Each of the tanks is provided with two parallel chlorides provided vertically to the floor. It is pierced by a support plate 9 formed of a vinyl plate. A transport roller 3 having a flange 3a for guiding the substrate is rotatably arranged on the support plate 9. A tank 16 filled with the developing solution 4 is disposed below the development processing tank 6.

The development processing tank 6 is provided with a floor 6a below the transport roller 3 and having a downward inclination from both sides toward the center. A pipe 13b connected to the tank 16 is vertically connected downward from the deepest part of the floor 6a. Further, nozzles 5 for ejecting the developing solution 4 onto the substrate 2 are arranged at equal intervals above the transport roller 3 in the developing treatment tank 6 along the transport direction of the transport roller 3. The nozzle 5 is connected to a pipe 13a extending from the tank 16. That is, the pipe 13a is the conveyance roller 3
And a valve installed below the floor 6a of the development tank 6.
It is connected to the tank 16 via 14 and the pump 15.

As shown in FIG. 5, notches 9b are formed in the upper edge portion of the support plate 9 at equal intervals in the carrying direction, and bearings 9a are provided in the notches 9b. Both ends of the transport roller 3 are rotatably engaged with the bearing 9a. It should be noted that one end (right side in FIG. 5) of the shaft of the transport roller 3 penetrates the bearing 9a and projects to the outside of the support plate 9, and the projection roller rotates in the same direction as the transport roller 3. Bevel gear 10
Has been fixed. The bevel gear 10 is meshed with a bevel gear 11 that rotates in the orthogonal direction with the conveying roller 3. The bevel gear 11 is fixed to a drive shaft 12 arranged in parallel and close to the support plate 9, and is driven by a drive device (not shown). As described above, the transport rollers 3 are installed at right angles to the support plate 9 via the bearings 9a and at equal intervals in the transport direction.
The transport rollers 3 are provided sufficiently close to each other so that the substrate 2 does not drop into the gap between the transport rollers 3.

As described above, in the conventional developing device 1, the conveying roller 3, the support plate 9, and the like constitute a conveying system, and the nozzle 5, the pipe 13, the valve 14, the pump 15, the tank 16, and the like constitute a developer collecting and supplying system. And has the following actions. That is, first, the developing solution 4 is sprayed onto the substrate 2 by the nozzles 5 in the developing treatment tank 6 on the substrate 2 transported into the apparatus by the transporting roller 3. This time,
The developer 4 other than that attached to the substrate 2 flows to the deepest part due to the inclination formed in the floor 6 a of the development processing tank 6 and is collected in the tank 16. Next, the developed substrate 2 is conveyed to the buffer tank 7 and fixed. Then, the substrate 2 is conveyed to the water washing tank 8 and the excess of the developing solution 4 is washed away, and the developing process is completed.

[Problems to be Solved by the Invention] However, the above-described conventional techniques have the following problems.

That is, when the substrate 2 sprayed with the developing solution 4 in the development processing tank 6 is transferred to the buffer tank 7, a large amount of the developing solution 4 is transferred onto the substrate 2 while being transferred. Therefore, when a large amount of the developing process is performed, the carry-out of the developing solution 4 into the buffer tank 7 increases in proportion to the amount of the developing process, so that the total consumption amount of the developing solution 4 itself significantly increases. Was invited. Moreover, in the buffer tank 7, if a large amount of the developing solution 4 remains attached on the substrate 2 in excess of the required developing solution amount, overdevelopment is likely to occur, resulting in uneven development.

On the other hand, even when the substrate 2 is washed in the washing tank 8,
When the proper amount or more of the developing solution 4 is attached to the substrate 2, a large amount of the cleaning solution is required accordingly. Moreover, as the cleaning liquid, expensive pure water is often used so as not to destroy the development pattern of the substrate 2, resulting in high cost.

INDUSTRIAL APPLICABILITY The present invention prevents the developer from being taken out of the development processing tank, which wastes the developer and the cleaning solution as described above, and is economically advantageous. It is an object of the present invention to provide a developing device having high cost.

[Means for Solving the Problems] In order to solve the problems of the prior art as described above, the developing device of the present invention conveys a substrate on the surface of which a photosensitive portion is formed, and a developing solution is applied to the substrate. In a developing device for spraying, fixing and washing with water, a plurality of transport rollers for transporting a substrate on which a developing solution is sprayed in the same direction, and a substrate supporting means arranged vertically movable between the transport rollers, Inclination means for inclining the support means above the transport roller so that one end portion side of the transport roller is positioned below is provided.

[Operation] The operation of the present invention having the above configuration is as follows.

That is, the substrate on which the developing solution has been sprayed is transported horizontally above the support means by the transport roller. Then, by the tilting means, the supporting means holds the substrate and moves upward from between the transport rollers, and the one end side of the transport rollers is tilted so as to be positioned downward. This time,
The substrate on the supporting means is tilted above the transport roller, and the excess developer adhering to the substrate flows down. After that, the supporting plate is moved downward and returned to the horizontal state by the inclining means. Along with this, the substrate is returned onto the transport roller and is transported again in the horizontal state.

[Embodiment] An embodiment of the present invention as described above will be specifically described with reference to FIGS. 1 to 3. The same members as those in the conventional example are designated by the same reference numerals, and the description thereof will be omitted.

* Structure of Embodiment * In the developing device 17 of this embodiment, as shown in FIG. 2, in the buffer tank 7, the substrate supporting means X and its inclining means Y are arranged below the space between the transport rollers 3. , A pipe 13c connected to the tank 16 on the floor of the buffer tank 7.
Is arranged.

The substrate supporting means X is provided inside the supporting plate 9 and has a holding frame on which a shaft 18 parallel to the conveying roller 3 is fixed.
200, and a rectangular parallelepiped holding member 19 that is supported by being penetrated by the shaft 18 inside the holding frame 200.

As shown in FIG. 2, the holding frame 200 is composed of left and right side plates 20 parallel to the support plate 9 and one bottom plate 21 to which the lower parts of all the side plates 20 are connected and fixed. The side surfaces of the left and right side plates 20 are comb-shaped so that they are inserted below the three gaps between the four conveying rollers 3 as shown in FIG. Both ends of the shaft 18 are fixed. The holding member 19 is arranged on the upper side of the side plate 20 and on the side of the conveying roller 3 (hereinafter referred to as the inner side), and the lower portion thereof is penetrated by the shaft 18 so as to be slidable in the axial direction of the conveying roller 3. This holding member 19
A roller 19a having an axis orthogonal to the axis of the transport roller 3 and rotatable in the horizontal direction is provided on the upper end surface of the, and the inner side surface of the roller 19a has an axis parallel to the transport roller 3. Three
A roller 19b is provided which is rotatable in the same direction as. The roller 19a is located above the transport roller 3, and the roller 19b is located substantially at the same level as the transport roller 3. The difference between the high positions of the rollers 19a and 19b is set to be thicker than the thickness of the substrate 2.

The tilting means Y is a link mechanism A for tilting the pair of front and rear brackets 22 fixed to the lower surface of the bottom plate 21 of the holding frame 200, and the bracket 22 and the substrate holding portion X in FIG. And a cylinder 28 connected to the link mechanism A via the support plate 9.

Two brackets 22 are provided on the lower surface of the bottom plate 21 near the one support plate 9 (on the right side in FIG. 2), front and rear.
That is, the brackets 22 are arranged parallel to each other in the axial direction of the transport roller 3, and the length of the bracket 22 in the axial direction of the transport roller 3 is set to about half of the bottom plate 21. The shafts 22a and 22b supported by the two brackets 22 are attached to both ends of each bracket 22. The upper ends of the long link 23a and the short link 23b are connected to the shafts 22a and 22b. This long link 23a, short link 23b
The lower end of the locking piece 24 is located on the floor F of the buffer tank 7.
It is rotatably attached to a and 24b. Further, one end of the intermediate link 23c is rotatably connected to the intermediate portion of the long link 23a.

Cylinder 28 has expandable rod 26 and bracket
It is arranged on the side opposite to the link mechanism A with respect to the support plate 9 near the 22 side. The rod 26 is connected to the short link via a bearing 27 attached to a lower portion of the support plate 9 (right side in FIG. 2).
It is rotatably connected to the intermediate portion of 23b. The tip side of the rod 26 penetrates and is supported by a fixing piece 25 arranged on the floor F of the buffer tank 7, and is rotatably attached to the tip intermediate link 23c thereof.

As shown in FIG. 1, a sensor 29 capable of detecting the substrate 2 is provided above the conveying rollers 3 on both side wall portions 7a of the buffer tank 7, and the sensor 29 is a cylinder.
It is electrically connected to 28. The pipe 13c provided on the floor of the buffer tank 7 is set so as to be located below the bracket 22 in this embodiment.

* Operation of Embodiment * The operation of the present embodiment having the above-described configuration will be described with reference to FIG.

That is, when the substrate 2 horizontally fed into the buffer tank 7 by the transport roller 3 is positioned between the sensors, the sensor
29 is actuated, cylinder 28 is activated and rod 26 is linked.
It extends in the 23 direction and the intermediate link 23c is pressed to the left in the figure. At this time, the rod 26 connects the connecting portion with the short link 23b,
The intermediate link 23c is moved so as to raise the connecting portion with the long link 23a. Therefore, long link 23a and short link 2
3b is rotated leftward in the figure with the locking pieces 24a, 24b as fulcrums. The trajectories drawn by the shafts 22a and 22b by driving the rod 26 are arcs with the lengths of the long link 23a and the short link 23b as radii, so when the rod 26 is driven, the shaft 22a is higher than 22b. Be moved to. Therefore, short link 23b
The outer end of the bracket 22 engaged by is slightly raised,
The inner end portion of the bracket 22 with which the long link 23a engages greatly moves up. Along with this, the shaft 18 and the holding member 19 integrated with the holding frame 200 are tilted downward with the side where the bracket 22 is attached, and the substrate 2 is also tilted. At this time, the substrate 2 is held by the roller 19a provided on the upper end surface of the holding member 19. Then, the developing solution 4 attached on the substrate 2 flows down to the right side in the drawing,
It is collected in the tank 16 through the pipe 13a. Then, after a lapse of a certain time, the cylinder 28 is driven, the rod 26 is contracted, and the link 23 is moved to the original position so as to be folded. Along with this, the substrate is returned onto the transport roller and is transported again in the horizontal state.

* Effects of the embodiment * Since the tilting device for the substrate 2 in this embodiment is configured by connecting the three link pieces as described above, the bracket 22 with which the link 23 engages is less likely to shake and is stable. The substrate 2 can be tilted with a feeling. Further, by installing two brackets 22 on the lower surface of the bottom plate 21, the board 2 can be more stably tilted.

Further, since the substrate 2 is held by the roller 19a provided on the upper end surface of the holding member 19 when the substrate 2 is inclined, it does not slide down together with the developer 4. Moreover, when the substrate 2 is tilted, the edge portion on the lower side also rises above the transport roller 3, so that the developer 4 does not splash on the end portion of the transport roller 3 and the developer 4 transports the developer 4. It is also possible to prevent idling of the transport roller 3 caused by the adhesion to the roller 3 and the reduction of its friction coefficient.

Further, since the transport roller 3 is provided in a horizontal state without tilting, the substrate 2 is basically transported in a horizontal state,
Excessive developer 4 is dropped from the substrate 2 by being tilted by a tilting device provided in the buffer tank 7, and the developer 4 is collected and is supplied to a circulating developer supply system in the development processing tank 6. Will be returned. Therefore, since development processing is performed while the substrate 2 is in the horizontal state, uneven development is prevented, and more expensive developer can be effectively collected. Further, along with this, the amount of the developer adhering to the substrate 2 conveyed to the water washing tank 8 decreases, so that cleaning water, which is valuable pure water, can be saved when cleaning the substrate. Is also excellent.

As described above, in the developing device 1 of the present embodiment, the substrate 2 being conveyed is held above, and the developing solution is cut off from the surface thereof at the same time. Therefore, space saving of the buffer tank 7 and the washing tank 8 and cleaning are performed. The time can be shortened. Further, in the present embodiment, the substrate supporting means X, the tilting means Y and the like are arranged in the buffer tank 7, but they may be arranged in the developing processing tank 6. In this case, it goes without saying that the developing device 1 is further miniaturized.

[Advantages of the Invention] As described above, in the developing device of the present invention, the supporting means for the substrate, which is vertically movable between the transport rollers, is located above the transport roller by the tilting means and is located at one end side of the transport roller. Is tilted to position
It becomes possible to recover the excess developer from the substrate on which the developer has already been sprayed in a horizontal state so that processing unevenness does not occur. Accordingly, a reliable and economically advantageous developing device is provided, which prevents the developer from being taken out of the development processing tank, which causes waste of the developing solution and the cleaning solution, while performing appropriate development processing without processing unevenness. can do.

[Brief description of drawings]

FIG. 1 is a side view of an essential part of the present embodiment, FIG. 2 is a front view of an essential part of the present embodiment, FIG. 3 is a side view of the present embodiment, FIG. 4 is a side view of a conventional example, and FIG. [Fig. 4] is a front view of a conventional example. 1 ... Developing device, 2 ... Substrate, 3 ... Conveying roller, 4 ...
... Developer, 5 ... Nozzle, 6 ... Development processing tank, 7 ... Buffer tank, 8 ... Washing tank, 9 ... Support plate, 10 ... Bevel gear, 11 ... Bevel gear, 12 ... Drive shaft, 13 ... pipe, 14 ... valve, 15 ... pump, 16 ... tank, 17 ...
… Developing device, 18 …… Shaft, 19 …… Holding member, 20 ……
Side plate, 21 …… bottom plate, 22 …… bracket, 23 …… link,
24 …… Locking piece, 25 …… Fixing piece, 26 …… Rod, 27 …… Bearing, 28 …… Cylinder, 29 …… Sensor.

Claims (1)

(57) [Claims] 1. A substrate on which a photosensitive portion is formed is conveyed on a surface,
In a developing device for spraying, fixing and washing a developing solution on this substrate, a plurality of transport rollers for transporting the substrate sprayed with the developing solution in the same direction and a vertically movable arrangement between the transport rollers And a tilting means for tilting the supporting means so as to position one end side of the carrying roller downward above the carrying roller. .