JP2505200Y2 - 基板リ―ク試験用治具 - Google Patents

基板リ―ク試験用治具

Info

Publication number
JP2505200Y2
JP2505200Y2 JP1990111622U JP11162290U JP2505200Y2 JP 2505200 Y2 JP2505200 Y2 JP 2505200Y2 JP 1990111622 U JP1990111622 U JP 1990111622U JP 11162290 U JP11162290 U JP 11162290U JP 2505200 Y2 JP2505200 Y2 JP 2505200Y2
Authority
JP
Japan
Prior art keywords
substrate
jig
flange
vacuum
leak test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990111622U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0468550U (online.php
Inventor
努 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1990111622U priority Critical patent/JP2505200Y2/ja
Publication of JPH0468550U publication Critical patent/JPH0468550U/ja
Application granted granted Critical
Publication of JP2505200Y2 publication Critical patent/JP2505200Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP1990111622U 1990-10-26 1990-10-26 基板リ―ク試験用治具 Expired - Lifetime JP2505200Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990111622U JP2505200Y2 (ja) 1990-10-26 1990-10-26 基板リ―ク試験用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990111622U JP2505200Y2 (ja) 1990-10-26 1990-10-26 基板リ―ク試験用治具

Publications (2)

Publication Number Publication Date
JPH0468550U JPH0468550U (online.php) 1992-06-17
JP2505200Y2 true JP2505200Y2 (ja) 1996-07-24

Family

ID=31859090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990111622U Expired - Lifetime JP2505200Y2 (ja) 1990-10-26 1990-10-26 基板リ―ク試験用治具

Country Status (1)

Country Link
JP (1) JP2505200Y2 (online.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101380429B1 (ko) * 2012-12-17 2014-04-01 한국항공우주연구원 포트플레이트 기밀시험용 치구 및 포트플레이트 기밀시험방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101380429B1 (ko) * 2012-12-17 2014-04-01 한국항공우주연구원 포트플레이트 기밀시험용 치구 및 포트플레이트 기밀시험방법

Also Published As

Publication number Publication date
JPH0468550U (online.php) 1992-06-17

Similar Documents

Publication Publication Date Title
US5842690A (en) Semiconductor wafer anchoring device
JPH03149861A (ja) マルチチップモジュールの冷却構造
WO2019205339A1 (zh) 下电极及干蚀刻机
JPH07201429A (ja) 電気部品の接続器
JP2002347115A (ja) ラミネート装置におけるダイヤフラムの取付方法とこの方法を用いたラミネート装置
JP3179365B2 (ja) 圧力検査用シール装置
JP2915398B2 (ja) ヘッドスタック試験機にヘッドスタック装置を位置決めし固定するための装置
CN117227148A (zh) 利用气体充压以抑制载板翘曲的排气治具装置及方法
JPH0312333Y2 (online.php)
JPH06130122A (ja) バーンイン試験治具
KR100871039B1 (ko) 표시 패널 밀봉 부착용 클립
JPS6236639B2 (online.php)
JPS63224378A (ja) レ−ザ用ミラ−保持機構
JP3300126B2 (ja) 基板の固定機構
JPH0430487Y2 (online.php)
JPS61248450A (ja) 半導体デバイスのパツケ−ジ封止構造
JPH11230354A (ja) 真空シールの組立方法及び真空シールを有する真空装置
JPH0745874Y2 (ja) 材料試験機
JPH1039319A (ja) ギャップ出し治具
JP2586154Y2 (ja) 圧着装置
JPH0468550U (online.php)
JPH0449813Y2 (online.php)
HU199632B (en) Holding frame to working masks for contact copiers
JP2544014Y2 (ja) 恒温槽
CN118352332A (zh) 一种co2数字传感器集成电路的封装结构及其制造方法