JP2504666Y2 - 制動型水晶光偏向器 - Google Patents

制動型水晶光偏向器

Info

Publication number
JP2504666Y2
JP2504666Y2 JP14635489U JP14635489U JP2504666Y2 JP 2504666 Y2 JP2504666 Y2 JP 2504666Y2 JP 14635489 U JP14635489 U JP 14635489U JP 14635489 U JP14635489 U JP 14635489U JP 2504666 Y2 JP2504666 Y2 JP 2504666Y2
Authority
JP
Japan
Prior art keywords
light deflector
crystal light
type crystal
deflector
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14635489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0384805U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
尚樹 杉山
大輔 山崎
敏嗣 植田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP14635489U priority Critical patent/JP2504666Y2/ja
Publication of JPH0384805U publication Critical patent/JPH0384805U/ja
Application granted granted Critical
Publication of JP2504666Y2 publication Critical patent/JP2504666Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
JP14635489U 1989-12-19 1989-12-19 制動型水晶光偏向器 Expired - Lifetime JP2504666Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14635489U JP2504666Y2 (ja) 1989-12-19 1989-12-19 制動型水晶光偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14635489U JP2504666Y2 (ja) 1989-12-19 1989-12-19 制動型水晶光偏向器

Publications (2)

Publication Number Publication Date
JPH0384805U JPH0384805U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-28
JP2504666Y2 true JP2504666Y2 (ja) 1996-07-10

Family

ID=31692948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14635489U Expired - Lifetime JP2504666Y2 (ja) 1989-12-19 1989-12-19 制動型水晶光偏向器

Country Status (1)

Country Link
JP (1) JP2504666Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6587603B2 (ja) * 2016-12-27 2019-10-09 三菱電機株式会社 ガルバノスキャナ及びレーザ加工装置

Also Published As

Publication number Publication date
JPH0384805U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-28

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