JP2504256Y2 - 処理槽 - Google Patents

処理槽

Info

Publication number
JP2504256Y2
JP2504256Y2 JP1990067925U JP6792590U JP2504256Y2 JP 2504256 Y2 JP2504256 Y2 JP 2504256Y2 JP 1990067925 U JP1990067925 U JP 1990067925U JP 6792590 U JP6792590 U JP 6792590U JP 2504256 Y2 JP2504256 Y2 JP 2504256Y2
Authority
JP
Japan
Prior art keywords
wafer
tank
inner tank
processing
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990067925U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429666U (enrdf_load_stackoverflow
Inventor
尚補 高尾
正典 後藤
悟 上山
克己 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Toppan Inc
Original Assignee
Ebara Corp
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Toppan Inc filed Critical Ebara Corp
Priority to JP1990067925U priority Critical patent/JP2504256Y2/ja
Publication of JPH0429666U publication Critical patent/JPH0429666U/ja
Application granted granted Critical
Publication of JP2504256Y2 publication Critical patent/JP2504256Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1990067925U 1990-06-28 1990-06-28 処理槽 Expired - Lifetime JP2504256Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990067925U JP2504256Y2 (ja) 1990-06-28 1990-06-28 処理槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990067925U JP2504256Y2 (ja) 1990-06-28 1990-06-28 処理槽

Publications (2)

Publication Number Publication Date
JPH0429666U JPH0429666U (enrdf_load_stackoverflow) 1992-03-10
JP2504256Y2 true JP2504256Y2 (ja) 1996-07-10

Family

ID=31601938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990067925U Expired - Lifetime JP2504256Y2 (ja) 1990-06-28 1990-06-28 処理槽

Country Status (1)

Country Link
JP (1) JP2504256Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514908A (ja) * 1974-07-01 1976-01-16 Mitsubishi Electric Corp Waiyaresujohodentatsusochi

Also Published As

Publication number Publication date
JPH0429666U (enrdf_load_stackoverflow) 1992-03-10

Similar Documents

Publication Publication Date Title
US4017343A (en) Method of and apparatus for etching
EP0560208B1 (en) Method and apparatus for cleaning metal articles and apparatus for rinsing metal articles
KR940017973A (ko) 기판 건조장치 및 기판 건조방법
JP2504256Y2 (ja) 処理槽
CA2076554A1 (en) Method and apparatus for rinsing metal strip
JP2627865B2 (ja) 輪転印刷機のインク供給及び洗浄装置
US5564338A (en) Device for washing inking elements of a rotary printing machine
KR101295793B1 (ko) 이소프로필 알코올 용액 공급 장치 및 방법
JPS5851828B2 (ja) グラビアシリンダ−センジヨウソウチ
GB2297026A (en) Printer washing system
KR100311453B1 (ko) 금속판 도금장치
KR20030044692A (ko) 산세척설비의 롤 클리닝장치
US5845839A (en) Method and apparatus for dip solder processing
JPH0650982Y2 (ja) 浸漬型基板処理装置
US5682676A (en) Method for surface treatment of work having plural cylinders with different axial alignments
KR20010040938A (ko) 기판 처리장치
KR101816245B1 (ko) 선박용 스틸메쉬필터의 용접부 마감처리를 위한 에폭시 인사이드 디스펜서
KR100585091B1 (ko) 펌프 이상을 예측할 수 있는 웨이퍼 세정 장치 및 방법
KR200177330Y1 (ko) 반도체 웨이퍼 세정장치(apparatus for cleansing semiconductor wafer)
JPH0657473U (ja) 移動式洗浄装置
JP2582164Y2 (ja) 放電加工機の熱変形防止装置
JPH0359160B2 (enrdf_load_stackoverflow)
RU1757432C (ru) Линия для металлизации печатных плат
KR100558539B1 (ko) 식각조 커버 클리닝 툴
JPS6018433Y2 (ja) シリンダ内面の電気メツキ装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term