JP2503480B2 - Integrated circuit cooling structure - Google Patents

Integrated circuit cooling structure

Info

Publication number
JP2503480B2
JP2503480B2 JP62024311A JP2431187A JP2503480B2 JP 2503480 B2 JP2503480 B2 JP 2503480B2 JP 62024311 A JP62024311 A JP 62024311A JP 2431187 A JP2431187 A JP 2431187A JP 2503480 B2 JP2503480 B2 JP 2503480B2
Authority
JP
Japan
Prior art keywords
integrated circuit
cooling
cooling structure
refrigerant
integrated circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62024311A
Other languages
Japanese (ja)
Other versions
JPS63192255A (en
Inventor
隆志 萩原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62024311A priority Critical patent/JP2503480B2/en
Publication of JPS63192255A publication Critical patent/JPS63192255A/en
Application granted granted Critical
Publication of JP2503480B2 publication Critical patent/JP2503480B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は集積回路の冷却構造に関し、特に、コンピュ
ータ本体のメモリ装置の様に比較的低発熱量の集積回路
を大量に搭載した装置の冷却構造に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling structure for an integrated circuit, and more particularly to cooling a device such as a memory device of a computer main body in which a large number of integrated circuits having a relatively low heat generation amount are mounted. Regarding the structure.

[従来の技術] 一般に、電子機器装置の一部を構成するメモリ装置に
使用されるパッケージには、CMOS RAM等のメモリ系とそ
の制御系から成る複数種類の集積回路が多数搭載されて
いる。近年に於けるこれらの集積回路そのものの集積度
の向上と、パッケージの大型化及び一パッケージ当りの
搭載素子数の増大は集積回路の実装密度を飛躍的に向上
させた。しかし、その反面、集積回路の増大した総発熱
量に対する、より高性能かつ高効率的な冷却技術の開発
競争に拍車をかけている。
[Prior Art] In general, a package used for a memory device that constitutes a part of an electronic device includes a plurality of types of integrated circuits including a memory system such as a CMOS RAM and its control system. The recent increase in the degree of integration of these integrated circuits, the increase in the size of the package, and the increase in the number of mounted elements per package have dramatically improved the packaging density of the integrated circuits. On the other hand, however, it is accelerating the competition to develop higher-performance and highly-efficient cooling technology against the increased total heat generation of integrated circuits.

冷却技術開発の流れは、自然空冷、強制空冷、空気流
路に冷媒を介在させる間接水冷、水冷方式、浸漬方式と
進んできた。尚、後者になる程、価格面で不利である
が、高い冷却能力が得られる。
The development of cooling technology has progressed to natural air cooling, forced air cooling, indirect water cooling with a refrigerant intervening in the air flow path, water cooling method, and immersion method. It should be noted that the latter becomes more disadvantageous in terms of price, but a higher cooling capacity can be obtained.

前述したメモリ装置に於いては、特に大型機の分野で
は、制御系の集積回路の発熱量はもはや強制空冷の限界
を越えている。この為、集積回路の発熱面を冷媒流路を
有する冷却板に熱的に結合させる伝導冷却方式に代表さ
れる水冷方式の採用が活発である。
In the memory device described above, especially in the field of large machines, the heat generation amount of the integrated circuit of the control system has already exceeded the limit of forced air cooling. For this reason, the water cooling method represented by the conduction cooling method in which the heat generating surface of the integrated circuit is thermally coupled to the cooling plate having the coolant channel is actively used.

[解決すべき問題点] 上述した従来の水冷方式は、外部に冷水供給装置を必
要とするものの、強制空冷に於けるようなファンや、空
気取入口及び吐出口等の空気流路を確保する必要がない
為、実装形態の自由度が大きい。また、騒音規制を気に
する必要もない。
[Problems to be Solved] Although the above-described conventional water cooling system requires an external chilled water supply device, a fan for forced air cooling and an air flow path such as an air intake port and a discharge port are secured. Since there is no need, the degree of freedom of mounting is high. Also, there is no need to worry about noise regulation.

一方、個々の発熱量が低く、一パッケージ当りの搭載
数が多いメモリ系の集積回路の冷却方式は、強制空冷が
効率面で最も適している。
On the other hand, the forced cooling is most suitable for the cooling method of the integrated circuit of the memory system in which the heat generation amount of each is low and the number of mounted devices per package is large.

しかし、制御系の集積回路の冷却方式とメモリ系の集
積回路用の強制空冷方式を混在させるのは、上述した水
冷方式の長所を失わせる結果となる。そこで、パッケー
ジ内に持込まれた水路の有効利用を図る為にも、メモリ
系の集積回路に適した水冷方式による冷却構造が要望さ
れている。
However, mixing the cooling system for the control system integrated circuit and the forced air cooling system for the memory system integrated circuit results in losing the advantages of the water cooling system. Therefore, in order to effectively utilize the water channels carried in the package, there is a demand for a water cooling type cooling structure suitable for a memory integrated circuit.

[問題点の解決手段] 上記従来の問題点を解決する本発明は、基板上に実装
された複数の集積回路を冷却する冷却構造において、前
記集積回路間に内部に冷媒が循環する冷媒管とこの冷媒
管に熱的に結合したフィンを配置した構成となってい
る。
[Means for Solving the Problems] The present invention for solving the above-mentioned conventional problems provides a cooling structure for cooling a plurality of integrated circuits mounted on a substrate, and a refrigerant pipe in which a refrigerant circulates between the integrated circuits. The fins thermally coupled to the refrigerant pipe are arranged.

[実施例] 以下、本発明の実施例について図面を参照して説明す
る。
[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例に係る集積回路の冷却構造
を示す平面図、第2図は第1図のA−A矢視部の断面
図、第3図は第1図のB部を取出して示す斜視図であ
る。図中、基板1上に複数のMOS型の集積回路5を整列
させて搭載すると共に、冷却板6の下に同じく複数の集
積回路(図示せず)が搭載してある。一方のMOS型の集
積回路5はメモリ用であり、前述のようにその発熱量は
比較的少ない。他方の冷却板6の下の集積回路は制御用
であり、その発熱量は多い。
1 is a plan view showing a cooling structure for an integrated circuit according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line AA of FIG. 1, and FIG. 3 is a part B of FIG. It is a perspective view taken out and shown. In the figure, a plurality of MOS type integrated circuits 5 are arranged and mounted on a substrate 1, and a plurality of integrated circuits (not shown) are also mounted below the cooling plate 6. On the other hand, the MOS type integrated circuit 5 is for a memory, and its heat generation amount is relatively small as described above. The integrated circuit below the other cooling plate 6 is for control, and its heat generation amount is large.

基板1上には、MOS型の集積回路5全体を囲み、かつ
これら集積回路5間を横断するように冷媒管2が配置し
てある。冷媒管2内には冷媒注入口から8から冷媒が注
入され、この冷媒が集積回路5間を循環した後、冷媒排
出口9から排出されるようになっている。
A refrigerant pipe 2 is arranged on the substrate 1 so as to surround the entire MOS type integrated circuit 5 and to cross between the integrated circuits 5. Refrigerant is injected into the refrigerant pipe 2 from a refrigerant inlet 8, the refrigerant circulates between the integrated circuits 5, and then is discharged from the refrigerant outlet 9.

また、これら集積回路5間には、冷媒管2と直角な方
向に放熱フィン3が配置してある。この放熱フィン3と
冷媒管2とは熱的に結合するように固定してあるるこの
放熱フィン3と冷媒管2とで多数の格子を形成し、これ
ら格子の中に集積回路5を収容した状態となっている。
これらの構造を端的に表わしたのが第3図である。
In addition, between these integrated circuits 5, a radiation fin 3 is arranged in a direction perpendicular to the refrigerant pipe 2. The radiation fins 3 and the refrigerant tubes 2 are fixed so as to be thermally coupled to each other. The radiation fins 3 and the refrigerant tubes 2 form a large number of grids, and the integrated circuit 5 is housed in these grids. It is in a state.
FIG. 3 is a schematic representation of these structures.

本実施例の構造では、集積回路5と放熱フィン3ある
いは冷媒管2との間の熱交換は、格子が形成する狭い空
間の中で主として自然対流によって行われる。この自然
対流の能力を高めるため、さらに放熱フィン3の上面に
平板状の熱伝導板4を取付けてある。
In the structure of the present embodiment, the heat exchange between the integrated circuit 5 and the radiation fins 3 or the refrigerant tubes 2 is performed mainly by natural convection in the narrow space formed by the grid. In order to enhance the ability of this natural convection, a flat heat conduction plate 4 is further attached to the upper surface of the radiation fin 3.

[発明の効果] 以上説明したように本発明の集積回路の冷却構造は、
基板上に実装された集積回路間に内部に冷媒が循環する
冷媒管とこの冷媒管に熱的に結合したフィンを配置する
ようにしたので、大量に使用されるため伝導による水冷
構造を採りにくいMOS系のRAM等で、発熱量が比較的少な
いために完全水冷構造を採用することが可能となる。し
たがって、従来のような冷却用ファンが不要となり、低
騒音かつ信頼性の高い装置を実現できるという効果があ
る。
As described above, the cooling structure for an integrated circuit according to the present invention is
Since a refrigerant pipe in which the refrigerant circulates and a fin thermally coupled to this refrigerant pipe are arranged between the integrated circuits mounted on the substrate, it is difficult to adopt a water cooling structure by conduction because it is used in large quantities Since it is a MOS type RAM, etc., which has a relatively small amount of heat generation, it is possible to adopt a completely water-cooled structure. Therefore, there is an effect that a conventional cooling fan is not required and a device with low noise and high reliability can be realized.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例に係る集積回路の冷却構造を
示す平面図、第2図は第1図のA−A矢視部の断面図、
第3図は第1図のB部の拡大斜視図である。 1:基板、2:冷媒管 3:放熱フィン、4:熱伝導体板 5:集積回路、6:冷却板
1 is a plan view showing a cooling structure of an integrated circuit according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along the line AA of FIG.
FIG. 3 is an enlarged perspective view of portion B in FIG. 1: Substrate, 2: Refrigerant tube 3: Radiating fin, 4: Heat conductor plate 5: Integrated circuit, 6: Cooling plate

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】基板上に実装された複数の集積回路を冷却
する冷却構造において、 前記集積回路間に内部に冷媒が循環する冷媒管とこの冷
媒管に熱的に結合したフィンを配置したことを特徴とす
る集積回路の冷却構造。
1. A cooling structure for cooling a plurality of integrated circuits mounted on a substrate, wherein a refrigerant pipe through which a refrigerant circulates and fins thermally coupled to the refrigerant pipe are arranged between the integrated circuits. A cooling structure for an integrated circuit.
JP62024311A 1987-02-04 1987-02-04 Integrated circuit cooling structure Expired - Lifetime JP2503480B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62024311A JP2503480B2 (en) 1987-02-04 1987-02-04 Integrated circuit cooling structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62024311A JP2503480B2 (en) 1987-02-04 1987-02-04 Integrated circuit cooling structure

Publications (2)

Publication Number Publication Date
JPS63192255A JPS63192255A (en) 1988-08-09
JP2503480B2 true JP2503480B2 (en) 1996-06-05

Family

ID=12134631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62024311A Expired - Lifetime JP2503480B2 (en) 1987-02-04 1987-02-04 Integrated circuit cooling structure

Country Status (1)

Country Link
JP (1) JP2503480B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10964624B2 (en) * 2017-01-26 2021-03-30 Intel Corporation Techniques for fluid cooling of integrated circuits in packages

Also Published As

Publication number Publication date
JPS63192255A (en) 1988-08-09

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