JP2500700Y2 - ウエハ―入替・キャリア反転装置 - Google Patents

ウエハ―入替・キャリア反転装置

Info

Publication number
JP2500700Y2
JP2500700Y2 JP699690U JP699690U JP2500700Y2 JP 2500700 Y2 JP2500700 Y2 JP 2500700Y2 JP 699690 U JP699690 U JP 699690U JP 699690 U JP699690 U JP 699690U JP 2500700 Y2 JP2500700 Y2 JP 2500700Y2
Authority
JP
Japan
Prior art keywords
carrier
wafer
cross shape
rectangle
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP699690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0399440U (Direct
Inventor
忠康 大沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Corp
Original Assignee
Kaijo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corp filed Critical Kaijo Corp
Priority to JP699690U priority Critical patent/JP2500700Y2/ja
Publication of JPH0399440U publication Critical patent/JPH0399440U/ja
Application granted granted Critical
Publication of JP2500700Y2 publication Critical patent/JP2500700Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP699690U 1990-01-30 1990-01-30 ウエハ―入替・キャリア反転装置 Expired - Lifetime JP2500700Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP699690U JP2500700Y2 (ja) 1990-01-30 1990-01-30 ウエハ―入替・キャリア反転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP699690U JP2500700Y2 (ja) 1990-01-30 1990-01-30 ウエハ―入替・キャリア反転装置

Publications (2)

Publication Number Publication Date
JPH0399440U JPH0399440U (Direct) 1991-10-17
JP2500700Y2 true JP2500700Y2 (ja) 1996-06-12

Family

ID=31510660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP699690U Expired - Lifetime JP2500700Y2 (ja) 1990-01-30 1990-01-30 ウエハ―入替・キャリア反転装置

Country Status (1)

Country Link
JP (1) JP2500700Y2 (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5000208B2 (ja) * 2006-06-23 2012-08-15 本田技研工業株式会社 樹脂成形品

Also Published As

Publication number Publication date
JPH0399440U (Direct) 1991-10-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term