JP2025082655A5 - - Google Patents

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Publication number
JP2025082655A5
JP2025082655A5 JP2023196135A JP2023196135A JP2025082655A5 JP 2025082655 A5 JP2025082655 A5 JP 2025082655A5 JP 2023196135 A JP2023196135 A JP 2023196135A JP 2023196135 A JP2023196135 A JP 2023196135A JP 2025082655 A5 JP2025082655 A5 JP 2025082655A5
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Japan
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flow path
wafer holder
holder according
parallel
plate
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JP2023196135A
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English (en)
Japanese (ja)
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JP7820707B2 (ja
JP2025082655A (ja
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Priority to JP2023196135A priority Critical patent/JP7820707B2/ja
Priority claimed from JP2023196135A external-priority patent/JP7820707B2/ja
Publication of JP2025082655A publication Critical patent/JP2025082655A/ja
Publication of JP2025082655A5 publication Critical patent/JP2025082655A5/ja
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Publication of JP7820707B2 publication Critical patent/JP7820707B2/ja
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JP2023196135A 2023-11-17 2023-11-17 ウエハ保持台 Active JP7820707B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023196135A JP7820707B2 (ja) 2023-11-17 2023-11-17 ウエハ保持台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023196135A JP7820707B2 (ja) 2023-11-17 2023-11-17 ウエハ保持台

Publications (3)

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JP2025082655A JP2025082655A (ja) 2025-05-29
JP2025082655A5 true JP2025082655A5 (https=) 2025-08-04
JP7820707B2 JP7820707B2 (ja) 2026-02-26

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ID=95824829

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JP2023196135A Active JP7820707B2 (ja) 2023-11-17 2023-11-17 ウエハ保持台

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JP (1) JP7820707B2 (https=)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003282403A (ja) * 2002-03-22 2003-10-03 Sumitomo Electric Ind Ltd 半導体製造装置用保持体
JP2005085803A (ja) * 2003-09-04 2005-03-31 Shinwa Controls Co Ltd サセプタ
JP2006032701A (ja) * 2004-07-16 2006-02-02 Tokyo Seimitsu Co Ltd 温調ステージ
US7544251B2 (en) * 2004-10-07 2009-06-09 Applied Materials, Inc. Method and apparatus for controlling temperature of a substrate
KR100905258B1 (ko) * 2007-07-11 2009-06-29 세메스 주식회사 플레이트, 온도 조절 장치 및 이를 갖는 기판 처리 장치
JP5210706B2 (ja) * 2008-05-09 2013-06-12 株式会社日立ハイテクノロジーズ プラズマ処理装置及びプラズマ処理方法
WO2013179936A1 (ja) * 2012-05-30 2013-12-05 京セラ株式会社 流路部材ならびにこれを用いた吸着装置および冷却装置
JP6918042B2 (ja) * 2019-03-26 2021-08-11 日本碍子株式会社 ウエハ載置装置
JP7577558B2 (ja) * 2021-02-15 2024-11-05 日本特殊陶業株式会社 保持部材
JP7675340B2 (ja) * 2021-04-09 2025-05-13 住友電気工業株式会社 ウエハ保持台
WO2023037698A1 (ja) * 2021-09-09 2023-03-16 日本碍子株式会社 ウエハ載置台
JP7751792B2 (ja) * 2021-12-21 2025-10-09 住友電気工業株式会社 ウエハ保持台
CN121241428A (zh) * 2023-06-07 2025-12-30 日本碍子株式会社 晶片载放台

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