JP2025060236A5 - - Google Patents

Info

Publication number
JP2025060236A5
JP2025060236A5 JP2023170840A JP2023170840A JP2025060236A5 JP 2025060236 A5 JP2025060236 A5 JP 2025060236A5 JP 2023170840 A JP2023170840 A JP 2023170840A JP 2023170840 A JP2023170840 A JP 2023170840A JP 2025060236 A5 JP2025060236 A5 JP 2025060236A5
Authority
JP
Japan
Prior art keywords
door
gripping
pair
gripping claws
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023170840A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025060236A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2023170840A priority Critical patent/JP2025060236A/ja
Priority claimed from JP2023170840A external-priority patent/JP2025060236A/ja
Priority to CN202411328988.4A priority patent/CN119733722A/zh
Priority to TW113136493A priority patent/TWI920741B/zh
Priority to US18/897,666 priority patent/US20250108414A1/en
Priority to KR1020240132138A priority patent/KR20250047917A/ko
Publication of JP2025060236A publication Critical patent/JP2025060236A/ja
Publication of JP2025060236A5 publication Critical patent/JP2025060236A5/ja
Pending legal-status Critical Current

Links

JP2023170840A 2023-09-29 2023-09-29 ウェーハ収納容器洗浄装置 Pending JP2025060236A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2023170840A JP2025060236A (ja) 2023-09-29 2023-09-29 ウェーハ収納容器洗浄装置
CN202411328988.4A CN119733722A (zh) 2023-09-29 2024-09-24 晶片收纳容器清洗装置
TW113136493A TWI920741B (zh) 2023-09-29 2024-09-25 晶圓收納容器清洗裝置
US18/897,666 US20250108414A1 (en) 2023-09-29 2024-09-26 Cleaning apparatus for wafer storage container
KR1020240132138A KR20250047917A (ko) 2023-09-29 2024-09-27 웨이퍼 수납 용기 세정 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023170840A JP2025060236A (ja) 2023-09-29 2023-09-29 ウェーハ収納容器洗浄装置

Publications (2)

Publication Number Publication Date
JP2025060236A JP2025060236A (ja) 2025-04-10
JP2025060236A5 true JP2025060236A5 (https=) 2025-08-04

Family

ID=95132032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023170840A Pending JP2025060236A (ja) 2023-09-29 2023-09-29 ウェーハ収納容器洗浄装置

Country Status (4)

Country Link
US (1) US20250108414A1 (https=)
JP (1) JP2025060236A (https=)
KR (1) KR20250047917A (https=)
CN (1) CN119733722A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7849131B2 (ja) * 2023-09-28 2026-04-21 芝浦メカトロニクス株式会社 ウェーハ収納容器処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005109523A (ja) 2004-12-27 2005-04-21 Takeshiba Electric Co Ltd 半導体ウエハ等のポッド洗浄乾燥装置

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