JP2024546629A5 - - Google Patents

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Publication number
JP2024546629A5
JP2024546629A5 JP2024532950A JP2024532950A JP2024546629A5 JP 2024546629 A5 JP2024546629 A5 JP 2024546629A5 JP 2024532950 A JP2024532950 A JP 2024532950A JP 2024532950 A JP2024532950 A JP 2024532950A JP 2024546629 A5 JP2024546629 A5 JP 2024546629A5
Authority
JP
Japan
Prior art keywords
sample
information
probe
scanning
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024532950A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024546629A (ja
Filing date
Publication date
Priority claimed from NL2030290A external-priority patent/NL2030290B1/en
Application filed filed Critical
Publication of JP2024546629A publication Critical patent/JP2024546629A/ja
Publication of JP2024546629A5 publication Critical patent/JP2024546629A5/ja
Pending legal-status Critical Current

Links

JP2024532950A 2021-12-24 2022-12-23 原子間力顕微鏡（ａｆｍ）装置及びその操作方法 Pending JP2024546629A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2030290A NL2030290B1 (en) 2021-12-24 2021-12-24 Atomic Force Microscope (AFM) device and method of operating the same
NL2030290 2021-12-24
PCT/NL2022/050755 WO2023121463A1 (en) 2021-12-24 2022-12-23 Atomic force microscope (afm) device and method of operating the same

Publications (2)

Publication Number Publication Date
JP2024546629A JP2024546629A (ja) 2024-12-26
JP2024546629A5 true JP2024546629A5 (enExample) 2026-01-06

Family

ID=81648833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024532950A Pending JP2024546629A (ja) 2021-12-24 2022-12-23 原子間力顕微鏡（ａｆｍ）装置及びその操作方法

Country Status (5)

Country Link
US (1) US20250004010A1 (enExample)
JP (1) JP2024546629A (enExample)
KR (1) KR20240129180A (enExample)
NL (1) NL2030290B1 (enExample)
WO (1) WO2023121463A1 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004264039A (ja) * 2003-01-30 2004-09-24 Hitachi Ltd 走査プローブ顕微鏡及びｃｄ・断面プロファイル計測方法並びに半導体デバイス製造方法
JP4727499B2 (ja) * 2005-07-13 2011-07-20 日本電子株式会社 走査型プローブ顕微鏡及びその動作方法
CN106030316B (zh) * 2013-12-07 2019-02-19 布鲁克公司 实时基线确定的力测量
KR101710337B1 (ko) * 2015-06-02 2017-02-28 파크시스템스 주식회사 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법
CN112955996B (zh) * 2018-06-29 2024-01-19 江苏集萃微纳自动化系统与装备技术研究所有限公司 扫描速度动态变化的sem引导的afm形貌扫描方法

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