JP2024546629A - 原子間力顕微鏡（ａｆｍ）装置及びその操作方法 - Google Patents

原子間力顕微鏡（ａｆｍ）装置及びその操作方法 Download PDF

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Publication number
JP2024546629A
JP2024546629A JP2024532950A JP2024532950A JP2024546629A JP 2024546629 A JP2024546629 A JP 2024546629A JP 2024532950 A JP2024532950 A JP 2024532950A JP 2024532950 A JP2024532950 A JP 2024532950A JP 2024546629 A JP2024546629 A JP 2024546629A
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JP
Japan
Prior art keywords
sample
tip
information
probe
scan
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2024532950A
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English (en)
Japanese (ja)
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JP2024546629A5 (enExample
Inventor
デ ラール、ジェイコブ ヴァン
マルナニ、ハメド サデギアン
カリーニン、アーセニー
Original Assignee
ニアフィールド インストゥルメンツ ビー．ブイ．
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Application filed by ニアフィールド インストゥルメンツ ビー．ブイ． filed Critical ニアフィールド インストゥルメンツ ビー．ブイ．
Publication of JP2024546629A publication Critical patent/JP2024546629A/ja
Publication of JP2024546629A5 publication Critical patent/JP2024546629A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2024532950A 2021-12-24 2022-12-23 原子間力顕微鏡（ａｆｍ）装置及びその操作方法 Pending JP2024546629A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2030290A NL2030290B1 (en) 2021-12-24 2021-12-24 Atomic Force Microscope (AFM) device and method of operating the same
NL2030290 2021-12-24
PCT/NL2022/050755 WO2023121463A1 (en) 2021-12-24 2022-12-23 Atomic force microscope (afm) device and method of operating the same

Publications (2)

Publication Number Publication Date
JP2024546629A true JP2024546629A (ja) 2024-12-26
JP2024546629A5 JP2024546629A5 (enExample) 2026-01-06

Family

ID=81648833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024532950A Pending JP2024546629A (ja) 2021-12-24 2022-12-23 原子間力顕微鏡（ａｆｍ）装置及びその操作方法

Country Status (5)

Country Link
US (1) US20250004010A1 (enExample)
JP (1) JP2024546629A (enExample)
KR (1) KR20240129180A (enExample)
NL (1) NL2030290B1 (enExample)
WO (1) WO2023121463A1 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004264039A (ja) * 2003-01-30 2004-09-24 Hitachi Ltd 走査プローブ顕微鏡及びｃｄ・断面プロファイル計測方法並びに半導体デバイス製造方法
JP4727499B2 (ja) * 2005-07-13 2011-07-20 日本電子株式会社 走査型プローブ顕微鏡及びその動作方法
CN106030316B (zh) * 2013-12-07 2019-02-19 布鲁克公司 实时基线确定的力测量
KR101710337B1 (ko) * 2015-06-02 2017-02-28 파크시스템스 주식회사 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법
CN112955996B (zh) * 2018-06-29 2024-01-19 江苏集萃微纳自动化系统与装备技术研究所有限公司 扫描速度动态变化的sem引导的afm形貌扫描方法

Also Published As

Publication number Publication date
US20250004010A1 (en) 2025-01-02
NL2030290B1 (en) 2023-06-30
WO2023121463A1 (en) 2023-06-29
KR20240129180A (ko) 2024-08-27

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