JP2024545812A - 吹付けメンブレンテストリークを備えた真空リークディテクタおよび方法 - Google Patents

吹付けメンブレンテストリークを備えた真空リークディテクタおよび方法 Download PDF

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Publication number
JP2024545812A
JP2024545812A JP2024536147A JP2024536147A JP2024545812A JP 2024545812 A JP2024545812 A JP 2024545812A JP 2024536147 A JP2024536147 A JP 2024536147A JP 2024536147 A JP2024536147 A JP 2024536147A JP 2024545812 A JP2024545812 A JP 2024545812A
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JP
Japan
Prior art keywords
membrane
leak
test
gas
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024536147A
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English (en)
Japanese (ja)
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JP2024545812A5 (enExample
Inventor
ヴェツィヒ・ダニエル
ピュシャラ－ケーニヒ・ヨッヘン
デッカー・シルヴィオ
ヴァイス・セバスチャン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of JP2024545812A publication Critical patent/JP2024545812A/ja
Publication of JP2024545812A5 publication Critical patent/JP2024545812A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/10—Testing of membranes or membrane apparatus; Detecting or repairing leaks
    • B01D65/104—Detection of leaks in membrane apparatus or modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0223—Group 8, 9 or 10 metals
    • B01D71/02231—Palladium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/024—Oxides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005—Apparatus for calibrating pressure sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/007—Leak detector calibration, standard leaks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Examining Or Testing Airtightness (AREA)
JP2024536147A 2021-12-23 2022-12-22 吹付けメンブレンテストリークを備えた真空リークディテクタおよび方法 Pending JP2024545812A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021134647.9A DE102021134647A1 (de) 2021-12-23 2021-12-23 Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren
DE102021134647.9 2021-12-23
PCT/EP2022/087584 WO2023118490A1 (de) 2021-12-23 2022-12-22 Vakuumlecksucher mit ansprüh-membran-testleck und verfahren

Publications (2)

Publication Number Publication Date
JP2024545812A true JP2024545812A (ja) 2024-12-12
JP2024545812A5 JP2024545812A5 (enExample) 2025-04-16

Family

ID=84604283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024536147A Pending JP2024545812A (ja) 2021-12-23 2022-12-22 吹付けメンブレンテストリークを備えた真空リークディテクタおよび方法

Country Status (8)

Country Link
US (1) US20250058284A1 (enExample)
EP (1) EP4453529A1 (enExample)
JP (1) JP2024545812A (enExample)
KR (1) KR20240127332A (enExample)
CN (1) CN118556179A (enExample)
DE (1) DE102021134647A1 (enExample)
TW (1) TW202326089A (enExample)
WO (1) WO2023118490A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926112A1 (de) 1979-06-28 1981-01-08 Bosch Gmbh Robert Testleck-sonde
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
IT1224604B (it) * 1988-07-27 1990-10-04 Varian Spa Rivelatore perfezionato di perdite di elio
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE10122733A1 (de) 2001-05-10 2002-11-14 Inficon Gmbh Testleckvorrichtung
DE10162126A1 (de) 2001-12-18 2003-07-03 Inficon Gmbh Gasdurchlass mit selektiv wirkenden Gasdurchtrittsflächen
DE102005021909A1 (de) 2005-05-12 2006-11-16 Inficon Gmbh Schnüffellecksucher mit Quarzfenstersensor
EP2024710B2 (de) * 2006-06-07 2018-03-07 Kistler Holding AG Membranschutz für einen sensor mit einer membrane und sensor mit membrane und membranschutz
DE102006028778A1 (de) * 2006-06-23 2007-12-27 Inficon Gmbh Lecksuchgerät
DE102009009370A1 (de) * 2009-02-18 2010-08-19 Inficon Gmbh Verfahren zur Funktionsprüfung eines Lecksuchgerätes
US8361196B2 (en) * 2010-04-09 2013-01-29 Inficon Gmbh Gas-selective membrane and method of its production
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät

Also Published As

Publication number Publication date
WO2023118490A1 (de) 2023-06-29
US20250058284A1 (en) 2025-02-20
EP4453529A1 (de) 2024-10-30
TW202326089A (zh) 2023-07-01
KR20240127332A (ko) 2024-08-22
CN118556179A (zh) 2024-08-27
DE102021134647A1 (de) 2023-06-29

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