JP2024156593A5 - - Google Patents

Info

Publication number
JP2024156593A5
JP2024156593A5 JP2023141339A JP2023141339A JP2024156593A5 JP 2024156593 A5 JP2024156593 A5 JP 2024156593A5 JP 2023141339 A JP2023141339 A JP 2023141339A JP 2023141339 A JP2023141339 A JP 2023141339A JP 2024156593 A5 JP2024156593 A5 JP 2024156593A5
Authority
JP
Japan
Prior art keywords
bonding layer
electrostatic chuck
base plate
chuck according
dielectric substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023141339A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024156593A (ja
Filing date
Publication date
Priority claimed from JP2023070804A external-priority patent/JP7347709B1/ja
Application filed filed Critical
Priority to JP2023141339A priority Critical patent/JP2024156593A/ja
Priority claimed from JP2023141339A external-priority patent/JP2024156593A/ja
Priority to KR1020240001472A priority patent/KR102865860B1/ko
Priority to CN202410078362.6A priority patent/CN118841357A/zh
Priority to TW113102177A priority patent/TW202443780A/zh
Priority to US18/635,344 priority patent/US20240356465A1/en
Publication of JP2024156593A publication Critical patent/JP2024156593A/ja
Priority to KR1020250137768A priority patent/KR20250143140A/ko
Publication of JP2024156593A5 publication Critical patent/JP2024156593A5/ja
Pending legal-status Critical Current

Links

JP2023141339A 2023-04-24 2023-08-31 静電チャック Pending JP2024156593A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023141339A JP2024156593A (ja) 2023-04-24 2023-08-31 静電チャック
KR1020240001472A KR102865860B1 (ko) 2023-04-24 2024-01-04 정전 척
CN202410078362.6A CN118841357A (zh) 2023-04-24 2024-01-19 静电吸盘
TW113102177A TW202443780A (zh) 2023-04-24 2024-01-19 靜電吸盤
US18/635,344 US20240356465A1 (en) 2023-04-24 2024-04-15 Electrostatic chuck
KR1020250137768A KR20250143140A (ko) 2023-04-24 2025-09-24 정전 척

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023070804A JP7347709B1 (ja) 2023-04-24 2023-04-24 静電チャック
JP2023141339A JP2024156593A (ja) 2023-04-24 2023-08-31 静電チャック

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2023070804A Division JP7347709B1 (ja) 2023-04-24 2023-04-24 静電チャック

Publications (2)

Publication Number Publication Date
JP2024156593A JP2024156593A (ja) 2024-11-06
JP2024156593A5 true JP2024156593A5 (https=) 2026-04-27

Family

ID=93120982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023141339A Pending JP2024156593A (ja) 2023-04-24 2023-08-31 静電チャック

Country Status (4)

Country Link
US (1) US20240356465A1 (https=)
JP (1) JP2024156593A (https=)
KR (2) KR102865860B1 (https=)
TW (1) TW202443780A (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5811513B2 (ja) * 2014-03-27 2015-11-11 Toto株式会社 静電チャック
JP6971183B2 (ja) * 2018-03-23 2021-11-24 新光電気工業株式会社 基板固定装置
JP6886439B2 (ja) 2018-08-07 2021-06-16 日本特殊陶業株式会社 複合部材および接着剤組成物
JP7633794B2 (ja) * 2020-03-26 2025-02-20 三星電子株式会社 静電チャック装置
US11776794B2 (en) * 2021-02-19 2023-10-03 Applied Materials, Inc. Electrostatic chuck assembly for cryogenic applications
KR20240092572A (ko) * 2022-12-14 2024-06-24 주식회사 미코세라믹스 서셉터 및 그 제조방법
KR20250135271A (ko) * 2023-04-18 2025-09-12 니혼도꾸슈도교 가부시키가이샤 유지 장치

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