JP2024129692A - 測定装置 - Google Patents

測定装置 Download PDF

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Publication number
JP2024129692A
JP2024129692A JP2023039048A JP2023039048A JP2024129692A JP 2024129692 A JP2024129692 A JP 2024129692A JP 2023039048 A JP2023039048 A JP 2023039048A JP 2023039048 A JP2023039048 A JP 2023039048A JP 2024129692 A JP2024129692 A JP 2024129692A
Authority
JP
Japan
Prior art keywords
temperature
measurement
stylus
temperature correction
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023039048A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024129692A5 (https=
Inventor
邦博 前田
Kunihiro Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2023039048A priority Critical patent/JP2024129692A/ja
Priority to DE112024001199.3T priority patent/DE112024001199T5/de
Priority to CN202480018515.6A priority patent/CN120898109A/zh
Priority to PCT/JP2024/008970 priority patent/WO2024190643A1/ja
Publication of JP2024129692A publication Critical patent/JP2024129692A/ja
Publication of JP2024129692A5 publication Critical patent/JP2024129692A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/60—Unique sensor identification

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2023039048A 2023-03-13 2023-03-13 測定装置 Pending JP2024129692A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2023039048A JP2024129692A (ja) 2023-03-13 2023-03-13 測定装置
DE112024001199.3T DE112024001199T5 (de) 2023-03-13 2024-03-08 Messvorrichtung
CN202480018515.6A CN120898109A (zh) 2023-03-13 2024-03-08 测定装置
PCT/JP2024/008970 WO2024190643A1 (ja) 2023-03-13 2024-03-08 測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023039048A JP2024129692A (ja) 2023-03-13 2023-03-13 測定装置

Publications (2)

Publication Number Publication Date
JP2024129692A true JP2024129692A (ja) 2024-09-27
JP2024129692A5 JP2024129692A5 (https=) 2026-01-08

Family

ID=92755703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023039048A Pending JP2024129692A (ja) 2023-03-13 2023-03-13 測定装置

Country Status (4)

Country Link
JP (1) JP2024129692A (https=)
CN (1) CN120898109A (https=)
DE (1) DE112024001199T5 (https=)
WO (1) WO2024190643A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120651078A (zh) * 2025-07-24 2025-09-16 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 一种光面环规自动校准装置和方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214212A (ja) * 1984-04-10 1985-10-26 Mitsutoyo Mfg Co Ltd 測定装置
DE8813875U1 (de) * 1988-11-05 1988-12-22 Fa. Carl Zeiss, 7920 Heidenheim Taster für Koordinatenmeßgeräte
CN115461593B (zh) * 2020-04-30 2023-08-29 株式会社东京精密 测量装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120651078A (zh) * 2025-07-24 2025-09-16 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 一种光面环规自动校准装置和方法

Also Published As

Publication number Publication date
DE112024001199T5 (de) 2026-01-15
CN120898109A (zh) 2025-11-04
WO2024190643A1 (ja) 2024-09-19

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